JP2001189441A5 - - Google Patents
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- Publication number
- JP2001189441A5 JP2001189441A5 JP1999371336A JP37133699A JP2001189441A5 JP 2001189441 A5 JP2001189441 A5 JP 2001189441A5 JP 1999371336 A JP1999371336 A JP 1999371336A JP 37133699 A JP37133699 A JP 37133699A JP 2001189441 A5 JP2001189441 A5 JP 2001189441A5
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric conversion
- semiconductor
- region
- element separation
- conversion device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 description 47
- 238000006243 chemical reaction Methods 0.000 description 34
- 238000000926 separation method Methods 0.000 description 28
- 239000000758 substrate Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000002955 isolation Methods 0.000 description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP37133699A JP4845247B2 (ja) | 1999-12-27 | 1999-12-27 | 光電変換装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP37133699A JP4845247B2 (ja) | 1999-12-27 | 1999-12-27 | 光電変換装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001189441A JP2001189441A (ja) | 2001-07-10 |
JP2001189441A5 true JP2001189441A5 (enrdf_load_stackoverflow) | 2007-02-08 |
JP4845247B2 JP4845247B2 (ja) | 2011-12-28 |
Family
ID=18498534
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP37133699A Expired - Fee Related JP4845247B2 (ja) | 1999-12-27 | 1999-12-27 | 光電変換装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4845247B2 (enrdf_load_stackoverflow) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7205593B2 (en) | 2002-09-13 | 2007-04-17 | Matsushita Electric Industrial Co., Ltd. | MOS image pick-up device and camera incorporating the same |
JP3658384B2 (ja) * | 2002-09-13 | 2005-06-08 | 松下電器産業株式会社 | Mos型撮像装置およびこれを組み込んだカメラ |
JP3794637B2 (ja) | 2003-03-07 | 2006-07-05 | 松下電器産業株式会社 | 固体撮像装置 |
JP5297135B2 (ja) * | 2008-10-01 | 2013-09-25 | キヤノン株式会社 | 光電変換装置、撮像システム、及び光電変換装置の製造方法 |
JP5558857B2 (ja) * | 2009-03-09 | 2014-07-23 | キヤノン株式会社 | 光電変換装置およびそれを用いた撮像システム |
JP2016046420A (ja) * | 2014-08-25 | 2016-04-04 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
JP2023063943A (ja) * | 2021-10-25 | 2023-05-10 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3571909B2 (ja) * | 1998-03-19 | 2004-09-29 | キヤノン株式会社 | 固体撮像装置及びその製造方法 |
JP3337976B2 (ja) * | 1998-04-30 | 2002-10-28 | キヤノン株式会社 | 撮像装置 |
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1999
- 1999-12-27 JP JP37133699A patent/JP4845247B2/ja not_active Expired - Fee Related
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