EP3794639A1 - Système de contact, module électronique comportant le système de contact et procédé de création du système de contact - Google Patents

Système de contact, module électronique comportant le système de contact et procédé de création du système de contact

Info

Publication number
EP3794639A1
EP3794639A1 EP19724407.2A EP19724407A EP3794639A1 EP 3794639 A1 EP3794639 A1 EP 3794639A1 EP 19724407 A EP19724407 A EP 19724407A EP 3794639 A1 EP3794639 A1 EP 3794639A1
Authority
EP
European Patent Office
Prior art keywords
solder
contact arrangement
partner
joining partner
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19724407.2A
Other languages
German (de)
English (en)
Inventor
Thomas Suenner
Juergen ZIPPRICH
Christian Schiele
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP3794639A1 publication Critical patent/EP3794639A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

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    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/492—Bases or plates or solder therefor
    • H01L23/4922—Bases or plates or solder therefor having a heterogeneous or anisotropic structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0016—Brazing of electronic components
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    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/77—Apparatus for connecting with strap connectors
    • H01L2224/777—Means for aligning
    • H01L2224/77703—Mechanical holding means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8312—Aligning
    • H01L2224/83143—Passive alignment, i.e. self alignment, e.g. using surface energy, chemical reactions, thermal equilibrium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319—Arrangement of the layer connectors prior to mounting
    • H01L2224/83191—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319—Arrangement of the layer connectors prior to mounting
    • H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319—Arrangement of the layer connectors prior to mounting
    • H01L2224/83193—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed on both the semiconductor or solid-state body and another item or body to be connected to the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838—Bonding techniques
    • H01L2224/83801—Soldering or alloying
    • H01L2224/83815—Reflow soldering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
    • H01L2224/848—Bonding techniques
    • H01L2224/84801—Soldering or alloying
    • H01L2224/84815—Reflow soldering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92—Specific sequence of method steps
    • H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9221—Parallel connecting processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495—Lead-frames or other flat leads
    • H01L23/49503—Lead-frames or other flat leads characterised by the die pad
    • H01L23/49513—Lead-frames or other flat leads characterised by the die pad having bonding material between chip and die pad
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75—Apparatus for connecting with bump connectors or layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/77—Apparatus for connecting with strap connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector

Definitions

  • the invention relates to a contact arrangement, a contact arrangement
  • Non-fixed joining partners such as chip components to be soldered, thereby float in a relative position to the solderable surface of the joining partner, at which a minimum of the free surface energy is reached. Due to the uncontrolled blurring results
  • connection position which differs from the placement position, for example, the chip component usually.
  • a connection position which differs from the placement position, for example, the chip component usually.
  • a power semiconductor element is soldered between contact surfaces of two electrical guide elements.
  • solderable surface 30 of the guide elements to an area size is insignificantly larger than that
  • the invention is based on the object, in a stacked
  • joining partners defined without a limit on their solderable surface sizes.
  • the starting point is a contact arrangement as a layer stack of three joining partners arranged one above the other, wherein the middle joining partner is material-bonded with one layer each of a solidified solder to the overlying and to the underlying joining partner.
  • the overlying and / or the underlying joining partner each have a planar and solderable side surface zugrewte the middle joining partner.
  • a smaller area than the joining surface of the solder layer is formed, wherein at least one delimiting element for a solder meniscus of the solder layer is formed for centering the middle joining partner during a molten state of the solder at least within one of the two side surfaces and at a distance from their respective outer edges is there and closes the connection surface of the solder layer defines at least one outer contour portion defined.
  • the solder meniscus within the side surface is effectively interrupted. In this way, a blurring of the middle
  • Joining partners are suppressed to a position on the solderable side surface outside of there locally arranged limiting element.
  • Limiting element a continuous boundary edge. Characteristic of such an edge is a unique formed there
  • the boundary edge thus provides a simple action to act on the solder meniscus as a limiting barrier for lateral movement. More preferably, the boundary edge is formed in a straight line. Alternatively, the boundary edge may be partially interrupted one or more times, as long as said action on the solder meniscus is maintained.
  • boundary edge can be justified by various designs.
  • a favorable embodiment is shown in that the boundary edge terminates a protruding from the side surface mold elevation, in particular in the form of a web.
  • the boundary edge closes one in the plane of the
  • Defining element formed as a form of expression, as a punched out or as a form deflection within the overlying and / or the underlying joining partner.
  • the limiting element is formed parallel or perpendicular to at least one outer edge of the side surface.
  • a more compact contact arrangement can be achieved in the rule.
  • an embodiment of the contact arrangement is suitable in which a further different boundary element for the solder meniscus of the solder layer is formed by at least one outer edge of the side surface. This is particularly useful when the joining partner application-specific on the side of such an outer edge not over the middle
  • a limiting element can be advantageously paired within one of the side surfaces with at least one further identical limiting element and / or with at least one outer edge of one of the side surfaces as a further limiting element.
  • at least two next adjacent previously mentioned boundary elements are formed perpendicular or parallel to each other to ensure the operative engagement with the solder meniscus in at least two spatial directions.
  • An extension to three spatial directions results from a U-shaped arrangement of the aforementioned boundary elements, whereas an arrangement of four aforementioned boundary elements in each one spatial direction no
  • Connecting surface substantially a rectangular or square cross-sectional area, wherein at least two perpendicular and / or two mutually parallel cross-sectional contour sections are defined by the aforementioned boundary elements.
  • the contact arrangement is / are the
  • a joining partner can be made in one piece from one and the same
  • Material are provided or at least a consistent surface to be maintained as the solderable side surface.
  • the middle joining partner is an electrical and / or electronic component, for example a power semiconductor or a logic component.
  • the middle joining partner is a heat sink, for example a metal element or an unpopulated ceramic substrate element.
  • the electronic module is in particular a
  • Power module for example comprising a B2 or B6 bridge.
  • the invention also leads to a method for forming a
  • molten state is brought and the middle joining partner is floatingly supported by the molten solder, in which case a defined preferred position of the middle joining partner is occupied relative to the overlying and underlying joining partner by a solder mottle of the solder layer by at least one within at least one of
  • Fig. 1 an embodiment of an electronic assembly, comprising
  • Fig. 2 the electronics assembly of Fig. 1 in a plan view.
  • the contact arrangement 100 is designed as a stack construction of three joining partners 10, 20, 30 arranged one above the other, at least in one stacking area S.
  • the middle joining partner 20 is each with a layer of a solidified solder 40 with the then overlying and
  • the overlying and the underlying joint partners 30, 10 each have flat and solderable side surfaces 30.1, 10.2. These are corresponding solderable Contact surfaces 20.2, 20.1 of the middle joining partner 20 facing.
  • solder 40 On the side of the overlying and underlying joining partner 30, 10 is due to the substance composite with the solder 40 each one
  • Connecting surface 21, 23 limited as a partial surface of the individual solderable side surfaces 30.1, 10.2.
  • a flat residual surface of the respective solderable side surface 30.1, 10.2 projects beyond the partial surface 21, 23 which is thus occupied, and which is basically also wettable by the solder 40 in a molten state.
  • the upper side and the lower side contact surfaces 20.2, 20.1 are completely covered, for example, by the layer of the solder 40.
  • the solder 40 is, for example, before the formation of the contact arrangement 100 via a Lostpastentik on the contact surfaces 20.1, 20.2 of the middle contact partner 20 and / or on the faces 21, 23 of the
  • the outer joining partners 30, 10 then preferably in a fixed
  • the solder 40 brought into a molten state, so that an unobstructed wetting of the solderable contact surfaces 20.1, 20.2 or side surfaces 30.1, 10.2 can be done.
  • the middle joining partner 20 is floatingly carried by the molten solder 40.
  • a preferred position of the middle joining partner 20 is enforced in the present contact arrangement 100.
  • at least one of the outer joining partners 30, 10 within the side surface 30.1, 10.2 facing the middle joining partner 20 has at least one delimiting element 60 for a solder meniscus of the solder layer.
  • the limiting element 60 is arranged such that the solder meniscus in a plane of the respective
  • Side surface 30.1, 10.2 is interrupted in the lateral surface wetting in a defined spatial direction (for example, +/- x and or +/- y).
  • the delimiting element 60 is in the overlying joining partner 30 as a shaped recess 60.3a introduced, for example in the form of a long hole. This is arranged between two outer edges 60.34, 60.32 of the overlying joining partner 30.
  • the mold recess 60.3a has in the plane of the side surface 30.1 on a continuous rectilinear slot edge at which the solder meniscus is interrupted. This completes the connection surface 23 of the solder layer then over a defined contour section.
  • Mold recess 60.3a oriented perpendicular to the two outer outer edges 60.34, 60.32 of the middle joint partner 20, additionally preferably parallel to a further spaced third outer edge 60.33.
  • the solder meniscus is limited in the + x direction. This is shown more clearly in FIG. There, the contact arrangement 100 is shown in a plan view.
  • Limiting element 60 in the form of a further form of expression 60.3b, for example in the form of a slot, formed in the overlying joining partner 30.
  • the further mold recess 60.3b is arranged perpendicular to the first mold recess 60.3a, additionally preferably parallel to the first outer edge 60.34 of the middle joining partner 20, so that there is a limitation of the solder meniscus in the + y direction.
  • the corresponding two outer edges 60.32, 60.33 become different
  • Limiting element 60.33 or 60.34 of the middle joint partner 20 used.
  • a further mold recess for example, 60.3c in dashed lines
  • 60.3c in dashed lines can also be used as the limiting element 60.
  • Form cut 60.3a, 60.3b all other limiting elements 60 by an outer edge 60.32, 60.33, 60.34 of the middle joining partner 20 may be provided. Furthermore, it is also possible to provide one or all of the limiting elements shown in the exemplary embodiment as a corresponding projection in plan view in the joining partner 10 underneath. In addition to a mold recess, it is also conceivable to form one or more delimiting elements 60 as merely a mold cavity or, alternatively, as a mold cavity, which protrudes from the respective side surface 30.1, 10.2.
  • the mold recess, mold recess or mold elevation are, for example, in the form of a stamped shape, as a punched out punch or as a shaped bend in the joining partners 20, 10
  • the respective connecting surface 23, 21 is, for example, rectangular or square and preferably corresponds to the corresponding one Contact surface 20.1, 20.2 of the middle joint partner 20 or is slightly larger than this.
  • the Lötmenisken are made very steep - see example shown in Figure 1 - whereby the position position in the
  • the positional position of the middle joining partner 20 relative to the outer joining partners 30, 10 is obtained after solidification of the soldering agent 40 by cooling the contact arrangement 100 permanently in the forced preferential position.
  • the middle joining partner 20 is, for example, an electrical and / or electronic component 70, in particular a power semiconductor.
  • the underlying joining partner 10, for example, a circuit substrate 80 and the overlying joining partner 30 is a metal clip 90.
  • the contact assembly 100 is for example part of a B2 or B6 bridge of
  • the middle joining partner 20 is provided as a heat sink, for example a metal element or an unpopulated ceramic substrate element.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

L'invention porte sur un système de contact (100) sous forme d'empilement de couches de trois partenaires d'assemblage (10, 20, 30) agencés les uns sur les autres, le partenaire d'assemblage central (20) étant lié par matière au partenaire d'assemblage (30) situé au-dessus de lui et au partenaire d'assemblage (10) situé en dessous de lui au moyen respectivement d'une couche constituée d'un agent de soudure solidifié (40). Selon l'invention, le partenaire d'assemblage (30) situé au-dessus et/ou le partenaire d'assemblage (10) situé en dessous comportent respectivement une surface latérale (30.1, 10.2) plane et soudable tournée vers le partenaire d'assemblage central (20). Par ailleurs, une zone partielle de plus petite surface est réalisée dans cette surface latérale (30.1, 10.2) respective en tant que surface de liaison (21, 23) de la couche de soudure (40), au moins un élément de délimitation (60, 60.3a, 60.3b) (saillie, creux ou évidement) étant réalisé pour un ménisque de soudure de la couche de soudure (40) pour le centrage du partenaire d'assemblage central (20) dans un état fondu de l'agent de soudure au moins à l'intérieur d'une des deux surfaces latérales (30.1, 10.2) et à une certaine distance de son bord extérieur (60.32, 60.33, 60.34) respectif et connecte à cet endroit de manière définie la surface de liaison (21, 23) de la couche de soudure (40) par le biais d'au moins une section de contour extérieur. Dans un procédé de création d'un tel système de contact (100), le partenaire d'assemblage (30) situé au-dessus et le partenaire d'assemblage (10) situé en dessous sont fixés dans une position fixe et le dispositif (100) est traité thermiquement, la couche de soudure (40) étant fondue et le partenaire d'assemblage central (20) flotte dans la couche de soudure (40) fondue de manière qu'il adopte une position préférée définie par rapport au partenaire d'assemblage (30) situé au-dessus et au partenaire d'assemblage (10) situé en dessous du fait qu'un ménisque de soudure de la couche de soudure (40) est délimité par l'élément de délimitation (60, 60.3a, 60.3b) créé au moins dans une des surfaces latérales (30.1, 10.2) et la surface de liaison (21, 23) de la couche de soudure (40) y est fermée de façon définie par au moins un segment de contour extérieur. Le partenaire d'assemblage central (20) est par exemple un composant (70) électrique et/ou électronique, notamment un semi-conducteur de puissance, le partenaire d'assemblage (10) situé en dessous est par exemple un porte-circuit (80) et le partenaire d'assemblage (30) situé au-dessus est une pince métallique (90). En variante, le partenaire d'assemblage central (20) est conçu en tant que dissipateur thermique, par exemple un élément métallique ou un élément de substrat céramique non équipé.
EP19724407.2A 2018-05-15 2019-05-10 Système de contact, module électronique comportant le système de contact et procédé de création du système de contact Withdrawn EP3794639A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018207537.9A DE102018207537A1 (de) 2018-05-15 2018-05-15 Verbundanordnung aus drei gestapelten Fügepartnern
PCT/EP2019/062063 WO2019219536A1 (fr) 2018-05-15 2019-05-10 Système de contact, module électronique comportant le système de contact et procédé de création du système de contact

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EP3794639A1 true EP3794639A1 (fr) 2021-03-24

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EP19724406.4A Active EP3794641B1 (fr) 2018-05-15 2019-05-10 Dispositif d'évacuation de chaleur pour un module de puissance à semi-conducteurs
EP19724407.2A Withdrawn EP3794639A1 (fr) 2018-05-15 2019-05-10 Système de contact, module électronique comportant le système de contact et procédé de création du système de contact
EP19723412.3A Active EP3794640B1 (fr) 2018-05-15 2019-05-10 Système composite composé de trois pièces assemblées empilées

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US (1) US11569151B2 (fr)
EP (3) EP3794641B1 (fr)
CN (2) CN112106194A (fr)
DE (1) DE102018207537A1 (fr)
WO (3) WO2019219536A1 (fr)

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DE102022204294A1 (de) 2022-05-02 2023-11-02 Robert Bosch Gesellschaft mit beschränkter Haftung Verbindungsanordnung mit einem ein Bauelement zentrierenden Schaltungsträger

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JP6602480B2 (ja) * 2016-07-26 2019-11-06 三菱電機株式会社 半導体装置
CN107170720A (zh) * 2017-06-14 2017-09-15 扬州国扬电子有限公司 一种叠层封装双面散热功率模块

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CN112106194A (zh) 2020-12-18
US11569151B2 (en) 2023-01-31
DE102018207537A1 (de) 2019-11-21
CN112136210A (zh) 2020-12-25
EP3794640B1 (fr) 2022-07-06
EP3794640A1 (fr) 2021-03-24
EP3794641A1 (fr) 2021-03-24
EP3794641B1 (fr) 2024-07-10
WO2019219535A1 (fr) 2019-11-21
WO2019219533A1 (fr) 2019-11-21
WO2019219536A1 (fr) 2019-11-21

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