ID27122A - Bubur pemoles mekanik kimia yang berguna untuk substrat tembaga - Google Patents

Bubur pemoles mekanik kimia yang berguna untuk substrat tembaga

Info

Publication number
ID27122A
ID27122A IDW20002093A ID20002093A ID27122A ID 27122 A ID27122 A ID 27122A ID W20002093 A IDW20002093 A ID W20002093A ID 20002093 A ID20002093 A ID 20002093A ID 27122 A ID27122 A ID 27122A
Authority
ID
Indonesia
Prior art keywords
bubur
chemical mechanical
copper substrates
users
policy users
Prior art date
Application number
IDW20002093A
Other languages
English (en)
Indonesian (id)
Inventor
Vlasta Brusic Kaufman
Rodney C Kistler
Shumin Wang
Original Assignee
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Microelectronics Corp filed Critical Cabot Microelectronics Corp
Publication of ID27122A publication Critical patent/ID27122A/id

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Weting (AREA)
IDW20002093A 1998-03-18 1999-03-18 Bubur pemoles mekanik kimia yang berguna untuk substrat tembaga ID27122A (id)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/040,630 US6432828B2 (en) 1998-03-18 1998-03-18 Chemical mechanical polishing slurry useful for copper substrates

Publications (1)

Publication Number Publication Date
ID27122A true ID27122A (id) 2001-03-01

Family

ID=21912052

Family Applications (1)

Application Number Title Priority Date Filing Date
IDW20002093A ID27122A (id) 1998-03-18 1999-03-18 Bubur pemoles mekanik kimia yang berguna untuk substrat tembaga

Country Status (12)

Country Link
US (3) US6432828B2 (de)
EP (1) EP1064338B1 (de)
JP (3) JP2002506915A (de)
KR (1) KR100594561B1 (de)
CN (1) CN1157450C (de)
AU (1) AU3100499A (de)
CA (1) CA2324151A1 (de)
DE (1) DE69933015T2 (de)
ID (1) ID27122A (de)
IL (1) IL138483A0 (de)
TW (1) TWI256966B (de)
WO (1) WO1999047618A1 (de)

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Publication number Publication date
US20040009671A1 (en) 2004-01-15
JP2002506915A (ja) 2002-03-05
US7381648B2 (en) 2008-06-03
EP1064338B1 (de) 2006-08-30
EP1064338A1 (de) 2001-01-03
IL138483A0 (en) 2001-10-31
CN1157450C (zh) 2004-07-14
JP2007150341A (ja) 2007-06-14
KR100594561B1 (ko) 2006-06-30
DE69933015D1 (de) 2006-10-12
TWI256966B (en) 2006-06-21
CA2324151A1 (en) 1999-09-23
US6432828B2 (en) 2002-08-13
DE69933015T2 (de) 2006-12-14
JP5539934B2 (ja) 2014-07-02
US6620037B2 (en) 2003-09-16
WO1999047618A1 (en) 1999-09-23
CN1301288A (zh) 2001-06-27
JP2012004588A (ja) 2012-01-05
AU3100499A (en) 1999-10-11
KR20010041962A (ko) 2001-05-25
US20020168923A1 (en) 2002-11-14
US20010049910A1 (en) 2001-12-13

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