JP2002052705A - インクジェットヘッド、インクジェットヘッドの製造方法および当該ヘッドを用いた画像形成装置 - Google Patents

インクジェットヘッド、インクジェットヘッドの製造方法および当該ヘッドを用いた画像形成装置

Info

Publication number
JP2002052705A
JP2002052705A JP2000237824A JP2000237824A JP2002052705A JP 2002052705 A JP2002052705 A JP 2002052705A JP 2000237824 A JP2000237824 A JP 2000237824A JP 2000237824 A JP2000237824 A JP 2000237824A JP 2002052705 A JP2002052705 A JP 2002052705A
Authority
JP
Japan
Prior art keywords
ink jet
diaphragm
jet head
substrate
counter electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000237824A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002052705A5 (enExample
Inventor
Seiichi Kato
静一 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP2000237824A priority Critical patent/JP2002052705A/ja
Priority to US09/915,877 priority patent/US6467881B2/en
Publication of JP2002052705A publication Critical patent/JP2002052705A/ja
Publication of JP2002052705A5 publication Critical patent/JP2002052705A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2000237824A 2000-08-04 2000-08-04 インクジェットヘッド、インクジェットヘッドの製造方法および当該ヘッドを用いた画像形成装置 Pending JP2002052705A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000237824A JP2002052705A (ja) 2000-08-04 2000-08-04 インクジェットヘッド、インクジェットヘッドの製造方法および当該ヘッドを用いた画像形成装置
US09/915,877 US6467881B2 (en) 2000-08-04 2001-07-26 Ink jet head, ink jet head production method, and imaging apparatus employing such ink jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000237824A JP2002052705A (ja) 2000-08-04 2000-08-04 インクジェットヘッド、インクジェットヘッドの製造方法および当該ヘッドを用いた画像形成装置

Publications (2)

Publication Number Publication Date
JP2002052705A true JP2002052705A (ja) 2002-02-19
JP2002052705A5 JP2002052705A5 (enExample) 2006-04-06

Family

ID=18729615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000237824A Pending JP2002052705A (ja) 2000-08-04 2000-08-04 インクジェットヘッド、インクジェットヘッドの製造方法および当該ヘッドを用いた画像形成装置

Country Status (2)

Country Link
US (1) US6467881B2 (enExample)
JP (1) JP2002052705A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009166460A (ja) * 2008-01-21 2009-07-30 Seiko Epson Corp 静電アクチュエータ、液滴吐出ヘッド、液滴吐出装置及び液滴吐出ヘッドの製造方法
JP2009208243A (ja) * 2008-02-29 2009-09-17 Seiko Epson Corp 圧電装置およびその製造方法、液体噴射ヘッド、並びに、プリンタ
US8828750B2 (en) 2007-03-29 2014-09-09 Xerox Corporation Highly integrated wafer bonded MEMS devices with release-free membrane manufacture for high density print heads

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4774157B2 (ja) 2000-04-13 2011-09-14 株式会社リコー マルチビーム光源装置及び光走査装置
JP4054662B2 (ja) * 2002-07-17 2008-02-27 株式会社リコー 光走査装置
WO2004068536A2 (en) * 2003-01-30 2004-08-12 University Of Cape Town A thin film semiconductor device and method of manufacturing a thin film semiconductor device
JP4400855B2 (ja) * 2003-04-15 2010-01-20 株式会社リコー 光偏向装置、光偏向装置の製造方法、光偏向アレー、画像形成装置および画像投影表示装置
JP4363916B2 (ja) * 2003-06-27 2009-11-11 株式会社リコー 光偏向装置の駆動方法、光偏向装置、光偏向アレー、画像形成装置および画像投影表示装置
US7334871B2 (en) * 2004-03-26 2008-02-26 Hewlett-Packard Development Company, L.P. Fluid-ejection device and methods of forming same
JP2005305966A (ja) * 2004-04-26 2005-11-04 Canon Inc 液体吐出ヘッド
CN104793468B (zh) * 2014-01-20 2017-07-14 中芯国际集成电路制造(上海)有限公司 图形化装置和形成抗刻蚀图形的方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3175316B2 (ja) 1992-08-03 2001-06-11 セイコーエプソン株式会社 インクジェットヘッド及び記録装置
JP3473045B2 (ja) 1993-06-16 2003-12-02 セイコーエプソン株式会社 インクジェットプリンタ及びその駆動方法
JP3659811B2 (ja) 1998-08-07 2005-06-15 株式会社リコー インクジェットヘッド

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8828750B2 (en) 2007-03-29 2014-09-09 Xerox Corporation Highly integrated wafer bonded MEMS devices with release-free membrane manufacture for high density print heads
JP2009166460A (ja) * 2008-01-21 2009-07-30 Seiko Epson Corp 静電アクチュエータ、液滴吐出ヘッド、液滴吐出装置及び液滴吐出ヘッドの製造方法
JP2009208243A (ja) * 2008-02-29 2009-09-17 Seiko Epson Corp 圧電装置およびその製造方法、液体噴射ヘッド、並びに、プリンタ

Also Published As

Publication number Publication date
US20020018100A1 (en) 2002-02-14
US6467881B2 (en) 2002-10-22

Similar Documents

Publication Publication Date Title
JP3659811B2 (ja) インクジェットヘッド
US5010355A (en) Ink jet printhead having ionic passivation of electrical circuitry
JP2002052705A (ja) インクジェットヘッド、インクジェットヘッドの製造方法および当該ヘッドを用いた画像形成装置
JPH11192704A (ja) ドライブトランジスタ及び改良された高解像度サーマルインクジェットプリントヘッド
US6450618B2 (en) Ink jet head and method of producing the same
JP4144810B2 (ja) 液滴吐出ヘッド及びその製造方法、インクジェット記録装置並びに画像形成装置、液滴吐出装置
US6454395B1 (en) Electrostatic inkjet head and manufacturing method thereof
US6183070B1 (en) Ink jet recording head and process of manufacturing the ink jet recording head
JP2000094696A (ja) インクジェットヘッド及びその作製方法
TW544729B (en) Printhead integrated circuit
JP2002264329A (ja) インクジェットヘッド及びインクジェット記録装置
JP2000015804A (ja) インクジェットヘッド及びその製造方法
JP2000318155A (ja) 静電型アクチュエータ及びその製造方法
JP2000177122A (ja) インクジェットヘッド及びその製造方法
JP2002172776A (ja) インクジェットヘッド及びインクジェット記録装置
JP2001347673A (ja) インクジェットヘッド構造、インクジェットヘッドの製造方法及び画像形成装置
JP2000203023A (ja) 静電型アクチュエ―タ及びその製造方法並びにインクジェットヘッド
JP4412866B2 (ja) インクジェットヘッド及びインクジェット記録装置
JP4039799B2 (ja) 液滴吐出ヘッド、画像形成装置及び液滴を吐出する装置
JPH1044406A (ja) インクジェットヘッド及びその製造方法
JP4307745B2 (ja) 液滴吐出ヘッド及びインクジェット記録装置
JP2002160361A (ja) 液滴吐出ヘッド
JP2001212995A (ja) プリンタ及びプリンタ用ヘッド
JP3301086B2 (ja) サーマル印字ヘッドおよびその製造方法
JP2001347658A (ja) 静電型アクチュエータ及びその製造方法並びに液滴吐出ヘッド

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050126

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20050308

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060131

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070606

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070612

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070810

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20080226