JP1535455S - - Google Patents

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Publication number
JP1535455S
JP1535455S JPD2015-3957F JP2015003957F JP1535455S JP 1535455 S JP1535455 S JP 1535455S JP 2015003957 F JP2015003957 F JP 2015003957F JP 1535455 S JP1535455 S JP 1535455S
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JPD2015-3957F
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to JPD2015-3957F priority Critical patent/JP1535455S/ja
Priority to US29/536,784 priority patent/USD772824S1/en
Priority to TW104304617F priority patent/TWD175119S/zh
Application granted granted Critical
Publication of JP1535455S publication Critical patent/JP1535455S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JPD2015-3957F 2015-02-25 2015-02-25 Active JP1535455S (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JPD2015-3957F JP1535455S (ja) 2015-02-25 2015-02-25
US29/536,784 USD772824S1 (en) 2015-02-25 2015-08-19 Reaction tube
TW104304617F TWD175119S (zh) 2015-02-25 2015-08-24 反應管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-3957F JP1535455S (ja) 2015-02-25 2015-02-25

Publications (1)

Publication Number Publication Date
JP1535455S true JP1535455S (ja) 2015-10-19

Family

ID=54293783

Family Applications (1)

Application Number Title Priority Date Filing Date
JPD2015-3957F Active JP1535455S (ja) 2015-02-25 2015-02-25

Country Status (3)

Country Link
US (1) USD772824S1 (ja)
JP (1) JP1535455S (ja)
TW (1) TWD175119S (ja)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1548462S (ja) * 2015-09-04 2016-04-25
JP1546512S (ja) * 2015-09-04 2016-03-22
KR102043876B1 (ko) 2016-02-09 2019-11-12 가부시키가이샤 코쿠사이 엘렉트릭 기판 처리 장치 및 반도체 장치의 제조 방법
JP1605460S (ja) * 2017-08-09 2021-05-31
JP1605461S (ja) * 2017-08-10 2021-05-31
JP1605462S (ja) * 2017-08-10 2021-05-31
JP1605982S (ja) * 2017-12-27 2021-05-31
JP1644260S (ja) * 2019-03-20 2019-10-28
USD931823S1 (en) * 2020-01-29 2021-09-28 Kokusai Electric Corporation Reaction tube
JP1678273S (ja) * 2020-03-10 2021-02-01 反応管
JP1713189S (ja) * 2021-09-15 2022-04-21
JP1713188S (ja) * 2021-09-15 2022-04-21
JP1731789S (ja) * 2022-03-01 2022-12-09
JP1731877S (ja) * 2022-03-01 2022-12-09
JP1731878S (ja) * 2022-03-01 2022-12-09
JP1731674S (ja) * 2022-05-30 2022-12-08
JP1731673S (ja) * 2022-05-30 2022-12-08
JP1731675S (ja) * 2022-05-30 2022-12-08

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD424024S (en) * 1997-01-31 2000-05-02 Tokyo Electron Limited Quartz process tube
USD423463S (en) * 1997-01-31 2000-04-25 Tokyo Electron Limited Quartz process tube
USD406113S (en) * 1997-01-31 1999-02-23 Tokyo Electron Limited Processing tube for use in a semiconductor wafer heat processing apparatus
USD405429S (en) * 1997-01-31 1999-02-09 Tokyo Electron Limited Processing tube for use in a semiconductor wafer heat processing apparatus
USD417438S (en) * 1997-01-31 1999-12-07 Tokyo Electron Limited Quartz outer tube
USD405062S (en) * 1997-08-20 1999-02-02 Tokyo Electron Ltd. Processing tube for use in a semiconductor wafer heat processing apparatus
USD405431S (en) * 1997-08-20 1999-02-09 Tokyo Electron Ltd. Tube for use in a semiconductor wafer heat processing apparatus
US5948300A (en) * 1997-09-12 1999-09-07 Kokusai Bti Corporation Process tube with in-situ gas preheating
JP3985899B2 (ja) * 2002-03-28 2007-10-03 株式会社日立国際電気 基板処理装置
USD521464S1 (en) * 2003-11-04 2006-05-23 Tokyo Electron Limited Process tube for semiconductor device manufacturing apparatus
JP5157100B2 (ja) * 2006-08-04 2013-03-06 東京エレクトロン株式会社 成膜装置及び成膜方法
USD600659S1 (en) * 2006-09-12 2009-09-22 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
USD586768S1 (en) * 2006-10-12 2009-02-17 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
JP5096182B2 (ja) * 2008-01-31 2012-12-12 東京エレクトロン株式会社 熱処理炉
TWD143034S1 (zh) * 2008-03-28 2011-10-01 東京威力科創股份有限公司 半導體製造用處理管
JP4930438B2 (ja) * 2008-04-03 2012-05-16 東京エレクトロン株式会社 反応管及び熱処理装置
TWD133943S1 (zh) * 2008-05-09 2010-03-21 日立國際電氣股份有限公司 反應管
USD610559S1 (en) * 2008-05-30 2010-02-23 Hitachi Kokusai Electric, Inc. Reaction tube
USD739832S1 (en) * 2013-06-28 2015-09-29 Hitachi Kokusai Electric Inc. Reaction tube
TWD167985S (zh) * 2013-06-28 2015-05-21 日立國際電氣股份有限公司 反應管之部分
TWD167987S (zh) * 2013-06-28 2015-05-21 日立國際電氣股份有限公司 反應管之部分
TWD168774S (zh) * 2013-06-28 2015-07-01 日立國際電氣股份有限公司 反應管之部分
TWD167986S (zh) * 2013-06-28 2015-05-21 日立國際電氣股份有限公司 反應管之部分

Also Published As

Publication number Publication date
TWD175119S (zh) 2016-04-21
USD772824S1 (en) 2016-11-29

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