JP2001027727A5 - - Google Patents

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Publication number
JP2001027727A5
JP2001027727A5 JP1999199467A JP19946799A JP2001027727A5 JP 2001027727 A5 JP2001027727 A5 JP 2001027727A5 JP 1999199467 A JP1999199467 A JP 1999199467A JP 19946799 A JP19946799 A JP 19946799A JP 2001027727 A5 JP2001027727 A5 JP 2001027727A5
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JP
Japan
Prior art keywords
optical system
reflection
imaging optical
reflecting surface
reflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999199467A
Other languages
English (en)
Japanese (ja)
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JP4717974B2 (ja
JP2001027727A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP19946799A external-priority patent/JP4717974B2/ja
Priority to JP19946799A priority Critical patent/JP4717974B2/ja
Priority to US09/615,081 priority patent/US7079314B1/en
Priority to EP00305938A priority patent/EP1069448B1/en
Priority to DE60026623T priority patent/DE60026623T2/de
Priority to DE60001691T priority patent/DE60001691T2/de
Priority to EP03000101A priority patent/EP1318425B1/en
Publication of JP2001027727A publication Critical patent/JP2001027727A/ja
Publication of JP2001027727A5 publication Critical patent/JP2001027727A5/ja
Publication of JP4717974B2 publication Critical patent/JP4717974B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP19946799A 1999-07-13 1999-07-13 反射屈折光学系及び該光学系を備える投影露光装置 Expired - Fee Related JP4717974B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP19946799A JP4717974B2 (ja) 1999-07-13 1999-07-13 反射屈折光学系及び該光学系を備える投影露光装置
US09/615,081 US7079314B1 (en) 1999-07-13 2000-07-12 Catadioptric optical system and exposure apparatus equipped with the same
DE60001691T DE60001691T2 (de) 1999-07-13 2000-07-13 Katadioptrisches optisches System und Projektionsbelichtungsvorrichtung mit einem solchen System
DE60026623T DE60026623T2 (de) 1999-07-13 2000-07-13 Katadioptrisches optisches System und Belichtungsvorrichtung mit einem solchem System
EP00305938A EP1069448B1 (en) 1999-07-13 2000-07-13 Catadioptric optical system and projection exposure apparatus equipped with the same
EP03000101A EP1318425B1 (en) 1999-07-13 2000-07-13 Catadioptric optical system and exposure apparatus equipped with the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19946799A JP4717974B2 (ja) 1999-07-13 1999-07-13 反射屈折光学系及び該光学系を備える投影露光装置

Publications (3)

Publication Number Publication Date
JP2001027727A JP2001027727A (ja) 2001-01-30
JP2001027727A5 true JP2001027727A5 (US06195213-20010227-M00001.png) 2008-02-28
JP4717974B2 JP4717974B2 (ja) 2011-07-06

Family

ID=16408298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19946799A Expired - Fee Related JP4717974B2 (ja) 1999-07-13 1999-07-13 反射屈折光学系及び該光学系を備える投影露光装置

Country Status (4)

Country Link
US (1) US7079314B1 (US06195213-20010227-M00001.png)
EP (2) EP1318425B1 (US06195213-20010227-M00001.png)
JP (1) JP4717974B2 (US06195213-20010227-M00001.png)
DE (2) DE60001691T2 (US06195213-20010227-M00001.png)

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US7466489B2 (en) * 2003-12-15 2008-12-16 Susanne Beder Projection objective having a high aperture and a planar end surface
JP5102492B2 (ja) * 2003-12-19 2012-12-19 カール・ツァイス・エスエムティー・ゲーエムベーハー 結晶素子を有するマイクロリソグラフィー投影用対物レンズ
US20080151365A1 (en) * 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
US7463422B2 (en) * 2004-01-14 2008-12-09 Carl Zeiss Smt Ag Projection exposure apparatus
CN102169226B (zh) * 2004-01-14 2014-04-23 卡尔蔡司Smt有限责任公司 反射折射投影物镜
WO2005098504A1 (en) 2004-04-08 2005-10-20 Carl Zeiss Smt Ag Imaging system with mirror group
KR101213831B1 (ko) 2004-05-17 2012-12-24 칼 짜이스 에스엠티 게엠베하 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
EP1754110B1 (en) 2004-06-10 2008-07-30 Carl Zeiss SMT AG Projection objective for a microlithographic projection exposure apparatus
DE602005018648D1 (de) 2004-07-14 2010-02-11 Zeiss Carl Smt Ag Katadioptrisches projektionsobjektiv
US7184124B2 (en) 2004-10-28 2007-02-27 Asml Holding N.V. Lithographic apparatus having an adjustable projection system and device manufacturing method
DE102005042005A1 (de) 2004-12-23 2006-07-06 Carl Zeiss Smt Ag Hochaperturiges Objektiv mit obskurierter Pupille
JP2006309220A (ja) 2005-04-29 2006-11-09 Carl Zeiss Smt Ag 投影対物レンズ
EP1746463A2 (de) 2005-07-01 2007-01-24 Carl Zeiss SMT AG Verfahren zum Korrigieren eines lithographischen Projektionsobjektivs und derartiges Projektionsobjektiv
KR101127346B1 (ko) 2005-09-13 2012-03-29 칼 짜이스 에스엠티 게엠베하 마이크로리소그라피 투영 광학 시스템, 디바이스 제작 방법 및 광학 표면을 설계하기 위한 방법
KR101314974B1 (ko) 2006-02-17 2013-10-04 칼 짜이스 에스엠티 게엠베하 마이크로리소그래픽 조명 시스템 및 이를 구비한 투사 노출장치
DE102006014380A1 (de) 2006-03-27 2007-10-11 Carl Zeiss Smt Ag Projektionsobjektiv und Projektionsbelichtungsanlage mit negativer Schnittweite der Eintrittspupille
US7738188B2 (en) * 2006-03-28 2010-06-15 Carl Zeiss Smt Ag Projection objective and projection exposure apparatus including the same
US7920338B2 (en) * 2006-03-28 2011-04-05 Carl Zeiss Smt Gmbh Reduction projection objective and projection exposure apparatus including the same
EP1852745A1 (en) * 2006-05-05 2007-11-07 Carl Zeiss SMT AG High-NA projection objective
DE102006022958A1 (de) 2006-05-11 2007-11-22 Carl Zeiss Smt Ag Projektionsbelichtungsanlage, Projektionsbelichtungsverfahren und Verwendung eines Projektionsobjektivs
EP1890191A1 (en) 2006-08-14 2008-02-20 Carl Zeiss SMT AG Catadioptric projection objective with pupil mirror
US20090323739A1 (en) * 2006-12-22 2009-12-31 Uv Tech Systems Laser optical system
DE102007023411A1 (de) 2006-12-28 2008-07-03 Carl Zeiss Smt Ag Optisches Element, Beleuchtungsoptik für die Mikrolithographie mit mindestens einem derartigen optischen Element sowie Beleuchtungssystem mit einer derartigen Beleuchtungsoptik
DE102007019570A1 (de) 2007-04-25 2008-10-30 Carl Zeiss Smt Ag Spiegelanordnung, Kontaktierungsanordnung und optisches System
US7760425B2 (en) 2007-09-05 2010-07-20 Carl Zeiss Smt Ag Chromatically corrected catadioptric objective and projection exposure apparatus including the same
US8345350B2 (en) 2008-06-20 2013-01-01 Carl Zeiss Smt Gmbh Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same
JP5360529B2 (ja) * 2008-07-01 2013-12-04 株式会社ニコン 投影光学系、露光装置、およびデバイス製造方法
JP2014194552A (ja) * 2014-04-28 2014-10-09 Nikon Corp 反射屈折型の投影光学系、露光装置、および露光方法
JP6358242B2 (ja) * 2015-11-30 2018-07-18 株式会社ニコン 露光装置、露光方法、デバイス製造方法およびパターン形成方法
CN109814231B (zh) * 2017-11-20 2022-05-17 富士胶片株式会社 成像光学系统、投射型显示装置及摄像装置
JP6525069B2 (ja) * 2018-01-09 2019-06-05 株式会社ニコン 露光装置、露光方法およびデバイス製造方法

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