JP2002151496A5 - - Google Patents

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Publication number
JP2002151496A5
JP2002151496A5 JP2001136357A JP2001136357A JP2002151496A5 JP 2002151496 A5 JP2002151496 A5 JP 2002151496A5 JP 2001136357 A JP2001136357 A JP 2001136357A JP 2001136357 A JP2001136357 A JP 2001136357A JP 2002151496 A5 JP2002151496 A5 JP 2002151496A5
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JP
Japan
Prior art keywords
susceptor
conductive
plasma chamber
strap
conductive straps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001136357A
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English (en)
Japanese (ja)
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JP2002151496A (ja
JP4817528B2 (ja
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Publication date
Priority claimed from US09/563,963 external-priority patent/US6857387B1/en
Application filed filed Critical
Publication of JP2002151496A publication Critical patent/JP2002151496A/ja
Publication of JP2002151496A5 publication Critical patent/JP2002151496A5/ja
Application granted granted Critical
Publication of JP4817528B2 publication Critical patent/JP4817528B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2001136357A 2000-05-03 2001-05-07 電子ワークピース製造装置 Expired - Lifetime JP4817528B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/563963 2000-05-03
US09/563,963 US6857387B1 (en) 2000-05-03 2000-05-03 Multiple frequency plasma chamber with grounding capacitor at cathode

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011157868A Division JP5600644B2 (ja) 2000-05-03 2011-07-19 ワークピース製造装置

Publications (3)

Publication Number Publication Date
JP2002151496A JP2002151496A (ja) 2002-05-24
JP2002151496A5 true JP2002151496A5 (https=) 2008-07-24
JP4817528B2 JP4817528B2 (ja) 2011-11-16

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Family Applications (2)

Application Number Title Priority Date Filing Date
JP2001136357A Expired - Lifetime JP4817528B2 (ja) 2000-05-03 2001-05-07 電子ワークピース製造装置
JP2011157868A Expired - Lifetime JP5600644B2 (ja) 2000-05-03 2011-07-19 ワークピース製造装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011157868A Expired - Lifetime JP5600644B2 (ja) 2000-05-03 2011-07-19 ワークピース製造装置

Country Status (5)

Country Link
US (1) US6857387B1 (https=)
JP (2) JP4817528B2 (https=)
KR (5) KR20010102930A (https=)
SG (1) SG91920A1 (https=)
TW (1) TWI241649B (https=)

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