GB485965A - Process and apparatus for thermal deposition of metals or other materials - Google Patents

Process and apparatus for thermal deposition of metals or other materials

Info

Publication number
GB485965A
GB485965A GB19772/37A GB1977237A GB485965A GB 485965 A GB485965 A GB 485965A GB 19772/37 A GB19772/37 A GB 19772/37A GB 1977237 A GB1977237 A GB 1977237A GB 485965 A GB485965 A GB 485965A
Authority
GB
United Kingdom
Prior art keywords
heater
fed
wire
strip
evaporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB19772/37A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB485965A publication Critical patent/GB485965A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/246Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

485,965. Fusing and working silica. ALEXANDER, P. July 16, 1937, No. 19772. Convention date, July 17, 1936. [Class 56] [Also in Group II] In depositing coatings of metal or other material, e.g. quartz, by evaporation in vacuo, the rate at which the material to be evaporated is fed towards the heater is so low and the temperature of the heater is so high that the material is evaporated substantially as soon as it contacts with the heater. An inert gas, e.g. hydrogen, may be fed into the chamber to replace the residual air, and the residual gas may be ionized. In the form shown in Fig. 1, the material to be evaporated is in the form of a wire or strip 18 which is fed from a roll 19 so that its end contacts with the heater 16. The material is at once vaporized to form a coating on the surfaces 22 and 23. Inert gas may be introduced at 32 and the residual gas ionized by the electrodes 26, 27. In coating small surfaces a straight wire or strip may be placed in the guide 33 so as to rest on the heater, the wire or strip being fed down by its own weight. Fig. 2 shows a device, e.g. for use with quartz, where the material is fed in granular form, being carried from a hopper 34 at a predetermined rate by a conveyer 35 to a hopper 36 which feeds it on to a U-shaped heater 38. In another form, the heater may be a hollow body, e.g. a cylinder, made of wire gauze or perforated metal, a wire or strip of the material being fed into the body through a hole or slit. To coat large surfaces a plurality of heaters may be used, and Fig. 3 shows a device in which a plurality of heaters and feeding-devices is mounted on a bar 40 which can be moved up and down on guides 42, adjacent the surface 43 to be coated. In coating long flexible surfaces, such as paper strips, these may be contained on rolls which feed them past the source of vapour. The low density of the vapour enables a relative]y low vacuum to be used ; e.g. aluminium may be vaporixed in a vacuum of 10<-3> mm. of the temperature of the heater being about 1500‹ C.
GB19772/37A 1936-07-17 1937-07-16 Process and apparatus for thermal deposition of metals or other materials Expired GB485965A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DED0073135 1936-07-17

Publications (1)

Publication Number Publication Date
GB485965A true GB485965A (en) 1938-05-27

Family

ID=32236316

Family Applications (1)

Application Number Title Priority Date Filing Date
GB19772/37A Expired GB485965A (en) 1936-07-17 1937-07-16 Process and apparatus for thermal deposition of metals or other materials

Country Status (5)

Country Link
US (1) US2153786A (en)
BE (1) BE422666A (en)
FR (1) FR824423A (en)
GB (1) GB485965A (en)
NL (1) NL51379C (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2440135A (en) * 1944-08-04 1948-04-20 Alexander Paul Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers
US2703772A (en) * 1952-09-12 1955-03-08 Minnesota Mining & Mfg Transfer method for manufacturing infrared reflecting fabric
US2820722A (en) * 1953-09-04 1958-01-21 Richard J Fletcher Method of preparing titanium, zirconium and tantalum
US3488214A (en) * 1967-03-15 1970-01-06 Sperry Rand Corp Evaporant material control for vapor deposition apparatus
GB2217349A (en) * 1988-03-29 1989-10-25 Univ Hull Vapour deposited self-sealing ceramic coatings

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2899528A (en) * 1959-08-11 Method and apparatus for supplying
NL59597C (en) * 1939-02-22
US2435273A (en) * 1941-07-31 1948-02-03 Hatfield Henry Stafford Method of coating with tungsten carbide
US2508500A (en) * 1942-05-23 1950-05-23 Hartford Nat Bank & Trust Co Apparatus for applying metal coatings on insulators
US2621625A (en) * 1948-03-25 1952-12-16 Nat Res Corp Vapor coating device
US2665320A (en) * 1949-09-22 1954-01-05 Nat Res Corp Metal vaporizing crucible
US2635579A (en) * 1949-12-01 1953-04-21 Nat Res Corp Coating by evaporating metal under vacuum
US2665223A (en) * 1949-12-31 1954-01-05 Nat Res Corp Process for depositing an aluminum film on a substrate by thermal vaporization
US2665224A (en) * 1950-03-07 1954-01-05 Nat Res Corp Process for vapor coating
US2664852A (en) * 1950-04-27 1954-01-05 Nat Res Corp Vapor coating apparatus
US2665225A (en) * 1950-04-27 1954-01-05 Nat Res Corp Apparatus and process for coating by vapor deposition
US2665227A (en) * 1950-06-30 1954-01-05 Nat Res Corp Apparatus and method of coating by vapor deposition
US2665228A (en) * 1950-07-19 1954-01-05 Nat Res Corp Apparatus and process for vapor coating
US2665229A (en) * 1951-11-05 1954-01-05 Nat Res Corp Method of coating by vapor deposition
US2753800A (en) * 1952-03-24 1956-07-10 Ohio Commw Eng Co Production of printing plates
US2664853A (en) * 1952-05-12 1954-01-05 Nat Res Corp Apparatus for vapor coating
US2840494A (en) * 1952-12-31 1958-06-24 Henry W Parker Manufacture of transistors
US2894679A (en) * 1953-11-23 1959-07-14 Wisconsin Alumni Res Found Pump
US2850225A (en) * 1955-11-10 1958-09-02 Wisconsin Alumni Res Found Pump
US2960457A (en) * 1956-02-28 1960-11-15 Servomechanisms Inc Apparatus for vaporizing coating materials
US2978364A (en) * 1956-03-05 1961-04-04 Fairchild Camera Instr Co Automatic control system for precision resistor manufacture
US2967223A (en) * 1958-11-26 1961-01-03 Wisconsin Alumni Res Found Feeder mechanism
NL253747A (en) * 1959-07-13
US3167451A (en) * 1959-08-26 1965-01-26 Sprague Electric Co Method of resistor production
US3690291A (en) * 1971-04-28 1972-09-12 Nasa Deposition apparatus
BE795116A (en) * 1972-02-08 1973-05-29 Cockerill EVAPORATION BATH FEEDING PROCESS
US3750623A (en) * 1972-02-11 1973-08-07 Mc Donnell Douglas Corp Glow discharge coating apparatus
US3826226A (en) * 1972-12-12 1974-07-30 R Clark Apparatus for coating particulate material
US5366764A (en) * 1992-06-15 1994-11-22 Sunthankar Mandar B Environmentally safe methods and apparatus for depositing and/or reclaiming a metal or semi-conductor material using sublimation
DE102006026523A1 (en) * 2006-06-06 2007-12-13 Berkenhoff Gmbh Method of vapor deposition of thin layers in vacuum and wire to its execution
WO2011065999A1 (en) * 2008-12-18 2011-06-03 Veeco Instruments Inc. Linear deposition source
WO2011065998A1 (en) * 2008-12-18 2011-06-03 Veeco Instruments Inc. Linear deposition source
US20100159132A1 (en) * 2008-12-18 2010-06-24 Veeco Instruments, Inc. Linear Deposition Source
EP2270253B1 (en) * 2009-07-03 2012-09-12 Applied Materials, Inc. Bending fixture for homogenous and smooth operation of an evaporation source
TWI492258B (en) * 2013-05-10 2015-07-11 Darfon Electronics Corp Backlit keyboard and light guide module and manufacture method thereof
CN108103445B (en) * 2017-12-14 2020-04-17 内蒙古科技大学 In-situ preparation method of alloy with special structure
EP3884079A1 (en) * 2018-11-20 2021-09-29 Bobst Manchester Limited Evaporator boat control system, pvd machine and method of operating the pvd machine

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2440135A (en) * 1944-08-04 1948-04-20 Alexander Paul Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers
US2703772A (en) * 1952-09-12 1955-03-08 Minnesota Mining & Mfg Transfer method for manufacturing infrared reflecting fabric
US2820722A (en) * 1953-09-04 1958-01-21 Richard J Fletcher Method of preparing titanium, zirconium and tantalum
US3488214A (en) * 1967-03-15 1970-01-06 Sperry Rand Corp Evaporant material control for vapor deposition apparatus
GB2217349A (en) * 1988-03-29 1989-10-25 Univ Hull Vapour deposited self-sealing ceramic coatings
GB2217349B (en) * 1988-03-29 1992-06-24 Univ Hull Vapour deposited self-sealing ceramic coatings

Also Published As

Publication number Publication date
US2153786A (en) 1939-04-11
NL51379C (en) 1941-11-15
FR824423A (en) 1938-02-08
BE422666A (en) 1937-08-31

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