CH517833A - Hochfrequenz-Sprühvorrichtung - Google Patents

Hochfrequenz-Sprühvorrichtung

Info

Publication number
CH517833A
CH517833A CH865570A CH865570A CH517833A CH 517833 A CH517833 A CH 517833A CH 865570 A CH865570 A CH 865570A CH 865570 A CH865570 A CH 865570A CH 517833 A CH517833 A CH 517833A
Authority
CH
Switzerland
Prior art keywords
high frequency
spray device
frequency spray
spray
frequency
Prior art date
Application number
CH865570A
Other languages
English (en)
Inventor
Lang Albert Jr
Francis Herte Lawrence
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Publication of CH517833A publication Critical patent/CH517833A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
CH865570A 1969-06-11 1970-09-09 Hochfrequenz-Sprühvorrichtung CH517833A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83224669A 1969-06-11 1969-06-11

Publications (1)

Publication Number Publication Date
CH517833A true CH517833A (de) 1972-01-15

Family

ID=25261097

Family Applications (1)

Application Number Title Priority Date Filing Date
CH865570A CH517833A (de) 1969-06-11 1970-09-09 Hochfrequenz-Sprühvorrichtung

Country Status (6)

Country Link
JP (1) JPS4820707B1 (de)
CA (1) CA918601A (de)
CH (1) CH517833A (de)
DE (1) DE2022957A1 (de)
FR (1) FR2049999A5 (de)
GB (1) GB1308243A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5375213U (de) * 1976-11-26 1978-06-23
DE4022708A1 (de) * 1990-07-17 1992-04-02 Balzers Hochvakuum Aetz- oder beschichtungsanlagen
DE4042417C2 (de) * 1990-07-17 1993-11-25 Balzers Hochvakuum Ätz- oder Beschichtungsanlage sowie Verfahren zu ihrem Zünden oder intermittierenden Betreiben

Also Published As

Publication number Publication date
GB1308243A (en) 1973-02-21
JPS4820707B1 (de) 1973-06-22
DE2022957A1 (de) 1970-12-17
CA918601A (en) 1973-01-09
FR2049999A5 (de) 1971-03-26

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Legal Events

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