IL116414A - Esterified styrene/maleic anhydride polymer photoimageable compositions containing said polymer and a method of forming a resist pattern on a substrate surface - Google Patents

Esterified styrene/maleic anhydride polymer photoimageable compositions containing said polymer and a method of forming a resist pattern on a substrate surface

Info

Publication number
IL116414A
IL116414A IL11641495A IL11641495A IL116414A IL 116414 A IL116414 A IL 116414A IL 11641495 A IL11641495 A IL 11641495A IL 11641495 A IL11641495 A IL 11641495A IL 116414 A IL116414 A IL 116414A
Authority
IL
Israel
Prior art keywords
polymer
mole percent
maleic anhydride
photoimageable
forming
Prior art date
Application number
IL11641495A
Other languages
English (en)
Other versions
IL116414A0 (en
Original Assignee
Morton Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/386,974 external-priority patent/US5576145A/en
Application filed by Morton Int Inc filed Critical Morton Int Inc
Publication of IL116414A0 publication Critical patent/IL116414A0/xx
Publication of IL116414A publication Critical patent/IL116414A/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F8/00—Chemical modification by after-treatment
    • C08F8/14—Esterification
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2810/00—Chemical modification of a polymer
    • C08F2810/20—Chemical modification of a polymer leading to a crosslinking, either explicitly or inherently
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2810/00—Chemical modification of a polymer
    • C08F2810/30—Chemical modification of a polymer leading to the formation or introduction of aliphatic or alicyclic unsaturated groups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
IL11641495A 1995-02-10 1995-12-15 Esterified styrene/maleic anhydride polymer photoimageable compositions containing said polymer and a method of forming a resist pattern on a substrate surface IL116414A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/386,974 US5576145A (en) 1995-02-10 1995-02-10 Esterified styrene/maleic anhydride polymer and polymer-containing photoimageable composition having improved alkaline process resistance
US08/510,836 US5609991A (en) 1995-02-10 1995-08-03 Photoimageable composition having improved alkaline process resistance and tack-free surface for contact imaging

Publications (2)

Publication Number Publication Date
IL116414A0 IL116414A0 (en) 1996-03-31
IL116414A true IL116414A (en) 2000-09-28

Family

ID=27011686

Family Applications (1)

Application Number Title Priority Date Filing Date
IL11641495A IL116414A (en) 1995-02-10 1995-12-15 Esterified styrene/maleic anhydride polymer photoimageable compositions containing said polymer and a method of forming a resist pattern on a substrate surface

Country Status (13)

Country Link
US (2) US5609991A (zh)
EP (1) EP0726499B1 (zh)
JP (1) JP2950770B2 (zh)
KR (1) KR0169207B1 (zh)
CN (1) CN1087080C (zh)
AT (1) ATE171284T1 (zh)
AU (1) AU677537B2 (zh)
BR (1) BR9600360A (zh)
CA (1) CA2166177C (zh)
DE (1) DE69600644T2 (zh)
ES (1) ES2123320T3 (zh)
HK (1) HK1005153A1 (zh)
IL (1) IL116414A (zh)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW353158B (en) * 1994-03-09 1999-02-21 Nat Starch Chem Invest Aqueous photoresist composition, method for preparing the same and circuit board comprising thereof
US5576145A (en) * 1995-02-10 1996-11-19 Morton International, Inc. Esterified styrene/maleic anhydride polymer and polymer-containing photoimageable composition having improved alkaline process resistance
US5609991A (en) * 1995-02-10 1997-03-11 Morton International, Inc. Photoimageable composition having improved alkaline process resistance and tack-free surface for contact imaging
US6066435A (en) * 1997-06-02 2000-05-23 Ciba Specialty Chemicals Corp. Liquid photosensitive composition
US5922522A (en) * 1998-04-29 1999-07-13 Morton International, Inc. Aqueous developing solutions for reduced developer residue
US6063550A (en) * 1998-04-29 2000-05-16 Morton International, Inc. Aqueous developing solutions for reduced developer residue
JP2000047381A (ja) * 1998-07-02 2000-02-18 Morton Internatl Inc ソルダ―マスクを形成するための１パ―ト型光画像形成性組成物
US6248506B1 (en) 1998-12-04 2001-06-19 Nichigo-Morton Aqueous developing solutions for reduced developer residue
IL133218A0 (en) * 1998-12-11 2001-03-19 Shipley Co Llc Photoimageable compositions having improved chemical resistance and stripping ability
US6045973A (en) * 1998-12-11 2000-04-04 Morton International, Inc. Photoimageable compositions having improved chemical resistance and stripping ability
CN1445248A (zh) * 2002-02-15 2003-10-01 希普雷公司 官能化聚合物
WO2010129918A1 (en) 2009-05-07 2010-11-11 Regents Of The University Of Minnesota Triptolide prodrugs
US9150600B2 (en) 2009-05-07 2015-10-06 Regents Of The University Of Minnesota Triptolide prodrugs
CN102549498B (zh) * 2009-09-25 2013-10-30 旭化成电子材料株式会社 抗蚀材料用感光性树脂组合物以及感光性树脂层压体

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US3707521A (en) * 1970-03-05 1972-12-26 Essex Chemical Corp Polyurethane sealant-primer system isocyanate-reactive surface primer composition for polyurethane sealants
US3779794A (en) * 1970-03-05 1973-12-18 Essex Chemical Corp Polyurethane sealant-primer system
US3953309A (en) * 1972-12-14 1976-04-27 Dynachem Corporation Polymerization compositions and processes having polymeric binding agents
JPS5753587B2 (zh) * 1974-08-05 1982-11-13
US4273857A (en) * 1976-01-30 1981-06-16 E. I. Du Pont De Nemours And Company Polymeric binders for aqueous processable photopolymer compositions
US4092443A (en) * 1976-02-19 1978-05-30 Ciba-Geigy Corporation Method for making reinforced composites
NL7800122A (nl) * 1978-01-05 1979-07-09 Philips Nv Magnetische registratieband en drager voor een magnetische registratieband.
US4176212A (en) * 1978-01-25 1979-11-27 Design Cote Corporation Radiation and moisture curable compositions and method of use
US4359549A (en) * 1980-04-14 1982-11-16 Basf Wyandotte Corporation Polyurethane sealant compositions
US4293635A (en) * 1980-05-27 1981-10-06 E. I. Du Pont De Nemours And Company Photopolymerizable composition with polymeric binder
US4444976A (en) * 1982-12-20 1984-04-24 The Goodyear Tire & Rubber Company Sag resistant two component adhesive and sealant
DE3420425A1 (de) * 1984-06-01 1985-12-05 Hoechst Ag, 6230 Frankfurt Photopolymerisierbares gemisch, das als photoinitiator ein 1,3,10-triazaanthracen-4-on- enthaelt
US4722947A (en) * 1985-08-05 1988-02-02 Pony Industries, Inc. Production of radiation curable partial esters of anhydride-containing copolymers
JPS62158710A (ja) * 1986-01-08 1987-07-14 Ube Ind Ltd 光硬化性組成物
JPS63123038A (ja) * 1986-11-12 1988-05-26 Nitto Electric Ind Co Ltd 画像形成材料
US5364736A (en) * 1987-12-07 1994-11-15 Morton International, Inc. Photoimageable compositions
US4889790A (en) * 1988-02-26 1989-12-26 Morton Thiokol, Inc. Method of forming a conformable mask on a printed circuit board
US5164284A (en) * 1988-02-26 1992-11-17 Morton International, Inc. Method of application of a conforming mask to a printed circuit board
US4992354A (en) * 1988-02-26 1991-02-12 Morton International, Inc. Dry film photoresist for forming a conformable mask and method of application to a printed circuit board or the like
DE3814567A1 (de) * 1988-04-29 1989-11-09 Du Pont Deutschland Photopolymerisierbare zusammensetzungen mit carboxylgruppen enthaltenden bindemitteln
JPH0247661A (ja) * 1988-08-09 1990-02-16 Fuji Photo Film Co Ltd 電子写真感光体
JPH0247658A (ja) * 1988-08-10 1990-02-16 Mitsubishi Kasei Corp 光重合性組成物
JPH0299956A (ja) * 1988-10-06 1990-04-11 Matsushita Electric Ind Co Ltd パターン形成用コントラストエンハンスト材料
JPH02103049A (ja) * 1988-10-12 1990-04-16 Tosoh Corp フォトレジスト組成物
US5229252A (en) * 1989-06-09 1993-07-20 Morton International, Inc. Photoimageable compositions
JPH04136857A (ja) * 1990-09-28 1992-05-11 Hitachi Ltd 光硬化性レジスト組成物およびこれを用いたプリント回路板の製造方法およびプリント回路板
JPH04153657A (ja) * 1990-10-18 1992-05-27 Nippon Kayaku Co Ltd カラーフィルター形成用の光重合性組成物
DE4133086A1 (de) * 1991-09-30 1993-05-13 Inst Technologie Der Polymere Fotopolymerisierbares material
US5270146A (en) * 1992-04-07 1993-12-14 Morton International, Inc. Photosensitive laminate having dual intermediate layers
CA2090099C (en) * 1992-05-15 1997-01-14 James Rath Method of forming a multilayer printed circuit board and product thereof
US5296334A (en) * 1992-08-28 1994-03-22 Macdermid, Incorporated Radiation-curable composition useful for preparation of solder masks
GB2273366B (en) * 1992-11-18 1996-03-27 Du Pont Forming images on radiation-sensitive plates
JP2877659B2 (ja) * 1993-05-10 1999-03-31 日本化薬株式会社 レジストインキ組成物及びその硬化物
JPH075302A (ja) * 1993-06-15 1995-01-10 Tosoh Corp マイクロ集光レンズ形成用感光性組成物
US5609991A (en) * 1995-02-10 1997-03-11 Morton International, Inc. Photoimageable composition having improved alkaline process resistance and tack-free surface for contact imaging
US5576145A (en) * 1995-02-10 1996-11-19 Morton International, Inc. Esterified styrene/maleic anhydride polymer and polymer-containing photoimageable composition having improved alkaline process resistance

Also Published As

Publication number Publication date
ES2123320T3 (es) 1999-01-01
CN1087080C (zh) 2002-07-03
BR9600360A (pt) 1998-01-27
US5609991A (en) 1997-03-11
JP2950770B2 (ja) 1999-09-20
ATE171284T1 (de) 1998-10-15
DE69600644T2 (de) 1999-02-11
MX9600240A (es) 1998-06-28
IL116414A0 (en) 1996-03-31
EP0726499B1 (en) 1998-09-16
CA2166177A1 (en) 1996-08-11
KR0169207B1 (ko) 1999-03-20
CA2166177C (en) 1998-12-08
AU677537B2 (en) 1997-04-24
DE69600644D1 (de) 1998-10-22
HK1005153A1 (en) 1998-12-24
US5698376A (en) 1997-12-16
KR960031490A (ko) 1996-09-17
EP0726499A1 (en) 1996-08-14
JPH08248634A (ja) 1996-09-27
AU4229496A (en) 1996-08-22
CN1135611A (zh) 1996-11-13

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