JP2001210700A5 - - Google Patents

Download PDF

Info

Publication number
JP2001210700A5
JP2001210700A5 JP2000015968A JP2000015968A JP2001210700A5 JP 2001210700 A5 JP2001210700 A5 JP 2001210700A5 JP 2000015968 A JP2000015968 A JP 2000015968A JP 2000015968 A JP2000015968 A JP 2000015968A JP 2001210700 A5 JP2001210700 A5 JP 2001210700A5
Authority
JP
Japan
Prior art keywords
lid
substrate
detection sensor
substrate detection
cam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000015968A
Other languages
English (en)
Japanese (ja)
Other versions
JP3939062B2 (ja
JP2001210700A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000015968A priority Critical patent/JP3939062B2/ja
Priority claimed from JP2000015968A external-priority patent/JP3939062B2/ja
Priority to KR1020010003594A priority patent/KR100606526B1/ko
Priority to US09/768,065 priority patent/US6642533B2/en
Publication of JP2001210700A publication Critical patent/JP2001210700A/ja
Publication of JP2001210700A5 publication Critical patent/JP2001210700A5/ja
Application granted granted Critical
Publication of JP3939062B2 publication Critical patent/JP3939062B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000015968A 2000-01-25 2000-01-25 基板検出装置 Expired - Fee Related JP3939062B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000015968A JP3939062B2 (ja) 2000-01-25 2000-01-25 基板検出装置
KR1020010003594A KR100606526B1 (ko) 2000-01-25 2001-01-22 기판검출방법 및 그 장치
US09/768,065 US6642533B2 (en) 2000-01-25 2001-01-24 Substrate detecting method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000015968A JP3939062B2 (ja) 2000-01-25 2000-01-25 基板検出装置

Publications (3)

Publication Number Publication Date
JP2001210700A JP2001210700A (ja) 2001-08-03
JP2001210700A5 true JP2001210700A5 (enExample) 2005-01-06
JP3939062B2 JP3939062B2 (ja) 2007-06-27

Family

ID=18543183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000015968A Expired - Fee Related JP3939062B2 (ja) 2000-01-25 2000-01-25 基板検出装置

Country Status (3)

Country Link
US (1) US6642533B2 (enExample)
JP (1) JP3939062B2 (enExample)
KR (1) KR100606526B1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3468056B2 (ja) * 1997-09-23 2003-11-17 東京エレクトロン株式会社 基板検出装置
US7282889B2 (en) * 2001-04-19 2007-10-16 Onwafer Technologies, Inc. Maintenance unit for a sensor apparatus
US6717171B2 (en) * 2001-06-05 2004-04-06 Semitool, Inc. Method and apparatus for accessing microelectronic workpiece containers
JP2003303876A (ja) * 2002-04-10 2003-10-24 Seiko Instruments Inc 試料ステージにおける半導体ウエハ保持機構
DE10250353B4 (de) * 2002-10-25 2008-04-30 Brooks Automation (Germany) Gmbh Einrichtung zur Detektion von übereinander mit einem bestimmten Abstand angeordneten Substraten
JP4276440B2 (ja) * 2003-01-06 2009-06-10 東京エレクトロン株式会社 基板検出方法及び装置並びに基板処理装置
US7255524B2 (en) * 2003-04-14 2007-08-14 Brooks Automation, Inc. Substrate cassette mapper
WO2006023838A2 (en) 2004-08-19 2006-03-02 Brooks Automation, Inc. Reduced capacity carrier and method of use
JP4891538B2 (ja) * 2004-11-04 2012-03-07 株式会社日立ハイテクノロジーズ ロードポート
JP4502127B2 (ja) * 2005-04-01 2010-07-14 株式会社ダイフク カセット保管及び被処理板の処理設備
JP5592710B2 (ja) * 2010-06-17 2014-09-17 セイコーインスツル株式会社 ピッチ変換装置
JP6045946B2 (ja) * 2012-07-13 2016-12-14 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、プログラムおよび記録媒体
KR101432137B1 (ko) * 2013-03-27 2014-08-20 주식회사 싸이맥스 웨이퍼의 존재 유무 및 위치를 검출하는 일체형 매핑바가 형성된 매핑장치
US10790177B2 (en) * 2017-11-14 2020-09-29 Taiwan Semiconductor Manufacturing Co., Ltd. Systems, devices, and methods for using a real time environment sensor in a FOUP
CN109444720B (zh) * 2018-12-13 2024-03-22 奥士康科技股份有限公司 一种pcb板自动化检测装置
CN112401880B (zh) * 2020-10-22 2022-07-12 中国人民解放军陆军军医大学第二附属医院 一种用于戴在手指上的血氧监测设备
KR102563297B1 (ko) * 2021-04-12 2023-08-03 주식회사 유진테크 기판이송장치 및 이를 포함하는 기판 처리장치
CN117810128B (zh) * 2023-12-30 2024-05-24 医顺通信息科技(常州)有限公司 一种rfid腕带芯片衬底接合装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2868645B2 (ja) * 1991-04-19 1999-03-10 東京エレクトロン株式会社 ウエハ搬送装置、ウエハの傾き検出方法、およびウエハの検出方法
US6013920A (en) * 1997-11-28 2000-01-11 Fortrend Engineering Coirporation Wafer-mapping load post interface having an effector position sensing device
JP3590517B2 (ja) * 1998-01-21 2004-11-17 株式会社 日立インダストリイズ カセット内ウエフア検出装置
TW444260B (en) * 2000-07-13 2001-07-01 Ind Tech Res Inst Wafer mapping method of wafer load port equipment

Similar Documents

Publication Publication Date Title
JP2001210700A5 (enExample)
JP4620866B2 (ja) 同軸駆動軸を備えた二重アーム装置及びこれを用いた基板搬送方法
US4964776A (en) Article transfer and storage system
JP2003512257A5 (enExample)
JP5278698B2 (ja) カセット搬送装置
JP2762928B2 (ja) 物品移載装置
JP3939062B2 (ja) 基板検出装置
JPH11278724A (ja) リ―ル操作装置
JP3433218B2 (ja) 電子部品装着装置
JP4326331B2 (ja) 薬剤供給装置
CN110386291B (zh) 用于传输泡罩包装的传输单元及方法
JP3474211B2 (ja) カム機構及びカム機構を有する材料供給装置
JP5303829B2 (ja) 搬送装置および搬送方法
US20050063797A1 (en) FOUP door transfer system
US6622852B2 (en) Continuous container-supplying apparatus
JP4056141B2 (ja) 基板搬送装置
JPH10264901A (ja) 箱詰め装置
JP4370512B2 (ja) 旋回式搬送装置
JPH09153534A (ja) ウェーハ移載装置
JP4687120B2 (ja) 物品整列装置
JP5187558B2 (ja) 物品搬送装置
JP4006996B2 (ja) 基板検出装置
JP2007176660A (ja) 容器保持装置
JP2021104885A (ja) 搬送装置
CN217261244U (zh) 一种翻盒装置及贴标流水线