GB900205A - Improvements in and relating to sources for the evaporation of metals and other materials under vacuum - Google Patents

Improvements in and relating to sources for the evaporation of metals and other materials under vacuum

Info

Publication number
GB900205A
GB900205A GB1551457A GB1551457A GB900205A GB 900205 A GB900205 A GB 900205A GB 1551457 A GB1551457 A GB 1551457A GB 1551457 A GB1551457 A GB 1551457A GB 900205 A GB900205 A GB 900205A
Authority
GB
United Kingdom
Prior art keywords
filament
metal
aluminium
cooled
graphite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1551457A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RICHARD JOHN FLETCHER
Original Assignee
RICHARD JOHN FLETCHER
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RICHARD JOHN FLETCHER filed Critical RICHARD JOHN FLETCHER
Priority to GB1551457A priority Critical patent/GB900205A/en
Publication of GB900205A publication Critical patent/GB900205A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/26Vacuum evaporation by resistance or inductive heating of the source
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/246Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

900,205. Electric vaporizers. FLETCHER, R. J. Oct. 15, 1958 [July 15, 1957], No. 15514/57. Class 39 (3). [Also in Group II] Metals, e.g. aluminium, are evaporated in a vacuum by contact with a graphite or carbon filament 1 secured in electrodes 2 cooled by a circulation in pipe 3. In Fig. 5 a tubular graphite or carbon filament 10 has a watercooled shield 12 and a side opening 11 for introduction of the metal wire 13 and for escape of the metal vapour. The hollow retains any slag, the melted wire rising up the inside of the tube to the opening 11 where it evaporates. The wire metal 13 may be substituted by block metal introduced at the ends. The filament 10 may contain a refractory metal, e.g. tungsten, tantalum or zirconium in the form of a bundle of wires or sheet or powder. The bottom of the filament 10 may be pierced by small holes. Al-bronze at a high temperature may be fed to a molten pool of aluminium in the filament to ensure instant evaporation. To evaporate zinc a graphite filament is first wetted with molten copper with or without prior treatment with aluminium. The zinc is fed into the copper pool with which it alloys and then evaporates. A carbon or refractory scraper may scrape the filament. The filament may be oscillated or rotated, supported in an aluminium trough where a hopper 18 supplies the metal under the surface of the molten pool. In Fig. 10 a web of paper or other sheet material is metallized under vacuum. The heating filament 22 is mounted in electrodes 23 supported by insulating blocks 24 in a water-cooled shield 25. The metal wire 26 to be evaporated is fed to the filament. Angularly adjustable water-cooled shields 27 concentrate the heat of the filament and determine the area of open space through which the evaporated metal may pass. The paper &c. web comes from a supply roller 29 and is coated and received on a roller 30. In Fig. 15, graphite connectors 39 holding the filament 38 are seated in ceramic insulators 40 and held by clamps 41 which may be cooled.
GB1551457A 1957-07-15 1957-07-15 Improvements in and relating to sources for the evaporation of metals and other materials under vacuum Expired GB900205A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1551457A GB900205A (en) 1957-07-15 1957-07-15 Improvements in and relating to sources for the evaporation of metals and other materials under vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1551457A GB900205A (en) 1957-07-15 1957-07-15 Improvements in and relating to sources for the evaporation of metals and other materials under vacuum

Publications (1)

Publication Number Publication Date
GB900205A true GB900205A (en) 1962-07-04

Family

ID=10060470

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1551457A Expired GB900205A (en) 1957-07-15 1957-07-15 Improvements in and relating to sources for the evaporation of metals and other materials under vacuum

Country Status (1)

Country Link
GB (1) GB900205A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3541301A (en) * 1967-11-06 1970-11-17 Comp Generale Electricite Source for evaporation in a vacuum
US4880960A (en) * 1987-03-06 1989-11-14 Centre National D'etudes Spatiales Continuous vacuum evaporation device for metal
EP1628322A1 (en) * 2004-08-17 2006-02-22 Applied Films GmbH & Co. KG Support structure for a shield
CN106868457A (en) * 2017-03-22 2017-06-20 合肥鑫晟光电科技有限公司 One kind evaporation component and evaporated device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3541301A (en) * 1967-11-06 1970-11-17 Comp Generale Electricite Source for evaporation in a vacuum
US4880960A (en) * 1987-03-06 1989-11-14 Centre National D'etudes Spatiales Continuous vacuum evaporation device for metal
EP1628322A1 (en) * 2004-08-17 2006-02-22 Applied Films GmbH & Co. KG Support structure for a shield
CN100347115C (en) * 2004-08-17 2007-11-07 应用材料有限责任与两合公司 Holding device for a screen
CN106868457A (en) * 2017-03-22 2017-06-20 合肥鑫晟光电科技有限公司 One kind evaporation component and evaporated device

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