CA855193A - Apparatus for the radio frequency sputtering of materials - Google Patents

Apparatus for the radio frequency sputtering of materials

Info

Publication number
CA855193A
CA855193A CA855193A CA855193DA CA855193A CA 855193 A CA855193 A CA 855193A CA 855193 A CA855193 A CA 855193A CA 855193D A CA855193D A CA 855193DA CA 855193 A CA855193 A CA 855193A
Authority
CA
Canada
Prior art keywords
materials
radio frequency
frequency sputtering
sputtering
radio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA855193A
Inventor
D. Davidse Pieter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA855193A publication Critical patent/CA855193A/en
Expired legal-status Critical Current

Links

CA855193A Apparatus for the radio frequency sputtering of materials Expired CA855193A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA855193T

Publications (1)

Publication Number Publication Date
CA855193A true CA855193A (en) 1970-11-03

Family

ID=36340768

Family Applications (1)

Application Number Title Priority Date Filing Date
CA855193A Expired CA855193A (en) Apparatus for the radio frequency sputtering of materials

Country Status (1)

Country Link
CA (1) CA855193A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4415602A (en) * 1981-07-24 1983-11-15 Canadian Industrial Innovation Centre/Waterloo Reactive plating method and product

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4415602A (en) * 1981-07-24 1983-11-15 Canadian Industrial Innovation Centre/Waterloo Reactive plating method and product

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