GB1308243A - Radio frequency sputter apparatus - Google Patents

Radio frequency sputter apparatus

Info

Publication number
GB1308243A
GB1308243A GB2687770A GB2687770A GB1308243A GB 1308243 A GB1308243 A GB 1308243A GB 2687770 A GB2687770 A GB 2687770A GB 2687770 A GB2687770 A GB 2687770A GB 1308243 A GB1308243 A GB 1308243A
Authority
GB
United Kingdom
Prior art keywords
electrode structure
inductor
june
bell jar
earth potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2687770A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB1308243A publication Critical patent/GB1308243A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
GB2687770A 1969-06-11 1970-06-03 Radio frequency sputter apparatus Expired GB1308243A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83224669A 1969-06-11 1969-06-11

Publications (1)

Publication Number Publication Date
GB1308243A true GB1308243A (en) 1973-02-21

Family

ID=25261097

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2687770A Expired GB1308243A (en) 1969-06-11 1970-06-03 Radio frequency sputter apparatus

Country Status (6)

Country Link
JP (1) JPS4820707B1 (enExample)
CA (1) CA918601A (enExample)
CH (1) CH517833A (enExample)
DE (1) DE2022957A1 (enExample)
FR (1) FR2049999A5 (enExample)
GB (1) GB1308243A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5375213U (enExample) * 1976-11-26 1978-06-23
DE4042417C2 (de) * 1990-07-17 1993-11-25 Balzers Hochvakuum Ätz- oder Beschichtungsanlage sowie Verfahren zu ihrem Zünden oder intermittierenden Betreiben
DE4022708A1 (de) * 1990-07-17 1992-04-02 Balzers Hochvakuum Aetz- oder beschichtungsanlagen

Also Published As

Publication number Publication date
FR2049999A5 (enExample) 1971-03-26
CH517833A (de) 1972-01-15
DE2022957A1 (de) 1970-12-17
JPS4820707B1 (enExample) 1973-06-22
CA918601A (en) 1973-01-09

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees