AU2001282326A1 - An apparatus for the backside gas cooling of a wafer in a batch ion implantationsystem - Google Patents
An apparatus for the backside gas cooling of a wafer in a batch ion implantationsystemInfo
- Publication number
- AU2001282326A1 AU2001282326A1 AU2001282326A AU8232601A AU2001282326A1 AU 2001282326 A1 AU2001282326 A1 AU 2001282326A1 AU 2001282326 A AU2001282326 A AU 2001282326A AU 8232601 A AU8232601 A AU 8232601A AU 2001282326 A1 AU2001282326 A1 AU 2001282326A1
- Authority
- AU
- Australia
- Prior art keywords
- implantationsystem
- wafer
- gas cooling
- backside gas
- batch ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09670241 | 2000-09-26 | ||
US09/670,241 US6583428B1 (en) | 2000-09-26 | 2000-09-26 | Apparatus for the backside gas cooling of a wafer in a batch ion implantation system |
PCT/GB2001/003795 WO2002027754A2 (en) | 2000-09-26 | 2001-08-23 | An apparatus for the backside gas cooling of a wafer in a batch ion implantation system |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001282326A1 true AU2001282326A1 (en) | 2002-04-08 |
Family
ID=24689580
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001282326A Abandoned AU2001282326A1 (en) | 2000-09-26 | 2001-08-23 | An apparatus for the backside gas cooling of a wafer in a batch ion implantationsystem |
Country Status (8)
Country | Link |
---|---|
US (1) | US6583428B1 (en) |
EP (1) | EP1320866A2 (en) |
JP (1) | JP2004510306A (en) |
KR (1) | KR20040005822A (en) |
CN (1) | CN1466770A (en) |
AU (1) | AU2001282326A1 (en) |
TW (1) | TW504740B (en) |
WO (1) | WO2002027754A2 (en) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1251809C (en) | 2000-10-17 | 2006-04-19 | 尼奥弗托尼克斯公司 | Coating formation by reactive deposition |
US7064491B2 (en) * | 2000-11-30 | 2006-06-20 | Semequip, Inc. | Ion implantation system and control method |
US6734439B2 (en) * | 2001-10-25 | 2004-05-11 | Allan Weed | Wafer pedestal tilt mechanism and cooling system |
US6695270B1 (en) * | 2002-08-15 | 2004-02-24 | Ole Falk Smed | Flat panel display system |
JP2006179613A (en) * | 2004-12-21 | 2006-07-06 | Rigaku Corp | Magnetic fluid sealing unit for semiconductor wafer vertical heat processor |
US7867403B2 (en) * | 2006-06-05 | 2011-01-11 | Jason Plumhoff | Temperature control method for photolithographic substrate |
US7629597B2 (en) * | 2006-08-18 | 2009-12-08 | Axcelis Technologies, Inc. | Deposition reduction system for an ion implanter |
US20080121821A1 (en) * | 2006-11-27 | 2008-05-29 | Varian Semiconductor Equipment Associates Inc. | Techniques for low-temperature ion implantation |
US7528392B2 (en) | 2006-11-27 | 2009-05-05 | Varian Semiconductor Equipment Associates, Inc. | Techniques for low-temperature ion implantation |
US7528391B2 (en) * | 2006-12-22 | 2009-05-05 | Varian Semiconductor Equipment Associates, Inc. | Techniques for reducing contamination during ion implantation |
US7559557B2 (en) * | 2007-08-22 | 2009-07-14 | Varian Semiconductor Equipment Associates, Inc. | Sealing between vacuum chambers |
US8149256B2 (en) * | 2008-06-04 | 2012-04-03 | Varian Semiconductor Equipment Associates, Inc. | Techniques for changing temperature of a platen |
US20100084117A1 (en) * | 2008-10-02 | 2010-04-08 | Fish Roger B | Platen cooling mechanism for cryogenic ion implanting |
US20100155026A1 (en) * | 2008-12-19 | 2010-06-24 | Walther Steven R | Condensible gas cooling system |
US7977652B2 (en) * | 2009-09-29 | 2011-07-12 | Varian Semiconductor Equipment Associates, Inc. | Optical heater for cryogenic ion implanter surface regeneration |
CN103594553B (en) * | 2013-10-23 | 2015-10-28 | 中国电子科技集团公司第四十八研究所 | A kind of array silicon slice loading target disc |
CN107154346B (en) * | 2017-05-19 | 2021-03-16 | 京东方科技集团股份有限公司 | Film doping method, thin film transistor and manufacturing method thereof |
CN109243954B (en) * | 2018-10-12 | 2023-11-03 | 江苏晋誉达半导体股份有限公司 | Ion implanter |
WO2020124158A1 (en) * | 2018-12-21 | 2020-06-25 | Ozone 1 Pty Ltd | Improvements in plasma reactors |
US10971327B1 (en) * | 2019-12-06 | 2021-04-06 | Applied Materials, Inc. | Cryogenic heat transfer system |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4514636A (en) * | 1979-09-14 | 1985-04-30 | Eaton Corporation | Ion treatment apparatus |
US4419584A (en) | 1981-07-14 | 1983-12-06 | Eaton Semi-Conductor Implantation Corporation | Treating workpiece with beams |
JPS5950275A (en) | 1982-09-16 | 1984-03-23 | Rigaku Keisoku Kk | Shaft sealing apparatus utilizing magnetic fluid |
US5389793A (en) | 1983-08-15 | 1995-02-14 | Applied Materials, Inc. | Apparatus and methods for ion implantation |
US4567938A (en) * | 1984-05-02 | 1986-02-04 | Varian Associates, Inc. | Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system |
US4733091A (en) * | 1984-09-19 | 1988-03-22 | Applied Materials, Inc. | Systems and methods for ion implantation of semiconductor wafers |
JPS61264649A (en) * | 1985-05-20 | 1986-11-22 | Ulvac Corp | Substrate cooling device |
US4965862A (en) | 1988-05-18 | 1990-10-23 | Varian Associates, Inc. | Disk scanning apparatus for batch ion implanters |
US4899059A (en) | 1988-05-18 | 1990-02-06 | Varian Associates, Inc. | Disk scanning apparatus for batch ion implanters |
US5238499A (en) | 1990-07-16 | 1993-08-24 | Novellus Systems, Inc. | Gas-based substrate protection during processing |
US5641969A (en) * | 1996-03-28 | 1997-06-24 | Applied Materials, Inc. | Ion implantation apparatus |
US5954342A (en) | 1997-04-25 | 1999-09-21 | Mfs Technology Ltd | Magnetic fluid seal apparatus for a rotary shaft |
US6222196B1 (en) * | 1998-11-19 | 2001-04-24 | Axcelis Technologies, Inc. | Rotatable workpiece support including cyclindrical workpiece support surfaces for an ion beam implanter |
US6412289B1 (en) | 2001-05-15 | 2002-07-02 | General Electric Company | Synchronous machine having cryogenic gas transfer coupling to rotor with super-conducting coils |
-
2000
- 2000-09-26 US US09/670,241 patent/US6583428B1/en not_active Expired - Fee Related
-
2001
- 2001-08-23 EP EP01960939A patent/EP1320866A2/en not_active Withdrawn
- 2001-08-23 KR KR10-2003-7004031A patent/KR20040005822A/en not_active Application Discontinuation
- 2001-08-23 WO PCT/GB2001/003795 patent/WO2002027754A2/en not_active Application Discontinuation
- 2001-08-23 JP JP2002531454A patent/JP2004510306A/en active Pending
- 2001-08-23 AU AU2001282326A patent/AU2001282326A1/en not_active Abandoned
- 2001-08-23 CN CNA018163548A patent/CN1466770A/en active Pending
- 2001-09-04 TW TW090121920A patent/TW504740B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1466770A (en) | 2004-01-07 |
US6583428B1 (en) | 2003-06-24 |
KR20040005822A (en) | 2004-01-16 |
EP1320866A2 (en) | 2003-06-25 |
WO2002027754A2 (en) | 2002-04-04 |
WO2002027754A3 (en) | 2002-06-13 |
JP2004510306A (en) | 2004-04-02 |
TW504740B (en) | 2002-10-01 |
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