GB1284224A - Radio frequency sputtering apparatus - Google Patents

Radio frequency sputtering apparatus

Info

Publication number
GB1284224A
GB1284224A GB5909368A GB5909368A GB1284224A GB 1284224 A GB1284224 A GB 1284224A GB 5909368 A GB5909368 A GB 5909368A GB 5909368 A GB5909368 A GB 5909368A GB 1284224 A GB1284224 A GB 1284224A
Authority
GB
United Kingdom
Prior art keywords
sputtering apparatus
substrates
electrodes
radio frequency
frequency sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5909368A
Inventor
Geoffrey Norman Jackson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum International Ltd
Original Assignee
Edwards High Vacuum International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards High Vacuum International Ltd filed Critical Edwards High Vacuum International Ltd
Priority to GB5909368A priority Critical patent/GB1284224A/en
Priority to US783767A priority patent/US3580946A/en
Priority to DE19691960641 priority patent/DE1960641A1/en
Priority to FR6943191A priority patent/FR2026021A1/fr
Publication of GB1284224A publication Critical patent/GB1284224A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
    • C09B23/14—Styryl dyes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60Q—ARRANGEMENT OF SIGNALLING OR LIGHTING DEVICES, THE MOUNTING OR SUPPORTING THEREOF OR CIRCUITS THEREFOR, FOR VEHICLES IN GENERAL
    • B60Q7/00—Arrangement or adaptation of portable emergency signal devices on vehicles
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C255/00—Carboxylic acid nitriles
    • C07C255/01—Carboxylic acid nitriles having cyano groups bound to acyclic carbon atoms
    • C07C255/32—Carboxylic acid nitriles having cyano groups bound to acyclic carbon atoms having cyano groups bound to acyclic carbon atoms of a carbon skeleton containing at least one six-membered aromatic ring
    • C07C255/34—Carboxylic acid nitriles having cyano groups bound to acyclic carbon atoms having cyano groups bound to acyclic carbon atoms of a carbon skeleton containing at least one six-membered aromatic ring with cyano groups linked to the six-membered aromatic ring, or to the condensed ring system containing that ring, by unsaturated carbon chains
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrostatic Spraying Apparatus (AREA)

Abstract

1284224 Sputtering apparatus EDWARDS HIGH VACUUM INTERNATIONAL Ltd 13 Nov 1969 [12 Dec 1968] 59093/68 Heading C7F A R. F. sputtering apparatus comprises a vacuum chamber which may be water cooled, target electrodes 5, 6 with earthed shields 7, 8, and a rotatable drum 9 carrying the substrates. A magnet field is provided by an electromagnet 10. The electrodes may be arranged in one or more pairs; and they may be inside the substrate carrying drum. Alternatively the substrates may be passed in line across the electrodes. The temperature of the substrates may be controlled by radiant heaters 12.
GB5909368A 1967-12-29 1968-12-12 Radio frequency sputtering apparatus Expired GB1284224A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB5909368A GB1284224A (en) 1968-12-12 1968-12-12 Radio frequency sputtering apparatus
US783767A US3580946A (en) 1967-12-29 1968-12-13 Cyano containing styryl dyestuffs
DE19691960641 DE1960641A1 (en) 1968-12-12 1969-12-03 High frequency atomization device
FR6943191A FR2026021A1 (en) 1968-12-12 1969-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5909368A GB1284224A (en) 1968-12-12 1968-12-12 Radio frequency sputtering apparatus

Publications (1)

Publication Number Publication Date
GB1284224A true GB1284224A (en) 1972-08-02

Family

ID=10483051

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5909368A Expired GB1284224A (en) 1967-12-29 1968-12-12 Radio frequency sputtering apparatus

Country Status (3)

Country Link
DE (1) DE1960641A1 (en)
FR (1) FR2026021A1 (en)
GB (1) GB1284224A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2290801A (en) * 1994-06-30 1996-01-10 Agency Ind Science Techn Producing thin film using high gravity field

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3829373A (en) * 1973-01-12 1974-08-13 Coulter Information Systems Thin film deposition apparatus using segmented target means

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2290801A (en) * 1994-06-30 1996-01-10 Agency Ind Science Techn Producing thin film using high gravity field
US5635241A (en) * 1994-06-30 1997-06-03 Agency Of Industrial Science And Technology Method for producing thin film and apparatus therefor
GB2290801B (en) * 1994-06-30 1998-11-25 Agency Ind Science Techn Method for producing thin film and apparatus therefor

Also Published As

Publication number Publication date
FR2026021A1 (en) 1970-09-11
DE1960641A1 (en) 1970-07-02

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees