GB900205A - Improvements in and relating to sources for the evaporation of metals and other materials under vacuum - Google Patents
Improvements in and relating to sources for the evaporation of metals and other materials under vacuumInfo
- Publication number
- GB900205A GB900205A GB1551457A GB1551457A GB900205A GB 900205 A GB900205 A GB 900205A GB 1551457 A GB1551457 A GB 1551457A GB 1551457 A GB1551457 A GB 1551457A GB 900205 A GB900205 A GB 900205A
- Authority
- GB
- United Kingdom
- Prior art keywords
- filament
- metal
- aluminium
- cooled
- graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Physical Vapour Deposition (AREA)
Abstract
900,205. Electric vaporizers. FLETCHER, R. J. Oct. 15, 1958 [July 15, 1957], No. 15514/57. Class 39 (3). [Also in Group II] Metals, e.g. aluminium, are evaporated in a vacuum by contact with a graphite or carbon filament 1 secured in electrodes 2 cooled by a circulation in pipe 3. In Fig. 5 a tubular graphite or carbon filament 10 has a watercooled shield 12 and a side opening 11 for introduction of the metal wire 13 and for escape of the metal vapour. The hollow retains any slag, the melted wire rising up the inside of the tube to the opening 11 where it evaporates. The wire metal 13 may be substituted by block metal introduced at the ends. The filament 10 may contain a refractory metal, e.g. tungsten, tantalum or zirconium in the form of a bundle of wires or sheet or powder. The bottom of the filament 10 may be pierced by small holes. Al-bronze at a high temperature may be fed to a molten pool of aluminium in the filament to ensure instant evaporation. To evaporate zinc a graphite filament is first wetted with molten copper with or without prior treatment with aluminium. The zinc is fed into the copper pool with which it alloys and then evaporates. A carbon or refractory scraper may scrape the filament. The filament may be oscillated or rotated, supported in an aluminium trough where a hopper 18 supplies the metal under the surface of the molten pool. In Fig. 10 a web of paper or other sheet material is metallized under vacuum. The heating filament 22 is mounted in electrodes 23 supported by insulating blocks 24 in a water-cooled shield 25. The metal wire 26 to be evaporated is fed to the filament. Angularly adjustable water-cooled shields 27 concentrate the heat of the filament and determine the area of open space through which the evaporated metal may pass. The paper &c. web comes from a supply roller 29 and is coated and received on a roller 30. In Fig. 15, graphite connectors 39 holding the filament 38 are seated in ceramic insulators 40 and held by clamps 41 which may be cooled.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1551457A GB900205A (en) | 1957-07-15 | 1957-07-15 | Improvements in and relating to sources for the evaporation of metals and other materials under vacuum |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1551457A GB900205A (en) | 1957-07-15 | 1957-07-15 | Improvements in and relating to sources for the evaporation of metals and other materials under vacuum |
Publications (1)
Publication Number | Publication Date |
---|---|
GB900205A true GB900205A (en) | 1962-07-04 |
Family
ID=10060470
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1551457A Expired GB900205A (en) | 1957-07-15 | 1957-07-15 | Improvements in and relating to sources for the evaporation of metals and other materials under vacuum |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB900205A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3541301A (en) * | 1967-11-06 | 1970-11-17 | Comp Generale Electricite | Source for evaporation in a vacuum |
US4880960A (en) * | 1987-03-06 | 1989-11-14 | Centre National D'etudes Spatiales | Continuous vacuum evaporation device for metal |
EP1628322A1 (en) * | 2004-08-17 | 2006-02-22 | Applied Films GmbH & Co. KG | Support structure for a shield |
CN106868457A (en) * | 2017-03-22 | 2017-06-20 | 合肥鑫晟光电科技有限公司 | One kind evaporation component and evaporated device |
-
1957
- 1957-07-15 GB GB1551457A patent/GB900205A/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3541301A (en) * | 1967-11-06 | 1970-11-17 | Comp Generale Electricite | Source for evaporation in a vacuum |
US4880960A (en) * | 1987-03-06 | 1989-11-14 | Centre National D'etudes Spatiales | Continuous vacuum evaporation device for metal |
EP1628322A1 (en) * | 2004-08-17 | 2006-02-22 | Applied Films GmbH & Co. KG | Support structure for a shield |
CN100347115C (en) * | 2004-08-17 | 2007-11-07 | 应用材料有限责任与两合公司 | Holding device for a screen |
CN106868457A (en) * | 2017-03-22 | 2017-06-20 | 合肥鑫晟光电科技有限公司 | One kind evaporation component and evaporated device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS59211574A (en) | Method and device for coating supporter with substance whichconverts to gas phase electrically | |
US2809905A (en) | Melting and refining metals | |
US2772318A (en) | Apparatus for vaporization of metals and metalloids | |
ES485398A1 (en) | Liquid-cooled support for the head of an electrode. | |
US2664853A (en) | Apparatus for vapor coating | |
US2665320A (en) | Metal vaporizing crucible | |
GB900205A (en) | Improvements in and relating to sources for the evaporation of metals and other materials under vacuum | |
GB1425095A (en) | Process for feeding an evaporation bath | |
GB2162766A (en) | Methods of and apparatus for the melting of silicon | |
GB1122438A (en) | Ion cleaning and deposition apparatus | |
US2207746A (en) | Apparatus for converting metals and the like | |
US2899528A (en) | Method and apparatus for supplying | |
GB551220A (en) | Improvements in or relating to the thermal deposition of metals in a vacuum | |
US4959524A (en) | Apparatus and evaporator for metallizing foils | |
ES441646A1 (en) | Mixed phase evaporation source | |
US3224844A (en) | Zone-melting method for metal compounds | |
GB1223162A (en) | Improvements in electrodes for electric arc furnaces | |
SU49092A1 (en) | Device for applying a protective layer to the glass envelope of gas luminaires | |
US4569307A (en) | Silicon melting and evaporation apparatus for high purity applications | |
JPS55141564A (en) | Crucible for vapour coating | |
GB995609A (en) | Improvements in or relating to the vaporization of metals | |
GB1126037A (en) | Improvements in or relating to a method and apparatus for melting materials of high melting-point | |
Gartland | A high temperature electric tube furnace | |
JPS589981A (en) | Vacuum deposition device | |
DE1078401B (en) | Evaporator for continuous vacuum evaporation |