IN2014DN09101A - - Google Patents

Download PDF

Info

Publication number
IN2014DN09101A
IN2014DN09101A IN9101DEN2014A IN2014DN09101A IN 2014DN09101 A IN2014DN09101 A IN 2014DN09101A IN 9101DEN2014 A IN9101DEN2014 A IN 9101DEN2014A IN 2014DN09101 A IN2014DN09101 A IN 2014DN09101A
Authority
IN
India
Prior art keywords
block copolymer
uneven structure
transferring
mold
base material
Prior art date
Application number
Other languages
English (en)
Inventor
Takashi Seki
Satoshi Masuyama
Maki Fukuda
Suzushi Nishimura
Original Assignee
Jx Nippon Oil & Energy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jx Nippon Oil & Energy Corp filed Critical Jx Nippon Oil & Energy Corp
Publication of IN2014DN09101A publication Critical patent/IN2014DN09101A/en

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3807Resin-bonded materials, e.g. inorganic particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842Manufacturing moulds, e.g. shaping the mould surface by machining
    • B29C33/3857Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
    • B29C33/3878Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts used as masters for making successive impressions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/42Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B29C33/424Moulding surfaces provided with means for marking or patterning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/26Moulds
    • B29C45/263Moulds with mould wall parts provided with fine grooves or impressions, e.g. for record discs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/026Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing of layered or coated substantially flat surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/10Moulds; Masks; Masterforms
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • G03F7/165Monolayers, e.g. Langmuir-Blodgett
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/10Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/85Arrangements for extracting light from the devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/85Arrangements for extracting light from the devices
    • H10K50/858Arrangements for extracting light from the devices comprising refractive means, e.g. lenses
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10P76/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842Manufacturing moulds, e.g. shaping the mould surface by machining
    • B29C2033/385Manufacturing moulds, e.g. shaping the mould surface by machining by laminating a plurality of layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023Microembossing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842Manufacturing moulds, e.g. shaping the mould surface by machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/0058Liquid or visquous
    • B29K2105/0061Gel or sol
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2825/00Use of polymers of vinyl-aromatic compounds or derivatives thereof as mould material
    • B29K2825/04Polymers of styrene
    • B29K2825/08Copolymers of styrene, e.g. AS or SAN, i.e. acrylonitrile styrene
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2833/00Use of polymers of unsaturated acids or derivatives thereof as mould material
    • B29K2833/04Polymers of esters
    • B29K2833/12Polymers of methacrylic acid esters, e.g. PMMA, i.e. polymethylmethacrylate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00Optical elements, e.g. lenses, prisms

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electroluminescent Light Sources (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Photovoltaic Devices (AREA)
IN9101DEN2014 2012-04-26 2013-03-19 IN2014DN09101A (enExample)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012101065 2012-04-26
PCT/JP2013/057851 WO2013161454A1 (ja) 2012-04-26 2013-03-19 微細パターン転写用のモールドの製造方法及びそれを用いた凹凸構造を有する基板の製造方法、並びに該凹凸構造を有する基板を有する有機el素子の製造方法

Publications (1)

Publication Number Publication Date
IN2014DN09101A true IN2014DN09101A (enExample) 2015-05-22

Family

ID=49482791

Family Applications (1)

Application Number Title Priority Date Filing Date
IN9101DEN2014 IN2014DN09101A (enExample) 2012-04-26 2013-03-19

Country Status (10)

Country Link
US (1) US20150028325A1 (enExample)
EP (1) EP2842721B1 (enExample)
JP (1) JP5695799B2 (enExample)
KR (1) KR20140106704A (enExample)
CN (1) CN104254438B (enExample)
AU (1) AU2013253941B2 (enExample)
CA (1) CA2870426C (enExample)
IN (1) IN2014DN09101A (enExample)
TW (1) TWI574812B (enExample)
WO (1) WO2013161454A1 (enExample)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2966669A4 (en) * 2013-03-06 2016-11-09 Jx Nippon Oil & Energy Corp METHOD FOR PRODUCING AN ELEMENT WITH RELIEF STRUCTURE AND RELATED STRUCTURE ELEMENT PRODUCED THEREWITH
WO2015075833A1 (ja) * 2013-11-25 2015-05-28 東京エレクトロン株式会社 パターン形成方法及び加熱装置
WO2015098401A1 (ja) 2013-12-27 2015-07-02 Jx日鉱日石エネルギー株式会社 発光素子
KR20160138419A (ko) * 2014-03-26 2016-12-05 제이엑스 에네루기 가부시키가이샤 에피택셜 성장용 기판 및 이것을 사용한 발광 소자
JP6438678B2 (ja) * 2014-05-14 2018-12-19 Jxtgエネルギー株式会社 凹凸構造を有するフィルム部材
JP6609402B2 (ja) * 2014-06-19 2019-11-20 デクセリアルズ株式会社 光学フィルム及びその製造方法
KR101499123B1 (ko) * 2014-07-04 2015-03-06 고려대학교 산학협력단 태양전지용 유리기판 텍스처링 방법
CA2956592A1 (en) * 2014-08-04 2016-02-11 Jx Nippon Oil & Energy Corporation Method for manufacturing member having irregular pattern
TWI556002B (zh) * 2014-08-05 2016-11-01 群創光電股份有限公司 抗反射結構及電子裝置
CN107073758B (zh) * 2014-09-29 2019-05-03 微非特有限公司 微型半球阵列板的制备方法、包括微型半球阵列板的微流器件及利用微流器件的细胞集合体的培养方法
JP6471447B2 (ja) * 2014-10-02 2019-02-20 大日本印刷株式会社 ワイヤーグリッド偏光子の製造用部材の修正方法とワイヤーグリッド偏光子の製造方法および露光方法
DE102016200793B4 (de) * 2015-02-11 2024-04-04 Heidelberger Druckmaschinen Ag Verfahren zum Herstellen einer Werkzeugplatte zum Bearbeiten von Bedruckstoff
JP2016201257A (ja) * 2015-04-10 2016-12-01 株式会社ジャパンディスプレイ 表示装置の製造方法
CN107533958B (zh) * 2015-05-13 2021-08-27 凸版印刷株式会社 凹凸图案形成体的制造方法、其制造装置以及贴纸
JP2016219341A (ja) * 2015-05-25 2016-12-22 Jxエネルギー株式会社 発光素子
WO2017074264A1 (en) * 2015-10-27 2017-05-04 Agency For Science, Technology And Research Nanoinjection molding
JP6784487B2 (ja) 2015-10-30 2020-11-11 デクセリアルズ株式会社 光学体、および表示装置
KR102222873B1 (ko) * 2016-06-05 2021-03-03 각코호진 오키나와가가쿠기쥬츠다이가쿠인 다이가쿠가쿠엔 제어된 핀홀 형성에 기반한 나노규모 패턴화 방법
KR102569627B1 (ko) * 2017-03-16 2023-08-22 위니베르시떼 덱스-마르세이유 나노임프린트 리소그래피 프로세스 및 그것으로부터 획득가능한 패터닝된 기재
JPWO2018181696A1 (ja) * 2017-03-30 2020-02-06 日本ゼオン株式会社 光学フィルム、その製造方法、偏光板、及び液晶表示装置
EP3388238A1 (en) * 2017-04-13 2018-10-17 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Carrier, use of a carrier, method of activating a carrier and method of making a carrier
TW201907183A (zh) 2017-05-19 2019-02-16 日商Jxtg能源股份有限公司 抗反射構件
KR20200010183A (ko) * 2017-05-31 2020-01-30 제이엑스티지 에네루기 가부시키가이샤 방담 부재
JP6918631B2 (ja) * 2017-08-18 2021-08-11 浜松ホトニクス株式会社 光検出素子
JP6393384B1 (ja) * 2017-10-06 2018-09-19 日本ペイント・オートモーティブコーティングス株式会社 防眩ハードコート層の形成方法
US12420456B2 (en) 2018-03-20 2025-09-23 Sharklet Technologies, Inc. Molds for manufacturing textured articles, methods of manufacturing thereof and articles manufactured therefrom
US11717991B2 (en) * 2018-03-20 2023-08-08 Sharklet Technologies, Inc. Molds for manufacturing textured articles, methods of manufacturing thereof and articles manufactured therefrom
WO2019230460A1 (ja) * 2018-05-30 2019-12-05 富士フイルム株式会社 パターン原盤、パターン原盤の製造方法、モールドの製造方法および基体の製造方法
TWI688832B (zh) * 2018-08-22 2020-03-21 鋆洤科技股份有限公司 精細金屬遮罩的製法
CN109597278A (zh) * 2019-02-01 2019-04-09 集美大学 光功能织构薄膜的压印装置及压印方法
US10482192B1 (en) * 2019-02-12 2019-11-19 SmileDirectClub LLC Systems and methods for selecting and marking a location on a dental aligner
WO2021079740A1 (ja) * 2019-10-21 2021-04-29 王子ホールディングス株式会社 三次元成形用フィルム、凹凸構造付き三次元構造体、その製造方法及び電鋳型の製造方法
KR102286438B1 (ko) * 2020-04-01 2021-08-05 연세대학교 산학협력단 패턴화된 금속 나노구 어레이층의 제조방법, 이를 포함하는 전자 소자의 제조방법 및 이에 의해 제조된 전자 소자
TWI726779B (zh) * 2020-07-29 2021-05-01 光群雷射科技股份有限公司 轉印滾輪的製造方法、及滾輪母膜與其製造方法
CN115256716A (zh) * 2021-04-30 2022-11-01 维达力实业(赤壁)有限公司 具有颗粒质感的模具和壳体、制备方法及应用
EP4119321A1 (en) * 2021-07-13 2023-01-18 Essilor International Method for fabricating microstructured inserts for injection molding
CN115723461B (zh) * 2021-08-30 2024-12-03 苏州苏大维格科技集团股份有限公司 一种光学转移材料及其制备方法
TWI876935B (zh) * 2024-03-19 2025-03-11 安可光電股份有限公司 金屬線偏光片的製作方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9028859B2 (en) * 2006-07-07 2015-05-12 Advanced Cardiovascular Systems, Inc. Phase-separated block copolymer coatings for implantable medical devices
CN101205054B (zh) * 2007-12-11 2011-03-30 山东大学 一种微型金属镍模具制作方法
JP2010017865A (ja) 2008-07-08 2010-01-28 Fuji Electric Device Technology Co Ltd ナノインプリント用モールドの製造方法
JP4654279B2 (ja) 2008-08-28 2011-03-16 株式会社日立製作所 微細構造を有する高分子薄膜およびパターン基板の製造方法
WO2011007878A1 (ja) * 2009-07-16 2011-01-20 Jx日鉱日石エネルギー株式会社 回折格子及びそれを用いた有機el素子、並びにそれらの製造方法
JP5484817B2 (ja) * 2009-08-04 2014-05-07 株式会社東芝 パターン形成方法及び半導体装置の製造方法
JP5394857B2 (ja) * 2009-08-27 2014-01-22 富士フイルム株式会社 高分子膜の製造方法
TW201143198A (en) * 2010-03-26 2011-12-01 Jx Nippon Oil & Amp Energy Corp Fuel cell system, reformer system, and method for driving fuel cell system
JP5322182B2 (ja) * 2010-05-14 2013-10-23 Jx日鉱日石エネルギー株式会社 有機el素子用のマイクロレンズ、それを用いた有機el素子、及びそれらの製造方法
JP5598970B2 (ja) * 2010-06-18 2014-10-01 凸版印刷株式会社 微細構造体の製造方法、複合体

Also Published As

Publication number Publication date
CA2870426A1 (en) 2013-10-31
CA2870426C (en) 2016-07-05
CN104254438A (zh) 2014-12-31
TWI574812B (zh) 2017-03-21
JP5695799B2 (ja) 2015-04-08
US20150028325A1 (en) 2015-01-29
CN104254438B (zh) 2016-11-09
AU2013253941A1 (en) 2014-11-27
AU2013253941B2 (en) 2015-09-17
EP2842721B1 (en) 2017-01-04
WO2013161454A1 (ja) 2013-10-31
EP2842721A4 (en) 2015-09-16
JPWO2013161454A1 (ja) 2015-12-24
TW201402297A (zh) 2014-01-16
EP2842721A1 (en) 2015-03-04
KR20140106704A (ko) 2014-09-03

Similar Documents

Publication Publication Date Title
IN2014DN09101A (enExample)
EA201390169A1 (ru) Способ получения материала, содержащего основу, снабженную покрытием
TW201130183A (en) Method of manufacturing high resolution organic thin film pattern
Lei et al. Highly ordered nanostructures with tunable size, shape and properties: A new way to surface nano-patterning using ultra-thin alumina masks
WO2017067813A3 (en) A method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle
EP2922083A3 (en) Plasma pre-clean process
PH12014502176A1 (en) Release film for ceramic green sheet production process
TW201614086A (en) Vapor deposition mask manufacturing method and organic semiconductor element manufacturing method
GB2496956B (en) Transparent conductor
IN2014CN02683A (enExample)
WO2012125481A3 (en) Thin film through-glass via and methods for forming same
WO2012047042A3 (ko) 미세 패턴 형성 방법 및 이를 이용한 미세 채널 트랜지스터 및 미세 채널 발광트랜지스터의 형성방법
MX354168B (es) Método para la manufactura de micro características de producto impreso y disposición para la producción continua de tal producto.
WO2012118947A3 (en) Apparatus and process for atomic layer deposition
MX2016008676A (es) Proceso para formar un producto de película integral.
GB201319526D0 (en) Method for producing transparent electrically conductive film laminates and transparent electrically conductive film laminate
TW201713184A (en) Three-dimensional wiring board production method, three-dimensional wiring board, and substrate for three-dimensional wiring board
WO2013015648A3 (en) Method of manufacturing mold for nano imprint
PL412520A1 (pl) Sposób wytwarzania folii grafenowej o zadanej liczbie warstw grafenu
WO2012177102A3 (ko) 탄소나노튜브필름 제조 방법
JP2013254783A5 (enExample)
FR2968241B1 (fr) Procede de fabrication d'un article permettant l'apposition d'un film
EP2983043A3 (en) Mask for photolithography; method of manufacturing the same and method of manufacturing substrate using the same
WO2013010111A3 (en) Nanoimprint lithography
WO2010093622A3 (en) Substrate for semiconductor device and method for its manufacture