JP2001284344A5 - - Google Patents
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- Publication number
- JP2001284344A5 JP2001284344A5 JP2000095818A JP2000095818A JP2001284344A5 JP 2001284344 A5 JP2001284344 A5 JP 2001284344A5 JP 2000095818 A JP2000095818 A JP 2000095818A JP 2000095818 A JP2000095818 A JP 2000095818A JP 2001284344 A5 JP2001284344 A5 JP 2001284344A5
- Authority
- JP
- Japan
- Prior art keywords
- forming
- dielectric film
- molecular compound
- substrate
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 150000001875 compounds Chemical class 0.000 description 37
- 238000000034 method Methods 0.000 description 36
- 239000012071 phase Substances 0.000 description 26
- 239000000758 substrate Substances 0.000 description 24
- 239000002052 molecular layer Substances 0.000 description 17
- 239000003989 dielectric material Substances 0.000 description 12
- 230000001590 oxidative effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910006501 ZrSiO Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 230000003301 hydrolyzing effect Effects 0.000 description 2
- 238000005191 phase separation Methods 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 229910007926 ZrCl Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011534 incubation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000095818A JP4493796B2 (ja) | 2000-03-30 | 2000-03-30 | 誘電体膜の形成方法 |
| US10/239,648 US6866890B2 (en) | 2000-03-30 | 2001-03-22 | Method of forming a dielectric film |
| EP01915684A EP1269528B1 (en) | 2000-03-30 | 2001-03-22 | Method of forming a dielectric film |
| PCT/JP2001/002262 WO2001075956A1 (en) | 2000-03-30 | 2001-03-22 | Method of forming a dielectric film |
| KR1020027012657A KR100752559B1 (ko) | 2000-03-30 | 2001-03-22 | 유전체막의 형성 방법 |
| TW090107295A TW486762B (en) | 2000-03-30 | 2001-03-28 | Method of forming a dielectric film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000095818A JP4493796B2 (ja) | 2000-03-30 | 2000-03-30 | 誘電体膜の形成方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009280314A Division JP2010056582A (ja) | 2009-12-10 | 2009-12-10 | 誘電体膜の形成方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001284344A JP2001284344A (ja) | 2001-10-12 |
| JP2001284344A5 true JP2001284344A5 (enExample) | 2007-05-10 |
| JP4493796B2 JP4493796B2 (ja) | 2010-06-30 |
Family
ID=18610667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000095818A Expired - Fee Related JP4493796B2 (ja) | 2000-03-30 | 2000-03-30 | 誘電体膜の形成方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6866890B2 (enExample) |
| EP (1) | EP1269528B1 (enExample) |
| JP (1) | JP4493796B2 (enExample) |
| KR (1) | KR100752559B1 (enExample) |
| TW (1) | TW486762B (enExample) |
| WO (1) | WO2001075956A1 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3437832B2 (ja) | 2000-03-22 | 2003-08-18 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
| JP4095326B2 (ja) | 2002-03-29 | 2008-06-04 | 株式会社東芝 | 半導体装置の製造方法及び半導体装置 |
| JP2004140292A (ja) | 2002-10-21 | 2004-05-13 | Tokyo Electron Ltd | 誘電体膜の形成方法 |
| JP2005093909A (ja) * | 2003-09-19 | 2005-04-07 | Tokyo Electron Ltd | 基板処理方法及び基板処理装置 |
| JP2005317583A (ja) * | 2004-04-27 | 2005-11-10 | Renesas Technology Corp | 半導体装置およびその製造方法 |
| JP4582542B2 (ja) * | 2005-02-02 | 2010-11-17 | 株式会社神戸製鋼所 | ダイヤモンド電界効果トランジスタ及びその製造方法 |
| US7235502B2 (en) * | 2005-03-31 | 2007-06-26 | Freescale Semiconductor, Inc. | Transitional dielectric layer to improve reliability and performance of high dielectric constant transistors |
| FR2890982B1 (fr) * | 2005-09-21 | 2008-05-02 | St Microelectronics Sa | Procede de realisation d'une couche dielectrique sur un materiau porteur et un circuit integre comprenant un condensateur incorporant une couche dielectrique |
| JP4722876B2 (ja) * | 2007-04-16 | 2011-07-13 | 東京エレクトロン株式会社 | 金属酸化膜の形成方法 |
| DE102007018013A1 (de) * | 2007-04-17 | 2008-10-23 | Qimonda Ag | Dielektrische Schicht sowie Verfahren zur Herstellung einer dielektrischen Schicht |
| KR101451716B1 (ko) * | 2008-08-11 | 2014-10-16 | 도쿄엘렉트론가부시키가이샤 | 성막 방법 및 성막 장치 |
| JP5419420B2 (ja) * | 2008-11-04 | 2014-02-19 | 東京エレクトロン株式会社 | 成膜方法および成膜装置、ならびに記憶媒体 |
| US8534752B2 (en) | 2010-06-02 | 2013-09-17 | Steelcase Inc. | Reconfigurable table assemblies |
| US9210999B2 (en) | 2010-06-02 | 2015-12-15 | Steelcase Inc. | Frame type table assemblies |
| US8667908B2 (en) | 2010-06-02 | 2014-03-11 | Steelcase Inc. | Frame type table assemblies |
| US9185974B2 (en) | 2010-06-02 | 2015-11-17 | Steelcase Inc. | Frame type workstation configurations |
| US12376677B1 (en) | 2012-10-10 | 2025-08-05 | Steelcase Inc. | Ergonomic seating system, tilt-lock control and remote powering method and apparatus |
| LU92795B1 (en) * | 2015-08-10 | 2017-02-14 | Luxembourg Inst Science & Tech List | SIO2 thin film produced by atomic layer deposition at room temperature |
| WO2017197395A1 (en) | 2016-05-13 | 2017-11-16 | Steelcase Inc. | Multi-tiered workstation assembly |
| US10517392B2 (en) | 2016-05-13 | 2019-12-31 | Steelcase Inc. | Multi-tiered workstation assembly |
| US10217626B1 (en) * | 2017-12-15 | 2019-02-26 | Mattson Technology, Inc. | Surface treatment of substrates using passivation layers |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1923279A1 (de) * | 1969-05-07 | 1970-12-23 | Licentia Gmbh | Transistor mit isolierter Steuerelektrode |
| JPH02283022A (ja) * | 1989-01-25 | 1990-11-20 | Hitachi Ltd | 半導体装置の製造方法 |
| JPH02196427A (ja) * | 1989-01-25 | 1990-08-03 | Nec Corp | 金属酸化膜の気相成長方法 |
| JP2828152B2 (ja) * | 1991-08-13 | 1998-11-25 | 富士通 株式会社 | 薄膜形成方法、多層構造膜及びシリコン薄膜トランジスタの形成方法 |
| JPH05315608A (ja) * | 1992-05-13 | 1993-11-26 | Tadahiro Omi | 半導体装置 |
| US5521423A (en) | 1993-04-19 | 1996-05-28 | Kawasaki Steel Corporation | Dielectric structure for anti-fuse programming element |
| JPH06310687A (ja) * | 1993-04-20 | 1994-11-04 | Kawasaki Steel Corp | 半導体装置およびその製造方法 |
| JPH07131007A (ja) * | 1993-11-02 | 1995-05-19 | Tadahiro Omi | 半導体装置 |
| KR0183732B1 (ko) | 1995-09-01 | 1999-03-20 | 김광호 | 반도체 장치의 캐패시터 제작방법 |
| JP4236707B2 (ja) * | 1995-09-14 | 2009-03-11 | 日産自動車株式会社 | 化学的気相成長法及び化学的気相成長装置 |
| JPH09232542A (ja) * | 1996-02-28 | 1997-09-05 | Nec Corp | 半導体装置およびその製造方法 |
| JP2871580B2 (ja) * | 1996-03-29 | 1999-03-17 | 日本電気株式会社 | 半導体装置の製造方法 |
| KR100207485B1 (ko) | 1996-07-23 | 1999-07-15 | 윤종용 | 반도체장치의 커패시터 제조방법 |
| US5858843A (en) * | 1996-09-27 | 1999-01-12 | Intel Corporation | Low temperature method of forming gate electrode and gate dielectric |
| TW468253B (en) * | 1997-01-13 | 2001-12-11 | Hitachi Ltd | Semiconductor memory device |
| JPH10303372A (ja) * | 1997-01-31 | 1998-11-13 | Sanyo Electric Co Ltd | 半導体集積回路およびその製造方法 |
| US6589644B1 (en) * | 1997-05-28 | 2003-07-08 | Nippon Steel Corporation | Low dielectric constant materials and their production and use |
| US6020243A (en) | 1997-07-24 | 2000-02-01 | Texas Instruments Incorporated | Zirconium and/or hafnium silicon-oxynitride gate dielectric |
| US6475927B1 (en) * | 1998-02-02 | 2002-11-05 | Micron Technology, Inc. | Method of forming a semiconductor device |
| WO2000012640A1 (fr) * | 1998-09-01 | 2000-03-09 | Catalysts & Chemicals Industries Co., Ltd. | Fluide de revetement pour preparer un film de revetement a base de silice a faible permittivite et substrat avec film de revetement a faible permittivite |
| US6558747B2 (en) * | 1999-09-29 | 2003-05-06 | Kabushiki Kaisha Toshiba | Method of forming insulating film and process for producing semiconductor device |
| JP4043705B2 (ja) * | 2000-09-27 | 2008-02-06 | 株式会社東芝 | 半導体装置の製造方法、ウェハ処理装置、及びウェハ保管箱 |
| US6699797B1 (en) * | 2002-12-17 | 2004-03-02 | Intel Corporation | Method of fabrication of low dielectric constant porous metal silicate films |
-
2000
- 2000-03-30 JP JP2000095818A patent/JP4493796B2/ja not_active Expired - Fee Related
-
2001
- 2001-03-22 EP EP01915684A patent/EP1269528B1/en not_active Expired - Lifetime
- 2001-03-22 WO PCT/JP2001/002262 patent/WO2001075956A1/en not_active Ceased
- 2001-03-22 US US10/239,648 patent/US6866890B2/en not_active Expired - Fee Related
- 2001-03-22 KR KR1020027012657A patent/KR100752559B1/ko not_active Expired - Fee Related
- 2001-03-28 TW TW090107295A patent/TW486762B/zh not_active IP Right Cessation
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