ES8308638A1 - Metodo y aparato para inspeccionar automaticamente superficies de pastillas de silicio. - Google Patents

Metodo y aparato para inspeccionar automaticamente superficies de pastillas de silicio.

Info

Publication number
ES8308638A1
ES8308638A1 ES512098A ES512098A ES8308638A1 ES 8308638 A1 ES8308638 A1 ES 8308638A1 ES 512098 A ES512098 A ES 512098A ES 512098 A ES512098 A ES 512098A ES 8308638 A1 ES8308638 A1 ES 8308638A1
Authority
ES
Spain
Prior art keywords
flaws
reflected
light
energy
dark channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES512098A
Other languages
English (en)
Other versions
ES512098A0 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Space Systems Loral LLC
Original Assignee
Ford Aerospace and Communications Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Aerospace and Communications Corp filed Critical Ford Aerospace and Communications Corp
Publication of ES512098A0 publication Critical patent/ES512098A0/es
Publication of ES8308638A1 publication Critical patent/ES8308638A1/es
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Road Signs Or Road Markings (AREA)
  • Absorbent Articles And Supports Therefor (AREA)
  • Prostheses (AREA)

Abstract

METODO Y APARATO PARA INSPECCIONAR AUTOMATICAMENTE SUPERFICIES DE PASTILLAS DE SILICIO. EL METODO COMPRENDE LAS SIGUIENTES OPERACIONES: PRIMERA, SE PREPARA UNA SUPERFICIE DE INSPECCION; SEGUNDA, SE EXPLORA DE MANERA REPETIDA CON UN ESTRECHO HAZ DE RADIACION ELECTROMAGNETICA UNA LINEA A TRAVES DE DICHA SUPERFICIE DE INSPECCION; TERCERA, MEDIANTE UN RECEPTOR DE CANAL LUMINOSO SE RECIBE LA RADIACION ELECTROMAGNETICA REFLEJADA POR LA PASTILLA DE SILICIO; Y POR ULTIMO, SE COMPARA LA SEÑAL DE SALIDA EMITIDA POR EL CANAL LUMINOSO CON UN NIVEL DE UMBRAL PREDETERMINADO Y SE GENERA UN NIVEL DE SEÑAL PREDETERMINADO EN UN CANAL DE CATEGORIA, CADA VEZ QUE DICHA SEÑAL DE SALIDA Y EL NIVEL DE UMBRAL PREDETERMINADO DIFIEREN EN UNA CANTIDAD PREDETERMINADA.
ES512098A 1981-05-12 1982-05-11 Metodo y aparato para inspeccionar automaticamente superficies de pastillas de silicio. Expired ES8308638A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/262,866 US4376583A (en) 1981-05-12 1981-05-12 Surface inspection scanning system

Publications (2)

Publication Number Publication Date
ES512098A0 ES512098A0 (es) 1983-09-01
ES8308638A1 true ES8308638A1 (es) 1983-09-01

Family

ID=22999399

Family Applications (1)

Application Number Title Priority Date Filing Date
ES512098A Expired ES8308638A1 (es) 1981-05-12 1982-05-11 Metodo y aparato para inspeccionar automaticamente superficies de pastillas de silicio.

Country Status (14)

Country Link
US (1) US4376583A (es)
EP (1) EP0065051B1 (es)
JP (1) JPS57192844A (es)
KR (1) KR880000750B1 (es)
AT (1) AT394632B (es)
AU (1) AU543465B2 (es)
BR (1) BR8202514A (es)
CA (1) CA1173930A (es)
DE (1) DE3176646D1 (es)
DK (1) DK210382A (es)
ES (1) ES8308638A1 (es)
MX (1) MX151906A (es)
NO (1) NO821555L (es)
PT (1) PT74873B (es)

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US5127726A (en) * 1989-05-19 1992-07-07 Eastman Kodak Company Method and apparatus for low angle, high resolution surface inspection
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US6262432B1 (en) * 1992-12-03 2001-07-17 Brown & Sharpe Surface Inspection Systems, Inc. High speed surface inspection optical apparatus for a reflective disk using gaussian distribution analysis and method therefor
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US5448364A (en) * 1993-03-22 1995-09-05 Estek Corporation Particle detection system with reflective line-to-spot collector
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US5864394A (en) * 1994-06-20 1999-01-26 Kla-Tencor Corporation Surface inspection system
US5487879A (en) * 1994-07-15 1996-01-30 Martin Marietta Magnesia Specialities Inc. Stabilized, pressure-hydrated magnesium hydroxide slurry from burnt magnesite and process for its production
US5535005A (en) * 1994-08-25 1996-07-09 Texas Instruments Incorporated Method and system for inspecting polished surface texture
US20040057044A1 (en) * 1994-12-08 2004-03-25 Mehrdad Nikoonahad Scanning system for inspecting anamolies on surfaces
US6462813B1 (en) * 1996-04-12 2002-10-08 Perceptron, Inc. Surface defect inspection system and method
EP0979398B1 (en) * 1996-06-04 2012-01-04 KLA-Tencor Corporation Optical scanning system for surface inspection
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EP1016126B1 (en) * 1997-03-31 2018-12-26 Nanometrics Incorporated Optical inspection module and method for detecting particles and defects on substrates in integrated process tools
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DE19733194B4 (de) * 1997-08-01 2005-06-16 Carl Zeiss Jena Gmbh Laser-Scanning-Mikroskop
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US6324298B1 (en) * 1998-07-15 2001-11-27 August Technology Corp. Automated wafer defect inspection system and a process of performing such inspection
US6265232B1 (en) * 1998-08-21 2001-07-24 Micron Technology, Inc. Yield based, in-line defect sampling method
US6222145B1 (en) * 1998-10-29 2001-04-24 International Business Machines Corporation Mechanical strength die sorting
DE10033179B4 (de) * 2000-06-29 2016-06-02 Carl Zeiss Microscopy Gmbh Verfahren zur optischen Detektion einer beleuchteten Probe in mehreren Detektionskanälen
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US6724476B1 (en) * 2002-10-01 2004-04-20 Advanced Micro Devices, Inc. Low defect metrology approach on clean track using integrated metrology
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DE102004029012B4 (de) * 2004-06-16 2006-11-09 Leica Microsystems Semiconductor Gmbh Verfahren zur Inspektion eines Wafers
US7586617B2 (en) * 2007-06-22 2009-09-08 Schlumberger Technology Corporation Controlling a dynamic signal range in an optical time domain reflectometry
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CN108818161B (zh) * 2018-07-24 2020-08-04 上海新昇半导体科技有限公司 硅片的返工系统及方法

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Also Published As

Publication number Publication date
ES512098A0 (es) 1983-09-01
KR830010380A (ko) 1983-12-30
NO821555L (no) 1983-01-21
KR880000750B1 (ko) 1988-05-04
AU7768281A (en) 1982-11-18
PT74873A (en) 1982-06-01
US4376583A (en) 1983-03-15
DE3176646D1 (en) 1988-03-17
EP0065051B1 (en) 1988-02-10
EP0065051A3 (en) 1984-05-23
PT74873B (en) 1983-12-02
MX151906A (es) 1985-05-02
BR8202514A (pt) 1983-04-12
AT394632B (de) 1992-05-25
AU543465B2 (en) 1985-04-18
EP0065051A2 (en) 1982-11-24
JPH0341785B2 (es) 1991-06-25
JPS57192844A (en) 1982-11-27
ATA186482A (de) 1991-10-15
CA1173930A (en) 1984-09-04
DK210382A (da) 1982-12-30

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