USD521464S1 - Process tube for semiconductor device manufacturing apparatus - Google Patents

Process tube for semiconductor device manufacturing apparatus Download PDF

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Publication number
USD521464S1
USD521464S1 US29/204,406 US20440604F USD521464S US D521464 S1 USD521464 S1 US D521464S1 US 20440604 F US20440604 F US 20440604F US D521464 S USD521464 S US D521464S
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US
United States
Prior art keywords
semiconductor device
manufacturing apparatus
device manufacturing
process tube
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/204,406
Inventor
Katsutoshi Ishii
Hiroyuki Matsuura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ISHII, KATSUTOSHI, MATSUURA, HIROYUKI
Application granted granted Critical
Publication of USD521464S1 publication Critical patent/USD521464S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is an isometric view of a process tube for semiconductor device manufacturing apparatus of the present invention;
FIG. 2 is a front view thereof;
FIG. 3 is a left side view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a top view thereof;
FIG. 6 is a bottom view thereof;
FIG. 7 is a sectional view along line 7—7 shown in FIG. 5;
FIG. 8 is a sectional view along line 8—8 shown in FIG. 7;
FIG. 9 is a sectional view along line 9—9 shown in FIG. 5;
FIG. 10 is a sectional view along line 10—10 shown in FIG. 5; and,
FIG. 11 is a sectional view along line 11—11 shown in FIG. 5.
A rear view is not shown as the rear view is a mirror image of the front view shown in FIG. 2.

Claims (1)

  1. The ornamental design for a process tube for semiconductor device manufacturing apparatus, as shown and described.
US29/204,406 2003-11-04 2004-04-29 Process tube for semiconductor device manufacturing apparatus Expired - Lifetime USD521464S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003032503 2003-11-04

Publications (1)

Publication Number Publication Date
USD521464S1 true USD521464S1 (en) 2006-05-23

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ID=36424296

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/204,406 Expired - Lifetime USD521464S1 (en) 2003-11-04 2004-04-29 Process tube for semiconductor device manufacturing apparatus

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US (1) USD521464S1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD772824S1 (en) * 2015-02-25 2016-11-29 Hitachi Kokusai Electric Inc. Reaction tube
USD842823S1 (en) * 2017-08-10 2019-03-12 Kokusai Electric Corporation Reaction tube
USD842824S1 (en) * 2017-08-09 2019-03-12 Kokusai Electric Corporation Reaction tube
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD901406S1 (en) * 2019-03-20 2020-11-10 Kokusai Electric Corporation Inner tube of reactor for semiconductor fabrication
USD931823S1 (en) * 2020-01-29 2021-09-28 Kokusai Electric Corporation Reaction tube

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD772824S1 (en) * 2015-02-25 2016-11-29 Hitachi Kokusai Electric Inc. Reaction tube
USD842824S1 (en) * 2017-08-09 2019-03-12 Kokusai Electric Corporation Reaction tube
USD842823S1 (en) * 2017-08-10 2019-03-12 Kokusai Electric Corporation Reaction tube
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD901406S1 (en) * 2019-03-20 2020-11-10 Kokusai Electric Corporation Inner tube of reactor for semiconductor fabrication
USD931823S1 (en) * 2020-01-29 2021-09-28 Kokusai Electric Corporation Reaction tube

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