JP2002060927A - 薄膜パターン成膜用マスク - Google Patents

薄膜パターン成膜用マスク

Info

Publication number
JP2002060927A
JP2002060927A JP2000242531A JP2000242531A JP2002060927A JP 2002060927 A JP2002060927 A JP 2002060927A JP 2000242531 A JP2000242531 A JP 2000242531A JP 2000242531 A JP2000242531 A JP 2000242531A JP 2002060927 A JP2002060927 A JP 2002060927A
Authority
JP
Japan
Prior art keywords
mask
thin film
pattern
forming
color filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000242531A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002060927A5 (enExample
Inventor
Hisaya Nakagawara
寿哉 中川原
Masayuki Ogawa
正幸 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP2000242531A priority Critical patent/JP2002060927A/ja
Publication of JP2002060927A publication Critical patent/JP2002060927A/ja
Publication of JP2002060927A5 publication Critical patent/JP2002060927A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP2000242531A 2000-08-10 2000-08-10 薄膜パターン成膜用マスク Pending JP2002060927A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000242531A JP2002060927A (ja) 2000-08-10 2000-08-10 薄膜パターン成膜用マスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000242531A JP2002060927A (ja) 2000-08-10 2000-08-10 薄膜パターン成膜用マスク

Publications (2)

Publication Number Publication Date
JP2002060927A true JP2002060927A (ja) 2002-02-28
JP2002060927A5 JP2002060927A5 (enExample) 2007-09-27

Family

ID=18733536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000242531A Pending JP2002060927A (ja) 2000-08-10 2000-08-10 薄膜パターン成膜用マスク

Country Status (1)

Country Link
JP (1) JP2002060927A (enExample)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004296436A (ja) * 2003-03-13 2004-10-21 Toray Ind Inc 有機電界発光装置およびその製造方法
WO2006027830A1 (ja) * 2004-09-08 2006-03-16 Toray Industries, Inc. 有機電界発光装置およびその製造方法
KR100814818B1 (ko) 2006-07-31 2008-03-20 삼성에스디아이 주식회사 유기 발광 표시 장치 제조용 마스크
KR100880944B1 (ko) 2007-10-01 2009-02-04 엘지디스플레이 주식회사 유기발광표시장치
KR100922753B1 (ko) * 2002-11-29 2009-10-21 삼성모바일디스플레이주식회사 증착 마스크, 이를 이용한 유기 전계 발광 소자의제조방법 및 유기 전계 발광 소자
KR100986787B1 (ko) * 2003-03-19 2010-10-12 도호꾸 파이오니어 가부시끼가이샤 성막용 마스크, 유기 ｅｌ 패널, 및 유기 ｅｌ 패널의제조 방법
JP2013019026A (ja) * 2011-07-12 2013-01-31 Toyota Motor Corp 選択成膜用マスク
JP2014125671A (ja) * 2012-12-27 2014-07-07 V Technology Co Ltd 蒸着マスク及びその製造方法
WO2019003534A1 (ja) * 2017-06-28 2019-01-03 株式会社ジャパンディスプレイ 蒸着マスク
US20210108310A1 (en) * 2018-03-20 2021-04-15 Sharp Kabushiki Kaisha Film forming mask and method of manufacturing display device using same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05117839A (ja) * 1991-10-28 1993-05-14 Dainippon Printing Co Ltd スパツタ用治具
JPH0927454A (ja) * 1995-07-13 1997-01-28 Fuji Electric Co Ltd 選択蒸着用マスク
JPH108239A (ja) * 1996-06-14 1998-01-13 Murata Mfg Co Ltd 電子部品の電極形成方法およびそれに用いる電極形成装置
JPH10265940A (ja) * 1997-03-28 1998-10-06 Canon Inc 成膜用メタルマスク及びその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05117839A (ja) * 1991-10-28 1993-05-14 Dainippon Printing Co Ltd スパツタ用治具
JPH0927454A (ja) * 1995-07-13 1997-01-28 Fuji Electric Co Ltd 選択蒸着用マスク
JPH108239A (ja) * 1996-06-14 1998-01-13 Murata Mfg Co Ltd 電子部品の電極形成方法およびそれに用いる電極形成装置
JPH10265940A (ja) * 1997-03-28 1998-10-06 Canon Inc 成膜用メタルマスク及びその製造方法

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8334649B2 (en) 2002-11-29 2012-12-18 Samsung Display Co., Ltd. Evaporation mask, method of fabricating organic electroluminescent device using the same, and organic electroluminescent device
US7837528B2 (en) 2002-11-29 2010-11-23 Samsung Mobile Display Co., Ltd. Evaporation mask, method of fabricating organic electroluminescent device using the same, and organic electroluminescent device
KR100922753B1 (ko) * 2002-11-29 2009-10-21 삼성모바일디스플레이주식회사 증착 마스크, 이를 이용한 유기 전계 발광 소자의제조방법 및 유기 전계 발광 소자
JP2004296436A (ja) * 2003-03-13 2004-10-21 Toray Ind Inc 有機電界発光装置およびその製造方法
KR100986787B1 (ko) * 2003-03-19 2010-10-12 도호꾸 파이오니어 가부시끼가이샤 성막용 마스크, 유기 ｅｌ 패널, 및 유기 ｅｌ 패널의제조 방법
WO2006027830A1 (ja) * 2004-09-08 2006-03-16 Toray Industries, Inc. 有機電界発光装置およびその製造方法
US7821199B2 (en) 2004-09-08 2010-10-26 Toray Industries, Inc. Organic electroluminescent device and manufacturing method thereof
KR100814818B1 (ko) 2006-07-31 2008-03-20 삼성에스디아이 주식회사 유기 발광 표시 장치 제조용 마스크
KR100880944B1 (ko) 2007-10-01 2009-02-04 엘지디스플레이 주식회사 유기발광표시장치
JP2013019026A (ja) * 2011-07-12 2013-01-31 Toyota Motor Corp 選択成膜用マスク
JP2014125671A (ja) * 2012-12-27 2014-07-07 V Technology Co Ltd 蒸着マスク及びその製造方法
WO2019003534A1 (ja) * 2017-06-28 2019-01-03 株式会社ジャパンディスプレイ 蒸着マスク
JP2019007069A (ja) * 2017-06-28 2019-01-17 株式会社ジャパンディスプレイ 蒸着マスク
JP6998139B2 (ja) 2017-06-28 2022-01-18 株式会社ジャパンディスプレイ 蒸着マスク
US20210108310A1 (en) * 2018-03-20 2021-04-15 Sharp Kabushiki Kaisha Film forming mask and method of manufacturing display device using same
US11655536B2 (en) * 2018-03-20 2023-05-23 Sharp Kabushiki Kaisha Film forming mask and method of manufacturing display device using same

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