JPS52138183A - Inspecting apparatus for flaw - Google Patents

Inspecting apparatus for flaw

Info

Publication number
JPS52138183A
JPS52138183A JP5485876A JP5485876A JPS52138183A JP S52138183 A JPS52138183 A JP S52138183A JP 5485876 A JP5485876 A JP 5485876A JP 5485876 A JP5485876 A JP 5485876A JP S52138183 A JPS52138183 A JP S52138183A
Authority
JP
Japan
Prior art keywords
flaw
polarized light
inspecting apparatus
competent
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5485876A
Other languages
Japanese (ja)
Other versions
JPS5632581B2 (en
Inventor
Masayoshi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5485876A priority Critical patent/JPS52138183A/en
Publication of JPS52138183A publication Critical patent/JPS52138183A/en
Publication of JPS5632581B2 publication Critical patent/JPS5632581B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To perform competent inspection of flaw in dielectric film of silicon steel plate, etc., by detecting component ratio of polarized light orthogonal and parallel to the receiving and reflecting plane for the round polarized light reflected by the surface of inspected object.
JP5485876A 1976-05-14 1976-05-14 Inspecting apparatus for flaw Granted JPS52138183A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5485876A JPS52138183A (en) 1976-05-14 1976-05-14 Inspecting apparatus for flaw

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5485876A JPS52138183A (en) 1976-05-14 1976-05-14 Inspecting apparatus for flaw

Publications (2)

Publication Number Publication Date
JPS52138183A true JPS52138183A (en) 1977-11-18
JPS5632581B2 JPS5632581B2 (en) 1981-07-29

Family

ID=12982279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5485876A Granted JPS52138183A (en) 1976-05-14 1976-05-14 Inspecting apparatus for flaw

Country Status (1)

Country Link
JP (1) JPS52138183A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS60122359A (en) * 1984-07-04 1985-06-29 Hitachi Ltd Optical inspecting device
JPS6270738A (en) * 1985-09-25 1987-04-01 Hitachi Electronics Eng Co Ltd System for detecting foreign matter
US5835220A (en) * 1995-10-27 1998-11-10 Nkk Corporation Method and apparatus for detecting surface flaws
JP2013033017A (en) * 2011-06-30 2013-02-14 National Institute Of Advanced Industrial & Technology Surface inspection device, surface inspection method, surface inspection program, and computer-readable recording medium
JP2018073709A (en) * 2016-11-01 2018-05-10 凸版印刷株式会社 Electrode catalyst layer, membrane-electrode assembly, and solid polymer fuel cell
JP2021043210A (en) * 2016-03-31 2021-03-18 凸版印刷株式会社 Membrane electrode assembly inspection device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8497985B2 (en) * 2007-10-23 2013-07-30 Shibaura Mechatronics Corporation Inspection method based on captured image and inspection device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495689A (en) * 1972-04-13 1974-01-18
JPS4999086A (en) * 1973-01-26 1974-09-19

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495689A (en) * 1972-04-13 1974-01-18
JPS4999086A (en) * 1973-01-26 1974-09-19

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS6330570B2 (en) * 1978-01-27 1988-06-20 Hitachi Ltd
JPS60122359A (en) * 1984-07-04 1985-06-29 Hitachi Ltd Optical inspecting device
JPS6270738A (en) * 1985-09-25 1987-04-01 Hitachi Electronics Eng Co Ltd System for detecting foreign matter
JPH0523620B2 (en) * 1985-09-25 1993-04-05 Hitachi Electr Eng
US5835220A (en) * 1995-10-27 1998-11-10 Nkk Corporation Method and apparatus for detecting surface flaws
JP2013033017A (en) * 2011-06-30 2013-02-14 National Institute Of Advanced Industrial & Technology Surface inspection device, surface inspection method, surface inspection program, and computer-readable recording medium
JP2021043210A (en) * 2016-03-31 2021-03-18 凸版印刷株式会社 Membrane electrode assembly inspection device
JP2018073709A (en) * 2016-11-01 2018-05-10 凸版印刷株式会社 Electrode catalyst layer, membrane-electrode assembly, and solid polymer fuel cell

Also Published As

Publication number Publication date
JPS5632581B2 (en) 1981-07-29

Similar Documents

Publication Publication Date Title
DE3067238D1 (en) Ellipsometric method and ellipsometric device for testing the physical properties of the surface of a sample
FI851819L (en) ELLIPSOMETRISKT FOERFARANDE SAMT ELLIPSOMETRISK ANORDNING FOER UNDERSOEKNING AV DE PHYSIKALISKA EGENSKAPERNA I PROV ELLER YTSKIKTEN I PROV.
JPS5757246A (en) Detecting and measuring apparatus for flaw
JPS52138183A (en) Inspecting apparatus for flaw
JPS54101390A (en) Foreign matter inspector
JPS5223986A (en) Method of detecting surface flaws
JPS63163152A (en) Method and apparatus for inspecting transparent substrate or translucent substrate
JPS5365777A (en) Surface defect detector
JPS5271289A (en) Surface inspection device
JPS5340584A (en) Bottle inspector by elliptically focusing system
JPS5214477A (en) Method to detect a defect in a transparent test object
JPS51150379A (en) Surface defects detecting device for picking steel plate
JPS5213378A (en) Automatic measuring device for reflexibility distribution
JPS5344075A (en) Ultrasonic inspecting method
JPS5382492A (en) Surface inspecting method
JPS52146685A (en) Inspecting apparatus of glass bottle etc.
ES506924A0 (en) IMPROVEMENTS IN AN INSPECTION DEVICE TO DETECT DEFECTS IN OBJECTS.
JPS5218387A (en) Material defect inspecting apparatus
JPS5235684A (en) Method and apparatus for total reflection absorption measurement at lo w temperatures
JPS5249880A (en) Defect inspecting apparatus
JPS56110006A (en) Inspecting device for mouth-top surface of glass bottle
JPS5329790A (en) Nonndestructive inspecting apparatus
JPS545785A (en) Non-destructive inspecting apparatus
JPS5357087A (en) Flaw detecting system
JPS51120778A (en) Device for detecting flaws in rails