ES2148585T3 - Regulador de caudal. - Google Patents
Regulador de caudal.Info
- Publication number
- ES2148585T3 ES2148585T3 ES95940785T ES95940785T ES2148585T3 ES 2148585 T3 ES2148585 T3 ES 2148585T3 ES 95940785 T ES95940785 T ES 95940785T ES 95940785 T ES95940785 T ES 95940785T ES 2148585 T3 ES2148585 T3 ES 2148585T3
- Authority
- ES
- Spain
- Prior art keywords
- liquid flow
- bushing
- flow path
- sensor
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P11/00—Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for
- B23P11/005—Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for by expanding or crimping
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/005—Valves
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0753—Control by change of position or inertia of system
- Y10T137/0898—By shifting of liquid level
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87265—Dividing into parallel flow paths with recombining
- Y10T137/87338—Flow passage with bypass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87265—Dividing into parallel flow paths with recombining
- Y10T137/87338—Flow passage with bypass
- Y10T137/87354—Including flowmeter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49405—Valve or choke making
- Y10T29/49412—Valve or choke making with assembly, disassembly or composite article making
- Y10T29/49416—Valve or choke making with assembly, disassembly or composite article making with material shaping or cutting
- Y10T29/49423—Valve or choke making with assembly, disassembly or composite article making with material shaping or cutting including metal deforming
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49405—Valve or choke making
- Y10T29/49426—Valve or choke making including metal shaping and diverse operation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Lift Valve (AREA)
- Details Of Valves (AREA)
- Valve Housings (AREA)
- Temperature-Responsive Valves (AREA)
Abstract
UN CONTROLADOR DE FLUJO DE LIQUIDOS TIENE UNA VALVULA QUE ES CONTROLADA POR UNA ESTRUCTURA DE VARILLA CONTROLADORA QUE ESTA MONTADA DE FORMA BASICAMENTE GIRATORIA SOBRE UN DIAFRAGMA METALICO QUE SE ESTIRA Y SE ENCOGE CON EL MOVIMIENTO DE LA ESTRUCTURA DE VARILLA. LA ESTRUCTURA DE VARILLA ES ACTIVADA POR LA EXPANSION Y LA CONTRACCION DE UN CABLE DE ACCIONAMIENTO QUE SE CALIENTA PARA LA EXPANSION Y SE DEJA ENFRIAR PARA LA CONTRACCION. EL TRAYECTO DEL FLUJO DEL LIQUIDO PRIMARIO A TRAVES DEL CONTROLADOR ES RECTO. UN CONDUCTO DE UN SENSOR, QUE SUMINISTRA UN TRAYECTO PARALELO DE FLUJO DE LIQUIDO DEL SENSOR, SE CONECTA EN SU SITIO UTILIZANDO MIEMBROS SELLADORES METALICOS QUE SE EXTIENDEN EN ABERTURAS HACIA EL TRAYECTO DEL FLUJO DEL LIQUIDO PRIMARIO Y QUE ESTAN REDONDEADOS A LO LARGO DE LA DIRECCION QUE ATRAVIESA TALES ABERTURAS. LA CAIDA DE PRESION A LO LARGO DEL TRAYECTO DE FLUJO DEL LIQUIDO PRIMARIO PARA CREAR EL FLUJO A TRAVES DEL CONDUCTO DEL SENSOR ES SUMINISTRADA POR UN RESTRICTOR DE FLUJO DE LIQUIDO QUE TIENE UN NUCLEO Y LONGITUDES DE ALAMBRE A LO LARGO DEL NUCLEO QUE SON COMPRIMIDAS ENTRE EL NUCLEO Y UNA PARED DE TRAYECTO CONICO DE FLUJO DE LIQUIDO EN LA PROXIMIDAD DE LAS CONEXIONES DE ENTRADA Y DE SALIDA DEL CONDUCTO DEL SENSOR. PUEDE UTILIZARSE UNA FORMA ESFERICA O CONICA PARA LA FORMA DEL NUCLEO. UN CASQUILLO DE ASIENTO DE VALVULA SE MONTA EN UNA ESTRUCTURA DE TUBO QUE PROPORCIONA EL TRAYECTO DE FLUJO DE LIQUIDO PRIMARIO MEDIANTE LA APLICACION DE UNA FUERZA CONTRA UNA SUPERFICIE DEL EXTREMO DEL CASQUILLO, CON EL MOVIMIENTO DEL CASQUILLO BLOQUEADO, PARA DEFORMAR LA SUPERFICIE DEL EXTREMO, EMPUJAR LA PARED EXTERNA DEL CASQUILLO CONTRA LA PARED INTERNA DE LA ESTRUCTURA DEL TUBO Y FIJAR EL CASQUILLO EN LA ESTRUCTURA DEL TUBO. EN LA RELACION ENTRE LA ESTRUCTURA DE VARILLA CONTROLADORA Y UNA BOLA QUE ACTUA COMO MIEMBRO DE COMPUERTA PARA LA VALVULA, PUEDE UTILIZARSE UNA VARILLA DE UN VASTAGO ALARGADO QUE TIENE UN MANGUITO ALREDEDOR DE ELLA PARA FIJAR LA BOLA A LA ESTRUCTURA DE VARILLA CONTROLADORA. LA VARILLA DEL VASTAGO PUEDE MONTARSE FIJANDOLA EN EL MANGUITO ALARGADO A UNA DISTANCIA DESDE EL LATERAL DEL MIEMBRO DE COMPUERTA DE LA ESTRUCTURA DE VARILLA CONTROLADORA QUE SEA BASICAMENTE MAYOR QUE LA DISTANCIA DE LA POSICION DE LA BOLA DESDE EL LADO DEL MIEMBRO DE LA COMPUERTA DE LA ESTRUCTURA DE LA VARILLA CONTROLADORA.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/365,861 US5660207A (en) | 1994-12-29 | 1994-12-29 | Flow controller, parts of flow controller, and related method |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2148585T3 true ES2148585T3 (es) | 2000-10-16 |
Family
ID=23440685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES95940785T Expired - Lifetime ES2148585T3 (es) | 1994-12-29 | 1995-11-20 | Regulador de caudal. |
Country Status (10)
Country | Link |
---|---|
US (4) | US5660207A (es) |
EP (4) | EP0940741B1 (es) |
JP (1) | JP3717520B2 (es) |
KR (1) | KR100323958B1 (es) |
CN (2) | CN1155864C (es) |
AU (1) | AU4242396A (es) |
DE (3) | DE69526378T2 (es) |
ES (1) | ES2148585T3 (es) |
TW (1) | TW285723B (es) |
WO (1) | WO1996021182A2 (es) |
Families Citing this family (93)
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US6078030A (en) * | 1998-09-09 | 2000-06-20 | Millipore Corporation | Component heater for use in semiconductor manufacturing equipment |
US6202669B1 (en) * | 1998-12-29 | 2001-03-20 | Honeywell International Inc. | Self-aligning valve |
EP1031731B1 (de) * | 1999-02-22 | 2006-06-07 | Hydraulik-Ring GmbH | Wegesitzventil |
JP2000271471A (ja) | 1999-03-24 | 2000-10-03 | Nippon M K S Kk | 液体ソース供給システム及びその洗浄方法、気化器 |
US6138990A (en) * | 1999-03-25 | 2000-10-31 | Dxl Usa Inc. | Flow control valve assembly for mass flow controller |
US6575027B1 (en) | 1999-07-09 | 2003-06-10 | Mykrolis Corporation | Mass flow sensor interface circuit |
US6343617B1 (en) | 1999-07-09 | 2002-02-05 | Millipore Corporation | System and method of operation of a digital mass flow controller |
US6449571B1 (en) | 1999-07-09 | 2002-09-10 | Mykrolis Corporation | System and method for sensor response linearization |
US6445980B1 (en) | 1999-07-10 | 2002-09-03 | Mykrolis Corporation | System and method for a variable gain proportional-integral (PI) controller |
US6389364B1 (en) | 1999-07-10 | 2002-05-14 | Mykrolis Corporation | System and method for a digital mass flow controller |
US6404612B1 (en) | 1999-07-10 | 2002-06-11 | Mykrolis Corporation | Method for system for driving a solenoid |
JP2003523507A (ja) | 2000-02-14 | 2003-08-05 | ユニット・インストゥルメンツ・インコーポレーテッド | 抵抗値を平衡させる方法および装置 |
WO2002008844A1 (en) * | 2000-07-08 | 2002-01-31 | Fugasity Corporation | Fluid mass flow control valve and method of operation |
WO2002008845A1 (en) * | 2000-07-25 | 2002-01-31 | Fugasity Corporation | Small internal volume fluid mass flow control apparatus |
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-
1994
- 1994-12-29 US US08/365,861 patent/US5660207A/en not_active Expired - Lifetime
-
1995
- 1995-11-20 TW TW084112299A patent/TW285723B/zh active
- 1995-11-20 EP EP99108928A patent/EP0940741B1/en not_active Expired - Lifetime
- 1995-11-20 ES ES95940785T patent/ES2148585T3/es not_active Expired - Lifetime
- 1995-11-20 EP EP99108927A patent/EP0940740A3/en not_active Ceased
- 1995-11-20 DE DE69526378T patent/DE69526378T2/de not_active Expired - Fee Related
- 1995-11-20 EP EP99108929A patent/EP0940742B1/en not_active Expired - Lifetime
- 1995-11-20 CN CNB951975684A patent/CN1155864C/zh not_active Expired - Fee Related
- 1995-11-20 WO PCT/US1995/015157 patent/WO1996021182A2/en active IP Right Grant
- 1995-11-20 DE DE69535683T patent/DE69535683T2/de not_active Expired - Fee Related
- 1995-11-20 EP EP95940785A patent/EP0800672B1/en not_active Expired - Lifetime
- 1995-11-20 JP JP52098096A patent/JP3717520B2/ja not_active Expired - Fee Related
- 1995-11-20 AU AU42423/96A patent/AU4242396A/en not_active Abandoned
- 1995-11-20 US US08/860,343 patent/US5901741A/en not_active Expired - Lifetime
- 1995-11-20 DE DE69517447T patent/DE69517447T2/de not_active Expired - Fee Related
- 1995-11-20 CN CNB2004100384474A patent/CN100334515C/zh not_active Expired - Fee Related
- 1995-11-20 KR KR1019970704536A patent/KR100323958B1/ko not_active IP Right Cessation
-
1996
- 1996-07-23 US US08/685,260 patent/US5850850A/en not_active Expired - Lifetime
- 1996-07-23 US US08/685,322 patent/US5765283A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0940741A2 (en) | 1999-09-08 |
DE69535683D1 (de) | 2008-02-21 |
US5901741A (en) | 1999-05-11 |
EP0940742A2 (en) | 1999-09-08 |
EP0940742B1 (en) | 2002-04-10 |
EP0940742A3 (en) | 2000-07-12 |
CN1601420A (zh) | 2005-03-30 |
KR100323958B1 (ko) | 2002-06-22 |
DE69535683T2 (de) | 2009-01-08 |
DE69526378T2 (de) | 2002-11-14 |
WO1996021182A2 (en) | 1996-07-11 |
US5660207A (en) | 1997-08-26 |
EP0940741A3 (en) | 2000-07-12 |
WO1996021182A3 (en) | 1996-09-06 |
CN100334515C (zh) | 2007-08-29 |
DE69517447T2 (de) | 2001-01-11 |
DE69517447D1 (de) | 2000-07-13 |
US5765283A (en) | 1998-06-16 |
TW285723B (es) | 1996-09-11 |
JP3717520B2 (ja) | 2005-11-16 |
JPH10512071A (ja) | 1998-11-17 |
EP0800672A2 (en) | 1997-10-15 |
AU4242396A (en) | 1996-07-24 |
EP0940740A3 (en) | 2000-07-12 |
DE69526378D1 (de) | 2002-05-16 |
CN1155864C (zh) | 2004-06-30 |
CN1175310A (zh) | 1998-03-04 |
US5850850A (en) | 1998-12-22 |
EP0940741B1 (en) | 2008-01-09 |
EP0800672B1 (en) | 2000-06-07 |
EP0940740A2 (en) | 1999-09-08 |
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