CA918601A - Method and apparatus for radio frequency sputter - Google Patents

Method and apparatus for radio frequency sputter

Info

Publication number
CA918601A
CA918601A CA084677A CA84677A CA918601A CA 918601 A CA918601 A CA 918601A CA 084677 A CA084677 A CA 084677A CA 84677 A CA84677 A CA 84677A CA 918601 A CA918601 A CA 918601A
Authority
CA
Canada
Prior art keywords
radio frequency
frequency sputter
sputter
radio
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA084677A
Inventor
F. Herte Lawrence
Albert Lang, Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Application granted granted Critical
Publication of CA918601A publication Critical patent/CA918601A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
CA084677A 1969-06-11 1970-06-04 Method and apparatus for radio frequency sputter Expired CA918601A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83224669A 1969-06-11 1969-06-11

Publications (1)

Publication Number Publication Date
CA918601A true CA918601A (en) 1973-01-09

Family

ID=25261097

Family Applications (1)

Application Number Title Priority Date Filing Date
CA084677A Expired CA918601A (en) 1969-06-11 1970-06-04 Method and apparatus for radio frequency sputter

Country Status (6)

Country Link
JP (1) JPS4820707B1 (en)
CA (1) CA918601A (en)
CH (1) CH517833A (en)
DE (1) DE2022957A1 (en)
FR (1) FR2049999A5 (en)
GB (1) GB1308243A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5375213U (en) * 1976-11-26 1978-06-23
DE4022708A1 (en) * 1990-07-17 1992-04-02 Balzers Hochvakuum ETCHING OR COATING PLANTS
DE4042417C2 (en) * 1990-07-17 1993-11-25 Balzers Hochvakuum Etching or coating system and method for igniting or intermittent operation

Also Published As

Publication number Publication date
CH517833A (en) 1972-01-15
DE2022957A1 (en) 1970-12-17
JPS4820707B1 (en) 1973-06-22
GB1308243A (en) 1973-02-21
FR2049999A5 (en) 1971-03-26

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