GB1103766A - Improvements in or relating to vapourisation of metals and metalloids - Google Patents

Improvements in or relating to vapourisation of metals and metalloids

Info

Publication number
GB1103766A
GB1103766A GB17963/64A GB1796364A GB1103766A GB 1103766 A GB1103766 A GB 1103766A GB 17963/64 A GB17963/64 A GB 17963/64A GB 1796364 A GB1796364 A GB 1796364A GB 1103766 A GB1103766 A GB 1103766A
Authority
GB
United Kingdom
Prior art keywords
metalloids
metals
vapourisation
relating
plug
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB17963/64A
Inventor
Alfred Hilliard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
POUDRES METALLIQUES ALLIAGES SPECIAUX UGINE CARBONE
Original Assignee
POUDRES METALLIQUES ALLIAGES SPECIAUX UGINE CARBONE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by POUDRES METALLIQUES ALLIAGES SPECIAUX UGINE CARBONE filed Critical POUDRES METALLIQUES ALLIAGES SPECIAUX UGINE CARBONE
Priority to GB17963/64A priority Critical patent/GB1103766A/en
Priority to US450730A priority patent/US3373260A/en
Priority to NL6505276A priority patent/NL6505276A/xx
Priority to DE19651521471 priority patent/DE1521471A1/en
Priority to FR15133A priority patent/FR1445545A/en
Publication of GB1103766A publication Critical patent/GB1103766A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Physical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

<PICT:1103766/C6-C7/1> An electric heater 10 for vaporizing metals and metalloids e.g. Al, Cr, Ni, and Si contains a recess 11 smaller at the top than at the bottom to receive a plug 13 above which the metal or metalloid is evaporated. The heater 10 may be of graphite, W, Mo or a refractory carbide, boride, nitride or oxide and the recess is trunco-conical but may be cylindrical at the bottom. The plug is of Ti diboride, Ta carbide or refractory nitride or oxide and may be cylindrical or cubic having a domed top provided with an annular depression.
GB17963/64A 1964-04-30 1964-04-30 Improvements in or relating to vapourisation of metals and metalloids Expired GB1103766A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB17963/64A GB1103766A (en) 1964-04-30 1964-04-30 Improvements in or relating to vapourisation of metals and metalloids
US450730A US3373260A (en) 1964-04-30 1965-04-26 Vaporization of metals and metalloids
NL6505276A NL6505276A (en) 1964-04-30 1965-04-26
DE19651521471 DE1521471A1 (en) 1964-04-30 1965-04-28 Process for plating objects by vapor deposition of metals or metalloids
FR15133A FR1445545A (en) 1964-04-30 1965-04-29 Improvements relating to the vaporization of metals and metalloids

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB17963/64A GB1103766A (en) 1964-04-30 1964-04-30 Improvements in or relating to vapourisation of metals and metalloids

Publications (1)

Publication Number Publication Date
GB1103766A true GB1103766A (en) 1968-02-21

Family

ID=10104281

Family Applications (1)

Application Number Title Priority Date Filing Date
GB17963/64A Expired GB1103766A (en) 1964-04-30 1964-04-30 Improvements in or relating to vapourisation of metals and metalloids

Country Status (5)

Country Link
US (1) US3373260A (en)
DE (1) DE1521471A1 (en)
FR (1) FR1445545A (en)
GB (1) GB1103766A (en)
NL (1) NL6505276A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2162681A (en) * 1984-06-08 1986-02-05 Philips Nv Electron emission devices and forming work function reducing layers thereon
DE10200909A1 (en) * 2002-01-12 2003-07-24 Applied Films Gmbh & Co Kg Evaporator boat for a device for coating substrates

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3514575A (en) * 1967-08-10 1970-05-26 Sylvania Electric Prod Metal-evaporating source
JPS5943873A (en) * 1982-09-04 1984-03-12 Konishiroku Photo Ind Co Ltd Vessel for storing material to be evaporated
FR2582319B1 (en) * 1985-05-22 1992-10-23 Barbier Benard & Turenne NICKEL DEPOSIT SYSTEM BY VACUUM EVAPORATION, PARTICULARLY FOR THE PREPARATION OF NEUTRON GUIDES
DE3632027C1 (en) * 1986-09-20 1988-02-18 Rudnay Andre Dr De Process and vacuum vapor deposition system for metallizing foil surfaces
DE102005027382B4 (en) * 2005-06-14 2010-01-28 Leybold Optics Gmbh Evaporator boat for a device for coating substrates

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB770751A (en) * 1952-12-31 1957-03-27 Edwards And Company London Ltd Improvements in or relating to the vaporisation of aluminium
US2793609A (en) * 1953-01-26 1957-05-28 British Dielectric Res Ltd Means for the deposition of materials by evaporation in a vacuum
US2902525A (en) * 1957-02-12 1959-09-01 Edwards High Vacuum Ltd Apparatus for vaporisation of metals and metalloids
US2940873A (en) * 1957-07-18 1960-06-14 Itt Method of increasing the thickness of fine mesh metal screens
US3057936A (en) * 1959-05-13 1962-10-09 Richard D Brew And Company Inc Electrical heating device
US3017851A (en) * 1959-12-21 1962-01-23 Bell Telephone Labor Inc Vapor deposition apparatus
US3271561A (en) * 1964-03-02 1966-09-06 Martin Marietta Corp Apparatus for thermally evaporating various materials in vacuums for producing thin films

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2162681A (en) * 1984-06-08 1986-02-05 Philips Nv Electron emission devices and forming work function reducing layers thereon
DE10200909A1 (en) * 2002-01-12 2003-07-24 Applied Films Gmbh & Co Kg Evaporator boat for a device for coating substrates

Also Published As

Publication number Publication date
US3373260A (en) 1968-03-12
DE1521471A1 (en) 1969-05-22
FR1445545A (en) 1966-07-15
NL6505276A (en) 1965-11-01

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