JP2000081443A5 - - Google Patents

Download PDF

Info

Publication number
JP2000081443A5
JP2000081443A5 JP1999164333A JP16433399A JP2000081443A5 JP 2000081443 A5 JP2000081443 A5 JP 2000081443A5 JP 1999164333 A JP1999164333 A JP 1999164333A JP 16433399 A JP16433399 A JP 16433399A JP 2000081443 A5 JP2000081443 A5 JP 2000081443A5
Authority
JP
Japan
Prior art keywords
probe
detection
piezoelectric body
bonding
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999164333A
Other languages
English (en)
Japanese (ja)
Other versions
JP3905254B2 (ja
JP2000081443A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP16433399A priority Critical patent/JP3905254B2/ja
Priority claimed from JP16433399A external-priority patent/JP3905254B2/ja
Priority to US09/337,613 priority patent/US6257053B1/en
Publication of JP2000081443A publication Critical patent/JP2000081443A/ja
Publication of JP2000081443A5 publication Critical patent/JP2000081443A5/ja
Application granted granted Critical
Publication of JP3905254B2 publication Critical patent/JP3905254B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP16433399A 1998-06-22 1999-06-10 走査型プローブ顕微鏡 Expired - Fee Related JP3905254B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP16433399A JP3905254B2 (ja) 1998-06-22 1999-06-10 走査型プローブ顕微鏡
US09/337,613 US6257053B1 (en) 1998-06-22 1999-06-21 Scanning probe microscope having piezoelectric member for controlling movement of probe

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP17442498 1998-06-22
JP10-174424 1998-06-22
JP16433399A JP3905254B2 (ja) 1998-06-22 1999-06-10 走査型プローブ顕微鏡

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006014383A Division JP4209891B2 (ja) 1998-06-22 2006-01-23 走査型プローブ顕微鏡

Publications (3)

Publication Number Publication Date
JP2000081443A JP2000081443A (ja) 2000-03-21
JP2000081443A5 true JP2000081443A5 (enExample) 2005-05-19
JP3905254B2 JP3905254B2 (ja) 2007-04-18

Family

ID=26489478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16433399A Expired - Fee Related JP3905254B2 (ja) 1998-06-22 1999-06-10 走査型プローブ顕微鏡

Country Status (2)

Country Link
US (1) US6257053B1 (enExample)
JP (1) JP3905254B2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6100523A (en) * 1997-10-29 2000-08-08 International Business Machines Corporation Micro goniometer for scanning microscopy
US6459088B1 (en) * 1998-01-16 2002-10-01 Canon Kabushiki Kaisha Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same
JP3387846B2 (ja) * 1999-03-04 2003-03-17 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
US6477898B1 (en) * 2000-07-06 2002-11-12 Motorola, Inc. Membrane mask stress measurement apparatus and method therefor
US6888135B2 (en) * 2000-10-18 2005-05-03 Nec Corporation Scanning probe microscope with probe formed by single conductive material
US6748795B1 (en) 2001-07-27 2004-06-15 Molecular Imaging Corporation Pendulum scanner for scanning probe microscope
JP4782953B2 (ja) * 2001-08-06 2011-09-28 東京エレクトロン株式会社 プローブカード特性測定装置、プローブ装置及びプローブ方法
IL145136A0 (en) * 2001-08-27 2002-06-30 Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes
US6953930B2 (en) * 2001-08-27 2005-10-11 Nippon Telegraph And Telephone Corporation Conductive transparent probe and probe control apparatus
US6677697B2 (en) * 2001-12-06 2004-01-13 Veeco Instruments Inc. Force scanning probe microscope
US6991948B2 (en) * 2003-11-05 2006-01-31 Solid State Measurements, Inc. Method of electrical characterization of a silicon-on-insulator (SOI) wafer
US7180662B2 (en) * 2004-04-12 2007-02-20 Applied Scientific Instrumentation Inc. Stage assembly and method for optical microscope including Z-axis stage and piezoelectric actuator for rectilinear translation of Z stage
DE112006003492T5 (de) * 2005-12-28 2008-10-30 Karma Technology, Inc., Agoura Hills Sondermodul mit integriertem Stellglied für ein Rastersondenmikroskop
US8302456B2 (en) * 2006-02-23 2012-11-06 Asylum Research Corporation Active damping of high speed scanning probe microscope components
JP2007309919A (ja) * 2006-04-20 2007-11-29 Hitachi Kenki Fine Tech Co Ltd 走査プローブ顕微鏡
JP4378385B2 (ja) * 2006-05-17 2009-12-02 キヤノン株式会社 走査型プローブ装置における駆動ステージ、走査型プローブ装置
JP4899162B2 (ja) * 2007-07-17 2012-03-21 独立行政法人産業技術総合研究所 走査型プローブ顕微鏡用プローブ及びそれを用いた走査型プローブ顕微鏡
KR101065981B1 (ko) * 2009-05-20 2011-09-19 인하대학교 산학협력단 소리굽쇠-주사탐침 결합 진동계
US9383388B2 (en) 2014-04-21 2016-07-05 Oxford Instruments Asylum Research, Inc Automated atomic force microscope and the operation thereof
CN105092896B (zh) * 2015-08-03 2018-06-29 中国科学院合肥物质科学研究院 单扫描管驱动的多维压电马达及可搜索扫描探针显微镜
CN115979467B (zh) * 2023-02-02 2024-06-18 合肥工业大学 一种基于石英音叉三维谐振测头的触发力测量方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
DE3610540A1 (de) * 1986-03-27 1987-10-01 Kernforschungsanlage Juelich Bewegungseinrichtung zur mikrobewegung von objekten
US4800274A (en) * 1987-02-02 1989-01-24 The Regents Of The University Of California High resolution atomic force microscope
DE4013742C2 (de) * 1990-04-28 1994-06-30 Focus Mestechnik Gmbh & Co Kg Abtastkopf für eine Maschine zum Ausmessen der Mikrooberflächenkontur von Werkstücken
JP2500373B2 (ja) * 1993-11-09 1996-05-29 工業技術院長 原子間力顕微鏡及び原子間力顕微鏡における試料観察方法
US6006594A (en) * 1994-05-11 1999-12-28 Dr. Khaled Und Dr. Miles Haines Gesellschaft Burgerlichen Rechts Scanning probe microscope head with signal processing circuit
JPH10283972A (ja) * 1997-04-10 1998-10-23 Seiko Instr Inc 走査型プローブ顕微鏡を用いた加工、記録、再生装置
US5900618A (en) * 1997-08-26 1999-05-04 University Of Maryland Near-field scanning microwave microscope having a transmission line with an open end

Similar Documents

Publication Publication Date Title
JP2000081443A5 (enExample)
JP3905254B2 (ja) 走査型プローブ顕微鏡
JP3401444B2 (ja) 微細形状測定装置
US6101878A (en) Angular rate sensor and method of improving output characteristic thereof
US7819013B2 (en) Method and apparatus for measuring oscillation amplitude of an ultrasonic device
CN109752280B (zh) 用于确定流体介质的密度的密度测量装置
JP4732903B2 (ja) カンチレバーホルダ及び走査型プローブ顕微鏡
JP4688643B2 (ja) 加振型カンチレバーホルダ及び走査型プローブ顕微鏡
JP4394679B2 (ja) 振動超ミクロトームカッタを有する保持装置
CN101039774A (zh) 有一个装在支座内的传感器的超声换能器
JP3318085B2 (ja) カンチレバーチップホルダー
JP2000258330A (ja) 走査型プローブ顕微鏡
JP2000065716A (ja) 加振形接触センサ
JP2006113082A (ja) 走査型プローブ顕微鏡
JP2005271171A (ja) 振動切削装置及び振動発生装置
JPH0611385A (ja) 横波音速測定装置及びこれを利用したヤング率及び／又はポアソン比測定装置
JPH10239191A (ja) 音圧センサ−
JP2003344034A (ja) 表面性状測定装置及び表面性状センサ
US8484757B2 (en) Device for oscillation excitation of an elastic bar fastened on one side in an atomic force microscope
JPH1082704A (ja) 音圧センサ−
JP2003149119A (ja) 導電透明プローブ
JPH1138021A (ja) 走査型プローブ顕微鏡とその接近機構
JPH0829148A (ja) ニアフィールド顕微鏡
KR100238980B1 (ko) 압전진동형 회전각센서
EP1992021B1 (en) A low frequency acoustic transducer for a probe for non-destructive testing