MX9600240A - Polimero de estireno esterificado/anhidrido maleico y composicion formadora de fotoimagen que contiene polimero que tiene resistencia mejorada al procedimiento alcalino. - Google Patents

Polimero de estireno esterificado/anhidrido maleico y composicion formadora de fotoimagen que contiene polimero que tiene resistencia mejorada al procedimiento alcalino.

Info

Publication number
MX9600240A
MX9600240A MX9600240A MX9600240A MX9600240A MX 9600240 A MX9600240 A MX 9600240A MX 9600240 A MX9600240 A MX 9600240A MX 9600240 A MX9600240 A MX 9600240A MX 9600240 A MX9600240 A MX 9600240A
Authority
MX
Mexico
Prior art keywords
polymer
mole percent
percent
maleic anhydride
styrene
Prior art date
Application number
MX9600240A
Other languages
English (en)
Other versions
MXPA96000240A (es
Inventor
James J Briguglio
Charles R Keil
Vinai Ming Tara
Edward J Reardon Jr
Randall W Kautz
Original Assignee
Morton Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/386,974 external-priority patent/US5576145A/en
Application filed by Morton Int Inc filed Critical Morton Int Inc
Publication of MX9600240A publication Critical patent/MX9600240A/es
Publication of MXPA96000240A publication Critical patent/MXPA96000240A/es

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F8/00Chemical modification by after-treatment
    • C08F8/14Esterification
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2810/00Chemical modification of a polymer
    • C08F2810/20Chemical modification of a polymer leading to a crosslinking, either explicitly or inherently
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2810/00Chemical modification of a polymer
    • C08F2810/30Chemical modification of a polymer leading to the formation or introduction of aliphatic or alicyclic unsaturated groups

Abstract

Una composicion de formacion de fotoimagen, util como un fotorresistente para formar un tablero de circuito impreso, es tanto revelable en acuoso alcalino pero, después de la exposicion y revelado, es procesable en ambientes altamente alcalinos, tales como aditivo de baños de chapado y grabadores amoniacales. La composicion de formacion de fotoimagen comprende (A) entre alrededor de 25 y aproximadamente 75% en peso de un polímero aglutinante, (B) entre alrededor de 20 y aproximadamente 60% en peso de un material fotopolimerizable que es un monomero fotopolimerizable multifuncional u oligomero de cadena corta y, (C) entre alrededor de 2 y aproximadamente 20% en peso de un sistema químico fotoiniciador, los porcentajes en peso estando basados en el peso total de los componentes (A)-(C). La mejora es el uso en la composicion de formacion de fotoimagen de un polímero aglutinante (A) que es un copolímero de estireno/anhidro maleico en el que los residuos de anhídrido maleico son monoesterificados de entre alrededor de 50 y aproximadamente 65 por ciento molar de un alcohol de alquilo, arilo, cicloalquilo, alcarilo o arilalquilo que tiene un peso molecular mayor de 100, a entre alrededor de 15 y aproximadamente 50 porciento molar de un alcohol de C1-C3, y por los menos aproximadamente 80 por ciento molar total. El polímero tiene entre alrededor de 45 y aproximadamente 65 por ciento molar de residuos de estireno y entre alrededor de 35 y aproximadamente 55 por ciento molar de residuos de anhídrido maleico, un peso molecular promedio en peso de entre alrededor de 80,000 y aproximadamente 200,000, y un numero ácido de entre alrededor de 170 y aproximadamente 220.
MXPA/A/1996/000240A 1995-02-10 1996-01-15 Polimero de estireno esterificado/anhidrido maleico y composicion formadora de fotoimagen que contiene polimero que tiene resistencia mejorada al procedimiento alcalino MXPA96000240A (es)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US08/386,974 US5576145A (en) 1995-02-10 1995-02-10 Esterified styrene/maleic anhydride polymer and polymer-containing photoimageable composition having improved alkaline process resistance
US08386974 1995-02-10
US08/510,836 US5609991A (en) 1995-02-10 1995-08-03 Photoimageable composition having improved alkaline process resistance and tack-free surface for contact imaging
US08510836 1995-08-03

Publications (2)

Publication Number Publication Date
MX9600240A true MX9600240A (es) 1998-06-28
MXPA96000240A MXPA96000240A (es) 1998-10-30

Family

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Also Published As

Publication number Publication date
IL116414A (en) 2000-09-28
AU677537B2 (en) 1997-04-24
DE69600644D1 (de) 1998-10-22
CA2166177C (en) 1998-12-08
JP2950770B2 (ja) 1999-09-20
IL116414A0 (en) 1996-03-31
CN1135611A (zh) 1996-11-13
US5698376A (en) 1997-12-16
CA2166177A1 (en) 1996-08-11
US5609991A (en) 1997-03-11
EP0726499A1 (en) 1996-08-14
BR9600360A (pt) 1998-01-27
KR960031490A (ko) 1996-09-17
ATE171284T1 (de) 1998-10-15
HK1005153A1 (en) 1998-12-24
KR0169207B1 (ko) 1999-03-20
ES2123320T3 (es) 1999-01-01
AU4229496A (en) 1996-08-22
DE69600644T2 (de) 1999-02-11
JPH08248634A (ja) 1996-09-27
CN1087080C (zh) 2002-07-03
EP0726499B1 (en) 1998-09-16

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