USD521465S1 - Process tube for semiconductor device manufacturing apparatus - Google Patents

Process tube for semiconductor device manufacturing apparatus Download PDF

Info

Publication number
USD521465S1
USD521465S1 US29/204,408 US20440804F USD521465S US D521465 S1 USD521465 S1 US D521465S1 US 20440804 F US20440804 F US 20440804F US D521465 S USD521465 S US D521465S
Authority
US
United States
Prior art keywords
semiconductor device
manufacturing apparatus
device manufacturing
process tube
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/204,408
Inventor
Katsutoshi Ishii
Hiroyuki Matsuura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ISHII, KATSUTOSHI, MATSUURA, HIROYUKI
Application granted granted Critical
Publication of USD521465S1 publication Critical patent/USD521465S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Description

FIG. 1 is an isometric view of a process tube for semiconductor device manufacturing apparatus of the present invention;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a top view thereof;
FIG. 7 is a bottom view thereof;
FIG. 8 is a sectional view along line 8—8 shown in FIG. 6;
FIG. 9 is a sectional view along line 9—9 shown in FIG. 6;
FIG. 10 is a sectional view along line 10—10 shown in FIG. 6; and,
FIG. 11 is a sectional view along line 11—11 shown in FIG. 2.

Claims (1)

  1. The ornamental design for a process tube for semiconductor device manufacturing apparatus, as shown and described.
US29/204,408 2003-11-04 2004-04-29 Process tube for semiconductor device manufacturing apparatus Expired - Lifetime USD521465S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003032506 2003-11-04

Publications (1)

Publication Number Publication Date
USD521465S1 true USD521465S1 (en) 2006-05-23

Family

ID=36424297

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/204,408 Expired - Lifetime USD521465S1 (en) 2003-11-04 2004-04-29 Process tube for semiconductor device manufacturing apparatus

Country Status (1)

Country Link
US (1) USD521465S1 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110278164A1 (en) * 2010-05-12 2011-11-17 Hon Hai Precision Industry Co., Ltd. Sputtering device
USD842823S1 (en) * 2017-08-10 2019-03-12 Kokusai Electric Corporation Reaction tube
USD842824S1 (en) * 2017-08-09 2019-03-12 Kokusai Electric Corporation Reaction tube
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD901406S1 (en) * 2019-03-20 2020-11-10 Kokusai Electric Corporation Inner tube of reactor for semiconductor fabrication
USD931823S1 (en) * 2020-01-29 2021-09-28 Kokusai Electric Corporation Reaction tube
US11542601B2 (en) * 2016-02-09 2023-01-03 Hitachi Kokusai Electric Inc. Substrate processing apparatus and method of manufacturing semiconductor device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110278164A1 (en) * 2010-05-12 2011-11-17 Hon Hai Precision Industry Co., Ltd. Sputtering device
US11542601B2 (en) * 2016-02-09 2023-01-03 Hitachi Kokusai Electric Inc. Substrate processing apparatus and method of manufacturing semiconductor device
US11952664B2 (en) 2016-02-09 2024-04-09 Kokusai Electric Corporation Substrate processing apparatus and method of manufacturing semiconductor device
USD842824S1 (en) * 2017-08-09 2019-03-12 Kokusai Electric Corporation Reaction tube
USD842823S1 (en) * 2017-08-10 2019-03-12 Kokusai Electric Corporation Reaction tube
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD901406S1 (en) * 2019-03-20 2020-11-10 Kokusai Electric Corporation Inner tube of reactor for semiconductor fabrication
USD931823S1 (en) * 2020-01-29 2021-09-28 Kokusai Electric Corporation Reaction tube

Similar Documents

Publication Publication Date Title
USD497312S1 (en) Bottle
USD476959S1 (en) Semiconductor device
USD503778S1 (en) Tube connector
USD706915S1 (en) Electronic incense apparatus
USD504177S1 (en) Neuro-electro-therapy headset
USD530796S1 (en) Component of a device for transport of liquid
USD489448S1 (en) Vaporization apparatus
USD490952S1 (en) Cleaning device
USD552047S1 (en) Process tube for manufacturing semiconductor wafers
USD476290S1 (en) All purpose ATV carrying rack
USD519150S1 (en) Image forming apparatus
USD501021S1 (en) Image forming apparatus
USD524359S1 (en) Image forming apparatus
USD521465S1 (en) Process tube for semiconductor device manufacturing apparatus
USD509533S1 (en) Image forming apparatus
USD521464S1 (en) Process tube for semiconductor device manufacturing apparatus
USD546354S1 (en) Semiconductor manufacturing apparatus
USD508074S1 (en) Image forming apparatus
USD489695S1 (en) Semiconductor device
USD518348S1 (en) Adjustable clamping device
USD515520S1 (en) Semiconductor device
USD495456S1 (en) Cleaning device
USD520467S1 (en) Process tube for semiconductor device manufacturing apparatus
USD491537S1 (en) Quick set device for mounting electrical devices
USD516526S1 (en) Electronic component cooling apparatus