FR1156159A - Apparatus for vaporizing metals and metalloids - Google Patents

Apparatus for vaporizing metals and metalloids

Info

Publication number
FR1156159A
FR1156159A FR1156159DA FR1156159A FR 1156159 A FR1156159 A FR 1156159A FR 1156159D A FR1156159D A FR 1156159DA FR 1156159 A FR1156159 A FR 1156159A
Authority
FR
France
Prior art keywords
metalloids
vaporizing metals
vaporizing
metals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum Ltd
Original Assignee
Edwards High Vacuum Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards High Vacuum Ltd filed Critical Edwards High Vacuum Ltd
Application granted granted Critical
Publication of FR1156159A publication Critical patent/FR1156159A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Carbon And Carbon Compounds (AREA)
FR1156159D 1952-12-31 1956-08-28 Apparatus for vaporizing metals and metalloids Expired FR1156159A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB33085/52A GB770751A (en) 1952-12-31 1952-12-31 Improvements in or relating to the vaporisation of aluminium

Publications (1)

Publication Number Publication Date
FR1156159A true FR1156159A (en) 1958-05-13

Family

ID=10348368

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1156159D Expired FR1156159A (en) 1952-12-31 1956-08-28 Apparatus for vaporizing metals and metalloids

Country Status (3)

Country Link
US (1) US2772318A (en)
FR (1) FR1156159A (en)
GB (2) GB770753A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396807A1 (en) * 1977-07-08 1979-02-02 Balzers Hochvakuum VACUUM EVAPORATION DEPOSIT INSTALLATION

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2899528A (en) * 1959-08-11 Method and apparatus for supplying
US2902525A (en) * 1957-02-12 1959-09-01 Edwards High Vacuum Ltd Apparatus for vaporisation of metals and metalloids
DE1084100B (en) * 1957-02-25 1960-06-23 Edwards High Vacuum Ltd Evaporation device for vacuum evaporation, especially with aluminum
US3063865A (en) * 1957-06-03 1962-11-13 Nat Steel Corp Process of treating a boron nitride crucible with molten aluminum
US2962538A (en) * 1958-01-30 1960-11-29 Continental Can Co Vaporizing heater for vacuum deposition and method of employing the same
US2996412A (en) * 1958-10-10 1961-08-15 Continental Can Co Art of depositing metals
US3029777A (en) * 1959-01-30 1962-04-17 Nat Res Corp Vapor deposition coating apparatus
DE1238307B (en) * 1960-03-05 1967-04-06 Heraeus Gmbh W C Method and device for operating an evaporator boat
US3086889A (en) * 1960-03-21 1963-04-23 Stokes F J Corp Method and apparatus for coating a continuous sheet of material
US3153137A (en) * 1961-10-13 1964-10-13 Union Carbide Corp Evaporation source
US3129315A (en) * 1961-12-26 1964-04-14 Lear Siegler Inc Vacuum vaporizing fixture
US3281517A (en) * 1963-11-19 1966-10-25 Melpar Inc Vacuum furnace
GB1103766A (en) * 1964-04-30 1968-02-21 Poudres Metalliques Alliages Speciaux Ugine Carbone Improvements in or relating to vapourisation of metals and metalloids
US3328558A (en) * 1964-09-30 1967-06-27 Hy Cal Engineering Thermal instrumentation apparatus
GB1169517A (en) * 1966-09-30 1969-11-05 Edwards High Vacuum Int Ltd Apparatus for the Vaporisation of Metals or Metalloids.
US3514575A (en) * 1967-08-10 1970-05-26 Sylvania Electric Prod Metal-evaporating source
US3572672A (en) * 1968-11-22 1971-03-30 Rca Corp Vacuum evaporation apparatus
US3660585A (en) * 1970-06-24 1972-05-02 Robert D Waldron Frozen shell metal melting means
US3864088A (en) * 1973-03-06 1975-02-04 Maihak Ag Apparatus for determining the content of organic substances in water
FI55878C (en) * 1976-04-28 1979-10-10 Ahlstroem Oy FOERFARANDE FOER BEHANDLING AV LIGNOCELLULOSAMATERIAL MED KLOR
US4482799A (en) * 1981-05-28 1984-11-13 Gte Products Corporation Evaporation heater
DE3632027C1 (en) * 1986-09-20 1988-02-18 Rudnay Andre Dr De Process and vacuum vapor deposition system for metallizing foil surfaces
DE4124018C1 (en) * 1991-07-19 1992-11-19 Leybold Ag, 6450 Hanau, De

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL46111C (en) * 1935-10-12
GB505135A (en) * 1937-03-25 1939-05-05 Bernhard Berghaus Improvements in and relating to the coating of articles by cathode disintegration
US2440135A (en) * 1944-08-04 1948-04-20 Alexander Paul Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers
US2554902A (en) * 1948-03-25 1951-05-29 Nat Res Corp Thermionic discharge device control
US2665320A (en) * 1949-09-22 1954-01-05 Nat Res Corp Metal vaporizing crucible
US2665223A (en) * 1949-12-31 1954-01-05 Nat Res Corp Process for depositing an aluminum film on a substrate by thermal vaporization
US2665229A (en) * 1951-11-05 1954-01-05 Nat Res Corp Method of coating by vapor deposition
US2693521A (en) * 1951-12-26 1954-11-02 Alexander Vacuum Res Inc Heater for vacuum metalizing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396807A1 (en) * 1977-07-08 1979-02-02 Balzers Hochvakuum VACUUM EVAPORATION DEPOSIT INSTALLATION

Also Published As

Publication number Publication date
GB770751A (en) 1957-03-27
US2772318A (en) 1956-11-27
GB770753A (en) 1957-03-27

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