CA813321A - Method and apparatus for ionic sputtering - Google Patents

Method and apparatus for ionic sputtering

Info

Publication number
CA813321A
CA813321A CA813321A CA813321DA CA813321A CA 813321 A CA813321 A CA 813321A CA 813321 A CA813321 A CA 813321A CA 813321D A CA813321D A CA 813321DA CA 813321 A CA813321 A CA 813321A
Authority
CA
Canada
Prior art keywords
ionic sputtering
sputtering
ionic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA813321A
Inventor
S. Anderson Gerald
M. Moseson Roger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Guidance and Electronics Co Inc
Original Assignee
Litton Systems Inc
Publication date
Application granted granted Critical
Publication of CA813321A publication Critical patent/CA813321A/en
Expired legal-status Critical Current

Links

CA813321A Method and apparatus for ionic sputtering Expired CA813321A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA813321T

Publications (1)

Publication Number Publication Date
CA813321A true CA813321A (en) 1969-05-20

Family

ID=36285820

Family Applications (1)

Application Number Title Priority Date Filing Date
CA813321A Expired CA813321A (en) Method and apparatus for ionic sputtering

Country Status (1)

Country Link
CA (1) CA813321A (en)

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