GB1169517A - Apparatus for the Vaporisation of Metals or Metalloids. - Google Patents

Apparatus for the Vaporisation of Metals or Metalloids.

Info

Publication number
GB1169517A
GB1169517A GB43845/66A GB4384566A GB1169517A GB 1169517 A GB1169517 A GB 1169517A GB 43845/66 A GB43845/66 A GB 43845/66A GB 4384566 A GB4384566 A GB 4384566A GB 1169517 A GB1169517 A GB 1169517A
Authority
GB
United Kingdom
Prior art keywords
bar
sept
metalloids
metals
electrical resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB43845/66A
Inventor
Dennis Walter Barker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum International Ltd
Original Assignee
Edwards High Vacuum International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards High Vacuum International Ltd filed Critical Edwards High Vacuum International Ltd
Priority to GB43845/66A priority Critical patent/GB1169517A/en
Priority to DE1967E0034850 priority patent/DE1621240B1/en
Priority to US671771A priority patent/US3539769A/en
Publication of GB1169517A publication Critical patent/GB1169517A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Ceramic Products (AREA)

Abstract

1,169,517. Resistance heating. EDWARDS HIGH VACUUM INTERNATIONAL Ltd. 27 Sept., 1967 [30 Sept., 1966], No. 43845/66. Heading H5H. [Also in Division C7] Material to be evaporated in a vacuum is heated on base 2 both by electrical resistance heating of bar 2 and by radiation from the walls of a cavity over or within which the bar is placed. Preferably the bar 2 is a composite sintered product of titanium diboride and boron nitride, with end portions 4 which fit into slots in an electrical resistance heater 1, which may be a graphite element held in clamps 6 and fed with low-tension power through water-cooled electrodes 8. The bar 2 and the surrounding cavity may be made with basically rectangular shapes. Metalloids and metals uch as aluminium may be evaporated continuously and may be deposited as film on stationary or moving articles, such as plastics materials, metal sheets or paper.
GB43845/66A 1966-09-30 1966-09-30 Apparatus for the Vaporisation of Metals or Metalloids. Expired GB1169517A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB43845/66A GB1169517A (en) 1966-09-30 1966-09-30 Apparatus for the Vaporisation of Metals or Metalloids.
DE1967E0034850 DE1621240B1 (en) 1966-09-30 1967-09-28 DEVICE FOR EVAPORATING METALS OR METALLOIDS
US671771A US3539769A (en) 1966-09-30 1967-09-29 Apparatus for the vaporisation of metals or metalloids

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB43845/66A GB1169517A (en) 1966-09-30 1966-09-30 Apparatus for the Vaporisation of Metals or Metalloids.

Publications (1)

Publication Number Publication Date
GB1169517A true GB1169517A (en) 1969-11-05

Family

ID=10430560

Family Applications (1)

Application Number Title Priority Date Filing Date
GB43845/66A Expired GB1169517A (en) 1966-09-30 1966-09-30 Apparatus for the Vaporisation of Metals or Metalloids.

Country Status (3)

Country Link
US (1) US3539769A (en)
DE (1) DE1621240B1 (en)
GB (1) GB1169517A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3637980A (en) * 1970-07-13 1972-01-25 Motorola Inc Electrical and mechanical connections and support for evaporating boats
US5168543A (en) * 1991-04-05 1992-12-01 The Boeing Company Direct contact heater for vacuum evaporation utilizing thermal expansion compensation means

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4526840A (en) * 1983-02-11 1985-07-02 Gte Products Corporation Bar evaporation source having improved wettability
US5481086A (en) * 1994-08-09 1996-01-02 Dynamic Systems Inc. High temperature deformable crucible for use with self-resistively heated specimens
US5495550A (en) * 1994-09-28 1996-02-27 Advanced Ceramics Corporation Graphite flash evaporator having at least one intermediate layer and a pyrolytic boron nitride coating
US5493630A (en) * 1994-09-28 1996-02-20 Advanced Ceramics Corporation Pyrolytic boron nitride coated flash evaporator
RU2662914C2 (en) * 2016-07-26 2018-07-31 федеральное государственное автономное образовательное учреждение высшего образования "Самарский национальный исследовательский университет имени академика С.П. Королева" Dynamic evaporator of solid solutions

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB770751A (en) * 1952-12-31 1957-03-27 Edwards And Company London Ltd Improvements in or relating to the vaporisation of aluminium
US2903544A (en) * 1956-04-18 1959-09-08 Heraeus Gmbh W C Coating
US3234022A (en) * 1960-08-08 1966-02-08 Polaroid Corp Diffusion-transfer reversal processes and elements useful in such processes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3637980A (en) * 1970-07-13 1972-01-25 Motorola Inc Electrical and mechanical connections and support for evaporating boats
US5168543A (en) * 1991-04-05 1992-12-01 The Boeing Company Direct contact heater for vacuum evaporation utilizing thermal expansion compensation means

Also Published As

Publication number Publication date
DE1621240B1 (en) 1971-10-14
US3539769A (en) 1970-11-10

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