US2879739A - Vaporized metal coating apparatus - Google Patents

Vaporized metal coating apparatus Download PDF

Info

Publication number
US2879739A
US2879739A US481618A US48161855A US2879739A US 2879739 A US2879739 A US 2879739A US 481618 A US481618 A US 481618A US 48161855 A US48161855 A US 48161855A US 2879739 A US2879739 A US 2879739A
Authority
US
United States
Prior art keywords
coating
aluminum
chamber
tube
vapors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US481618A
Inventor
Wallace F Bugbee
Robert M Boehme
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Corp
Original Assignee
National Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Corp filed Critical National Research Corp
Priority to US481618A priority Critical patent/US2879739A/en
Application granted granted Critical
Publication of US2879739A publication Critical patent/US2879739A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Definitions

  • the present invention relates to coating and more particularly to the continuous coating of Vflexible substrates such as bers, threads, strips of sheet material and the like by the vapor deposition of a coating material on the substrate as it is advanced through a vacuum chamber.
  • a principal object of the present invention is to provide for maximum utilization of a given quantity of coating vapors so as to provide increased speed of operation of the coating equipment.
  • Another object of the invention is to provide improved coating apparatus particularly arranged for coating a thin filament at a high rate of speed with maximum utilization of the coating material.
  • the invention accordingly comprises the apparatus possessing the construction, combination of elements and arrangement of parts which are exemplified in the following detailed disclosure, and the ,scope of the application of which will be indicated in the claims.
  • Fig. 1 is a diagrammatic, schematic, sectional view of one continuous coating apparatus embodying the present invention
  • Fig. 2 is an enlarged fragmentary view of a portion of Fig. l;
  • Fig. 2a is an enlarged fragmentary view of a portion of Fig. l showing a variation in shape from that shown in Fig. 2.
  • the vacuum coating of thin iilamentary materials -such as bers, textile threads and the like by vapor deposition techniques has long been an object of workers in the art. Numerous techniques have been suggested but, so far as is known, none has obtained any great cornmercial success.
  • the present invention is particularly directed to the coating of such lamentary materials in a rapid, expeditious and economical fashion. This is achieved by providing a smaller chamber within a vacuum chamber capable of evacuation, the smaller chamber being for the purpose of confining a high-density mass of coating vapors.
  • the smaller inner chamber preferably comprises a hollow member in the form of a tube of carbonaceous material such as graphite and the like, this tube being arranged to confine aluminum vapors within its interior by means of end members which are preferably carbon discs.
  • the carbon discs are supplied with openings for permitting passage of the wire to and from the inner chamber so formed.
  • the graphite tube is preferably horizontally position in the vacuum chamber and is provided with a heating means arranged to heat the graphite to a tempera- 2,879,739v Patented Mar..
  • 10 represents a vacuum-tight housing defining therewithin a vacuum coating chamber 12 which is arranged to be evacuated to a low-free-air pressure on the order of less than l micron Hg abs. by means of a vacuum pumping system 14.
  • the substrate to be coated illustrated as a wire 16
  • the coating vapor source 18 cornprises a horizontally positioned cylindrical tube 22, the ends of the tube 22 being preferably closed by means of discs 24 which define, With tube 22, a coating vapor space 19.
  • the discs 24 are provided with aligned openings 26 through which the substrate 16 passes into vapor space 19.
  • the tube 22 is preferably made of a hightemperature-resistant, conductive material.
  • dense forms of carbonaceous material such as graphite or carbon or mixtures thereof have been found particularly suitable.
  • This carbonaceous tube 22 is heated to a high temperature on the order o-f l250 C. by means of a Water-cooled coil 2S.
  • a dielectric refractory member 36 preferably of a material such as alundum or zirconia, separates the induction coil 28 from tube 22 to insure against burning out of these members.
  • This wetting of the carbonaceous tube surface is preferably achievedby lining tube 22 with a group lVa, Va or Vla metal carbide, this carbide preferably being formed by adding one of said metals to the aluminum to be evaporated.
  • these carbides those of titanium, zirconium, hafnium, vanadium or columbium are preferred, since these carbides additionally aid in preventing attack of the carbonaceous tube by the high-temperature molten aluminum or its vapors.
  • a charge of aluminum is positioned inside of the tube 22 and wire 16 is threaded through the holes 26 in the end discs 24.
  • the vacuum chamber 12 is then evacuated by means of pump 14 to a low-free-air pressure of less than l micron Hg abs.
  • the inductor heating coil 28 is energized to bring the graphite sleeve 22 up to an elevated temperature on the order of l250 C. or thereabouts. This high temperature will cause the aluminum to become molten and to vaporize sufficiently so as to fill the small chamber 19 with aluminum vapors.
  • Fig. 2h there is illustrated anotherembodiment of the invention which is particularly adapted to the coating of both sides of a strip of sheet material which is passed through the inner coating chamber 19a.
  • the chamber 19a can be oval in cross section to accommodate the increased width of the substrate passing therethrough.
  • the holes 26a in the end pieces are formed as slits to permit passage of the relatively Wide strip 16a.
  • the tube is preferably provided with a hole 32 through which aluminum Wire 30b may be fed by a suitable mechanism indicated as a pair of rolls 34.
  • a suitable mechanism indicated as a pair of rolls 34.
  • the invention may be employed for coating textile bers or fabrics, particularly relatively ⁇ heat-resistant fibers such as glass bers and the like.
  • the coating be done in stages by passing the lber through the coating chamber at a high rate of speed so that only a small fraction of the requisite coating material is deposited thereon.
  • the fiber is then cooled, such as by being passed over a cooling roll, and again fed through the inner coating chamber where it receives a second coating. This procedure is particularly helpful for the coating of heat-sensitive material or for providing a relatively thick coating of metal or the like on even such a relatively heat-insensitive material as a glass fiber.
  • Coating materials that can be utilized include metals such as aluminum, copper, zinc, gold, platinum and other metals having vapor pressures at least as great as that of platinum. Equally, other materials such as metal compounds, normally applied by vacuum coating techniques, can be employed in the present invention.
  • a coating apparatus for the continuous coating of a substrate with metal comprising a vacuum chamber, an evacuation means for evacuating said chamber, a hollow member located within said vacuum chamber and adapted to form an inner chamber capable of contining vapors of a metal, means for feeding a supply of metal into the inner chamber in position to be heated to vaporization temperature, said hollow member being provided with openings which communicate with the vacuum chamber to permit travel of a substrate to and from said inner chamber, means for guiding said substrate through said openings, and means for electrically heating the interior surfaces of said hollow member and the supply of metal therewithin to a temperature sutliciently high to provide a partial pressure of the metal vapors which is higher than the pressure existing in the vacuum chamber outside of the inner chamber, the surface temperature of the hollow member being at substantially the same temperature as the temperature of the supply of metal to provide equal coating on all surfaces of the substrate while maintaining the substrate at a substantially lower temperature than the temperature of the hollow member.
  • the hollow member is formed of a carbonaceous material which is heated to the requisite high temperature by electrical currents flowing therewithin.
  • the coating metal is aluminum and the carbonaceous material has an inner surface comprising a carbide which is relatively inert to aluminum at temperatures on the order of l250 C. .and is wetted by molten aluminum.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Description

March 31, 1959 w. F. BUGBEE ET AL vAPoRIzED METAL coATING v.APPAMTUS Vgcuum Pumps Filed Jan. l5, 1955 willIlllllllllllllllllllllll .00.00.00.00.00
M mem Wn NC Elu/A N Va/ @an mm .m MJ/wm w @am W0 VAPOED METAL COATING APPARATUS Wallace F. Bugbee, Brookline, and Robert M. Boehme, Cambridge, Mass., assignors to National Research Coriplrliration, Cambridge, Mass., a corporation of Massac usetts Application January 13, 1955, Serial No. 481,618
3 Claims. (Cl. 118-49) The present invention relates to coating and more particularly to the continuous coating of Vflexible substrates such as bers, threads, strips of sheet material and the like by the vapor deposition of a coating material on the substrate as it is advanced through a vacuum chamber.
A principal object of the present invention is to provide for maximum utilization of a given quantity of coating vapors so as to provide increased speed of operation of the coating equipment.
Another object of the invention is to provide improved coating apparatus particularly arranged for coating a thin filament at a high rate of speed with maximum utilization of the coating material.
The invention accordingly comprises the apparatus possessing the construction, combination of elements and arrangement of parts which are exemplified in the following detailed disclosure, and the ,scope of the application of which will be indicated in the claims.
For a fuller understanding of the nature and objects of the present invention, reference should be had to .the following detailed description taken in `connection with the accompanying drawings wherein:
Fig. 1 is a diagrammatic, schematic, sectional view of one continuous coating apparatus embodying the present invention;
Fig. 2 is an enlarged fragmentary view of a portion of Fig. l; and
Fig. 2a is an enlarged fragmentary view of a portion of Fig. l showing a variation in shape from that shown in Fig. 2.
The vacuum coating of thin iilamentary materials -such as bers, textile threads and the like by vapor deposition techniques has long been an object of workers in the art. Numerous techniques have been suggested but, so far as is known, none has obtained any great cornmercial success. The present invention is particularly directed to the coating of such lamentary materials in a rapid, expeditious and economical fashion. This is achieved by providing a smaller chamber within a vacuum chamber capable of evacuation, the smaller chamber being for the purpose of confining a high-density mass of coating vapors.
The invention will initially be described in connection with the coating of a wire with aluminum vapors, this description being for illustrative purposes only without intent to limit the invention. In such an arrangement, the smaller inner chamber preferably comprises a hollow member in the form of a tube of carbonaceous material such as graphite and the like, this tube being arranged to confine aluminum vapors within its interior by means of end members which are preferably carbon discs. The carbon discs are supplied with openings for permitting passage of the wire to and from the inner chamber so formed. The graphite tube is preferably horizontally position in the vacuum chamber and is provided with a heating means arranged to heat the graphite to a tempera- 2,879,739v Patented Mar.. 31, 15959 ice yture which is high enough to give the desired partial pressure of aluminum vapors within the inner chamber. This heating Iis most conveniently conveniently accomplishedby means of an induction coil which heats the graphite by induced high-frequency currents. Contact between the graphite and the induction coil is preferably prevented through thev use of an interposed dielectric refractory member.
Referring now to the drawings, there are shown several preferred embodiments of the invention. 'In these figures, 10 represents a vacuum-tight housing defining therewithin a vacuum coating chamber 12 which is arranged to be evacuated to a low-free-air pressure on the order of less than l micron Hg abs. by means of a vacuum pumping system 14. Within this chamber, the substrate to be coated, illustrated as a wire 16, is guided through a coating vapor source 18 by means of a pair of guide rolls 20. The coating vapor source 18 cornprises a horizontally positioned cylindrical tube 22, the ends of the tube 22 being preferably closed by means of discs 24 which define, With tube 22, a coating vapor space 19. The discs 24 are provided with aligned openings 26 through which the substrate 16 passes into vapor space 19. The tube 22 is preferably made of a hightemperature-resistant, conductive material. For this purpose, dense forms of carbonaceous material such as graphite or carbon or mixtures thereof have been found particularly suitable. This carbonaceous tube 22 is heated to a high temperature on the order o-f l250 C. by means of a Water-cooled coil 2S. A dielectric refractory member 36, preferably of a material such as alundum or zirconia, separates the induction coil 28 from tube 22 to insure against burning out of these members.
A charge of aluminum, for example, is provided inside of the carbonaceous tube 22, this being shown particularly in Fig. 2 as a pool 30 which Wets the surface of the tube 22 `at 30a as it travels up the surface to provide a greatly increased evaporation area. This wetting of the carbonaceous tube surface is preferably achievedby lining tube 22 with a group lVa, Va or Vla metal carbide, this carbide preferably being formed by adding one of said metals to the aluminum to be evaporated. Of these carbides, those of titanium, zirconium, hafnium, vanadium or columbium are preferred, since these carbides additionally aid in preventing attack of the carbonaceous tube by the high-temperature molten aluminum or its vapors.
In the operation of the device in Fig. 2, a charge of aluminum is positioned inside of the tube 22 and wire 16 is threaded through the holes 26 in the end discs 24. The vacuum chamber 12 is then evacuated by means of pump 14 to a low-free-air pressure of less than l micron Hg abs. The inductor heating coil 28 is energized to bring the graphite sleeve 22 up to an elevated temperature on the order of l250 C. or thereabouts. This high temperature will cause the aluminum to become molten and to vaporize sufficiently so as to fill the small chamber 19 with aluminum vapors. Since substantially all of the walls of the chamber 19 are at an elevated temperature, which is substantially equal to the temperature of the aluminum vapors, a uniform high vapor pressure of aluminum will be maintained in this space 19. As a result of the uniform high concentration of aluminum vapors in the space 19, essentially all surfaces of the wire 16 traveling therethrough will be coated with a uniform layer of aluminum by condensation of aluminum vapors on the relatively cold wire. Since the holes 26 in the tube 22 and discs 24 are relatively small, there is slight escape of aluminum vapors from the inner chamber 19 to the outer chamber 12. Accordingly, there is achieved considerable economy of utilization of the coating vapors, since these vapors conf 3 dense substantially only on the wire 16 passing therethrough.
Referring now to Fig. 2h, there is illustrated anotherembodiment of the invention which is particularly adapted to the coating of both sides of a strip of sheet material which is passed through the inner coating chamber 19a. In this case, the chamber 19a can be oval in cross section to accommodate the increased width of the substrate passing therethrough. Similarly, the holes 26a in the end pieces are formed as slits to permit passage of the relatively Wide strip 16a. In this embodiment, the tube is preferably provided with a hole 32 through which aluminum Wire 30b may be fed by a suitable mechanism indicated as a pair of rolls 34. This is desirable since the relatively larger areas of the strip 16a, as compared to the filament 16 of the Fig. l embodiment, will remove a considerably greater quantity of aluminum as a result of its passage through the inner coating chamber 19a. In other respects, the operation of Fig. 2a is simiilar to that described in connection with the discussions of Figs. 1 and 2.
While the coating of a metal Wire or strip with yaluminum has been described as a preferred embodiment of the invention, numerous other modilications may be practiced. For example, the invention may be employed for coating textile bers or fabrics, particularly relatively `heat-resistant fibers such as glass bers and the like. When the heat capacity of the fiber is relatively low with respect to the amount of coating to be applied thereto, it is desirable that the coating be done in stages by passing the lber through the coating chamber at a high rate of speed so that only a small fraction of the requisite coating material is deposited thereon. The fiber is then cooled, such as by being passed over a cooling roll, and again fed through the inner coating chamber where it receives a second coating. This procedure is particularly helpful for the coating of heat-sensitive material or for providing a relatively thick coating of metal or the like on even such a relatively heat-insensitive material as a glass fiber.
Coating materials that can be utilized include metals such as aluminum, copper, zinc, gold, platinum and other metals having vapor pressures at least as great as that of platinum. Equally, other materials such as metal compounds, normally applied by vacuum coating techniques, can be employed in the present invention. y
Since certain changes may be made in the above apparatus without departing from the scope of the invention herein involved, it is intended that all matter contained in the above description, or shown in the accom- 4 panying drawings, shall be interpreted as illustrative and not in a limiting sense.
What is claimed is: V
1. A coating apparatus for the continuous coating of a substrate with metal, said coating apparatus comprising a vacuum chamber, an evacuation means for evacuating said chamber, a hollow member located within said vacuum chamber and adapted to form an inner chamber capable of contining vapors of a metal, means for feeding a supply of metal into the inner chamber in position to be heated to vaporization temperature, said hollow member being provided with openings which communicate with the vacuum chamber to permit travel of a substrate to and from said inner chamber, means for guiding said substrate through said openings, and means for electrically heating the interior surfaces of said hollow member and the supply of metal therewithin to a temperature sutliciently high to provide a partial pressure of the metal vapors which is higher than the pressure existing in the vacuum chamber outside of the inner chamber, the surface temperature of the hollow member being at substantially the same temperature as the temperature of the supply of metal to provide equal coating on all surfaces of the substrate while maintaining the substrate at a substantially lower temperature than the temperature of the hollow member.
2. The apparatus of claim l wherein the hollow member is formed of a carbonaceous material which is heated to the requisite high temperature by electrical currents flowing therewithin.
3. The apparatus of claim 2 wherein the coating metal is aluminum and the carbonaceous material has an inner surface comprising a carbide which is relatively inert to aluminum at temperatures on the order of l250 C. .and is wetted by molten aluminum.
References Cited in the tile of this patent UNITED STATES PATENTS 1,263,858 Cole Apr. 23, 1918 2,074,281 Sommer Mar. 16, 1937 2,255,436 Olson Sept. 9, 1941 2,273,941 Dom Feb. 24, 1942 2,354,521 Hewlett July 25, 1944 2,382,432 McManus Aug. 14, 1945 2,665.223 Clough et al. Jan. 5, 1954 2,702,760 Barth Feb. 22, 1955 FOREIGN PATENTS 276,390 Great Britain Aug. 23, 1927
US481618A 1955-01-13 1955-01-13 Vaporized metal coating apparatus Expired - Lifetime US2879739A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US481618A US2879739A (en) 1955-01-13 1955-01-13 Vaporized metal coating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US481618A US2879739A (en) 1955-01-13 1955-01-13 Vaporized metal coating apparatus

Publications (1)

Publication Number Publication Date
US2879739A true US2879739A (en) 1959-03-31

Family

ID=23912687

Family Applications (1)

Application Number Title Priority Date Filing Date
US481618A Expired - Lifetime US2879739A (en) 1955-01-13 1955-01-13 Vaporized metal coating apparatus

Country Status (1)

Country Link
US (1) US2879739A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3188726A (en) * 1962-05-16 1965-06-15 Laske Hans Device for evaporating coatings from extremely thin metal elements
US3216710A (en) * 1961-06-30 1965-11-09 Union Carbide Corp Aluminum vaporizer
US3379803A (en) * 1964-05-04 1968-04-23 Union Carbide Corp Coating method and apparatus for deposition of polymer-forming vapor under vacuum
US3392899A (en) * 1964-11-03 1968-07-16 Norton Co Pressure sensitive tapes with solderable layer
US3655428A (en) * 1969-01-02 1972-04-11 Centre Nat Rech Metall Coating metallic materials
US3690638A (en) * 1970-05-15 1972-09-12 Republic Steel Corp Apparatus and method for vaporizing molten metal
US3925146A (en) * 1970-12-09 1975-12-09 Minnesota Mining & Mfg Method for producing epitaxial thin-film fabry-perot cavity suitable for use as a laser crystal by vacuum evaporation and product thereof
US4479369A (en) * 1983-04-04 1984-10-30 Sando Iron Works Co., Ltd. Apparatus for treating a textile product with the use of low-temperature plasma
US5048456A (en) * 1989-04-04 1991-09-17 Centre National De La Recherche Scientifique Device for continuously coating a carbon fiber fabric with a carbide-based passivating protective layer

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1263858A (en) * 1917-12-27 1918-04-23 William L Cole Apparatus for applying coatings to bars, rods, pipes, &c.
GB276390A (en) * 1926-03-23 1927-08-23 American Mach & Foundry Improvements in methods and apparatus for coating metals with metal
US2074281A (en) * 1933-07-13 1937-03-16 Sommer Ludwig August Method and apparatus for the production of metallic coatings on electrically nonconducting substances by the thermal vaporization of metals in vacuo
US2255436A (en) * 1939-09-19 1941-09-09 Anaconda Wire & Cable Co Coating apparatus and method of operation
US2273941A (en) * 1937-08-11 1942-02-24 Bosch Gmbh Robert Process for the production of resistances
US2354521A (en) * 1943-01-07 1944-07-25 Gen Electric Evaporator for treating surfaces
US2382432A (en) * 1940-08-02 1945-08-14 Crown Cork & Seal Co Method and apparatus for depositing vaporized metal coatings
US2665223A (en) * 1949-12-31 1954-01-05 Nat Res Corp Process for depositing an aluminum film on a substrate by thermal vaporization
US2702760A (en) * 1951-04-25 1955-02-22 Western Electric Co Method of applying metallic stripes to a web of paper

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1263858A (en) * 1917-12-27 1918-04-23 William L Cole Apparatus for applying coatings to bars, rods, pipes, &c.
GB276390A (en) * 1926-03-23 1927-08-23 American Mach & Foundry Improvements in methods and apparatus for coating metals with metal
US2074281A (en) * 1933-07-13 1937-03-16 Sommer Ludwig August Method and apparatus for the production of metallic coatings on electrically nonconducting substances by the thermal vaporization of metals in vacuo
US2273941A (en) * 1937-08-11 1942-02-24 Bosch Gmbh Robert Process for the production of resistances
US2255436A (en) * 1939-09-19 1941-09-09 Anaconda Wire & Cable Co Coating apparatus and method of operation
US2382432A (en) * 1940-08-02 1945-08-14 Crown Cork & Seal Co Method and apparatus for depositing vaporized metal coatings
US2354521A (en) * 1943-01-07 1944-07-25 Gen Electric Evaporator for treating surfaces
US2665223A (en) * 1949-12-31 1954-01-05 Nat Res Corp Process for depositing an aluminum film on a substrate by thermal vaporization
US2702760A (en) * 1951-04-25 1955-02-22 Western Electric Co Method of applying metallic stripes to a web of paper

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3216710A (en) * 1961-06-30 1965-11-09 Union Carbide Corp Aluminum vaporizer
US3188726A (en) * 1962-05-16 1965-06-15 Laske Hans Device for evaporating coatings from extremely thin metal elements
US3379803A (en) * 1964-05-04 1968-04-23 Union Carbide Corp Coating method and apparatus for deposition of polymer-forming vapor under vacuum
US3392899A (en) * 1964-11-03 1968-07-16 Norton Co Pressure sensitive tapes with solderable layer
US3655428A (en) * 1969-01-02 1972-04-11 Centre Nat Rech Metall Coating metallic materials
US3690638A (en) * 1970-05-15 1972-09-12 Republic Steel Corp Apparatus and method for vaporizing molten metal
US3925146A (en) * 1970-12-09 1975-12-09 Minnesota Mining & Mfg Method for producing epitaxial thin-film fabry-perot cavity suitable for use as a laser crystal by vacuum evaporation and product thereof
US4479369A (en) * 1983-04-04 1984-10-30 Sando Iron Works Co., Ltd. Apparatus for treating a textile product with the use of low-temperature plasma
US5048456A (en) * 1989-04-04 1991-09-17 Centre National De La Recherche Scientifique Device for continuously coating a carbon fiber fabric with a carbide-based passivating protective layer

Similar Documents

Publication Publication Date Title
US2664852A (en) Vapor coating apparatus
US2665226A (en) Method and apparatus for vapor coating
US2879739A (en) Vaporized metal coating apparatus
US2996418A (en) Method and apparatus for vapor depositing thin films
US2665225A (en) Apparatus and process for coating by vapor deposition
US2664853A (en) Apparatus for vapor coating
US3181209A (en) Foil production
US2665227A (en) Apparatus and method of coating by vapor deposition
US3230110A (en) Method of forming carbon vapor barrier
US2971862A (en) Vapor deposition method and apparatus
US2665320A (en) Metal vaporizing crucible
US3227132A (en) Apparatus for depositing coatings of tin on a flexible substrate
US3138434A (en) Deposition method of forming a pyrolytic graphite article
US3860444A (en) Coating of workpieces by vapor deposition
US2183302A (en) Method for producing coatings of high ohmic resistance in the interior of vacuum tubes
US2822301A (en) Vacuum metallizing and apparatus therefor
US4635586A (en) Setup for producing metallic coatings
US3216710A (en) Aluminum vaporizer
US2846971A (en) Apparatus for coating particulate material by thermal evaporation
US3036549A (en) Apparatus for vacuum evaporation of metals
US3208873A (en) Method and apparatus for depositing films of refractory metal oxides and refractory metals
Balon et al. Diamond-like carbon thin films for high-temperature applications prepared by filtered pulsed laser deposition
US2899528A (en) Method and apparatus for supplying
US3700486A (en) Method for coating filaments
US3029777A (en) Vapor deposition coating apparatus