JP3905254B2 - 走査型プローブ顕微鏡 - Google Patents

走査型プローブ顕微鏡 Download PDF

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Publication number
JP3905254B2
JP3905254B2 JP16433399A JP16433399A JP3905254B2 JP 3905254 B2 JP3905254 B2 JP 3905254B2 JP 16433399 A JP16433399 A JP 16433399A JP 16433399 A JP16433399 A JP 16433399A JP 3905254 B2 JP3905254 B2 JP 3905254B2
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JP
Japan
Prior art keywords
probe
detection
scanning
piezoelectric body
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP16433399A
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English (en)
Japanese (ja)
Other versions
JP2000081443A5 (enExample
JP2000081443A (ja
Inventor
誠人 伊與木
正夫 長谷川
英介 冨田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Science Corp
Original Assignee
SII NanoTechnology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SII NanoTechnology Inc filed Critical SII NanoTechnology Inc
Priority to JP16433399A priority Critical patent/JP3905254B2/ja
Priority to US09/337,613 priority patent/US6257053B1/en
Publication of JP2000081443A publication Critical patent/JP2000081443A/ja
Publication of JP2000081443A5 publication Critical patent/JP2000081443A5/ja
Application granted granted Critical
Publication of JP3905254B2 publication Critical patent/JP3905254B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner

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  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP16433399A 1998-06-22 1999-06-10 走査型プローブ顕微鏡 Expired - Fee Related JP3905254B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP16433399A JP3905254B2 (ja) 1998-06-22 1999-06-10 走査型プローブ顕微鏡
US09/337,613 US6257053B1 (en) 1998-06-22 1999-06-21 Scanning probe microscope having piezoelectric member for controlling movement of probe

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10-174424 1998-06-22
JP17442498 1998-06-22
JP16433399A JP3905254B2 (ja) 1998-06-22 1999-06-10 走査型プローブ顕微鏡

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006014383A Division JP4209891B2 (ja) 1998-06-22 2006-01-23 走査型プローブ顕微鏡

Publications (3)

Publication Number Publication Date
JP2000081443A JP2000081443A (ja) 2000-03-21
JP2000081443A5 JP2000081443A5 (enExample) 2005-05-19
JP3905254B2 true JP3905254B2 (ja) 2007-04-18

Family

ID=26489478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16433399A Expired - Fee Related JP3905254B2 (ja) 1998-06-22 1999-06-10 走査型プローブ顕微鏡

Country Status (2)

Country Link
US (1) US6257053B1 (enExample)
JP (1) JP3905254B2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6100523A (en) * 1997-10-29 2000-08-08 International Business Machines Corporation Micro goniometer for scanning microscopy
US6459088B1 (en) * 1998-01-16 2002-10-01 Canon Kabushiki Kaisha Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same
JP3387846B2 (ja) * 1999-03-04 2003-03-17 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
US6477898B1 (en) * 2000-07-06 2002-11-12 Motorola, Inc. Membrane mask stress measurement apparatus and method therefor
US6888135B2 (en) * 2000-10-18 2005-05-03 Nec Corporation Scanning probe microscope with probe formed by single conductive material
US6748795B1 (en) 2001-07-27 2004-06-15 Molecular Imaging Corporation Pendulum scanner for scanning probe microscope
JP4782953B2 (ja) * 2001-08-06 2011-09-28 東京エレクトロン株式会社 プローブカード特性測定装置、プローブ装置及びプローブ方法
US6953930B2 (en) * 2001-08-27 2005-10-11 Nippon Telegraph And Telephone Corporation Conductive transparent probe and probe control apparatus
IL145136A0 (en) * 2001-08-27 2002-06-30 Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes
US6677697B2 (en) * 2001-12-06 2004-01-13 Veeco Instruments Inc. Force scanning probe microscope
US6991948B2 (en) * 2003-11-05 2006-01-31 Solid State Measurements, Inc. Method of electrical characterization of a silicon-on-insulator (SOI) wafer
US7180662B2 (en) * 2004-04-12 2007-02-20 Applied Scientific Instrumentation Inc. Stage assembly and method for optical microscope including Z-axis stage and piezoelectric actuator for rectilinear translation of Z stage
WO2007078979A2 (en) * 2005-12-28 2007-07-12 Karma Technology, Inc. Probe module with integrated actuator for a probe microscope
US8302456B2 (en) * 2006-02-23 2012-11-06 Asylum Research Corporation Active damping of high speed scanning probe microscope components
JP2007309919A (ja) * 2006-04-20 2007-11-29 Hitachi Kenki Fine Tech Co Ltd 走査プローブ顕微鏡
JP4378385B2 (ja) * 2006-05-17 2009-12-02 キヤノン株式会社 走査型プローブ装置における駆動ステージ、走査型プローブ装置
JP4899162B2 (ja) * 2007-07-17 2012-03-21 独立行政法人産業技術総合研究所 走査型プローブ顕微鏡用プローブ及びそれを用いた走査型プローブ顕微鏡
KR101065981B1 (ko) * 2009-05-20 2011-09-19 인하대학교 산학협력단 소리굽쇠-주사탐침 결합 진동계
US9383388B2 (en) 2014-04-21 2016-07-05 Oxford Instruments Asylum Research, Inc Automated atomic force microscope and the operation thereof
CN105092896B (zh) * 2015-08-03 2018-06-29 中国科学院合肥物质科学研究院 单扫描管驱动的多维压电马达及可搜索扫描探针显微镜
CN115979467B (zh) * 2023-02-02 2024-06-18 合肥工业大学 一种基于石英音叉三维谐振测头的触发力测量方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
DE3610540A1 (de) * 1986-03-27 1987-10-01 Kernforschungsanlage Juelich Bewegungseinrichtung zur mikrobewegung von objekten
US4800274A (en) * 1987-02-02 1989-01-24 The Regents Of The University Of California High resolution atomic force microscope
DE4013742C2 (de) * 1990-04-28 1994-06-30 Focus Mestechnik Gmbh & Co Kg Abtastkopf für eine Maschine zum Ausmessen der Mikrooberflächenkontur von Werkstücken
JP2500373B2 (ja) * 1993-11-09 1996-05-29 工業技術院長 原子間力顕微鏡及び原子間力顕微鏡における試料観察方法
US6006594A (en) * 1994-05-11 1999-12-28 Dr. Khaled Und Dr. Miles Haines Gesellschaft Burgerlichen Rechts Scanning probe microscope head with signal processing circuit
JPH10283972A (ja) * 1997-04-10 1998-10-23 Seiko Instr Inc 走査型プローブ顕微鏡を用いた加工、記録、再生装置
US5900618A (en) * 1997-08-26 1999-05-04 University Of Maryland Near-field scanning microwave microscope having a transmission line with an open end

Also Published As

Publication number Publication date
US6257053B1 (en) 2001-07-10
JP2000081443A (ja) 2000-03-21

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