DE3176646D1 - Surface inspection scanning system and method - Google Patents

Surface inspection scanning system and method

Info

Publication number
DE3176646D1
DE3176646D1 DE8181305663T DE3176646T DE3176646D1 DE 3176646 D1 DE3176646 D1 DE 3176646D1 DE 8181305663 T DE8181305663 T DE 8181305663T DE 3176646 T DE3176646 T DE 3176646T DE 3176646 D1 DE3176646 D1 DE 3176646D1
Authority
DE
Germany
Prior art keywords
scanning system
surface inspection
inspection scanning
scanning
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181305663T
Other languages
English (en)
Inventor
Jerry W Alford
Charles J Cushing
James D Hunt
Michael L Smith
Neut Richard D Vander
James L Wilkes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ADE Optical Systems Corp
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Application granted granted Critical
Publication of DE3176646D1 publication Critical patent/DE3176646D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Road Signs Or Road Markings (AREA)
  • Absorbent Articles And Supports Therefor (AREA)
  • Prostheses (AREA)
DE8181305663T 1981-05-12 1981-12-01 Surface inspection scanning system and method Expired DE3176646D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/262,866 US4376583A (en) 1981-05-12 1981-05-12 Surface inspection scanning system

Publications (1)

Publication Number Publication Date
DE3176646D1 true DE3176646D1 (en) 1988-03-17

Family

ID=22999399

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181305663T Expired DE3176646D1 (en) 1981-05-12 1981-12-01 Surface inspection scanning system and method

Country Status (14)

Country Link
US (1) US4376583A (de)
EP (1) EP0065051B1 (de)
JP (1) JPS57192844A (de)
KR (1) KR880000750B1 (de)
AT (1) AT394632B (de)
AU (1) AU543465B2 (de)
BR (1) BR8202514A (de)
CA (1) CA1173930A (de)
DE (1) DE3176646D1 (de)
DK (1) DK210382A (de)
ES (1) ES512098A0 (de)
MX (1) MX151906A (de)
NO (1) NO821555L (de)
PT (1) PT74873B (de)

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US5274434A (en) * 1990-04-02 1993-12-28 Hitachi, Ltd. Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line
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US5448364A (en) * 1993-03-22 1995-09-05 Estek Corporation Particle detection system with reflective line-to-spot collector
US5864394A (en) * 1994-06-20 1999-01-26 Kla-Tencor Corporation Surface inspection system
US5883710A (en) 1994-12-08 1999-03-16 Kla-Tencor Corporation Scanning system for inspecting anomalies on surfaces
US5487879A (en) * 1994-07-15 1996-01-30 Martin Marietta Magnesia Specialities Inc. Stabilized, pressure-hydrated magnesium hydroxide slurry from burnt magnesite and process for its production
US5535005A (en) * 1994-08-25 1996-07-09 Texas Instruments Incorporated Method and system for inspecting polished surface texture
US20040057044A1 (en) * 1994-12-08 2004-03-25 Mehrdad Nikoonahad Scanning system for inspecting anamolies on surfaces
US6462813B1 (en) * 1996-04-12 2002-10-08 Perceptron, Inc. Surface defect inspection system and method
EP0979398B1 (de) * 1996-06-04 2012-01-04 KLA-Tencor Corporation Optische rastervorrichtung fur oberflaechenpruefung
US5912732A (en) * 1996-07-05 1999-06-15 Kabushiki Kaisha Topcon Surface detecting apparatus
US6072574A (en) 1997-01-30 2000-06-06 Micron Technology, Inc. Integrated circuit defect review and classification process
JP4527205B2 (ja) * 1997-03-31 2010-08-18 リアル・タイム・メトロジー，インコーポレーテッド 光学検査モジュール、及び統合プロセス工具内で基板上の粒子及び欠陥を検出するための方法
US6034776A (en) * 1997-04-16 2000-03-07 The United States Of America As Represented By The Secretary Of Commerce Microroughness-blind optical scattering instrument
DE19733194B4 (de) * 1997-08-01 2005-06-16 Carl Zeiss Jena Gmbh Laser-Scanning-Mikroskop
US6895109B1 (en) * 1997-09-04 2005-05-17 Texas Instruments Incorporated Apparatus and method for automatically detecting defects on silicon dies on silicon wafers
US6956963B2 (en) * 1998-07-08 2005-10-18 Ismeca Europe Semiconductor Sa Imaging for a machine-vision system
US6324298B1 (en) 1998-07-15 2001-11-27 August Technology Corp. Automated wafer defect inspection system and a process of performing such inspection
US6265232B1 (en) * 1998-08-21 2001-07-24 Micron Technology, Inc. Yield based, in-line defect sampling method
US6222145B1 (en) * 1998-10-29 2001-04-24 International Business Machines Corporation Mechanical strength die sorting
DE10033179B4 (de) * 2000-06-29 2016-06-02 Carl Zeiss Microscopy Gmbh Verfahren zur optischen Detektion einer beleuchteten Probe in mehreren Detektionskanälen
US6747737B2 (en) 2000-06-29 2004-06-08 Carl Zeiss Jena Gmbh Method for optical detection of an illuminated specimen in a plurality of detection channels
US7112812B2 (en) * 2001-12-28 2006-09-26 Applied Materials, Inc. Optical measurement apparatus
US6724476B1 (en) * 2002-10-01 2004-04-20 Advanced Micro Devices, Inc. Low defect metrology approach on clean track using integrated metrology
US7319935B2 (en) * 2003-02-12 2008-01-15 Micron Technology, Inc. System and method for analyzing electrical failure data
KR100542747B1 (ko) 2003-08-01 2006-01-11 삼성전자주식회사 결함 검사 방법 및 결함 검사 장치
DE102004029012B4 (de) * 2004-06-16 2006-11-09 Leica Microsystems Semiconductor Gmbh Verfahren zur Inspektion eines Wafers
US7586617B2 (en) * 2007-06-22 2009-09-08 Schlumberger Technology Corporation Controlling a dynamic signal range in an optical time domain reflectometry
EP2128701A1 (de) * 2008-05-30 2009-12-02 ASML Netherlands BV Verfahren zur Bestimmung von Defekten in einem Substrat und Vorrichtung zur Belichtung eines Substrats in einem lithographischen Verfahren
AU2009245853B2 (en) * 2009-12-08 2013-12-19 Radar Portal Systems Pty Ltd High speed photometric stereo pavement scanner
TWI620926B (zh) 2016-11-04 2018-04-11 財團法人工業技術研究院 工件表面檢測方法及應用其之系統
CN108818161B (zh) * 2018-07-24 2020-08-04 上海新昇半导体科技有限公司 硅片的返工系统及方法

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US3700909A (en) * 1972-03-09 1972-10-24 Columbia Research Corp Method for detecting pinhole defects in foil material
US3781117A (en) * 1972-03-31 1973-12-25 United States Steel Corp Apparatus for surface inspection of moving material
US3790287A (en) * 1972-03-31 1974-02-05 Western Electric Co Surface inspection with scanned focused light beams
US3743431A (en) * 1972-05-09 1973-07-03 Philco Ford Corp Radiation sensitive means for detecting flaws in glass
US3781531A (en) * 1972-06-23 1973-12-25 Intec Corp Flaw detector system utilizing a laser scanner
CH552197A (de) * 1972-11-24 1974-07-31 Bbc Brown Boveri & Cie Einrichtung zum messen der rauhigkeit einer oberflaeche.
US3866054A (en) * 1973-09-28 1975-02-11 Du Pont Defect size discriminator circuit for web inspection system
US3859537A (en) * 1973-10-15 1975-01-07 Du Pont Inspection system for web materials
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US3900265A (en) * 1974-03-08 1975-08-19 Intec Corp Laser scanner flaw detection system
US3958127A (en) * 1974-08-09 1976-05-18 E. I. Du Pont De Nemours And Company Optical-electrical web inspection system
JPS51113783A (en) * 1975-03-31 1976-10-07 Asahi Chem Ind Co Ltd Defects detector of nonwoven fabric
US4030830A (en) * 1976-01-05 1977-06-21 Atlantic Research Corporation Process and apparatus for sensing defects on a smooth surface
GB1580195A (en) * 1976-05-07 1980-11-26 Ferranti Ltd Discrimination circuit arrangements
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US4173441A (en) * 1977-03-28 1979-11-06 E. I. Du Pont De Nemours And Company Web inspection system and method therefor
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US4219277A (en) * 1978-08-09 1980-08-26 Westinghouse Electric Corp. Method of detecting flaws on surfaces
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JPS56146112A (en) * 1980-04-15 1981-11-13 Mitsubishi Electric Corp Optical microscope

Also Published As

Publication number Publication date
EP0065051A3 (en) 1984-05-23
ES8308638A1 (es) 1983-09-01
KR880000750B1 (ko) 1988-05-04
BR8202514A (pt) 1983-04-12
EP0065051A2 (de) 1982-11-24
JPH0341785B2 (de) 1991-06-25
AU7768281A (en) 1982-11-18
AU543465B2 (en) 1985-04-18
MX151906A (es) 1985-05-02
JPS57192844A (en) 1982-11-27
AT394632B (de) 1992-05-25
PT74873B (en) 1983-12-02
ES512098A0 (es) 1983-09-01
US4376583A (en) 1983-03-15
PT74873A (en) 1982-06-01
EP0065051B1 (de) 1988-02-10
NO821555L (no) 1983-01-21
ATA186482A (de) 1991-10-15
CA1173930A (en) 1984-09-04
DK210382A (da) 1982-12-30
KR830010380A (ko) 1983-12-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ESTEK CORP., CHARLOTTE, N.C., US

8328 Change in the person/name/address of the agent

Free format text: LIECK, H., DIPL.-ING. RUPPRECHT, K., DIPL.-ING., 80538 MUENCHEN PREISSNER, N., DIPL.-ING., PAT.-ANWAELTE, 81675 MUENCHEN

8327 Change in the person/name/address of the patent owner

Owner name: ADE OPTICAL SYSTEMS CORPORATION, NEWTON, MASS., US