FI116832B - Menetelmä epäorgaanisten oksidien silyloimiseksi - Google Patents

Menetelmä epäorgaanisten oksidien silyloimiseksi Download PDF

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Publication number
FI116832B
FI116832B FI952622A FI952622A FI116832B FI 116832 B FI116832 B FI 116832B FI 952622 A FI952622 A FI 952622A FI 952622 A FI952622 A FI 952622A FI 116832 B FI116832 B FI 116832B
Authority
FI
Finland
Prior art keywords
finely divided
silylation
silica
polar
silylating agent
Prior art date
Application number
FI952622A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI952622A0 (fi
FI952622A (fi
Inventor
Herbert Barthel
Mario Heinemann
Franz Herrmann
August Altenbuchner
Original Assignee
Wacker Chemie Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6519579&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FI116832(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Wacker Chemie Ag filed Critical Wacker Chemie Ag
Publication of FI952622A0 publication Critical patent/FI952622A0/fi
Publication of FI952622A publication Critical patent/FI952622A/fi
Application granted granted Critical
Publication of FI116832B publication Critical patent/FI116832B/fi

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/02—Inorganic compounds ; Elemental compounds
    • C11D3/12—Water-insoluble compounds
    • C11D3/124—Silicon containing, e.g. silica, silex, quartz or glass beads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/02—Foam dispersion or prevention
    • B01D19/04—Foam dispersion or prevention by addition of chemical substances
    • B01D19/0404—Foam dispersion or prevention by addition of chemical substances characterised by the nature of the chemical substance
    • B01D19/0409—Foam dispersion or prevention by addition of chemical substances characterised by the nature of the chemical substance compounds containing Si-atoms
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/14—Methods for preparing oxides or hydroxides in general
    • C01B13/145—After-treatment of oxides or hydroxides, e.g. pulverising, drying, decreasing the acidity
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/28—Compounds of silicon
    • C09C1/30—Silicic acid
    • C09C1/3081—Treatment with organo-silicon compounds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C3/00—Treatment in general of inorganic materials, other than fibrous fillers, to enhance their pigmenting or filling properties
    • C09C3/12—Treatment with organosilicon compounds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • C09D7/43—Thickening agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40—Additives
    • C09D7/66—Additives characterised by particle size
    • C09D7/67—Particle size smaller than 100 nm
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/32—Materials not provided for elsewhere for absorbing liquids to remove pollution, e.g. oil, gasoline, fat
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/12—Surface area
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/22—Rheological behaviour as dispersion, e.g. viscosity, sedimentation stability
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/34—Silicon-containing compounds
    • C08K3/36—Silica
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/54—Silicon-containing compounds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K9/00—Use of pretreated ingredients
    • C08K9/08—Ingredients agglomerated by treatment with a binding agent

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Nanotechnology (AREA)
  • Toxicology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Public Health (AREA)
  • Silicon Compounds (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Developing Agents For Electrophotography (AREA)
  • Pigments, Carbon Blacks, Or Wood Stains (AREA)
  • Paper (AREA)
FI952622A 1994-06-01 1995-05-30 Menetelmä epäorgaanisten oksidien silyloimiseksi FI116832B (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4419234 1994-06-01
DE4419234A DE4419234A1 (de) 1994-06-01 1994-06-01 Verfahren zur Silylierung von anorganischen Oxiden

Publications (3)

Publication Number Publication Date
FI952622A0 FI952622A0 (fi) 1995-05-30
FI952622A FI952622A (fi) 1995-12-02
FI116832B true FI116832B (fi) 2006-03-15

Family

ID=6519579

Family Applications (1)

Application Number Title Priority Date Filing Date
FI952622A FI116832B (fi) 1994-06-01 1995-05-30 Menetelmä epäorgaanisten oksidien silyloimiseksi

Country Status (15)

Country Link
US (2) US5686054A (ja)
EP (1) EP0686676B1 (ja)
JP (1) JP2918092B2 (ja)
CN (1) CN1051747C (ja)
AT (1) ATE169948T1 (ja)
AU (1) AU669647B2 (ja)
BR (1) BR9502619A (ja)
CA (1) CA2149821C (ja)
DE (2) DE4419234A1 (ja)
ES (1) ES2121261T3 (ja)
FI (1) FI116832B (ja)
NO (1) NO316383B1 (ja)
RU (1) RU2137712C1 (ja)
TW (1) TW311904B (ja)
UA (1) UA43328C2 (ja)

Families Citing this family (123)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6191122B1 (en) 1996-03-29 2001-02-20 DEGUSSA HüLS AKTIENGESELLSCHAFT Partially hydrophobic precipitated silicas
IN191468B (ja) * 1996-03-29 2003-12-06 Degussa
DE19742761A1 (de) * 1997-09-27 1999-04-01 Gerd Dr Rossmy An ihrer Oberfläche anisotrop verteilte überwiegend hydrophile und überwiegend hydrophobe Domänen aufweisende amphiphile Teilchen oder Moleküle
DE19756831A1 (de) 1997-12-19 1999-07-01 Wacker Chemie Gmbh Siliciumdioxid, das an seiner Oberfläche teil- oder vollständig silylierte Polykieselsäureketten trägt
DE19757210A1 (de) * 1997-12-22 1999-07-01 Degussa Hydrophobierte, pyrogen hergestellte Oxide
DE69915590T2 (de) * 1998-01-15 2004-08-05 Cabot Corp., Boston Verfahren zur herstellung von organisch modifizierter kieselgel
WO1999036356A2 (en) * 1998-01-15 1999-07-22 Cabot Corporation Polyfunctional organosilane treatment of silica
EP1047734B1 (en) * 1998-01-15 2004-10-27 Cabot Corporation Method of preparing treated silica
US5981131A (en) * 1998-07-27 1999-11-09 Mitsubishi Chemical America, Inc. Electrostatic toner composition to enhance copy quality by rejection of ghosting and method of manufacturing same
US6383466B1 (en) * 1998-12-28 2002-05-07 Battelle Memorial Institute Method of dehydroxylating a hydroxylated material and method of making a mesoporous film
US6174926B1 (en) 1999-01-13 2001-01-16 Cabot Corporation Method of preparing organically modified silica
GB9927431D0 (en) * 1999-11-22 2000-01-19 Ciba Sc Holding Ag Casting resin and process for the fabrication of resin molds
GB2357497A (en) * 1999-12-22 2001-06-27 Degussa Hydrophobic silica
DE19963187B4 (de) * 1999-12-27 2006-10-26 Deutsche Amphibolin-Werke Von Robert Murjahn Gmbh & Co. Kg Wässriges Beschichtungsmaterial mit schmutz- und wasserabweisender Wirkung, Verfahren zu seiner Herstellung und dessen Verwendung
AU4227301A (en) * 2000-02-29 2001-09-12 Aluminium Feron Gmbh And Co. Lacquer, a coating material produced therefrom, and method for producing said coating material
US20010036437A1 (en) * 2000-04-03 2001-11-01 Andreas Gutsch Nanoscale pyrogenic oxides
DE50005683D1 (de) 2000-04-11 2004-04-22 Degussa Streichfarben für Inkjet-Medien
DE10109484A1 (de) * 2001-02-28 2002-09-12 Degussa Oberflächenmodifizierte, dotierte, pyrogen hergestellte Oxide
US6861115B2 (en) * 2001-05-18 2005-03-01 Cabot Corporation Ink jet recording medium comprising amine-treated silica
EP1276017B1 (en) 2001-07-11 2006-06-14 Seiko Epson Corporation Non-magnetic single-component toner, method of preparing the same, and image forming apparatus using the same
DE10138492A1 (de) * 2001-08-04 2003-02-13 Degussa Hydrophobe, nicht getemperte Fällungskieselsäure mit hohem Weißgrad
DE10145162A1 (de) * 2001-09-13 2003-04-10 Wacker Chemie Gmbh Kieselsäure mit geringem Gehalt an Kieselsäure-Silanolgruppen
DE10150274A1 (de) * 2001-10-12 2003-04-30 Wacker Chemie Gmbh Kieselsäure mit homogener Silyliermittelschicht
JP3886363B2 (ja) * 2001-11-14 2007-02-28 電気化学工業株式会社 疎水性シリカ微粉体の製造方法
DE10211313A1 (de) 2002-03-14 2003-10-02 Wacker Chemie Gmbh Mehrfachemulsionen
DE10239425A1 (de) * 2002-08-28 2004-03-11 Degussa Ag Lackformulierungen
DE10260323A1 (de) * 2002-12-20 2004-07-08 Wacker-Chemie Gmbh Wasserbenetzbare silylierte Metalloxide
JP4299336B2 (ja) * 2003-02-20 2009-07-22 ワッカー ケミー アクチエンゲゼルシャフト 分散体安定化方法
US7176144B1 (en) 2003-03-31 2007-02-13 Novellus Systems, Inc. Plasma detemplating and silanol capping of porous dielectric films
US7241704B1 (en) 2003-03-31 2007-07-10 Novellus Systems, Inc. Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups
US7208389B1 (en) 2003-03-31 2007-04-24 Novellus Systems, Inc. Method of porogen removal from porous low-k films using UV radiation
US7265061B1 (en) 2003-05-09 2007-09-04 Novellus Systems, Inc. Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical properties
DE10330020A1 (de) * 2003-07-03 2005-01-20 Degussa Ag Hochgefüllte Silan-Zubereitung
US7169375B2 (en) * 2003-08-29 2007-01-30 General Electric Company Metal oxide nanoparticles, methods of making, and methods of use
DE10342828A1 (de) * 2003-09-17 2005-04-14 Degussa Ag Hochreines, pyrogen hergestelltes Siliciumdioxid
DE20321548U1 (de) * 2003-09-19 2007-11-29 Gallus Druckmaschinen Gmbh Rotationsdruckmaschine
US7390537B1 (en) 2003-11-20 2008-06-24 Novellus Systems, Inc. Methods for producing low-k CDO films with low residual stress
US20050205102A1 (en) * 2004-01-30 2005-09-22 Philip Morris Usa Inc. Method of making surface modified silica gel
US7094713B1 (en) 2004-03-11 2006-08-22 Novellus Systems, Inc. Methods for improving the cracking resistance of low-k dielectric materials
US7381662B1 (en) 2004-03-11 2008-06-03 Novellus Systems, Inc. Methods for improving the cracking resistance of low-k dielectric materials
US7341761B1 (en) 2004-03-11 2008-03-11 Novellus Systems, Inc. Methods for producing low-k CDO films
DE102004014704A1 (de) * 2004-03-25 2005-10-13 Wacker-Chemie Gmbh Partikelstabilisierte Emulsionen
US7781351B1 (en) 2004-04-07 2010-08-24 Novellus Systems, Inc. Methods for producing low-k carbon doped oxide films with low residual stress
US7253125B1 (en) 2004-04-16 2007-08-07 Novellus Systems, Inc. Method to improve mechanical strength of low-k dielectric film using modulated UV exposure
US7622400B1 (en) 2004-05-18 2009-11-24 Novellus Systems, Inc. Method for improving mechanical properties of low dielectric constant materials
DE102004039212A1 (de) * 2004-08-12 2006-03-02 Wacker-Chemie Gmbh Rheologiesteuerung von Pickering-Emulsion durch Elektrolyte
US7326444B1 (en) 2004-09-14 2008-02-05 Novellus Systems, Inc. Methods for improving integration performance of low stress CDO films
US9659769B1 (en) 2004-10-22 2017-05-23 Novellus Systems, Inc. Tensile dielectric films using UV curing
US7790633B1 (en) 2004-10-26 2010-09-07 Novellus Systems, Inc. Sequential deposition/anneal film densification method
US7695765B1 (en) 2004-11-12 2010-04-13 Novellus Systems, Inc. Methods for producing low-stress carbon-doped oxide films with improved integration properties
US7510982B1 (en) 2005-01-31 2009-03-31 Novellus Systems, Inc. Creation of porosity in low-k films by photo-disassociation of imbedded nanoparticles
US7166531B1 (en) 2005-01-31 2007-01-23 Novellus Systems, Inc. VLSI fabrication processes for introducing pores into dielectric materials
DE102005006870A1 (de) * 2005-02-14 2006-08-24 Byk-Chemie Gmbh Oberflächenmodifizierte Nanopartikel, Verfahren zu ihrer Herstellung und ihre Verwendung
DE102005007753A1 (de) * 2005-02-18 2006-08-31 Wacker Chemie Ag Partikel mit geringer spezifischer Oberfläche und hoher Verdickungswirkung
DE102005012409A1 (de) 2005-03-17 2006-09-21 Wacker Chemie Ag Wäßrige Dispersionen teilhydrophober Kieselsäuren
US8282768B1 (en) 2005-04-26 2012-10-09 Novellus Systems, Inc. Purging of porogen from UV cure chamber
US8137465B1 (en) 2005-04-26 2012-03-20 Novellus Systems, Inc. Single-chamber sequential curing of semiconductor wafers
US8454750B1 (en) 2005-04-26 2013-06-04 Novellus Systems, Inc. Multi-station sequential curing of dielectric films
US8980769B1 (en) 2005-04-26 2015-03-17 Novellus Systems, Inc. Multi-station sequential curing of dielectric films
US8889233B1 (en) 2005-04-26 2014-11-18 Novellus Systems, Inc. Method for reducing stress in porous dielectric films
DE102005035442A1 (de) 2005-07-28 2007-05-16 Wacker Chemie Ag Stabilisierte HDK-Suspensionen zur Verstärkung von Reaktivharzen
US7892985B1 (en) 2005-11-15 2011-02-22 Novellus Systems, Inc. Method for porogen removal and mechanical strength enhancement of low-k carbon doped silicon oxide using low thermal budget microwave curing
US9308520B2 (en) 2005-12-16 2016-04-12 Akzo Nobel N.V. Silica based material
JP4999861B2 (ja) 2005-12-16 2012-08-15 アクゾ ノーベル ナムローゼ フェンノートシャップ シリカをベースとする材料
US7381644B1 (en) 2005-12-23 2008-06-03 Novellus Systems, Inc. Pulsed PECVD method for modulating hydrogen content in hard mask
US8110493B1 (en) 2005-12-23 2012-02-07 Novellus Systems, Inc. Pulsed PECVD method for modulating hydrogen content in hard mask
US20090030222A1 (en) * 2006-01-19 2009-01-29 Dow Corning Corporation Systems and methods for functionalizing particulates with silane-containing materials
US7923376B1 (en) 2006-03-30 2011-04-12 Novellus Systems, Inc. Method of reducing defects in PECVD TEOS films
DE102006014875A1 (de) 2006-03-30 2007-10-04 Wacker Chemie Ag Partikel mit strukturierter Oberfläche
US7527838B2 (en) * 2006-04-06 2009-05-05 Momentive Performance Materials Inc. Architectural unit possessing translucent silicone rubber component
DE102006017592A1 (de) * 2006-04-13 2007-10-18 Wacker Chemie Ag Rheologiesteuerung stark basischer Flüssigkeiten
CN101522821B (zh) * 2006-08-06 2013-07-03 比克化学股份有限公司 用聚硅氧烷表面改性的颗粒和其生产方法
US8530048B2 (en) * 2006-08-06 2013-09-10 Byk-Chemie Gmbh Surface-modified particles and production method
JP5133993B2 (ja) * 2006-09-01 2013-01-30 キャボット コーポレイション 表面処理された金属酸化物粒子
US8202502B2 (en) 2006-09-15 2012-06-19 Cabot Corporation Method of preparing hydrophobic silica
US8455165B2 (en) 2006-09-15 2013-06-04 Cabot Corporation Cyclic-treated metal oxide
US8435474B2 (en) 2006-09-15 2013-05-07 Cabot Corporation Surface-treated metal oxide particles
US20080070146A1 (en) 2006-09-15 2008-03-20 Cabot Corporation Hydrophobic-treated metal oxide
US8465991B2 (en) * 2006-10-30 2013-06-18 Novellus Systems, Inc. Carbon containing low-k dielectric constant recovery using UV treatment
US7851232B2 (en) 2006-10-30 2010-12-14 Novellus Systems, Inc. UV treatment for carbon-containing low-k dielectric repair in semiconductor processing
US10037905B2 (en) 2009-11-12 2018-07-31 Novellus Systems, Inc. UV and reducing treatment for K recovery and surface clean in semiconductor processing
US7906174B1 (en) 2006-12-07 2011-03-15 Novellus Systems, Inc. PECVD methods for producing ultra low-k dielectric films using UV treatment
US20080145545A1 (en) * 2006-12-15 2008-06-19 Bret Ja Chisholm Metal oxide and sulfur-containing coating compositions, methods of use, and articles prepared therefrom
DE102006061057A1 (de) * 2006-12-22 2008-06-26 Wacker Chemie Ag Organofunktionelle Silikonharzschichten auf Metalloxiden
US8242028B1 (en) 2007-04-03 2012-08-14 Novellus Systems, Inc. UV treatment of etch stop and hard mask films for selectivity and hermeticity enhancement
DE102007024963A1 (de) 2007-05-30 2008-12-04 Wacker Polymer Systems Gmbh & Co. Kg Verfahren zur Herstellung von dämmenden Beschichtungen
US7622162B1 (en) 2007-06-07 2009-11-24 Novellus Systems, Inc. UV treatment of STI films for increasing tensile stress
US8501856B2 (en) * 2007-07-13 2013-08-06 Momentive Performance Materials Inc. Curable silicon-containing compositions possessing high translucency
DE102007033448A1 (de) * 2007-07-18 2009-01-22 Wacker Chemie Ag Hochdisperse Metalloxide mit einer hohen positiven Oberflächenladung
DE102007035955A1 (de) * 2007-07-30 2009-02-05 Evonik Degussa Gmbh Oberflächenmodifizierte, pyrogen hergestellte Kieselsäuren
DE102007035956A1 (de) * 2007-07-30 2009-02-05 Evonik Degussa Gmbh Oberflächenmodifizierte, pyrogen hergestellte Kieselsäuren
US8211510B1 (en) 2007-08-31 2012-07-03 Novellus Systems, Inc. Cascaded cure approach to fabricate highly tensile silicon nitride films
DE102007055879A1 (de) 2007-12-19 2009-06-25 Wacker Chemie Ag Hydrophobierung von Kieselsäuren und oxidierenden Bedingungen
DE102008041466A1 (de) 2008-08-22 2010-02-25 Wacker Chemie Ag Wäßrige Dispersionen hydrophober Kieselsäuren
US9050623B1 (en) 2008-09-12 2015-06-09 Novellus Systems, Inc. Progressive UV cure
FR2937338B1 (fr) * 2008-10-17 2013-03-22 Biomerieux Sa Milieu reactionnel pour la detection et/ou l'identification de bacteries du genre legionella
DE102008054592A1 (de) 2008-12-12 2010-06-17 Wacker Chemie Ag Pyrogene Kieselsäure hergestellt in einer Produktions-Anlage mit kleiner Kapazität
EP2408864A1 (en) * 2009-03-18 2012-01-25 Basf Se Modified silica particles and dirt repellent polymer compositions comprising them
JP4893836B2 (ja) * 2010-01-29 2012-03-07 オムロン株式会社 一液性エポキシ樹脂組成物およびその利用
FR2979107A1 (fr) * 2011-08-16 2013-02-22 Bluestar Silicones France Procede de preparation d'une silice greffee par un compose organosilicie
DE102011084048A1 (de) 2011-10-05 2013-04-11 Wacker Chemie Ag Polymerpulver enthaltende Baustofftrockenformulierungen
DE102012203826A1 (de) * 2012-03-12 2013-09-12 Wacker Chemie Ag Verfahren zur Oberflächenmodifikation von partikulären Feststoffen
WO2013156337A1 (en) * 2012-04-20 2013-10-24 Evonik Degussa Gmbh Reinforced epoxy resin adhesive
EP2781558B1 (de) 2013-03-19 2016-12-14 Evonik Degussa GmbH Modifizierte kieselsäure enthaltende zusammensetzung und diese zusammensetzung enthaltender silikonkautschuk
DE102013224206A1 (de) * 2013-11-27 2015-05-28 Wacker Chemie Ag Oberflächenmodifizierte partikuläre Metalloxide
DE102013224210A1 (de) 2013-11-27 2015-05-28 Wacker Chemie Ag Silanisierte hochhydrophobe Kieselsäuren
DE102013226494A1 (de) 2013-12-18 2015-06-18 Wacker Chemie Ag Modifizierung der Oberflächen von Metalloxiden mittels kettenartiger Strukturen
FR3020766B1 (fr) * 2014-05-07 2020-05-08 Pylote Particules inorganiques individualisees
DE102015214883A1 (de) 2015-08-04 2017-02-09 Wacker Chemie Ag Verfahren zur Herstellung von Formkörpern
DE102015216505A1 (de) 2015-08-28 2017-03-02 Wacker Chemie Ag Silica Formkörper mit geringer thermischer Leitfähigkeit
WO2017081028A1 (de) 2015-11-09 2017-05-18 Wacker Chemie Ag Siliconzusammensetzungen zur herstellung elastomerer formteile mittels ballistischer verfahren
CN108025494B (zh) 2015-11-26 2020-03-10 瓦克化学股份公司 用于通过弹道生成方法生产弹性体模制部件的高粘性硅酮组合物
EP3344438B1 (de) 2016-08-26 2019-05-22 Wacker Chemie AG Verfahren zur herstellung von formkörpern
US9847221B1 (en) 2016-09-29 2017-12-19 Lam Research Corporation Low temperature formation of high quality silicon oxide films in semiconductor device manufacturing
KR102123926B1 (ko) 2017-02-23 2020-06-18 와커 헤미 아게 왁스로 제조된 지지 재료를 사용하여 성형체를 제조하기 위한 생성 방법
DE102017209782A1 (de) 2017-06-09 2018-12-13 Evonik Degussa Gmbh Verfahren zur Wärmedämmung eines evakuierbaren Behälters
US20210107210A1 (en) 2018-03-28 2021-04-15 Wacker Chemie Ag Additive method of producing molded bodies
EP3597615A1 (en) 2018-07-17 2020-01-22 Evonik Operations GmbH Granular mixed oxide material and thermal insulating composition on its basis
JP7086266B2 (ja) 2018-07-18 2022-06-17 エボニック オペレーションズ ゲーエムベーハー シリカをベースとする成形断熱体を周囲圧力で疎水化する方法
KR102057036B1 (ko) * 2019-10-04 2019-12-18 박희대 소수성 나노실리카가 배합된 접착력이 우수한 열가소성 핫멜트 필름
US20230002627A1 (en) 2020-01-14 2023-01-05 Evonik Operations Gmbh Silica-based hydrophobic granular material with an increased polarity
EP3877332B1 (en) 2020-01-14 2022-04-06 Evonik Operations GmbH Fumed silica with modified surface activity
WO2022184271A1 (de) 2021-03-05 2022-09-09 Wacker Chemie Ag Siloxan-funktionalisierte kieselsäure

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1163784C2 (de) * 1962-03-30 1973-05-03 Degussa Verfahren zur Oberflaechenbehandlung von hochdispersen Oxyden
US3963627A (en) * 1970-02-16 1976-06-15 Imperial Chemical Industries Limited Surface treatment of particulate solids
GB1348372A (en) * 1970-02-16 1974-03-13 Ici Ltd Foam-compatible powder compositions
US3830738A (en) * 1970-02-16 1974-08-20 Ici Ltd Surface treatment of particulate solids
DE2344388B2 (de) * 1973-09-03 1978-06-22 Elektroschmelzwerk Kempten Gmbh, 8000 Muenchen Verfahren zum Herstellen von hydrophobem Siliciumdioxyd
US4036933A (en) * 1974-01-18 1977-07-19 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler Highly-active, finely divided super-dry silicon dioxide
DE2403783C2 (de) * 1974-01-26 1982-10-21 Bayer Ag, 5090 Leverkusen Verfahren zur Herstellung hydrophobierter pyrogener Kieselsäure
DE2513608C2 (de) * 1975-03-27 1982-08-05 Degussa Ag, 6000 Frankfurt Verfahren zur Hydrophobierung von Kieselsäuren und Silikaten mit Organosilanen
DE2620737C2 (de) * 1976-05-11 1982-07-29 Wacker-Chemie GmbH, 8000 München Verfahren zum Herstellen von hochdispersem Siliciumdioxid
DE2728490C2 (de) * 1977-06-24 1981-09-17 Degussa Ag, 6000 Frankfurt Verfahren zur Hydrophobierung von Kieselsäure
DE3211431A1 (de) * 1982-03-27 1983-09-29 Degussa Ag, 6000 Frankfurt Verfahren zur hydrophobierung von pyrogen hergestelltem siliciumdioxid
DE3616133A1 (de) * 1985-09-25 1987-11-19 Merck Patent Gmbh Kugelfoermige sio(pfeil abwaerts)2(pfeil abwaerts)-partikel
DE3707226A1 (de) * 1987-03-06 1988-09-15 Wacker Chemie Gmbh Verfahren zur herstellung von hochdispersem metalloxid mit ammoniumfunktionellem organopolysiloxan modifizierter oberflaeche als positiv steuerndes ladungsmittel fuer toner
US5614177A (en) * 1987-11-04 1997-03-25 Rhone-Poulenc Chimie Dentifrice-compatible silica particulates
US5153030A (en) * 1988-11-18 1992-10-06 Cabot Corporation Continuous treatment process for particulate material
JPH0657337B2 (ja) * 1988-11-18 1994-08-03 キヤボツト コーポレーシヨン 低嵩密度材料連続処理方法
DE3913938A1 (de) * 1989-04-27 1990-10-31 Degussa Presslinge auf basis von pyrogen hergestelltem titandioxid, verfahren zu ihrer herstellung sowie ihre verwendung
DE3919940A1 (de) * 1989-06-19 1990-12-20 Merck Patent Gmbh Dispersionen kugelfoermiger anorganischer partikel
JPH0616971A (ja) * 1992-06-30 1994-01-25 Nippon Shirika Kogyo Kk 塗料の耐アルカリ性を改良する方法
DE4221716A1 (de) * 1992-07-02 1994-01-05 Wacker Chemie Gmbh Verfahren zur Hydrophobierung von pyrogen hergestelltem Siliciumdioxid
JP3146679B2 (ja) * 1992-08-31 2001-03-19 三菱マテリアル株式会社 疎水性金属酸化物粉体
JP3318997B2 (ja) * 1993-02-03 2002-08-26 三菱マテリアル株式会社 疎水性シリカ粉体、その製法および電子写真用現像剤

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FI952622A0 (fi) 1995-05-30
EP0686676B1 (de) 1998-08-19
CN1121044A (zh) 1996-04-24
US5851715A (en) 1998-12-22
CA2149821C (en) 2000-05-16
RU95109149A (ru) 1997-06-20
JPH07330324A (ja) 1995-12-19
CN1051747C (zh) 2000-04-26
US5686054A (en) 1997-11-11
UA43328C2 (uk) 2001-12-17
DE59503235D1 (de) 1998-09-24
BR9502619A (pt) 1996-01-02
AU2037595A (en) 1996-01-04
RU2137712C1 (ru) 1999-09-20
ES2121261T3 (es) 1998-11-16
EP0686676A1 (de) 1995-12-13
ATE169948T1 (de) 1998-09-15
CA2149821A1 (en) 1995-12-02
NO952158D0 (no) 1995-05-31
NO952158L (no) 1995-12-04
AU669647B2 (en) 1996-06-13
FI952622A (fi) 1995-12-02
DE4419234A1 (de) 1995-12-07
TW311904B (ja) 1997-08-01
JP2918092B2 (ja) 1999-07-12

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