GB821518A - Improvements in or relating to the vaporisation of metals and metalloids - Google Patents

Improvements in or relating to the vaporisation of metals and metalloids

Info

Publication number
GB821518A
GB821518A GB24506/55A GB2450655A GB821518A GB 821518 A GB821518 A GB 821518A GB 24506/55 A GB24506/55 A GB 24506/55A GB 2450655 A GB2450655 A GB 2450655A GB 821518 A GB821518 A GB 821518A
Authority
GB
United Kingdom
Prior art keywords
block
vaporisation
metalloids
metals
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB24506/55A
Inventor
Dennis Walter Barker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum Ltd
Original Assignee
Edwards High Vacuum Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards High Vacuum Ltd filed Critical Edwards High Vacuum Ltd
Priority to GB24506/55A priority Critical patent/GB821518A/en
Publication of GB821518A publication Critical patent/GB821518A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A six flat-faced block of refractory material is used as an evaporator in vacuum vaporization apparatus. The block is preferably a cube of tantalum carbide, tungsten carbide or tungsten, and is heated by being mounted in a cavity in a carbon bar which is supplied with electric current. Material to be evaporated is fed to the block in wire or strip form through interengaging wheels and a guide tube. Reference is made to the evaporation of aluminium and the coating of plastics. Specification 770,753 is referred to.
GB24506/55A 1955-08-25 1955-08-25 Improvements in or relating to the vaporisation of metals and metalloids Expired GB821518A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB24506/55A GB821518A (en) 1955-08-25 1955-08-25 Improvements in or relating to the vaporisation of metals and metalloids

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB24506/55A GB821518A (en) 1955-08-25 1955-08-25 Improvements in or relating to the vaporisation of metals and metalloids

Publications (1)

Publication Number Publication Date
GB821518A true GB821518A (en) 1959-10-07

Family

ID=10212725

Family Applications (1)

Application Number Title Priority Date Filing Date
GB24506/55A Expired GB821518A (en) 1955-08-25 1955-08-25 Improvements in or relating to the vaporisation of metals and metalloids

Country Status (1)

Country Link
GB (1) GB821518A (en)

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