JPS5218387A - Material defect inspecting apparatus - Google Patents

Material defect inspecting apparatus

Info

Publication number
JPS5218387A
JPS5218387A JP9443375A JP9443375A JPS5218387A JP S5218387 A JPS5218387 A JP S5218387A JP 9443375 A JP9443375 A JP 9443375A JP 9443375 A JP9443375 A JP 9443375A JP S5218387 A JPS5218387 A JP S5218387A
Authority
JP
Japan
Prior art keywords
inspecting apparatus
material defect
defect inspecting
light
pattemed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9443375A
Other languages
Japanese (ja)
Other versions
JPS5612817B2 (en
Inventor
Hideo Ohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Tateisi Electronics Co
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tateisi Electronics Co, Omron Tateisi Electronics Co filed Critical Tateisi Electronics Co
Priority to JP9443375A priority Critical patent/JPS5218387A/en
Publication of JPS5218387A publication Critical patent/JPS5218387A/en
Publication of JPS5612817B2 publication Critical patent/JPS5612817B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To light up a pattemed object of a sheet form to be inspected, then divide the light beam into two beams, reflected and transmitted, and measure the light at varying color-photo sensitivities through filters thereby detecting the defect of materials.
JP9443375A 1975-08-01 1975-08-01 Material defect inspecting apparatus Granted JPS5218387A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9443375A JPS5218387A (en) 1975-08-01 1975-08-01 Material defect inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9443375A JPS5218387A (en) 1975-08-01 1975-08-01 Material defect inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS5218387A true JPS5218387A (en) 1977-02-10
JPS5612817B2 JPS5612817B2 (en) 1981-03-24

Family

ID=14110099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9443375A Granted JPS5218387A (en) 1975-08-01 1975-08-01 Material defect inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS5218387A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5077083A (en) * 1973-11-08 1975-06-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5077083A (en) * 1973-11-08 1975-06-24

Also Published As

Publication number Publication date
JPS5612817B2 (en) 1981-03-24

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