GB770753A - Improvements in or relating to apparatus for the vaporisation of metals and metalloids - Google Patents
Improvements in or relating to apparatus for the vaporisation of metals and metalloidsInfo
- Publication number
- GB770753A GB770753A GB35750/53A GB3575053A GB770753A GB 770753 A GB770753 A GB 770753A GB 35750/53 A GB35750/53 A GB 35750/53A GB 3575053 A GB3575053 A GB 3575053A GB 770753 A GB770753 A GB 770753A
- Authority
- GB
- United Kingdom
- Prior art keywords
- block
- cavity
- heater
- space
- metalloids
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 title abstract 3
- 239000002184 metal Substances 0.000 title abstract 3
- 229910052752 metalloid Inorganic materials 0.000 title abstract 2
- 150000002738 metalloids Chemical class 0.000 title abstract 2
- 150000002739 metals Chemical class 0.000 title abstract 2
- 238000009834 vaporization Methods 0.000 title 1
- 229910052799 carbon Inorganic materials 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- -1 aluminium Chemical class 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 150000001721 carbon Chemical class 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000006698 induction Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 abstract 1
- 230000008016 vaporization Effects 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
770,753. Coating by vapour deposition. EDWARDS & CO. (LONDON), Ltd., W. Dec. 23, 1953 [Dec. 31, 1952; Sept. 18, 1953], Nos. 35750/53 and 25887/53. Divided out of 770,751. Class 82(2) [Also in Group XI] An apparatus for vaporizing metals and metalloids, e.g. aluminium, comprises an electrically heated radiator element having a cavity therein, an evaporator base in the form of a block located in the cavity with a space between the walls of the cavity and the side and bottom surfaces of the block, such space being in direct communication with a space above the block and means for feeding the material continuously to the block. An additional heater may also be provided. The heater, Figs. 1 and 2, is in the form of a carbon or refractory carbide bar 10 of dumb-bell shape with an enlargement centrally having a cavity 11 in which is mounted the evaporator base 12. The latter is formed with lugs 13 and may be of tungsten carbide. Metal is fed to the block at 15. Alternatively, Fig. 3, the block has radial projections 14, and a refractory liner 16 is provided inside the cavity of the carbon heater. As a further alternative, high frequency induction heating may be used.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB33085/52A GB770751A (en) | 1952-12-31 | 1952-12-31 | Improvements in or relating to the vaporisation of aluminium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB770753A true GB770753A (en) | 1957-03-27 |
Family
ID=10348368
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB35750/53A Expired GB770753A (en) | 1952-12-31 | 1952-12-31 | Improvements in or relating to apparatus for the vaporisation of metals and metalloids |
| GB33085/52A Expired GB770751A (en) | 1952-12-31 | 1952-12-31 | Improvements in or relating to the vaporisation of aluminium |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB33085/52A Expired GB770751A (en) | 1952-12-31 | 1952-12-31 | Improvements in or relating to the vaporisation of aluminium |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US2772318A (en) |
| FR (1) | FR1156159A (en) |
| GB (2) | GB770753A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1238307B (en) * | 1960-03-05 | 1967-04-06 | Heraeus Gmbh W C | Method and device for operating an evaporator boat |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2899528A (en) * | 1959-08-11 | Method and apparatus for supplying | ||
| US2902525A (en) * | 1957-02-12 | 1959-09-01 | Edwards High Vacuum Ltd | Apparatus for vaporisation of metals and metalloids |
| DE1084100B (en) * | 1957-02-25 | 1960-06-23 | Edwards High Vacuum Ltd | Evaporation device for vacuum evaporation, especially with aluminum |
| US3063865A (en) * | 1957-06-03 | 1962-11-13 | Nat Steel Corp | Process of treating a boron nitride crucible with molten aluminum |
| US2962538A (en) * | 1958-01-30 | 1960-11-29 | Continental Can Co | Vaporizing heater for vacuum deposition and method of employing the same |
| US2996412A (en) * | 1958-10-10 | 1961-08-15 | Continental Can Co | Art of depositing metals |
| US3029777A (en) * | 1959-01-30 | 1962-04-17 | Nat Res Corp | Vapor deposition coating apparatus |
| US3086889A (en) * | 1960-03-21 | 1963-04-23 | Stokes F J Corp | Method and apparatus for coating a continuous sheet of material |
| US3153137A (en) * | 1961-10-13 | 1964-10-13 | Union Carbide Corp | Evaporation source |
| US3129315A (en) * | 1961-12-26 | 1964-04-14 | Lear Siegler Inc | Vacuum vaporizing fixture |
| US3281517A (en) * | 1963-11-19 | 1966-10-25 | Melpar Inc | Vacuum furnace |
| GB1103766A (en) * | 1964-04-30 | 1968-02-21 | Poudres Metalliques Alliages Speciaux Ugine Carbone | Improvements in or relating to vapourisation of metals and metalloids |
| US3328558A (en) * | 1964-09-30 | 1967-06-27 | Hy Cal Engineering | Thermal instrumentation apparatus |
| GB1169517A (en) * | 1966-09-30 | 1969-11-05 | Edwards High Vacuum Int Ltd | Apparatus for the Vaporisation of Metals or Metalloids. |
| US3514575A (en) * | 1967-08-10 | 1970-05-26 | Sylvania Electric Prod | Metal-evaporating source |
| US3572672A (en) * | 1968-11-22 | 1971-03-30 | Rca Corp | Vacuum evaporation apparatus |
| US3660585A (en) * | 1970-06-24 | 1972-05-02 | Robert D Waldron | Frozen shell metal melting means |
| US3864088A (en) * | 1973-03-06 | 1975-02-04 | Maihak Ag | Apparatus for determining the content of organic substances in water |
| FI55878C (en) * | 1976-04-28 | 1979-10-10 | Ahlstroem Oy | FOERFARANDE FOER BEHANDLING AV LIGNOCELLULOSAMATERIAL MED KLOR |
| CH626407A5 (en) * | 1977-07-08 | 1981-11-13 | Balzers Hochvakuum | |
| US4482799A (en) * | 1981-05-28 | 1984-11-13 | Gte Products Corporation | Evaporation heater |
| DE3632027C1 (en) * | 1986-09-20 | 1988-02-18 | Rudnay Andre Dr De | Process and vacuum vapor deposition system for metallizing foil surfaces |
| DE4124018C1 (en) * | 1991-07-19 | 1992-11-19 | Leybold Ag, 6450 Hanau, De |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL46111C (en) * | 1935-10-12 | |||
| GB505135A (en) * | 1937-03-25 | 1939-05-05 | Bernhard Berghaus | Improvements in and relating to the coating of articles by cathode disintegration |
| US2440135A (en) * | 1944-08-04 | 1948-04-20 | Alexander Paul | Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers |
| US2554902A (en) * | 1948-03-25 | 1951-05-29 | Nat Res Corp | Thermionic discharge device control |
| US2665320A (en) * | 1949-09-22 | 1954-01-05 | Nat Res Corp | Metal vaporizing crucible |
| US2665223A (en) * | 1949-12-31 | 1954-01-05 | Nat Res Corp | Process for depositing an aluminum film on a substrate by thermal vaporization |
| US2665229A (en) * | 1951-11-05 | 1954-01-05 | Nat Res Corp | Method of coating by vapor deposition |
| US2693521A (en) * | 1951-12-26 | 1954-11-02 | Alexander Vacuum Res Inc | Heater for vacuum metalizing apparatus |
-
1952
- 1952-12-31 GB GB35750/53A patent/GB770753A/en not_active Expired
- 1952-12-31 GB GB33085/52A patent/GB770751A/en not_active Expired
-
1953
- 1953-12-31 US US401667A patent/US2772318A/en not_active Expired - Lifetime
-
1956
- 1956-08-28 FR FR1156159D patent/FR1156159A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1238307B (en) * | 1960-03-05 | 1967-04-06 | Heraeus Gmbh W C | Method and device for operating an evaporator boat |
Also Published As
| Publication number | Publication date |
|---|---|
| GB770751A (en) | 1957-03-27 |
| US2772318A (en) | 1956-11-27 |
| FR1156159A (en) | 1958-05-13 |
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