KR100863790B1 - 마이크로 기계식 소자를 제어하기 위한 방법 및 장치 - Google Patents

마이크로 기계식 소자를 제어하기 위한 방법 및 장치 Download PDF

Info

Publication number
KR100863790B1
KR100863790B1 KR1020027013758A KR20027013758A KR100863790B1 KR 100863790 B1 KR100863790 B1 KR 100863790B1 KR 1020027013758 A KR1020027013758 A KR 1020027013758A KR 20027013758 A KR20027013758 A KR 20027013758A KR 100863790 B1 KR100863790 B1 KR 100863790B1
Authority
KR
South Korea
Prior art keywords
control signal
micromechanical
micromechanical element
voltage
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020027013758A
Other languages
English (en)
Korean (ko)
Other versions
KR20020089464A (ko
Inventor
리해넨타파니
에르몰로프블라디미르
Original Assignee
노키아 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 노키아 코포레이션 filed Critical 노키아 코포레이션
Publication of KR20020089464A publication Critical patent/KR20020089464A/ko
Application granted granted Critical
Publication of KR100863790B1 publication Critical patent/KR100863790B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H47/00—Circuit arrangements not adapted to a particular application of the relay and designed to obtain desired operating characteristics or to provide energising current
    • H01H47/22—Circuit arrangements not adapted to a particular application of the relay and designed to obtain desired operating characteristics or to provide energising current for supplying energising current for relay coil
    • H01H47/32—Energising current supplied by semiconductor device
    • H01H47/325—Energising current supplied by semiconductor device by switching regulator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0036—Movable armature with higher resonant frequency for faster switching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Dc-Dc Converters (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Paper (AREA)
  • Pinball Game Machines (AREA)
  • Relay Circuits (AREA)
KR1020027013758A 2000-04-13 2001-04-12 마이크로 기계식 소자를 제어하기 위한 방법 및 장치 Expired - Fee Related KR100863790B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20000888A FI109155B (fi) 2000-04-13 2000-04-13 Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi
FI20000888 2000-04-13

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020087015610A Division KR100871098B1 (ko) 2000-04-13 2001-04-12 마이크로 기계식 소자를 제어하기 위한 방법

Publications (2)

Publication Number Publication Date
KR20020089464A KR20020089464A (ko) 2002-11-29
KR100863790B1 true KR100863790B1 (ko) 2008-10-16

Family

ID=8558203

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020027013758A Expired - Fee Related KR100863790B1 (ko) 2000-04-13 2001-04-12 마이크로 기계식 소자를 제어하기 위한 방법 및 장치
KR1020087015610A Expired - Fee Related KR100871098B1 (ko) 2000-04-13 2001-04-12 마이크로 기계식 소자를 제어하기 위한 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020087015610A Expired - Fee Related KR100871098B1 (ko) 2000-04-13 2001-04-12 마이크로 기계식 소자를 제어하기 위한 방법

Country Status (11)

Country Link
US (1) US7027282B2 (enExample)
EP (1) EP1146532B1 (enExample)
JP (1) JP2002036197A (enExample)
KR (2) KR100863790B1 (enExample)
CN (1) CN1436357A (enExample)
AT (1) ATE445907T1 (enExample)
AU (1) AU2001256377A1 (enExample)
CA (1) CA2406186A1 (enExample)
DE (1) DE60140157D1 (enExample)
FI (1) FI109155B (enExample)
WO (1) WO2001080266A1 (enExample)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0207363D0 (en) * 2002-03-28 2002-05-08 Qinetiq Ltd Switch device
JP2004134370A (ja) * 2002-07-26 2004-04-30 Matsushita Electric Ind Co Ltd スイッチ
US7106066B2 (en) 2002-08-28 2006-09-12 Teravicta Technologies, Inc. Micro-electromechanical switch performance enhancement
US7370185B2 (en) * 2003-04-30 2008-05-06 Hewlett-Packard Development Company, L.P. Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
JP4555951B2 (ja) * 2002-12-10 2010-10-06 エプコス アクチエンゲゼルシャフト ＭＥＭＳ（Ｍｉｃｒｏ−Ｅｌｅｃｔｒｏ−Ｍｅｃｈａｎｉｃａｌ−Ｓｙｓｔｅｍ）素子のアレイの駆動
WO2005069330A1 (en) 2003-12-30 2005-07-28 Massachusetts Institute Of Technology Electro-mechanical micro-switch device
US7477812B2 (en) 2003-12-30 2009-01-13 Massachusetts Institute Of Technology System and method for providing fast, low voltage integrated optical elements
WO2005069331A1 (en) 2003-12-30 2005-07-28 Massachusetts Institute Of Technology Low-voltage micro-switch actuation technique
EP1751765A4 (en) * 2004-05-24 2009-05-20 Univ Boston CONTROLLABLE NANOCHEMICAL MEMORY ELEMENT
GB0413341D0 (en) * 2004-06-15 2004-07-21 Cavendish Kinetics B V Arrangement and method for controlling a micromechanical element
KR100599115B1 (ko) * 2004-07-20 2006-07-12 삼성전자주식회사 진동형 멤스 스위치 및 그 제조방법
CN1769945A (zh) 2004-09-30 2006-05-10 富士胶片株式会社 微型机电式调制元件和微型机电式调制元件阵列
DE102004055937B4 (de) * 2004-11-19 2006-08-24 Siemens Ag Schaltmatrix
JP4643316B2 (ja) * 2005-03-11 2011-03-02 株式会社東芝 マイクロマシンスイッチ及びその駆動方法
US20070001542A1 (en) * 2005-06-30 2007-01-04 Neidrich Jason M Versatile system for restricting movement of MEMS structures
JP2007015067A (ja) 2005-07-08 2007-01-25 Fujifilm Holdings Corp 微小薄膜可動素子及び微小薄膜可動素子アレイ並びに画像形成装置
JP4990286B2 (ja) * 2005-10-14 2012-08-01 エプコス アーゲー Ｍｅｍｓチューナブルデバイス
JP5123198B2 (ja) * 2005-11-16 2013-01-16 クゥアルコム・メムス・テクノロジーズ・インコーポレイテッド セットおよびラッチ電極を備えたｍｅｍｓスイッチ
US7332835B1 (en) * 2006-11-28 2008-02-19 General Electric Company Micro-electromechanical system based switching module serially stackable with other such modules to meet a voltage rating
EP2122648B1 (en) 2006-12-22 2012-06-27 Analog Devices, Inc. Method and apparatus for driving a switch
JP5275252B2 (ja) * 2007-01-18 2013-08-28 エプコス アクチエンゲゼルシャフト Ｍｅｍｓキャパシタ回路及び方法
JP4919819B2 (ja) 2007-01-24 2012-04-18 富士通株式会社 マイクロマシンデバイスの駆動制御方法および装置
JP4610576B2 (ja) 2007-03-30 2011-01-12 富士通株式会社 マイクロマシンデバイスの駆動制御方法および装置
JP4477051B2 (ja) * 2007-09-12 2010-06-09 株式会社東芝 半導体集積回路及びｍｅｍｓ型可変容量キャパシタの制御方法
JP4528815B2 (ja) * 2007-09-13 2010-08-25 株式会社東芝 半導体装置、及び静電アクチュエータの制御方法
JP5361346B2 (ja) 2008-11-21 2013-12-04 株式会社東芝 半導体集積回路
US8804295B2 (en) * 2009-10-15 2014-08-12 Altera Corporation Configurable multi-gate switch circuitry
JP5418317B2 (ja) * 2010-03-11 2014-02-19 富士通株式会社 静電アクチュエータ、およびその駆動方法
US9754745B2 (en) 2010-11-01 2017-09-05 Raritan Americas, Inc. Methods and apparatus for improved relay control
DE102011081042B4 (de) * 2011-08-16 2021-05-27 Robert Bosch Gmbh Steuervorrichtung für einen Mikrospiegel, Verfahren zum Ansteuern eines Mikrospiegels und Bildprojektionssystem
JP2013114935A (ja) * 2011-11-29 2013-06-10 Ritsumeikan Ｍｅｍｓスイッチ
DE102012218987A1 (de) * 2012-10-18 2014-04-24 Robert Bosch Gmbh Ansteuerschaltung für n Schütze sowie ein Verfahren zur Ansteuerung von n Schützen
EP3343755B1 (en) * 2016-12-28 2023-12-06 Electrolux Appliances Aktiebolag Electric appliance and method with improved control of relay activation and deactivation
CN108183048B (zh) * 2018-02-05 2019-08-16 广东美的制冷设备有限公司 继电器驱动电路与空调器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3387194A (en) 1967-10-31 1968-06-04 Donald S. Banks Electric motor control system including a bank of batteries for series/parallel operation
JPH08512141A (ja) * 1993-07-02 1996-12-17 マサチューセッツ インスティチュート オブ テクノロジー 空間光変調器
US5784189A (en) 1991-03-06 1998-07-21 Massachusetts Institute Of Technology Spatial light modulator
US5943223A (en) 1997-10-15 1999-08-24 Reliance Electric Industrial Company Electric switches for reducing on-state power loss

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4356730A (en) * 1981-01-08 1982-11-02 International Business Machines Corporation Electrostatically deformographic switches
US4959515A (en) * 1984-05-01 1990-09-25 The Foxboro Company Micromechanical electric shunt and encoding devices made therefrom
JPH0458429A (ja) 1990-06-26 1992-02-25 Matsushita Electric Works Ltd 静電リレー
DE4031248A1 (de) 1990-10-04 1992-04-09 Kernforschungsz Karlsruhe Mikromechanisches element
US5233569A (en) * 1991-07-31 1993-08-03 Western Atlas International, Inc. Modified residual migration of seismic data
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
WO1998034269A1 (en) * 1997-02-04 1998-08-06 California Institute Of Technology Micro-electromechanical relays

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3387194A (en) 1967-10-31 1968-06-04 Donald S. Banks Electric motor control system including a bank of batteries for series/parallel operation
US5784189A (en) 1991-03-06 1998-07-21 Massachusetts Institute Of Technology Spatial light modulator
JPH08512141A (ja) * 1993-07-02 1996-12-17 マサチューセッツ インスティチュート オブ テクノロジー 空間光変調器
US5943223A (en) 1997-10-15 1999-08-24 Reliance Electric Industrial Company Electric switches for reducing on-state power loss

Also Published As

Publication number Publication date
EP1146532A2 (en) 2001-10-17
EP1146532A3 (en) 2004-09-01
FI20000888L (fi) 2001-10-14
US20020066659A1 (en) 2002-06-06
FI20000888A0 (fi) 2000-04-13
ATE445907T1 (de) 2009-10-15
JP2002036197A (ja) 2002-02-05
KR20080077233A (ko) 2008-08-21
WO2001080266A1 (en) 2001-10-25
FI109155B (fi) 2002-05-31
KR20020089464A (ko) 2002-11-29
CA2406186A1 (en) 2001-10-25
DE60140157D1 (de) 2009-11-26
CN1436357A (zh) 2003-08-13
AU2001256377A1 (en) 2001-10-30
EP1146532B1 (en) 2009-10-14
US7027282B2 (en) 2006-04-11
KR100871098B1 (ko) 2008-11-28

Similar Documents

Publication Publication Date Title
KR100863790B1 (ko) 마이크로 기계식 소자를 제어하기 위한 방법 및 장치
Dorzhiev et al. Electret-free micromachined silicon electrostatic vibration energy harvester with the Bennet’s doubler as conditioning circuit
JPS6325691B2 (enExample)
US8928435B2 (en) Electromechanical switch device and method of operating the same
US7732978B2 (en) Piezoelectric element driving circuit and pump device
CN101904079B (zh) 具有可变电容器的电转换器
US6058027A (en) Micromachined circuit elements driven by micromachined DC-to-DC converter on a common substrate
KR20040004398A (ko) Ｅ/ｆ 클래스 스위칭 전력 증폭기
KR100325648B1 (ko) 압전트랜스를이용한전압변환장치
CN87106591A (zh) 具有高压脉冲发生器的激光装置和高压脉冲发生器及脉冲的发生方法
CN101088216B (zh) 电荷偏置mem谐振器
US8093967B1 (en) MEMS high speed switching converter
KR100762571B1 (ko) 압전 트랜스의 구동 방법 및 구동 회로, 냉음극관 발광장치, 액정 패널, 및 액정 패널 장착 기기
US8384169B1 (en) MEMS DC to DC switching converter
JP2002199720A (ja) 共振型電源回路
US20250091857A1 (en) Reduction of ringing and intermodulation distortion in a mems device
JP2001119282A (ja) 高電圧半導体スイッチ
EP1195883B1 (en) Control circuit for rectification
CN117200701A (zh) Mems振荡器及其控制方法
JP2006210265A (ja) 電気機械スイッチ
CN118282370A (zh) 用于气脉冲产生器的解调信号产生器
Sangouard Device, Electronic, Technology for a MEMS Which Allow the Extraction of Vacuum Energy Conform to Emmy Noether Theorem
Cho et al. A shunt-type RF MEMS switch at 3.3 V operation actuated by Lorentz force and electrostatic hold
WO2003083886A1 (en) Switch device
JPH10289818A (ja) 電磁接触器の電磁石装置

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

J201 Request for trial against refusal decision
PJ0201 Trial against decision of rejection

St.27 status event code: A-3-3-V10-V11-apl-PJ0201

A107 Divisional application of patent
AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0104 Divisional application for international application

St.27 status event code: A-0-1-A10-A18-div-PA0104

St.27 status event code: A-0-1-A10-A16-div-PA0104

PB0901 Examination by re-examination before a trial

St.27 status event code: A-6-3-E10-E12-rex-PB0901

B701 Decision to grant
PB0701 Decision of registration after re-examination before a trial

St.27 status event code: A-3-4-F10-F13-rex-PB0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20110921

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20120924

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20131010

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20131010

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000