DK210382A - Apparat til skanderende overfladeundersoegelse samt fremgangsmaade ved en saadan undersoegelse - Google Patents

Apparat til skanderende overfladeundersoegelse samt fremgangsmaade ved en saadan undersoegelse Download PDF

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Publication number
DK210382A
DK210382A DK210382A DK210382A DK210382A DK 210382 A DK210382 A DK 210382A DK 210382 A DK210382 A DK 210382A DK 210382 A DK210382 A DK 210382A DK 210382 A DK210382 A DK 210382A
Authority
DK
Denmark
Prior art keywords
investigation
procedures
scanning surface
scanning
surface investigation
Prior art date
Application number
DK210382A
Other languages
English (en)
Inventor
W J Alford
C J Cushing
J D Hunt
M L Smith
J L Wilkes
Original Assignee
Ford Aerospace & Communication
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Aerospace & Communication filed Critical Ford Aerospace & Communication
Publication of DK210382A publication Critical patent/DK210382A/da

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Road Signs Or Road Markings (AREA)
  • Absorbent Articles And Supports Therefor (AREA)
  • Prostheses (AREA)
DK210382A 1981-05-12 1982-05-11 Apparat til skanderende overfladeundersoegelse samt fremgangsmaade ved en saadan undersoegelse DK210382A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/262,866 US4376583A (en) 1981-05-12 1981-05-12 Surface inspection scanning system

Publications (1)

Publication Number Publication Date
DK210382A true DK210382A (da) 1982-12-30

Family

ID=22999399

Family Applications (1)

Application Number Title Priority Date Filing Date
DK210382A DK210382A (da) 1981-05-12 1982-05-11 Apparat til skanderende overfladeundersoegelse samt fremgangsmaade ved en saadan undersoegelse

Country Status (14)

Country Link
US (1) US4376583A (da)
EP (1) EP0065051B1 (da)
JP (1) JPS57192844A (da)
KR (1) KR880000750B1 (da)
AT (1) AT394632B (da)
AU (1) AU543465B2 (da)
BR (1) BR8202514A (da)
CA (1) CA1173930A (da)
DE (1) DE3176646D1 (da)
DK (1) DK210382A (da)
ES (1) ES512098A0 (da)
MX (1) MX151906A (da)
NO (1) NO821555L (da)
PT (1) PT74873B (da)

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US6255666B1 (en) * 1992-12-03 2001-07-03 Brown & Sharpe Surface Inspection Systems, Inc. High speed optical inspection apparatus for a large transparent flat panel using gaussian distribution analysis and method therefor
US6294793B1 (en) * 1992-12-03 2001-09-25 Brown & Sharpe Surface Inspection Systems, Inc. High speed optical inspection apparatus for a transparent disk using gaussian distribution analysis and method therefor
US6252242B1 (en) * 1992-12-03 2001-06-26 Brown & Sharpe Surface Inspection Systems, Inc. High speed optical inspection apparatus using Gaussian distribution analysis and method therefore
US5448364A (en) * 1993-03-22 1995-09-05 Estek Corporation Particle detection system with reflective line-to-spot collector
US5864394A (en) * 1994-06-20 1999-01-26 Kla-Tencor Corporation Surface inspection system
US5883710A (en) 1994-12-08 1999-03-16 Kla-Tencor Corporation Scanning system for inspecting anomalies on surfaces
US5487879A (en) * 1994-07-15 1996-01-30 Martin Marietta Magnesia Specialities Inc. Stabilized, pressure-hydrated magnesium hydroxide slurry from burnt magnesite and process for its production
US5535005A (en) * 1994-08-25 1996-07-09 Texas Instruments Incorporated Method and system for inspecting polished surface texture
US20040057044A1 (en) * 1994-12-08 2004-03-25 Mehrdad Nikoonahad Scanning system for inspecting anamolies on surfaces
US6462813B1 (en) * 1996-04-12 2002-10-08 Perceptron, Inc. Surface defect inspection system and method
EP0979398B1 (en) * 1996-06-04 2012-01-04 KLA-Tencor Corporation Optical scanning system for surface inspection
US5912732A (en) * 1996-07-05 1999-06-15 Kabushiki Kaisha Topcon Surface detecting apparatus
US6072574A (en) 1997-01-30 2000-06-06 Micron Technology, Inc. Integrated circuit defect review and classification process
JP4527205B2 (ja) * 1997-03-31 2010-08-18 リアル・タイム・メトロジー，インコーポレーテッド 光学検査モジュール、及び統合プロセス工具内で基板上の粒子及び欠陥を検出するための方法
US6034776A (en) * 1997-04-16 2000-03-07 The United States Of America As Represented By The Secretary Of Commerce Microroughness-blind optical scattering instrument
DE19733194B4 (de) * 1997-08-01 2005-06-16 Carl Zeiss Jena Gmbh Laser-Scanning-Mikroskop
US6895109B1 (en) * 1997-09-04 2005-05-17 Texas Instruments Incorporated Apparatus and method for automatically detecting defects on silicon dies on silicon wafers
US6956963B2 (en) * 1998-07-08 2005-10-18 Ismeca Europe Semiconductor Sa Imaging for a machine-vision system
US6324298B1 (en) 1998-07-15 2001-11-27 August Technology Corp. Automated wafer defect inspection system and a process of performing such inspection
US6265232B1 (en) * 1998-08-21 2001-07-24 Micron Technology, Inc. Yield based, in-line defect sampling method
US6222145B1 (en) * 1998-10-29 2001-04-24 International Business Machines Corporation Mechanical strength die sorting
DE10033179B4 (de) * 2000-06-29 2016-06-02 Carl Zeiss Microscopy Gmbh Verfahren zur optischen Detektion einer beleuchteten Probe in mehreren Detektionskanälen
US6747737B2 (en) 2000-06-29 2004-06-08 Carl Zeiss Jena Gmbh Method for optical detection of an illuminated specimen in a plurality of detection channels
US7112812B2 (en) * 2001-12-28 2006-09-26 Applied Materials, Inc. Optical measurement apparatus
US6724476B1 (en) * 2002-10-01 2004-04-20 Advanced Micro Devices, Inc. Low defect metrology approach on clean track using integrated metrology
US7319935B2 (en) * 2003-02-12 2008-01-15 Micron Technology, Inc. System and method for analyzing electrical failure data
KR100542747B1 (ko) 2003-08-01 2006-01-11 삼성전자주식회사 결함 검사 방법 및 결함 검사 장치
DE102004029012B4 (de) * 2004-06-16 2006-11-09 Leica Microsystems Semiconductor Gmbh Verfahren zur Inspektion eines Wafers
US7586617B2 (en) * 2007-06-22 2009-09-08 Schlumberger Technology Corporation Controlling a dynamic signal range in an optical time domain reflectometry
EP2128701A1 (en) * 2008-05-30 2009-12-02 ASML Netherlands BV Method of determining defects in a substrate and apparatus for exposing a substrate in a lithographic process
AU2009245853B2 (en) * 2009-12-08 2013-12-19 Radar Portal Systems Pty Ltd High speed photometric stereo pavement scanner
TWI620926B (zh) 2016-11-04 2018-04-11 財團法人工業技術研究院 工件表面檢測方法及應用其之系統
CN108818161B (zh) * 2018-07-24 2020-08-04 上海新昇半导体科技有限公司 硅片的返工系统及方法

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US3781117A (en) * 1972-03-31 1973-12-25 United States Steel Corp Apparatus for surface inspection of moving material
US3790287A (en) * 1972-03-31 1974-02-05 Western Electric Co Surface inspection with scanned focused light beams
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US3781531A (en) * 1972-06-23 1973-12-25 Intec Corp Flaw detector system utilizing a laser scanner
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Also Published As

Publication number Publication date
EP0065051A3 (en) 1984-05-23
ES8308638A1 (es) 1983-09-01
KR880000750B1 (ko) 1988-05-04
BR8202514A (pt) 1983-04-12
EP0065051A2 (en) 1982-11-24
JPH0341785B2 (da) 1991-06-25
AU7768281A (en) 1982-11-18
AU543465B2 (en) 1985-04-18
MX151906A (es) 1985-05-02
JPS57192844A (en) 1982-11-27
AT394632B (de) 1992-05-25
PT74873B (en) 1983-12-02
ES512098A0 (es) 1983-09-01
US4376583A (en) 1983-03-15
PT74873A (en) 1982-06-01
EP0065051B1 (en) 1988-02-10
NO821555L (no) 1983-01-21
ATA186482A (de) 1991-10-15
DE3176646D1 (en) 1988-03-17
CA1173930A (en) 1984-09-04
KR830010380A (ko) 1983-12-30

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