USD521465S1 - Process tube for semiconductor device manufacturing apparatus - Google Patents
Process tube for semiconductor device manufacturing apparatus Download PDFInfo
- Publication number
- USD521465S1 USD521465S1 US29/204,408 US20440804F USD521465S US D521465 S1 USD521465 S1 US D521465S1 US 20440804 F US20440804 F US 20440804F US D521465 S USD521465 S US D521465S
- Authority
- US
- United States
- Prior art keywords
- semiconductor device
- manufacturing apparatus
- device manufacturing
- process tube
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
FIG. 1 is an isometric view of a process tube for semiconductor device manufacturing apparatus of the present invention;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a top view thereof;
FIG. 7 is a bottom view thereof;
FIG. 8 is a sectional view along line 8—8 shown in FIG. 6;
FIG. 9 is a sectional view along line 9—9 shown in FIG. 6;
FIG. 10 is a sectional view along line 10—10 shown in FIG. 6; and,
FIG. 11 is a sectional view along line 11—11 shown in FIG. 2.
Claims (1)
- The ornamental design for a process tube for semiconductor device manufacturing apparatus, as shown and described.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003032506 | 2003-11-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD521465S1 true USD521465S1 (en) | 2006-05-23 |
Family
ID=36424297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/204,408 Expired - Lifetime USD521465S1 (en) | 2003-11-04 | 2004-04-29 | Process tube for semiconductor device manufacturing apparatus |
Country Status (1)
Country | Link |
---|---|
US (1) | USD521465S1 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110278164A1 (en) * | 2010-05-12 | 2011-11-17 | Hon Hai Precision Industry Co., Ltd. | Sputtering device |
USD842823S1 (en) * | 2017-08-10 | 2019-03-12 | Kokusai Electric Corporation | Reaction tube |
USD842824S1 (en) * | 2017-08-09 | 2019-03-12 | Kokusai Electric Corporation | Reaction tube |
USD853979S1 (en) * | 2017-12-27 | 2019-07-16 | Kokusai Electric Corporation | Reaction tube |
USD901406S1 (en) * | 2019-03-20 | 2020-11-10 | Kokusai Electric Corporation | Inner tube of reactor for semiconductor fabrication |
USD931823S1 (en) * | 2020-01-29 | 2021-09-28 | Kokusai Electric Corporation | Reaction tube |
US11542601B2 (en) * | 2016-02-09 | 2023-01-03 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and method of manufacturing semiconductor device |
-
2004
- 2004-04-29 US US29/204,408 patent/USD521465S1/en not_active Expired - Lifetime
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110278164A1 (en) * | 2010-05-12 | 2011-11-17 | Hon Hai Precision Industry Co., Ltd. | Sputtering device |
US11542601B2 (en) * | 2016-02-09 | 2023-01-03 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and method of manufacturing semiconductor device |
US11952664B2 (en) | 2016-02-09 | 2024-04-09 | Kokusai Electric Corporation | Substrate processing apparatus and method of manufacturing semiconductor device |
USD842824S1 (en) * | 2017-08-09 | 2019-03-12 | Kokusai Electric Corporation | Reaction tube |
USD842823S1 (en) * | 2017-08-10 | 2019-03-12 | Kokusai Electric Corporation | Reaction tube |
USD853979S1 (en) * | 2017-12-27 | 2019-07-16 | Kokusai Electric Corporation | Reaction tube |
USD901406S1 (en) * | 2019-03-20 | 2020-11-10 | Kokusai Electric Corporation | Inner tube of reactor for semiconductor fabrication |
USD931823S1 (en) * | 2020-01-29 | 2021-09-28 | Kokusai Electric Corporation | Reaction tube |
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