CN1436357A - 微机械元件的控制方法及配置 - Google Patents

微机械元件的控制方法及配置 Download PDF

Info

Publication number
CN1436357A
CN1436357A CN01811158A CN01811158A CN1436357A CN 1436357 A CN1436357 A CN 1436357A CN 01811158 A CN01811158 A CN 01811158A CN 01811158 A CN01811158 A CN 01811158A CN 1436357 A CN1436357 A CN 1436357A
Authority
CN
China
Prior art keywords
control signal
micromechanical element
micromechanical
voltage
arrangement according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN01811158A
Other languages
English (en)
Chinese (zh)
Inventor
T·赖海宁
V·埃尔莫洛夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia Oyj
Original Assignee
Nokia Oyj
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nokia Oyj filed Critical Nokia Oyj
Publication of CN1436357A publication Critical patent/CN1436357A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H47/00—Circuit arrangements not adapted to a particular application of the relay and designed to obtain desired operating characteristics or to provide energising current
    • H01H47/22—Circuit arrangements not adapted to a particular application of the relay and designed to obtain desired operating characteristics or to provide energising current for supplying energising current for relay coil
    • H01H47/32—Energising current supplied by semiconductor device
    • H01H47/325—Energising current supplied by semiconductor device by switching regulator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0036—Movable armature with higher resonant frequency for faster switching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Dc-Dc Converters (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Relay Circuits (AREA)
  • Paper (AREA)
  • Pinball Game Machines (AREA)
CN01811158A 2000-04-13 2001-04-12 微机械元件的控制方法及配置 Pending CN1436357A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20000888 2000-04-13
FI20000888A FI109155B (fi) 2000-04-13 2000-04-13 Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi

Publications (1)

Publication Number Publication Date
CN1436357A true CN1436357A (zh) 2003-08-13

Family

ID=8558203

Family Applications (1)

Application Number Title Priority Date Filing Date
CN01811158A Pending CN1436357A (zh) 2000-04-13 2001-04-12 微机械元件的控制方法及配置

Country Status (11)

Country Link
US (1) US7027282B2 (enExample)
EP (1) EP1146532B1 (enExample)
JP (1) JP2002036197A (enExample)
KR (2) KR100871098B1 (enExample)
CN (1) CN1436357A (enExample)
AT (1) ATE445907T1 (enExample)
AU (1) AU2001256377A1 (enExample)
CA (1) CA2406186A1 (enExample)
DE (1) DE60140157D1 (enExample)
FI (1) FI109155B (enExample)
WO (1) WO2001080266A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101276691B (zh) * 2007-03-30 2011-12-21 富士通株式会社 驱动控制微机械装置的设备和方法
CN104718595A (zh) * 2012-10-18 2015-06-17 罗伯特·博世有限公司 用于n个接触器的控制电路以及用于控制n个接触器的方法
WO2019148633A1 (zh) * 2018-02-05 2019-08-08 广东美的制冷设备有限公司 继电器驱动电路与空调器

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0207363D0 (en) * 2002-03-28 2002-05-08 Qinetiq Ltd Switch device
JP2004134370A (ja) * 2002-07-26 2004-04-30 Matsushita Electric Ind Co Ltd スイッチ
US7106066B2 (en) 2002-08-28 2006-09-12 Teravicta Technologies, Inc. Micro-electromechanical switch performance enhancement
US7370185B2 (en) * 2003-04-30 2008-05-06 Hewlett-Packard Development Company, L.P. Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
AU2003283676A1 (en) * 2002-12-10 2004-06-30 Koninklijke Philips Electronics N.V. Driving of an array of micro-electro-mechanical-system (mems) elements
WO2005069330A1 (en) 2003-12-30 2005-07-28 Massachusetts Institute Of Technology Electro-mechanical micro-switch device
US7486163B2 (en) 2003-12-30 2009-02-03 Massachusetts Institute Of Technology Low-voltage micro-switch actuation technique
US7477812B2 (en) 2003-12-30 2009-01-13 Massachusetts Institute Of Technology System and method for providing fast, low voltage integrated optical elements
US7352608B2 (en) * 2004-05-24 2008-04-01 Trustees Of Boston University Controllable nanomechanical memory element
GB0413341D0 (en) * 2004-06-15 2004-07-21 Cavendish Kinetics B V Arrangement and method for controlling a micromechanical element
KR100599115B1 (ko) 2004-07-20 2006-07-12 삼성전자주식회사 진동형 멤스 스위치 및 그 제조방법
CN1769945A (zh) 2004-09-30 2006-05-10 富士胶片株式会社 微型机电式调制元件和微型机电式调制元件阵列
DE102004055937B4 (de) * 2004-11-19 2006-08-24 Siemens Ag Schaltmatrix
JP4643316B2 (ja) * 2005-03-11 2011-03-02 株式会社東芝 マイクロマシンスイッチ及びその駆動方法
US20070001542A1 (en) * 2005-06-30 2007-01-04 Neidrich Jason M Versatile system for restricting movement of MEMS structures
JP2007015067A (ja) 2005-07-08 2007-01-25 Fujifilm Holdings Corp 微小薄膜可動素子及び微小薄膜可動素子アレイ並びに画像形成装置
US8027143B2 (en) 2005-10-14 2011-09-27 Epcos Ag MEMS tunable device
WO2007061406A1 (en) * 2005-11-16 2007-05-31 Idc, Llc Mems switch with set and latch electrodes
US7332835B1 (en) * 2006-11-28 2008-02-19 General Electric Company Micro-electromechanical system based switching module serially stackable with other such modules to meet a voltage rating
US8194382B2 (en) 2006-12-22 2012-06-05 Analog Devices, Inc. Method and apparatus for driving a switch
WO2008087584A1 (en) * 2007-01-18 2008-07-24 Nxp B.V. Mems capacitor circuit and method
JP4919819B2 (ja) 2007-01-24 2012-04-18 富士通株式会社 マイクロマシンデバイスの駆動制御方法および装置
JP4477051B2 (ja) * 2007-09-12 2010-06-09 株式会社東芝 半導体集積回路及びｍｅｍｓ型可変容量キャパシタの制御方法
JP4528815B2 (ja) 2007-09-13 2010-08-25 株式会社東芝 半導体装置、及び静電アクチュエータの制御方法
JP5361346B2 (ja) * 2008-11-21 2013-12-04 株式会社東芝 半導体集積回路
US8804295B2 (en) * 2009-10-15 2014-08-12 Altera Corporation Configurable multi-gate switch circuitry
JP5418317B2 (ja) 2010-03-11 2014-02-19 富士通株式会社 静電アクチュエータ、およびその駆動方法
US9754745B2 (en) * 2010-11-01 2017-09-05 Raritan Americas, Inc. Methods and apparatus for improved relay control
DE102011081042B4 (de) * 2011-08-16 2021-05-27 Robert Bosch Gmbh Steuervorrichtung für einen Mikrospiegel, Verfahren zum Ansteuern eines Mikrospiegels und Bildprojektionssystem
JP2013114935A (ja) * 2011-11-29 2013-06-10 Ritsumeikan Ｍｅｍｓスイッチ
EP3343755B1 (en) * 2016-12-28 2023-12-06 Electrolux Appliances Aktiebolag Electric appliance and method with improved control of relay activation and deactivation

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3387194A (en) 1967-10-31 1968-06-04 Donald S. Banks Electric motor control system including a bank of batteries for series/parallel operation
US4356730A (en) * 1981-01-08 1982-11-02 International Business Machines Corporation Electrostatically deformographic switches
US4959515A (en) * 1984-05-01 1990-09-25 The Foxboro Company Micromechanical electric shunt and encoding devices made therefrom
JPH0458429A (ja) 1990-06-26 1992-02-25 Matsushita Electric Works Ltd 静電リレー
DE4031248A1 (de) 1990-10-04 1992-04-09 Kernforschungsz Karlsruhe Mikromechanisches element
US5233459A (en) 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
US5233569A (en) * 1991-07-31 1993-08-03 Western Atlas International, Inc. Modified residual migration of seismic data
JP3439766B2 (ja) * 1993-07-02 2003-08-25 マサチューセッツ・インスティチュート・オブ・テクノロジー 空間光変調器
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
EP0968530A4 (en) * 1997-02-04 2001-04-25 California Inst Of Techn MICRO-ELECTROMECHANICAL RELAYS
US5943223A (en) 1997-10-15 1999-08-24 Reliance Electric Industrial Company Electric switches for reducing on-state power loss

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101276691B (zh) * 2007-03-30 2011-12-21 富士通株式会社 驱动控制微机械装置的设备和方法
CN104718595A (zh) * 2012-10-18 2015-06-17 罗伯特·博世有限公司 用于n个接触器的控制电路以及用于控制n个接触器的方法
CN104718595B (zh) * 2012-10-18 2017-06-09 罗伯特·博世有限公司 用于n个接触器的控制电路以及用于控制n个接触器的方法
WO2019148633A1 (zh) * 2018-02-05 2019-08-08 广东美的制冷设备有限公司 继电器驱动电路与空调器

Also Published As

Publication number Publication date
US20020066659A1 (en) 2002-06-06
JP2002036197A (ja) 2002-02-05
FI20000888L (fi) 2001-10-14
ATE445907T1 (de) 2009-10-15
WO2001080266A1 (en) 2001-10-25
KR100871098B1 (ko) 2008-11-28
DE60140157D1 (de) 2009-11-26
EP1146532B1 (en) 2009-10-14
AU2001256377A1 (en) 2001-10-30
KR20020089464A (ko) 2002-11-29
FI20000888A0 (fi) 2000-04-13
FI109155B (fi) 2002-05-31
KR20080077233A (ko) 2008-08-21
KR100863790B1 (ko) 2008-10-16
US7027282B2 (en) 2006-04-11
EP1146532A3 (en) 2004-09-01
EP1146532A2 (en) 2001-10-17
CA2406186A1 (en) 2001-10-25

Similar Documents

Publication Publication Date Title
CN1436357A (zh) 微机械元件的控制方法及配置
US8736142B2 (en) Polarity switching circuit
CN103490633B (zh) 开关式电源和用于操作开关式电源的方法
WO2006013741A1 (ja) 捩り共振器およびこれを用いたフィルタ
CN103918097A (zh) 具有高的有效机电耦合系数的压电变压器
JP2014036502A (ja) パルス発生回路
US20140266144A1 (en) On-chip power converter circuit and on-chip power supply using the power converter circuit
WO2009148677A2 (en) Microelectromechanical system (mems) resonant switches and applications for power converters and amplifiers
RU2606547C2 (ru) Устройство и способ возбуждения для возбуждения емкостной нагрузки и, в частности, ультразвукового преобразователя
JP2005175706A (ja) リレー回路およびスイッチング素子
US8674762B2 (en) RF power amplifier with spectrally grouped nanosized switches
KR100762571B1 (ko) 압전 트랜스의 구동 방법 및 구동 회로, 냉음극관 발광장치, 액정 패널, 및 액정 패널 장착 기기
US5998938A (en) Circuit arrangement with a piezoelectric transformer
Imtiaz et al. Film bulk acoustic resonator (FBAR) based power converters: A new trend featuring EMI reduction and high power density
US12255037B2 (en) Nanoplasma switch device for ultrafast switching
JPH06505844A (ja) 大電力スイッチ・モード無線周波増幅の方法及び装置
US9177748B2 (en) Pulsed depressed collector
JPS61173496A (ja) プラズマｘ線発生装置
US11355691B2 (en) Piezoelectric actuator type control device for capacitive loads
Kuthi et al. Nanosecond pulse generator using a fast recovery diode
Lee et al. A High-Performance Fast Switching Charge Dump Assisted Class-$ K^{\ast} $ Audio Amplifier
US12268094B2 (en) Piezoelectric power converter with trajectory control
EP2475091A1 (en) Modulator for capacitive loads comprising a series resonance circuit and corresponding method
JP2024049194A (ja) 超音波霧化装置
JP2006210265A (ja) 電気機械スイッチ

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
AD01 Patent right deemed abandoned

Effective date of abandoning: 20030813

C20 Patent right or utility model deemed to be abandoned or is abandoned