CA837593A - Method and apparatus for the radio frequency sputtering of dielectric materials - Google Patents

Method and apparatus for the radio frequency sputtering of dielectric materials

Info

Publication number
CA837593A
CA837593A CA837593A CA837593DA CA837593A CA 837593 A CA837593 A CA 837593A CA 837593 A CA837593 A CA 837593A CA 837593D A CA837593D A CA 837593DA CA 837593 A CA837593 A CA 837593A
Authority
CA
Canada
Prior art keywords
radio frequency
dielectric materials
frequency sputtering
sputtering
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA837593A
Inventor
D. Davidse Pieter
J. Kleinfelder Walter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA837593A publication Critical patent/CA837593A/en
Expired legal-status Critical Current

Links

CA837593A Method and apparatus for the radio frequency sputtering of dielectric materials Expired CA837593A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA837593T

Publications (1)

Publication Number Publication Date
CA837593A true CA837593A (en) 1970-03-24

Family

ID=36321787

Family Applications (1)

Application Number Title Priority Date Filing Date
CA837593A Expired CA837593A (en) Method and apparatus for the radio frequency sputtering of dielectric materials

Country Status (1)

Country Link
CA (1) CA837593A (en)

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