FI109155B - Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi - Google Patents

Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi Download PDF

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Publication number
FI109155B
FI109155B FI20000888A FI20000888A FI109155B FI 109155 B FI109155 B FI 109155B FI 20000888 A FI20000888 A FI 20000888A FI 20000888 A FI20000888 A FI 20000888A FI 109155 B FI109155 B FI 109155B
Authority
FI
Finland
Prior art keywords
control signal
micromechanical
micromechanical element
voltage
arrangement according
Prior art date
Application number
FI20000888A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI20000888L (fi
FI20000888A0 (fi
Inventor
Tapani Ryhaenen
Vladimir Ermolov
Original Assignee
Nokia Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nokia Corp filed Critical Nokia Corp
Publication of FI20000888A0 publication Critical patent/FI20000888A0/fi
Priority to FI20000888A priority Critical patent/FI109155B/fi
Priority to AT01660059T priority patent/ATE445907T1/de
Priority to EP01660059A priority patent/EP1146532B1/en
Priority to DE60140157T priority patent/DE60140157D1/de
Priority to CN01811158A priority patent/CN1436357A/zh
Priority to AU2001256377A priority patent/AU2001256377A1/en
Priority to KR1020087015610A priority patent/KR100871098B1/ko
Priority to CA002406186A priority patent/CA2406186A1/en
Priority to KR1020027013758A priority patent/KR100863790B1/ko
Priority to PCT/FI2001/000369 priority patent/WO2001080266A1/en
Priority to US09/834,198 priority patent/US7027282B2/en
Priority to JP2001115921A priority patent/JP2002036197A/ja
Publication of FI20000888L publication Critical patent/FI20000888L/fi
Application granted granted Critical
Publication of FI109155B publication Critical patent/FI109155B/fi

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H47/00—Circuit arrangements not adapted to a particular application of the relay and designed to obtain desired operating characteristics or to provide energising current
    • H01H47/22—Circuit arrangements not adapted to a particular application of the relay and designed to obtain desired operating characteristics or to provide energising current for supplying energising current for relay coil
    • H01H47/32—Energising current supplied by semiconductor device
    • H01H47/325—Energising current supplied by semiconductor device by switching regulator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0036—Movable armature with higher resonant frequency for faster switching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Dc-Dc Converters (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Paper (AREA)
  • Pinball Game Machines (AREA)
  • Relay Circuits (AREA)
FI20000888A 2000-04-13 2000-04-13 Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi FI109155B (fi)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FI20000888A FI109155B (fi) 2000-04-13 2000-04-13 Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi
AT01660059T ATE445907T1 (de) 2000-04-13 2001-04-02 Verfahren und anordnung zur steuerung eines mikromechanischen bauteils
EP01660059A EP1146532B1 (en) 2000-04-13 2001-04-02 Method and arrangement for controlling micromechanical element
DE60140157T DE60140157D1 (de) 2000-04-13 2001-04-02 Verfahren und Anordnung zur Steuerung eines mikromechanischen Bauteils
KR1020087015610A KR100871098B1 (ko) 2000-04-13 2001-04-12 마이크로 기계식 소자를 제어하기 위한 방법
AU2001256377A AU2001256377A1 (en) 2000-04-13 2001-04-12 Method and arrangement for controlling micromechanical element
CN01811158A CN1436357A (zh) 2000-04-13 2001-04-12 微机械元件的控制方法及配置
CA002406186A CA2406186A1 (en) 2000-04-13 2001-04-12 Method and arrangement for controlling micromechanical element
KR1020027013758A KR100863790B1 (ko) 2000-04-13 2001-04-12 마이크로 기계식 소자를 제어하기 위한 방법 및 장치
PCT/FI2001/000369 WO2001080266A1 (en) 2000-04-13 2001-04-12 Method and arrangement for controlling micromechanical element
US09/834,198 US7027282B2 (en) 2000-04-13 2001-04-12 Method and arrangement for controlling micromechanical element
JP2001115921A JP2002036197A (ja) 2000-04-13 2001-04-13 マイクロマシン素子を制御するための方法および装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20000888A FI109155B (fi) 2000-04-13 2000-04-13 Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi
FI20000888 2000-04-13

Publications (3)

Publication Number Publication Date
FI20000888A0 FI20000888A0 (fi) 2000-04-13
FI20000888L FI20000888L (fi) 2001-10-14
FI109155B true FI109155B (fi) 2002-05-31

Family

ID=8558203

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20000888A FI109155B (fi) 2000-04-13 2000-04-13 Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi

Country Status (11)

Country Link
US (1) US7027282B2 (enExample)
EP (1) EP1146532B1 (enExample)
JP (1) JP2002036197A (enExample)
KR (2) KR100863790B1 (enExample)
CN (1) CN1436357A (enExample)
AT (1) ATE445907T1 (enExample)
AU (1) AU2001256377A1 (enExample)
CA (1) CA2406186A1 (enExample)
DE (1) DE60140157D1 (enExample)
FI (1) FI109155B (enExample)
WO (1) WO2001080266A1 (enExample)

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GB0207363D0 (en) * 2002-03-28 2002-05-08 Qinetiq Ltd Switch device
JP2004134370A (ja) * 2002-07-26 2004-04-30 Matsushita Electric Ind Co Ltd スイッチ
US7106066B2 (en) 2002-08-28 2006-09-12 Teravicta Technologies, Inc. Micro-electromechanical switch performance enhancement
US7370185B2 (en) * 2003-04-30 2008-05-06 Hewlett-Packard Development Company, L.P. Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
JP4555951B2 (ja) * 2002-12-10 2010-10-06 エプコス アクチエンゲゼルシャフト ＭＥＭＳ（Ｍｉｃｒｏ−Ｅｌｅｃｔｒｏ−Ｍｅｃｈａｎｉｃａｌ−Ｓｙｓｔｅｍ）素子のアレイの駆動
WO2005069330A1 (en) 2003-12-30 2005-07-28 Massachusetts Institute Of Technology Electro-mechanical micro-switch device
US7477812B2 (en) 2003-12-30 2009-01-13 Massachusetts Institute Of Technology System and method for providing fast, low voltage integrated optical elements
WO2005069331A1 (en) 2003-12-30 2005-07-28 Massachusetts Institute Of Technology Low-voltage micro-switch actuation technique
EP1751765A4 (en) * 2004-05-24 2009-05-20 Univ Boston CONTROLLABLE NANOCHEMICAL MEMORY ELEMENT
GB0413341D0 (en) * 2004-06-15 2004-07-21 Cavendish Kinetics B V Arrangement and method for controlling a micromechanical element
KR100599115B1 (ko) * 2004-07-20 2006-07-12 삼성전자주식회사 진동형 멤스 스위치 및 그 제조방법
CN1769945A (zh) 2004-09-30 2006-05-10 富士胶片株式会社 微型机电式调制元件和微型机电式调制元件阵列
DE102004055937B4 (de) * 2004-11-19 2006-08-24 Siemens Ag Schaltmatrix
JP4643316B2 (ja) * 2005-03-11 2011-03-02 株式会社東芝 マイクロマシンスイッチ及びその駆動方法
US20070001542A1 (en) * 2005-06-30 2007-01-04 Neidrich Jason M Versatile system for restricting movement of MEMS structures
JP2007015067A (ja) 2005-07-08 2007-01-25 Fujifilm Holdings Corp 微小薄膜可動素子及び微小薄膜可動素子アレイ並びに画像形成装置
JP4990286B2 (ja) * 2005-10-14 2012-08-01 エプコス アーゲー Ｍｅｍｓチューナブルデバイス
JP5123198B2 (ja) * 2005-11-16 2013-01-16 クゥアルコム・メムス・テクノロジーズ・インコーポレイテッド セットおよびラッチ電極を備えたｍｅｍｓスイッチ
US7332835B1 (en) * 2006-11-28 2008-02-19 General Electric Company Micro-electromechanical system based switching module serially stackable with other such modules to meet a voltage rating
EP2122648B1 (en) 2006-12-22 2012-06-27 Analog Devices, Inc. Method and apparatus for driving a switch
JP5275252B2 (ja) * 2007-01-18 2013-08-28 エプコス アクチエンゲゼルシャフト Ｍｅｍｓキャパシタ回路及び方法
JP4919819B2 (ja) 2007-01-24 2012-04-18 富士通株式会社 マイクロマシンデバイスの駆動制御方法および装置
JP4610576B2 (ja) 2007-03-30 2011-01-12 富士通株式会社 マイクロマシンデバイスの駆動制御方法および装置
JP4477051B2 (ja) * 2007-09-12 2010-06-09 株式会社東芝 半導体集積回路及びｍｅｍｓ型可変容量キャパシタの制御方法
JP4528815B2 (ja) * 2007-09-13 2010-08-25 株式会社東芝 半導体装置、及び静電アクチュエータの制御方法
JP5361346B2 (ja) 2008-11-21 2013-12-04 株式会社東芝 半導体集積回路
US8804295B2 (en) * 2009-10-15 2014-08-12 Altera Corporation Configurable multi-gate switch circuitry
JP5418317B2 (ja) * 2010-03-11 2014-02-19 富士通株式会社 静電アクチュエータ、およびその駆動方法
US9754745B2 (en) 2010-11-01 2017-09-05 Raritan Americas, Inc. Methods and apparatus for improved relay control
DE102011081042B4 (de) * 2011-08-16 2021-05-27 Robert Bosch Gmbh Steuervorrichtung für einen Mikrospiegel, Verfahren zum Ansteuern eines Mikrospiegels und Bildprojektionssystem
JP2013114935A (ja) * 2011-11-29 2013-06-10 Ritsumeikan Ｍｅｍｓスイッチ
DE102012218987A1 (de) * 2012-10-18 2014-04-24 Robert Bosch Gmbh Ansteuerschaltung für n Schütze sowie ein Verfahren zur Ansteuerung von n Schützen
EP3343755B1 (en) * 2016-12-28 2023-12-06 Electrolux Appliances Aktiebolag Electric appliance and method with improved control of relay activation and deactivation
CN108183048B (zh) * 2018-02-05 2019-08-16 广东美的制冷设备有限公司 继电器驱动电路与空调器

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US3387194A (en) 1967-10-31 1968-06-04 Donald S. Banks Electric motor control system including a bank of batteries for series/parallel operation
US4356730A (en) * 1981-01-08 1982-11-02 International Business Machines Corporation Electrostatically deformographic switches
US4959515A (en) * 1984-05-01 1990-09-25 The Foxboro Company Micromechanical electric shunt and encoding devices made therefrom
JPH0458429A (ja) 1990-06-26 1992-02-25 Matsushita Electric Works Ltd 静電リレー
DE4031248A1 (de) 1990-10-04 1992-04-09 Kernforschungsz Karlsruhe Mikromechanisches element
US5233459A (en) * 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
US5233569A (en) * 1991-07-31 1993-08-03 Western Atlas International, Inc. Modified residual migration of seismic data
EP0706702B1 (en) * 1993-07-02 1999-01-27 Massachusetts Institute Of Technology Spatial light modulator
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
WO1998034269A1 (en) * 1997-02-04 1998-08-06 California Institute Of Technology Micro-electromechanical relays
US5943223A (en) 1997-10-15 1999-08-24 Reliance Electric Industrial Company Electric switches for reducing on-state power loss

Also Published As

Publication number Publication date
EP1146532A2 (en) 2001-10-17
EP1146532A3 (en) 2004-09-01
FI20000888L (fi) 2001-10-14
US20020066659A1 (en) 2002-06-06
FI20000888A0 (fi) 2000-04-13
ATE445907T1 (de) 2009-10-15
JP2002036197A (ja) 2002-02-05
KR20080077233A (ko) 2008-08-21
WO2001080266A1 (en) 2001-10-25
KR20020089464A (ko) 2002-11-29
CA2406186A1 (en) 2001-10-25
DE60140157D1 (de) 2009-11-26
CN1436357A (zh) 2003-08-13
AU2001256377A1 (en) 2001-10-30
EP1146532B1 (en) 2009-10-14
US7027282B2 (en) 2006-04-11
KR100871098B1 (ko) 2008-11-28
KR100863790B1 (ko) 2008-10-16

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