HK1143023A1 - Compression bonding device, compression bonding method, package and pressurizing plate - Google Patents

Compression bonding device, compression bonding method, package and pressurizing plate

Info

Publication number
HK1143023A1
HK1143023A1 HK10109179.2A HK10109179A HK1143023A1 HK 1143023 A1 HK1143023 A1 HK 1143023A1 HK 10109179 A HK10109179 A HK 10109179A HK 1143023 A1 HK1143023 A1 HK 1143023A1
Authority
HK
Hong Kong
Prior art keywords
compression bonding
pressurizing section
package
substrate
pressurizing plate
Prior art date
Application number
HK10109179.2A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of HK1143023A1 publication Critical patent/HK1143023A1/xx

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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • HELECTRICITY
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    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/303Surface mounted components, e.g. affixing before soldering, aligning means, spacing means
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    • Y10T29/00Metal working
    • Y10T29/53Means to assemble or disassemble
    • Y10T29/5313Means to assemble electrical device
    • Y10T29/53174Means to fasten electrical component to wiring board, base, or substrate

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
  • Combinations Of Printed Boards (AREA)
HK10109179.2A 2008-08-08 2010-09-26 Compression bonding device, compression bonding method, package and pressurizing plate HK1143023A1 (en)

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JP2008206217 2008-08-08
JP2008242946A JP4916494B2 (ja) 2008-08-08 2008-09-22 圧着装置、圧着方法、および押圧板
PCT/JP2009/001901 WO2010016170A1 (ja) 2008-08-08 2009-04-24 圧着装置、圧着方法、実装体および押圧板

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011109046A (ja) * 2009-11-20 2011-06-02 Sony Chemical & Information Device Corp 実装装置および電子モジュールの製造方法
JP6041463B2 (ja) * 2009-12-25 2016-12-07 デクセリアルズ株式会社 エポキシ樹脂組成物及びそれを用いた接合体の製造方法、並びに接合体
DE102010039749A1 (de) * 2010-08-25 2012-03-01 Robert Bosch Gmbh Verfahren zur Bestückung einer Leiterplatte mit mehreren Bauteilen und elektrische Schaltung mit einer Leiterplatte und darauf montierten mehreren Bauteilen
CN112863732B (zh) * 2014-10-29 2023-01-17 迪睿合株式会社 连接结构体的制造方法、连接结构体以及导电材料
TWI581942B (zh) 2015-04-08 2017-05-11 韋僑科技股份有限公司 跨橋裝置與系統及其軟性電路元件跨橋方法
TWI681701B (zh) * 2018-09-03 2020-01-01 活躍科技股份有限公司 節能式壓板機
CN109335675A (zh) * 2018-11-09 2019-02-15 东莞市若渝电子科技有限公司 自动贴球顶机及其工作方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3529117A (en) * 1969-09-11 1970-09-15 Argus Eng Co Soldering apparatus
JPH0690099A (ja) * 1992-06-09 1994-03-29 Ibiden Co Ltd 基板支持用治具
US5414298A (en) * 1993-03-26 1995-05-09 Tessera, Inc. Semiconductor chip assemblies and components with pressure contact
JPH08146451A (ja) * 1994-11-16 1996-06-07 Sony Corp 回路装置の製造装置
JPH10150297A (ja) * 1996-11-18 1998-06-02 Toyo Commun Equip Co Ltd 電子部品装着用サポート治具
JP2002017519A (ja) * 2000-07-06 2002-01-22 Toyo Tire & Rubber Co Ltd 均圧マット
JP2004322490A (ja) * 2003-04-25 2004-11-18 Konica Minolta Photo Imaging Inc 積層体の製造方法及び積層体の製造装置
JP3921459B2 (ja) * 2003-07-11 2007-05-30 ソニーケミカル&インフォメーションデバイス株式会社 電気部品の実装方法及び実装装置
JP4274126B2 (ja) * 2005-01-18 2009-06-03 パナソニック株式会社 圧着装置および圧着方法
WO2006082744A1 (ja) * 2005-02-02 2006-08-10 Sony Chemical & Information Device Corporation 電気部品の実装装置
CN1307699C (zh) * 2005-03-14 2007-03-28 西安交通大学 基于压接互连技术的电力电子集成模块的制备方法
JP4925669B2 (ja) 2006-01-13 2012-05-09 ソニーケミカル&インフォメーションデバイス株式会社 圧着装置及び実装方法
JP4832107B2 (ja) 2006-02-23 2011-12-07 ソニーケミカル&インフォメーションデバイス株式会社 実装方法
JP2007294607A (ja) * 2006-04-24 2007-11-08 Sony Chemical & Information Device Corp 押圧ヘッド及び押圧装置
JP2008206217A (ja) 2007-02-16 2008-09-04 Yaskawa Electric Corp 半導体スイッチング素子の寿命監視回路を有する半導体電力変換装置
JP2008242946A (ja) 2007-03-28 2008-10-09 Toshiba Corp 電子機器およびキー押下判定方法

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JP4916494B2 (ja) 2012-04-11
EP2309834A1 (en) 2011-04-13
CN101810067A (zh) 2010-08-18
EP2309834B1 (en) 2015-02-25
US8296939B2 (en) 2012-10-30
JP2010062504A (ja) 2010-03-18
TW201018329A (en) 2010-05-01
EP2309834A4 (en) 2011-09-14
WO2010016170A1 (ja) 2010-02-11
US20100085723A1 (en) 2010-04-08
CN101810067B (zh) 2013-07-10
TWI436700B (zh) 2014-05-01
KR20110039510A (ko) 2011-04-19

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