GB485965A - Process and apparatus for thermal deposition of metals or other materials - Google Patents
Process and apparatus for thermal deposition of metals or other materialsInfo
- Publication number
- GB485965A GB485965A GB19772/37A GB1977237A GB485965A GB 485965 A GB485965 A GB 485965A GB 19772/37 A GB19772/37 A GB 19772/37A GB 1977237 A GB1977237 A GB 1977237A GB 485965 A GB485965 A GB 485965A
- Authority
- GB
- United Kingdom
- Prior art keywords
- heater
- fed
- wire
- strip
- evaporated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
485,965. Fusing and working silica. ALEXANDER, P. July 16, 1937, No. 19772. Convention date, July 17, 1936. [Class 56] [Also in Group II] In depositing coatings of metal or other material, e.g. quartz, by evaporation in vacuo, the rate at which the material to be evaporated is fed towards the heater is so low and the temperature of the heater is so high that the material is evaporated substantially as soon as it contacts with the heater. An inert gas, e.g. hydrogen, may be fed into the chamber to replace the residual air, and the residual gas may be ionized. In the form shown in Fig. 1, the material to be evaporated is in the form of a wire or strip 18 which is fed from a roll 19 so that its end contacts with the heater 16. The material is at once vaporized to form a coating on the surfaces 22 and 23. Inert gas may be introduced at 32 and the residual gas ionized by the electrodes 26, 27. In coating small surfaces a straight wire or strip may be placed in the guide 33 so as to rest on the heater, the wire or strip being fed down by its own weight. Fig. 2 shows a device, e.g. for use with quartz, where the material is fed in granular form, being carried from a hopper 34 at a predetermined rate by a conveyer 35 to a hopper 36 which feeds it on to a U-shaped heater 38. In another form, the heater may be a hollow body, e.g. a cylinder, made of wire gauze or perforated metal, a wire or strip of the material being fed into the body through a hole or slit. To coat large surfaces a plurality of heaters may be used, and Fig. 3 shows a device in which a plurality of heaters and feeding-devices is mounted on a bar 40 which can be moved up and down on guides 42, adjacent the surface 43 to be coated. In coating long flexible surfaces, such as paper strips, these may be contained on rolls which feed them past the source of vapour. The low density of the vapour enables a relative]y low vacuum to be used ; e.g. aluminium may be vaporixed in a vacuum of 10<-3> mm. of the temperature of the heater being about 1500 C.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DED0073135 | 1936-07-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB485965A true GB485965A (en) | 1938-05-27 |
Family
ID=32236316
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB19772/37A Expired GB485965A (en) | 1936-07-17 | 1937-07-16 | Process and apparatus for thermal deposition of metals or other materials |
Country Status (5)
Country | Link |
---|---|
US (1) | US2153786A (en) |
BE (1) | BE422666A (en) |
FR (1) | FR824423A (en) |
GB (1) | GB485965A (en) |
NL (1) | NL51379C (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2440135A (en) * | 1944-08-04 | 1948-04-20 | Alexander Paul | Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers |
US2703772A (en) * | 1952-09-12 | 1955-03-08 | Minnesota Mining & Mfg | Transfer method for manufacturing infrared reflecting fabric |
US2820722A (en) * | 1953-09-04 | 1958-01-21 | Richard J Fletcher | Method of preparing titanium, zirconium and tantalum |
US3488214A (en) * | 1967-03-15 | 1970-01-06 | Sperry Rand Corp | Evaporant material control for vapor deposition apparatus |
GB2217349A (en) * | 1988-03-29 | 1989-10-25 | Univ Hull | Vapour deposited self-sealing ceramic coatings |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2899528A (en) * | 1959-08-11 | Method and apparatus for supplying | ||
NL59597C (en) * | 1939-02-22 | |||
US2435273A (en) * | 1941-07-31 | 1948-02-03 | Hatfield Henry Stafford | Method of coating with tungsten carbide |
US2508500A (en) * | 1942-05-23 | 1950-05-23 | Hartford Nat Bank & Trust Co | Apparatus for applying metal coatings on insulators |
US2621625A (en) * | 1948-03-25 | 1952-12-16 | Nat Res Corp | Vapor coating device |
US2665320A (en) * | 1949-09-22 | 1954-01-05 | Nat Res Corp | Metal vaporizing crucible |
US2635579A (en) * | 1949-12-01 | 1953-04-21 | Nat Res Corp | Coating by evaporating metal under vacuum |
US2665223A (en) * | 1949-12-31 | 1954-01-05 | Nat Res Corp | Process for depositing an aluminum film on a substrate by thermal vaporization |
US2665224A (en) * | 1950-03-07 | 1954-01-05 | Nat Res Corp | Process for vapor coating |
US2664852A (en) * | 1950-04-27 | 1954-01-05 | Nat Res Corp | Vapor coating apparatus |
US2665225A (en) * | 1950-04-27 | 1954-01-05 | Nat Res Corp | Apparatus and process for coating by vapor deposition |
US2665227A (en) * | 1950-06-30 | 1954-01-05 | Nat Res Corp | Apparatus and method of coating by vapor deposition |
US2665228A (en) * | 1950-07-19 | 1954-01-05 | Nat Res Corp | Apparatus and process for vapor coating |
US2665229A (en) * | 1951-11-05 | 1954-01-05 | Nat Res Corp | Method of coating by vapor deposition |
US2753800A (en) * | 1952-03-24 | 1956-07-10 | Ohio Commw Eng Co | Production of printing plates |
US2664853A (en) * | 1952-05-12 | 1954-01-05 | Nat Res Corp | Apparatus for vapor coating |
US2840494A (en) * | 1952-12-31 | 1958-06-24 | Henry W Parker | Manufacture of transistors |
US2894679A (en) * | 1953-11-23 | 1959-07-14 | Wisconsin Alumni Res Found | Pump |
US2850225A (en) * | 1955-11-10 | 1958-09-02 | Wisconsin Alumni Res Found | Pump |
US2960457A (en) * | 1956-02-28 | 1960-11-15 | Servomechanisms Inc | Apparatus for vaporizing coating materials |
US2978364A (en) * | 1956-03-05 | 1961-04-04 | Fairchild Camera Instr Co | Automatic control system for precision resistor manufacture |
US2967223A (en) * | 1958-11-26 | 1961-01-03 | Wisconsin Alumni Res Found | Feeder mechanism |
NL253747A (en) * | 1959-07-13 | |||
US3167451A (en) * | 1959-08-26 | 1965-01-26 | Sprague Electric Co | Method of resistor production |
US3690291A (en) * | 1971-04-28 | 1972-09-12 | Nasa | Deposition apparatus |
BE795116A (en) * | 1972-02-08 | 1973-05-29 | Cockerill | EVAPORATION BATH FEEDING PROCESS |
US3750623A (en) * | 1972-02-11 | 1973-08-07 | Mc Donnell Douglas Corp | Glow discharge coating apparatus |
US3826226A (en) * | 1972-12-12 | 1974-07-30 | R Clark | Apparatus for coating particulate material |
US5366764A (en) * | 1992-06-15 | 1994-11-22 | Sunthankar Mandar B | Environmentally safe methods and apparatus for depositing and/or reclaiming a metal or semi-conductor material using sublimation |
DE102006026523A1 (en) * | 2006-06-06 | 2007-12-13 | Berkenhoff Gmbh | Method of vapor deposition of thin layers in vacuum and wire to its execution |
WO2011065999A1 (en) * | 2008-12-18 | 2011-06-03 | Veeco Instruments Inc. | Linear deposition source |
WO2011065998A1 (en) * | 2008-12-18 | 2011-06-03 | Veeco Instruments Inc. | Linear deposition source |
US20100159132A1 (en) * | 2008-12-18 | 2010-06-24 | Veeco Instruments, Inc. | Linear Deposition Source |
EP2270253B1 (en) * | 2009-07-03 | 2012-09-12 | Applied Materials, Inc. | Bending fixture for homogenous and smooth operation of an evaporation source |
TWI492258B (en) * | 2013-05-10 | 2015-07-11 | Darfon Electronics Corp | Backlit keyboard and light guide module and manufacture method thereof |
CN108103445B (en) * | 2017-12-14 | 2020-04-17 | 内蒙古科技大学 | In-situ preparation method of alloy with special structure |
EP3884079A1 (en) * | 2018-11-20 | 2021-09-29 | Bobst Manchester Limited | Evaporator boat control system, pvd machine and method of operating the pvd machine |
-
1937
- 1937-07-14 US US153548A patent/US2153786A/en not_active Expired - Lifetime
- 1937-07-15 FR FR824423D patent/FR824423A/en not_active Expired
- 1937-07-15 BE BE422666D patent/BE422666A/xx unknown
- 1937-07-15 NL NL83360A patent/NL51379C/xx active
- 1937-07-16 GB GB19772/37A patent/GB485965A/en not_active Expired
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2440135A (en) * | 1944-08-04 | 1948-04-20 | Alexander Paul | Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers |
US2703772A (en) * | 1952-09-12 | 1955-03-08 | Minnesota Mining & Mfg | Transfer method for manufacturing infrared reflecting fabric |
US2820722A (en) * | 1953-09-04 | 1958-01-21 | Richard J Fletcher | Method of preparing titanium, zirconium and tantalum |
US3488214A (en) * | 1967-03-15 | 1970-01-06 | Sperry Rand Corp | Evaporant material control for vapor deposition apparatus |
GB2217349A (en) * | 1988-03-29 | 1989-10-25 | Univ Hull | Vapour deposited self-sealing ceramic coatings |
GB2217349B (en) * | 1988-03-29 | 1992-06-24 | Univ Hull | Vapour deposited self-sealing ceramic coatings |
Also Published As
Publication number | Publication date |
---|---|
US2153786A (en) | 1939-04-11 |
NL51379C (en) | 1941-11-15 |
FR824423A (en) | 1938-02-08 |
BE422666A (en) | 1937-08-31 |
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