JPS4820707B1 - - Google Patents
Info
- Publication number
- JPS4820707B1 JPS4820707B1 JP4959870A JP4959870A JPS4820707B1 JP S4820707 B1 JPS4820707 B1 JP S4820707B1 JP 4959870 A JP4959870 A JP 4959870A JP 4959870 A JP4959870 A JP 4959870A JP S4820707 B1 JPS4820707 B1 JP S4820707B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US83224669A | 1969-06-11 | 1969-06-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4820707B1 true JPS4820707B1 (enExample) | 1973-06-22 |
Family
ID=25261097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4959870A Pending JPS4820707B1 (enExample) | 1969-06-11 | 1970-06-10 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS4820707B1 (enExample) |
| CA (1) | CA918601A (enExample) |
| CH (1) | CH517833A (enExample) |
| DE (1) | DE2022957A1 (enExample) |
| FR (1) | FR2049999A5 (enExample) |
| GB (1) | GB1308243A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5375213U (enExample) * | 1976-11-26 | 1978-06-23 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4042417C2 (de) * | 1990-07-17 | 1993-11-25 | Balzers Hochvakuum | Ätz- oder Beschichtungsanlage sowie Verfahren zu ihrem Zünden oder intermittierenden Betreiben |
| DE4022708A1 (de) * | 1990-07-17 | 1992-04-02 | Balzers Hochvakuum | Aetz- oder beschichtungsanlagen |
-
1970
- 1970-05-12 DE DE19702022957 patent/DE2022957A1/de active Pending
- 1970-06-03 GB GB2687770A patent/GB1308243A/en not_active Expired
- 1970-06-04 CA CA084677A patent/CA918601A/en not_active Expired
- 1970-06-05 FR FR7020763A patent/FR2049999A5/fr not_active Expired
- 1970-06-10 JP JP4959870A patent/JPS4820707B1/ja active Pending
- 1970-09-09 CH CH865570A patent/CH517833A/de not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5375213U (enExample) * | 1976-11-26 | 1978-06-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2049999A5 (enExample) | 1971-03-26 |
| CH517833A (de) | 1972-01-15 |
| DE2022957A1 (de) | 1970-12-17 |
| GB1308243A (en) | 1973-02-21 |
| CA918601A (en) | 1973-01-09 |