EP3551373A1 - Procédé d'amincissement de couches de solides pourvues de composants - Google Patents

Procédé d'amincissement de couches de solides pourvues de composants

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Publication number
EP3551373A1
EP3551373A1 EP17816734.2A EP17816734A EP3551373A1 EP 3551373 A1 EP3551373 A1 EP 3551373A1 EP 17816734 A EP17816734 A EP 17816734A EP 3551373 A1 EP3551373 A1 EP 3551373A1
Authority
EP
European Patent Office
Prior art keywords
solid
layer
modifications
temperature
generated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP17816734.2A
Other languages
German (de)
English (en)
Inventor
Wolfram Drescher
Marko Swoboda
Ralf Rieske
Christian Beyer
Jan Richter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siltectra GmbH
Original Assignee
Siltectra GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102016014821.7A external-priority patent/DE102016014821A1/de
Priority claimed from DE102017010284.8A external-priority patent/DE102017010284A1/de
Application filed by Siltectra GmbH filed Critical Siltectra GmbH
Publication of EP3551373A1 publication Critical patent/EP3551373A1/fr
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
    • H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
    • H01L21/02345—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to radiation, e.g. visible light
    • H01L21/02354—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to radiation, e.g. visible light using a coherent radiation, e.g. a laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide

Definitions

  • the present invention relates according to claim 1 to a method for separating at least one solid state layer of at least one solid and according to claim 15 to a solid, in particular a semiconductor wafer.
  • a conventional wafer is finished before the final desired substrate thickness is achieved by removing the excess material in a final polishing and polishing step.
  • This circumstance is unfavorable for two reasons: on the one hand valuable material is lost in the grinding step, on the other hand the grinding / polishing step has the potential of damaging the substrate the potential for a total loss of the already processed components, which already accounts for a large part of the added value of the product Wafers included.
  • Removal of the polymer film after the cleavage step serves, for example, by decomposing or dissolving the sacrificial layer chemically by adding suitable reactants.
  • This object is achieved by a method for separating at least one solid layer of at least one solid according to claim 1.
  • This method preferably comprises at least the steps:
  • Producing a plurality of modifications by means of laser beams inside the solid to form a release plane producing a composite structure by arranging or creating layers and / or components at or above an initially exposed surface of the solid, wherein the exposed surface is part of the solid layer to be separated, introducing an external force in the solid to generate stresses in the solid, the external force being strong enough for the stresses to cause crack propagation along the release plane.
  • the modifications to form the release plane are more preferably generated prior to the formation of the composite structure.
  • the generation of a laser modification layer in the solid or substrate defines the subsequent thin plane or the release plane.
  • the other processes for building or generating layers and / or for component production take place (lithography, etc.).
  • the layers and / or components forming the composite structure together with the solid-state layer are preferably by means of lithography, in particular coating with eg metal compounds, coating, optical exposure (eg scanning through a photomask), developing the photoresist (in particular at low temperatures, such as temperatures below 70 ° C, especially below 50 ° C or below 30 ° C or below ambient temperature or below 20 ° C or below 5 ° C or below 0 ° C), etching of structures.
  • one or more or all of these processes, in particular lithographic processes can in particular be more than 10 times or up to 10 times or more than 20 times or up to 20 times or more than 40 times or until to be repeated 40 times or more than 80 times or up to 80 times.
  • the solid remaining after the separation of the solid-state layer preferably has a thickness which is greater, in particular many times greater, than the thickness of the separated solid-state layer.
  • the solid state material is preferably a semiconductor material or comprises a semiconductor material.
  • a surface of the solid layer to be separated can also be understood such that in the case of a laser treatment to produce the modifications upstream high-temperature step, a coating of the surface generated by the high-temperature process can take place at the then
  • the composite structure is, by definition, only produced after the laser treatment, a multilayer arrangement which may be present before the laser treatment is not named as a composite structure in the context of this patent application but as a multilayer structure Arrangement.
  • thinning means reducing the thickness of the solid, which is preferably a wafer, in order to remove the proportion of material which in the case of ordinary production processes of component-containing solids, in particular wafers, is removed by abrasion, e.g. be milled, sanded or polished away.
  • a metal layer on the surface exposed by the separation of the solid layer from the solid surface at least partially and preferably by a majority and especially preferably completely compensates for a deformation of the solid layer caused by the compressive stresses of the remaining modifying constituents or at least partially and preferably for the majority or completely compensating the compressive stresses is generated and / or the metal layer is preferably produced by sintering or electrochemical deposition.
  • the aforementioned object is additionally or alternatively achieved by a method for providing at least one solid-state layer, wherein the solid-state layer is separated from a solid.
  • the inventive method preferably comprises at least the steps: generating a plurality of modifications by means of laser beams in the interior of the solid to form a release plane, which are generated by the modifications compressive stresses in the solid, separating the solid layer by a separation of the remaining solid and the solid layer along the formed by the modifications Ablöseebene, wherein at least components of the compressive stress-generating modifications remain on the solid state layer, so many modifications are produced that the solid state layer due to the modifications from the solid body peels off or an external force in the solid state for generating further stresses in the solid state is initiated, the external force being strong enough for the stresses to cause crack propagation along the release plane formed by the modifications in a material layer, in particular a metal layer, on the surface exposed by the separation of the solid layer for at least partial and preferably majority and particularly preferably complete compensation of a deformation of the solid layer caused by the compress
  • This solution is advantageous because very flat solid layers can be provided without having to perform a machining of the solid state layer. This is particularly useful in the solid state material SiC, since its production is very expensive and therefore material losses should be avoided as far as possible. Furthermore, SiC is very hard, which requires the use of very expensive grinding tools that wear very quickly due to the high hardness of SiC.
  • the production of a composite structure also takes place by arranging or producing layers and / or components on or above an initially exposed surface of the solid, wherein the exposed surface is part of the solid layer to be separated.
  • the modifications to form the release plane are created prior to the formation of the composite structure.
  • an external force may be introduced into the solid for generating stresses in the solid, the external force being strong enough for the stresses to cause crack propagation along the release plane.
  • the above object is additionally or alternatively solved by a method for generating electrical components.
  • the method according to the invention preferably comprises at least the steps of: generating a plurality of modifications by means of
  • Composite structure by arranging or creating layers and / or components at or above an initially exposed surface of the solid, wherein the exposed
  • Solid state layer due to the modifications peels off the solid or wherein an external force is introduced into the solid for generating further stresses in the solid, wherein the external force is so strong that the voltages a
  • compressive stresses for deforming the solid state layer are preferably present in the separated solid layer, the compressive stresses being generated by the components of the modifications remaining in the solid state layer, and the step of
  • the production of a composite structure preferably also takes place by arranging or
  • the surface of the solid-state layer exposed as a result of the separation has, according to a preferred embodiment of the present invention, first surface portions which have an Ra value (average roughness) of less than 1, in particular less than 0.9 or less than 0.7 or less than 0.5, in particular between 0.01 and 0.4. Furthermore, the exposed surface of the solid-state layer preferably has second surface portions which have an Ra value (average roughness) of more than 1, in particular between 1 and 5.
  • the proportion of the first surface portions is preferably greater than the proportion of the second surface portions, wherein the second surface portions at least 1% or at least 2% or at least 5% or at least 10% or between 1% and 49% or between 1% and 40% or between 1% and 30% or between 1% and 20% of the total area formed from the first surface portions and the second surface portions.
  • This solution is advantageous because the solid state layer even with proportions have the Ra values between 1 and 5, especially without further surface conditioning, e.g. Grinding or lapping, can be processed further.
  • the material layer in particular metal layer, is produced according to a further preferred embodiment of the present invention in a first state of matter and a temperature above room temperature on the solid layer and is at room temperature in a second state of matter, wherein the transition from the first state of aggregation to the second state of aggregation the metal layer acts on the solid state layer for at least partial compensation and preferably complete compensation of the deformation or the compressive stresses caused by the compressive stresses of the remaining modification constituents.
  • the metal layer may be formed at a temperature range above room temperature on the solid state layer, the temperature range being at least 100 ° C or 150 ° C or 200 ° C or 250 ° C or 300 ° C or 350 ° C or 400 ° C above room temperature is and particularly preferably up to 2000 ° C or less than the melting or evaporation temperature of the solid state material, wherein the solid state layer for at least partially by cooling the metal layer to room temperature Balancing and preferably full compensation of the deformation caused by the compressive stresses of the remaining modification components or to compensate for the compressive stresses acted upon.
  • the solid state layer is preferably deformed negatively to the deformation caused by the compressive stresses or by which the compressive stresses are compensated.
  • the compressive stresses preferably cause a deformation which is referred to as Bow.
  • 20 ° C. is preferably defined as the room temperature, wherein the room temperature can also describe the temperature in a process space, which may preferably be between 0 ° C. and 100 ° C. or between 20 ° C. and 200 ° C.
  • the metal layer is produced by sputtering or electrochemical deposition according to another preferred embodiment of the present invention. It is preferred, e.g. in a modified SiC solid state layer, known sputtering materials or materials suitable for electrochemical deposition, e.g. Titanium, titanium-tungsten, nickel, platinum, TaSi2 and / or gold.
  • the thickness of the metal layer is determined preferably by the parameters thickness of the solid state layer, material of the solid state layer, area of the solid state layer, number and type of modifications.
  • the solid body consists of silicon carbide (SiC) or silicon carbide (Sic), the solid state layer preferably having a thickness of less than 200 ⁇ m, in particular having a thickness of less than 150 ⁇ m or less than 125 ⁇ or less than 110 ⁇ or less than 100 ⁇ or less than 90 ⁇ or less than 75 ⁇ , is separated from the solid.
  • the electrical components are vertical components, in particular Schottky diodes and / or metal oxide semiconductor field effect transistors (MOSFETs), the metal layer forming an electrical contact, in particular an ohmic contact, and / or an interface for heat dissipation forms.
  • MOSFETs metal oxide semiconductor field effect transistors
  • This embodiment is advantageous because vertical components are very flat (eg by the use of SiC) and thus also lighter with comparatively low material and wear losses due to the present invention can be generated. This creates the possibility that significantly more energy-efficient and less expensive electrical components are produced.
  • the electrical components are according to a further preferred embodiment of the present invention horizontal components, in particular high electron mobility transistors (HEMT), wherein the metal layer preferably forms an interface for heat dissipation.
  • HEMT high electron mobility transistors
  • This embodiment is advantageous because these components can be made smaller, lighter and cheaper.
  • an average, in particular at least 4 or at least 9 or at least 36 or at least 100, of electrical components is produced per cm 2 of a flat surface side of the solid-state layer, the electrical components being separated from one another after their generation by dicing become.
  • This embodiment is advantageous because the individual electrical components are quickly and very gently separated from each other.
  • the individual electrical components preferably have rectangular, in particular square, base surfaces.
  • the electrical components preferably have outer edges between 0.1 mm and 5 mm.
  • a receiving layer is arranged on an exposed surface of the composite structure for introducing the external force, wherein the receiving layer comprises a polymer material and the receiving layer for thermally, especially mechanically, generating stresses in the solid body, wherein the thermal Loading is a cooling of the receiving layer to a temperature below the ambient temperature, wherein the cooling takes place such that the polymer material of the receiving layer performs a partial or complete crystallization and / or a glass transition and wherein the tensions a crack in the solid propagates along the Ablöseebene , which separates the first solid layer from the solid or the external force is introduced by an application of the solid with ultrasound in the solid, wherein the solid body hereby i is preferably arranged in a container filled with a liquid.
  • the ultrasound can be used with a frequency range of 20 kHz to 100 kHz but also in the high frequency sound range with a frequency range of 100 kHz to 1 MHz. Due to these frequencies, it is preferable for solids in liquid media to cavitation processes with sequelae such as collapsing cavitation bubbles. In liquid media, especially in the area of phase boundaries, implosion and deformation occur in the nanosecond range dynamically forming cavitation bubbles and the formation of a microjet. The spatially resolved release of energy occurs in the form of adiabatic heating in a very small space due to the very rapid compression of the gas.
  • a spatially resolved CNC controlled application with the aid of an ultrasound tip (sonotrode) which can specifically bring about an influencing of the crack initiation and / or crack guidance is particularly preferred.
  • the spatially resolved pressurization can be used specifically for crack initiation and / or crack guidance.
  • the homogeneous and / or spatially resolved embodiment is advantageous since, in particular when using the recording layer, a very precise application of force and thus crack initiation and / or crack guidance can be effected.
  • the solid is, in accordance with another preferred embodiment of the present invention, treated with at least one high temperature process prior to generation of the stripping level, wherein the high temperature process is carried out at a temperature between 70 ° C and the melting or evaporating temperature of the material of the solid.
  • parameters of the laser process can be optimized in such a way that the stress in the solid state is minimized as far as possible, e.g. by careful multiple application of the solid, by larger line distances and decreasing energies at each crossing.
  • the laser process is preferably dependent on the crystallographic orientation of the
  • the laser modification is particularly preferably carried out so that in the course of treatment resulting microcracks neither impede the lithography nor run supercritically from the modification level and the
  • Substrate loss after triggering the separation crack can lead.
  • Substrate loss after triggering the separation crack can lead.
  • SiC first lines are guided parallel to the preferred crack direction to a crack plane define before in a second step lines in 90 ° direction to trigger the cracks final and define the parting plane.
  • the implementation of the high-temperature steps prior to the generation of the release plane is highly advantageous, since a significant increase in temperature above 70 ° C is accompanied by an increased mobility of doping atoms, atoms of metallic contaminants and dislocations or other crystal defects.
  • the release plane had been created before the high temperature step or partially generated, then e.g. As a result, micro-cracks continue to extend or grow into the solid or into the solid-state layer to be separated, as a result of which more material would have to be removed and thus greater losses would occur.
  • the at least one high-temperature method is an epitaxy method, a doping method or a method in which plasma is used.
  • High-temperature processes are understood to be all processes, in particular material-depositing processes, which are carried out at a temperature above 70 ° C. The temperature occurring is preferably less than 2000 ° C or less than the melting or evaporation temperature of the solid state material.
  • the high-temperature method preferably creates a multilayered arrangement of solid-state material and of the one or at least one produced or arranged layer.
  • the high-temperature process produces at least one layer on the solid, the at least one layer produced having predefined parameters, at least one predefined parameter having a maximum degree of refraction and / or absorption and / or reflection and / or or charge carrier generation by photoelectric effect of laser light waves, wherein the degree of refraction and / or absorption and / or reflection and / or charge carrier generation by photoelectric effect below 5% and preferably below 1% and particularly preferably below 0.1%.
  • This embodiment is advantageous because interactions of all metallic elements of the circuit with laser light are prevented. As a result of interactions between a metal layer or metallic components and laser light or laser radiation, the metal layer and / or the components, in particular electrical line connections, may be damaged.
  • this embodiment eliminates the further problem that when introducing the laser plane, if already metallic structures or components (for example greater than 20 nm longitudinal extent or extension in the direction of laser penetration) are arranged on the substrate or generated, wherein the laser process is disturbed either by back reflections on the structures or by the structures themselves, since for example the transmission is not ideal. Since a multiphoton process is preferably used for producing the material modifications, the focus in the material must preferably be very precise, in particular ideal, in order to enable the required high intensities with wave fronts that are as undisturbed as possible. Thus, this advantage also speaks for a laser treatment prior to the processing or production of the final structures, in particular layers and / or components.
  • the modifications are preferably produced by means of a multiphoton excitation, in particular a two-photon excitation, in accordance with a further preferred embodiment of the present invention.
  • a multiplicity of basic modifications is first of all generated on an at least partially homogeneously extending, in particular curved, line, in particular in the homogeneously extending section.
  • These basic modifications are preferably generated with or depending on predefined process parameters.
  • the predefined process parameters preferably include at least the pulse duration, pulse energy, pulse distance within a line, distance of the lines from each other, depth and / or numerical aperture.
  • at least one value of these process parameters and preferably a plurality of values or all values of these process parameters or more than two values of these process parameters are determined as a function of the crystal lattice stability of the solid. The value so is particularly preferably chosen so that the crystal lattice remains intact around the respective base modifications, i. preferably less than 20 ⁇ or less than ⁇ or less than 5 / vm or less than 1 vm einreisst.
  • trigger modification for triggering subcritical cracks is generated, wherein at least one process parameter for generating the trigger modifications is different from at least one process parameter for generating the base modifications, preferably, multiple process parameters are different from each other.
  • the trigger modifications may be generated in a direction inclined or spaced from the direction of the line along which the base modifications are made, with the subcritical cracks preferably less than 5mm, more preferably less than 4mm or less than 3mm or less than 2mm or less than 1mm or less than 0.5mm.
  • An inclined orientation can in this case, for example, an angle between 0 ° and 90 °, preferably at an angle between 85 ° and 90 °, and more preferably at an angle of 90 °.
  • Example pattern SiC - with fs pulses Pulse energy about 800nJ, pulse spacing 50nm and larger, up to 200nm, line pattern as follows: 30 lines with 1 ⁇ distance, then 20 ⁇ gap, then again 30 lines, then 96 ⁇ gap and then from the front, crossed with 30 lines, 20 ⁇ gap and 30 lines (always with 1 ⁇ distance between the lines), then 300 ⁇ gap and then again 30/20/30-line line. Depth 180 ⁇ , doping degree of SiC (characterized by sheet resistance> 21 mOhm cm), pulse length 400fs, numerical aperture 0.65.
  • the solid-state material is silicon, wherein the numerical aperture is between 0.5 and 0.8, in particular 0.65, the irradiation depth between 150 ⁇ and ⁇ , especially at 300 ⁇ , the pulse spacing is between 1 ⁇ and 5 ⁇ , in particular at 2 ⁇ , is the line spacing between 1 ⁇ and 5 ⁇ , especially at 2 ⁇ , is the pulse duration between 50ns and 400ns, especially at 300ns, and the pulse energy between 3 ⁇ and 30 ⁇ , especially at 10 ⁇ , is located.
  • the solid-state material is SiC
  • the numerical aperture being between 0.4 and 0.8, in particular 0.4
  • the irradiation depth between 50 ⁇ m and ⁇ , in particular at 180 ⁇ is the pulse spacing between ⁇ , ⁇ and 3 ⁇ , Especially at 1 ⁇ , is the line spacing between 10 ⁇ and ⁇ ⁇ , especially at 75 ⁇ , the pulse duration between 100fs and 10ns, especially at 3ns, and the pulse energy between 0.5 ⁇ and 30 ⁇ , especially at 7 ⁇ , is.
  • Sample pattern Sapphire 3-fold written lines at 0 °, 45 °, 90 °, each with 1, 5 / m line spacing, pulse spacing 300nm, pulse energy in the first pass 350nJ, in the second pass 300nJ and in the third pass 250nJ, with an NA of 0.65 and a pulse duration of 250fs.
  • the surface roughness decreases with shorter pulses, with femtosecond pulses one can produce better surfaces (roughnesses below 3jum) than with nanosecond pulses (more over 3 ⁇ ⁇ ), but the process is more expensive and takes longer.
  • Picosecond pulses represent a middle ground.
  • the advantage with shorter pulses is that the phase transformation takes place athermic, ie coupling between the laser pulse and the crystal lattice, so that fewer oscillations (phonons) are excited - the process thus runs cooler overall. For larger areas must be amorphized (phase transformation), so that the critical stress is set up, which triggers the cracks.
  • the subcritical cracks spread between 5pm and 200 ⁇ , in particular between ⁇ and 100 / vm or between 10 / ym and 50 ⁇ ⁇ or between " ⁇ and 30 / m or between 20 ⁇ and” ⁇ or between 20 ⁇ and 50 ⁇ or between 20 ⁇ and 30 ⁇ m, in the solid state.
  • This embodiment is advantageous because smaller crack propagation requires less reworking effort.
  • the subcritical cracks propagate along the crystal lattice boundaries, however, since the crystal lattice of the solid body is preferably inclined with respect to the release plane, in particular at an angle between 0 ° and 6 °, a sawtooth-shaped surface results.
  • the crack propagation of the subcritical cracks is thus according to a further embodiment of the present invention with respect to the direction of irradiation of the laser beams in a deviating from an angle of 90 ° inclined direction, in particular, the crack propagation direction is preferably between 93 ° and 95 °, in particular exactly 94 °, compared to Beam direction inclined.
  • the sections tear between the regions of several lines in which the subcritical cracks have spread due to the stresses or the introduction of external force, which are generated for example by the Giasübergang or the ultrasonic treatment, a.
  • This embodiment is advantageous because, due to the previously caused prior damage inside the solid, in particular due to the subcritical cracks, the required voltages can be significantly lower. Furthermore, the crack is guided very precisely.
  • the receiving layer is disposed on or generated on a surface of the solid opposite the surface of the solid on which the layers and / or components for forming the composite structure are disposed.
  • the receiving layer according to the invention in particular in the form of a polymer film, is applied on the side of the solid on which preferably no further layer and / or components are arranged.
  • the receiving layer according to a further preferred embodiment of the present invention consists massively at least predominantly and preferably completely of the polymer material, wherein the glass transition of the polymer material is between -130 ° C and 0 ° C, in particular between -85 ° C and -10 ° C or between 80 ° C and -20 ° C or between -65 ° C and -40 ° C or between -60 ° C and -50 ° C.
  • the polymeric material of the receiving layer is or consists of a polymer hybrid material forming a polymer matrix having a filler in the polymer matrix, the polymer matrix preferably being a polydimethylsiloxane matrix and wherein the mass fraction of the polymer matrix on the polymer hybrid material is preferably 80% to 99% and particularly preferably 90% to 99%.
  • a polymer hybrid material is specified for use in a splitting method in which at least two solid sections are produced from a solid starting material.
  • the polymer hybrid material according to the invention comprises a polymer matrix and at least one first filler embedded therein.
  • the filler may comprise a mixture of different materials, e.g. As metal oxides, metal particles and inorganic fibers.
  • the polymer matrix may be formed as an elastomer matrix, preferably as a polydiorganosiloxane matrix, particularly preferably as a polydimethylsiloxane matrix.
  • elastomer matrix preferably as a polydiorganosiloxane matrix, particularly preferably as a polydimethylsiloxane matrix.
  • Such polymer materials are particularly easy to use as a matrix material in combination with fillers, since the properties can be flexibly adjusted due to the variable degree of crosslinking and adapted to the respective filler and the solid-state starting material to be divided.
  • the mass fraction of the polymer matrix on the polymer-hybrid material is 80% to 99%, 10 preferably 90% to 99%.
  • the first filler may be of organic or inorganic nature and consist of both a chemical element and a chemical compound or a mixture of substances, for example an alloy.
  • the first filler is designed to act as a reactant, initiator, catalyst, or promoter during debonding of the polymer hybrid material from the solid portion after division, and thereby to faster release of the polymer as compared to a polymeric material without a first filler Hybrid material from the solid section after the division leads.
  • the specific chemical composition and configuration of the first filler and its mass fraction is dependent in particular on the specific material of the polymer matrix, which is to be detached, the solvent used for this and the reactants used. Furthermore, the material of the solid state starting material and the dimensions of the solid state starting material to be divided also play a role.
  • the concrete proportion of the first filler in the polymer matrix is highly dependent on the material of the filler and its mode of action. On the one hand, despite its filler, the polymer matrix must be able to do justice to its task of generating stresses. On the other hand, the proportion of the first filler must be high enough to achieve the desired effect on the polymer removal.
  • the respective optimum mass fraction of the first filler can be determined by the person skilled in the art within the scope of simple experiments carried out in a concentration-dependent manner.
  • a further filler such as fumed silica contribute in the form of an inorganic network in the polymer.
  • fumed silica contribute in the form of an inorganic network in the polymer.
  • even less strong interactions can be improved by purely hydrodynamic enhancements contribute.
  • a targeted increase in viscosity should be mentioned, which enables improved processing in the splitting method and thus can contribute to improved manufacturing tolerances.
  • the first filler in a polymer hybrid material is used to accelerate the detachment of the polymer hybrid material from a solid part divided by division by means of a splitting method in which a solid starting material is divided into at least two solid sections. is used.
  • the first filler may be distributed in the polymer matrix such that the mass fraction of the first filler from the outside, i. H. lower boundary surface of the polymer hybrid material, which is connected during the splitting process with the solid state starting material, in the direction of a parallel to the lower interface disposed further interface of the polymer hybrid material, decreases. This means that the mass fraction of the filler near the solid state starting material or section is greater than in the other regions of the polymer hybrid material.
  • This distribution of the first filler allows a particularly effective removal of the polymer hybrid material after the separation, since the first filler is close to the interface with the solid section and can exert its effect there. At the same time, the remaining areas of the polymer-hybrid material have less or no proportions of the first filler, so that the function of the polymer is influenced as little as possible.
  • the polymer hybrid material is layered, wherein only one of the solid state starting material facing layer has the first filler, while the remaining polymer hybrid material is free of the first filler.
  • a lower portion of the polymer hybrid material adjacent to its lower interface may be free of the first filler. This can result in a range sequence as follows: Adjacent to the solid state starting material is initially an area without first filler, followed by an area with a high Proportion of first filler and then an area with low proportion of first filler or without first filler.
  • the region extends predominantly parallel to the interface of the solid state starting material to which the polymer hybrid material is applied and has a longitudinal and transverse extent at least in the region of this interface.
  • a lower region without a first filler may be provided, in particular, in the event that the first filler worsens the adhesion of the polymer hybrid material to the solid state starting material.
  • an area without a first filler is first arranged, followed by an area with a high proportion of the first filler, so that the first filler can fulfill its function.
  • a lower layer without first filler for example, a thickness between 10 ⁇ and 500 ⁇ , for example, 100 ⁇ have.
  • an upper portion of the polymer hybrid material adjacent to its upper interface may be free of the first filler.
  • the upper interface is meant the interface which confines the polymer-hybrid material opposite the lower interface and the solid state starting material to the environment.
  • Lower and upper interfaces can be arranged parallel to each other.
  • Such an upper region without a first filler can be provided in particular if the first filler adversely affects the heat transfer between the environment and the polymer hybrid material, for example if the cooling of the polymer hybrid material were to be delayed.
  • the first filler may comprise or consist of a material capable of reacting with a reactant, preferably an oxidant, to release a gaseous product.
  • cavities can be generated in the polymer matrix, which allow a faster access of the reactants and solvents to the polymer matrix and any sacrificial layer present and, moreover, effect a faster removal of the educts and dissolved constituents.
  • the cavity density can be selectively influenced in the boundary region between the solid body section and the polymer hybrid material or between the sacrificial layer and the polymer hybrid material.
  • the first filler may comprise a metal, in particular aluminum, iron, zinc and / or copper or consist of a metal, in particular the aforementioned metals.
  • Consisting of includes all materials referred to herein that may contain technologically-caused impurities or technologically-caused admixtures, which are useful, for example, for the preparation of the fillers and their distribution or attachment to the polymer matrix.
  • Metallic fillers may be treated with oxidizing agents, e.g. Hydrochloric acid, nitric acid, citric acid, formic acid or sulfamic acid react to release a gaseous product and thereby be removed from the polymer hybrid material.
  • oxidizing agents e.g. Hydrochloric acid, nitric acid, citric acid, formic acid or sulfamic acid react to release a gaseous product and thereby be removed from the polymer hybrid material.
  • the reaction of zinc as a filler by reaction with concentrated hydrochloric acid leads to the formation of 5 additional cavities: Zn + 2 HCl ZnCl 2 + H 2
  • the generation of hydrogen introduces additional driving forces which are the removal of the polymer
  • the first filler may improve the thermal conductivity within the polymer hybrid material, for example, by having the first filler having a higher thermal conductivity than the polymer of the polymer matrix. This may be the case, for example.
  • Another advantage in the case where the first filler comprises a metal is the improved thermal diffusivity within the polymer hybrid material. As a result of an improved thermal diffusivity, the voltages generated for the division of the solid state starting material by means of cooling can be generated more effectively, ie more quickly and with less consumption of coolant. Increasing this can increase the overall yield of the splitting process.
  • a second filler may be provided which the
  • the adhesion is increased compared to a polymer material without filler.
  • the second filler may be a filler that can be activated by plasma.
  • Plasma activation results in new surface species that can be made to interact more strongly with the surface of the solid starting material and, as a result, improve the adhesion of the polymer hybrid material.
  • the type of surface species achievable by the plasma treatment is primarily dependent on the process control of the plasma process.
  • gases such as nitrogen, oxygen, silanes or chlorosilanes can be added, so that, for example, polar groups are formed which can interact more strongly with the surface of the solid starting material.
  • the second filler may be distributed in the polymer matrix 15 such that the mass fraction of the second filler increases toward the lower interface.
  • the polymer-hybrid material may contain the second filler only in a region adjacent to the lower interface, which region may also be formed as a layer in the sense of the above definition.
  • the second filler may comprise core-shell polymer particles or core-shell polymer particles.
  • the second filler can be activated by means of low-temperature plasma, eg cold plasma.
  • the plasma can be generated by means of dielectric barrier discharge (DBE).
  • DBE dielectric barrier discharge
  • electron densities in the range of 1014 to 1016 m-3 can be generated.
  • the average Temperature of DBE generated "cold" non-equilibrium plasma (plasma volume) is about 300 ⁇ 40 K at ambient pressure
  • the average temperature of DBE-generated nonthermal plasma is about 70 ° C at ambient pressure.
  • the surface is subjected to uni- or bipolar pulses with pulse durations from a few microseconds to a few tens of nanoseconds and amplitudes in the single-digit to double-digit kilovolt range.
  • no metallic electrodes in the discharge space and thus no metallic impurities or electrode wear are to be expected.
  • Dielectric surfaces can be modified at low temperatures and chemically activated.
  • the surface modification can be carried out, for example, by an interaction and reaction of the surface species by ion bombardment.
  • the second filler can furthermore be activatable by means of corona treatment, flame treatment, fluorination, ozonation or UV treatment or eximer irradiation.
  • the polymer hybrid material may further comprise a third filler as compared to a polymer hybrid material having a first or to a polymer hybrid material having a first and a second filler.
  • This third filler has a higher thermal conductivity and / or a higher modulus of elasticity compared to the polymer of the polymer matrix.
  • the modulus of elasticity of the polymer is at low-temperature conditions in the lower single-digit gigapaseal range (about 1 -3 GPa), while, for example, metallic fillers have an E-modulus in the two-digit to three-digit gigapaseal range.
  • a percolating filler network is possible, allowing for improved "force coupling" into the solid state starting material.
  • the percolation is significantly influenced by the volumetric fill level of the respective fillers (eg 0.1% by volume, 130% by volume to 10% by volume depending on the aspect ratio).
  • the viscoelastic layer structure of the polymer structure can be immersed and several percolation paths become effective.
  • improved heat transfer can be made possible because it can lead to improved contact of the fillers with the surface of the solid state starting material.
  • the mechanical stability of the polymer hybrid material is achieved faster even at low temperatures. In sum, there is a lower standard deviation of the corresponding structural property profiles such.
  • the spatially resolved property profile changes (stress peaks in the polymer hybrid material) and thus in the solid state are smaller, which leads to a higher overall yield of the splitting process and a better quality of the solid sections produced.
  • the third filler can provide improved heat transfer between the environment and polymer hybrid material and faster thermal conduction within the polymer hybrid material, so that the polymer hybrid material can be cooled faster and the splitting process performed faster overall and thus more effectively can be.
  • the third filler can also be used to influence the thermal expansion coefficient.
  • the aim is to maximize the difference between the coefficients of thermal expansion of the polymer hybrid material and the solid state starting material to be divided in order to generate additional stresses necessary for the division.
  • the third filler has a high thermal expansion coefficient, d. H. an expansion coefficient higher than that of the polymer matrix.
  • the thermal expansion coefficient of the third filler may be more than 300 ppm / K.
  • the third filler may be distributed in the polymer matrix such that the mass fraction of the third filler increases toward the upper interface to allow faster heat transfer, particularly at the interface to the environment.
  • the third filler may comprise a metal, in particular aluminum, iron, zinc and / or copper, or consist of one of the metals mentioned. Metals are generally characterized by high thermal conductivity and thermal conductivity.
  • the described fillers can be distributed in particulate form in the polymer matrix, wherein the particle size in the ⁇ - and nm range, based on at least one dimension of the particle, may be.
  • the filler particles can also assume other configurations, for example a rod-shaped or disc-shaped form.
  • the filler particles can have all particle size distributions, for example monomodal or bimodal, narrow, in particular monodisperse, or broad.
  • the fillers can be attached to the polymer matrix both physically, e.g. B. by embedding in the polymer network, as well as be chemically attached.
  • one or more of the fillers described may comprise or consist of inorganic or organic fibers, for example carbon, glass, basalt or aramid fibers, provided that the functions described above are compatible therewith.
  • another filler may be added comprising or consisting of said fibers.
  • Fibers usually have strongly anisotropic properties.
  • By a direction-dependent positioning of the filler in the polymer-hybrid material there is the possibility of a targeted influencing the necessary for the division of the solid state starting material voltages. This can help increase the overall yield of the splitting process.
  • An additional advantage, in the case where an organic or inorganic filler is used as a pulp having a highly anisotropic structure, is that it can achieve an improvement in mechanical properties within the polymer-hybrid material.
  • the described fillers may also comprise or consist of core-shell particles. Additionally or alternatively, a further filler may be provided comprising or consisting of core-shell particles in the polymer hybrid material.
  • core-shell polymer particles in addition to an improved activatability also allows a new design of energy-absorbing mechanisms, which in total to an impact and fracture toughness increase, in particular an increase in the low-temperature impact strength of the polymer hybrid material when used in splitting Method and thus can also contribute to a higher overall yield of the splitting method. For example, a mechanical Destruction of a film of a polymer hybrid material with a lower probability occur, so that the possibility of reuse of the film can be promoted.
  • Core-shell particles are characterized by the fact that a generally spherical core of a material is surrounded by a shell of a second material.
  • the shell can either completely encase the core or be permeable.
  • the materials may be both inorganic materials, such as. As metals, or organic materials such.
  • As polymers act. For example, two different metals can be combined with each other. But it is also possible to surround a core of a polymer with a shell of a metal or a second polymer.
  • Core-shell particles allow the combination of the properties of the first and second materials. For example, via an inexpensive polymer core the
  • Particle size distribution also allows the properties of the core-shell particles to be accurately predicted and adjusted.
  • one or more fillers may be carbon in the form of carbon black, graphite, chopped carbon fibers, carbon nanofibers, preferably in the form of carbon nanotubes.
  • carbon nanotubes, CNT such as multi-walled carbon nanotubes (MWCNT) as well as single-walled carbon nanotubes (SWCNT).
  • MWCNT multi-walled carbon nanotubes
  • SWCNT single-walled carbon nanotubes
  • SWCNT singlewalled carbon nanotubes
  • DWCNT double-walled
  • MWCNT multi-walled carbon nanotubes
  • the third filler may comprise or consist of MWCNTs, since they have a particularly high thermal conductivity (> 3000 W * (m * K) "1 ) and at the same time have a very high tear strength in the range of 5-60 GPa High mechanical stability is reflected in high tear values, extreme elasticity and a very good durability of the filler.
  • SWCNT modulus of elasticity: 410 GPa to 4150 GPa vs. graphite: 1000 GPa, SWCNT: thermal conductivity approx. 6000 W * (m * K) 1 ).
  • the cylinder diameters of MWCNT are typically in the range of 1 nm to 100 nm, preferably 5 to 50 nm, with a length of 500 nm to 1000 pm.
  • the third filler may comprise MWCNT and at the same time the second and / or first filler may comprise or consist of carbon black, since here too an improvement of the thermal conductivity (eg up to 200 W * (m * K) '1 ) can be achieved. Since the use of exemplary carbon black having a significantly lower tensile strength with values of ⁇ 0.4 GPa, a combination of both or other fillers is possible and can lead to an improvement in the Automatplitausbeute and to improve the overall costs in the splitting process.
  • the thermal conductivity eg up to 200 W * (m * K) '1
  • the fillers may comprise or consist of silica, for example fumed silica.
  • a further filler comprising or consisting of silicic acid may be provided in the polymer hybrid material.
  • Pyrogenic silica can form a three-dimensional network and thereby to
  • Such a filler can serve to selectively adjust the mechanical properties of the polymer hybrid material.
  • first, second, third filler may be of the same material, as long as this is compatible with the function attributed to them is.
  • both the first and the third filler comprise aluminum or consist of aluminum.
  • aluminum can be used both to generate cavities and thus to accelerate the detachment of the polymer hybrid material from the solid body section and to increase the thermal conductivity. Such a configuration simplifies the manufacturing process, since it may be sufficient to add only one or two fillers to perform all functions.
  • First and second and possibly third filler can also consist of different materials. This allows an individual and thus better adaptation of the filler to the desired function.
  • a film of the invention comprises a polymer hybrid material as described above.
  • the film may have a thickness of, for example, 0.5 to 5 mm.
  • An inventive polymer hybrid material or a film according to the invention is applied to at least this surface so that a corresponding composite structure results.
  • the applied polymer-hybrid material or the applied film are also referred to below as recording layer.
  • the thickness of such a receiving layer can be, for example, between 0.5 mm and 5 mm, in particular between 1 mm and 3 mm.
  • the polymer hybrid material or the film can also be applied to a plurality of exposed surfaces, in particular to surfaces arranged parallel to one another.
  • the thermal exposure preferably means that the receiving layer is cooled below the ambient temperature and preferably below 10 ° C and more preferably below 0 ° C and more preferably below -10 ° C or below -40 ° C.
  • the cooling of the receiving layer is most preferably carried out such that at least a portion of the receiving layer performs a glass transition or undergoes a partial or complete crystallization.
  • the cooling can be a cooling to below -130 ° C, the z. B. by means of liquid nitrogen is effected.
  • This embodiment is advantageous because the receiving layer contracts as a function of the temperature change and / or undergoes a glass transition and the resulting forces are transferred to the solid state starting material, whereby mechanical stresses can be generated in the solid, which trigger a crack and / or or crack propagation, wherein the crack first propagates along the first release plane to cleave the solid layer.
  • the polymer hybrid material or the film is removed from the solid section, for example by a chemical reaction, a physical detachment process and / or mechanical removal.
  • the detachment process of the polymer hybrid aterials from the solid section can at moderate ambient temperature, for. B. in the range of 20 ° C to 30 ° C, preferably in the higher temperature range of 30 ° C to 95 ° C, z. B. from 50 ° C to 90 ° C, or for example in a lower temperature range between 1 ° C and 19 ° C.
  • the elevated temperature range may allow for shortening of a chemical release reaction due to an increase in the reaction rate, e.g. Example, in the case of using a sacrificial layer between the polymer hybrid material and the solid.
  • the detachment may take place in aqueous solution, advantageously at a pH in the range 2-6.
  • the dissolution process may take the form of a treatment with a solution of a suitable apolar solvent, for example Ambient temperatures in the range of 1 ° C to 50 ° C are preferred and from 20 ° C to 40 ° C are particularly preferred.
  • a particular advantage here is the detachment without a temperature effect on the film.
  • This can advantageously aliphatic and aromatic hydrocarbons such.
  • As carbon tetrachloride, are applied.
  • additional forces can be introduced into the polymer hybrid material to be detached and the boundary surface to the solid body section, since a solvent treatment can cause a very strong reversible swelling of the polymer-hybrids material, whereby the detachment is simplified as a whole.
  • a combination with the above-described detachment mechanism of the sacrificial layer and the treatment with a suitable non-polar solvent can be carried out - also without affecting the temperature of the film.
  • a stabilizing layer for limiting deformation of the exposed layer or components may be disposed or created on the exposed layer or exposed components of the resulting composite structure, the deformations resulting from the mechanical stresses introduced by the receptacle layer.
  • the side with components is thus preferably protected and held (eg against warping of the substrate or the solid and Graunaum Struktur). This can be done via soluble polymers (organics) or holding layers.
  • This embodiment is advantageous because it limits interaction with, for example, small feature structures.
  • the surface finish of a wafer-finished wafer is usually not regular, which can lead to field swell and local surface damage due to excessive or abrupt movement.
  • this embodiment represents a solution which provides good protection of the solid state layer and the layers and / or components arranged thereon and / or produced, in particular against mechanical damage or destruction.
  • the method may also preferably or alternatively comprise one or more of the steps: providing a solid for separating at least one solid layer, the solid having a first planar area portion and a second planar area portion, wherein the first planar area portion preferably substantially or exactly parallel to the second planar surface portion is aligned.
  • the stabilizing layer comprises or has a preferably water-soluble ceramic, in particular Fortafix from Detakta, and / or a soluble polymer, in particular poly (ethylene glycol) (PEG), in particular with different and / or adapted chain lengths ,
  • Fortafix is a one- and two-component ceramic cement for use as an adhesive, glaze to protect against corrosion and chemical attack, casting compound for mold making or insulation, as a dip for fixing heating wires, for inserting knife blades, eg in metal or ceramic handles.
  • the polymer (PEG) is soluble in water and a range of organic solvents.
  • the surface structures / components can be filled with PEG before a protective layer is applied.
  • the stabilization layer is preferably produced in situ or provided as a film. Additionally or alternatively, the Cast in stabilization layer or the layer and / or the exposed components are charged with liquid material, which is only by hardening or solidification to the stabilizing layer.
  • the stabilizing layer is additionally or alternatively removed by applying a solvent or by immersion in a solvent from the layer or the exposed components.
  • the stabilization layer thus comprises or consists of a ceramic material and / or comprises or consists of a polymeric material.
  • the modifications are produced successively in at least one row or row or line, wherein the modifications produced in a row or row or line are preferably generated at a distance X and height H so that a between two successive modifications propagating crack, in particular in the crystal lattice direction propagating crack, the crack propagation direction is aligned at an angle W opposite the Ablöseebene connecting the two modifications together.
  • the angle W is in this case preferably between 0 ° and 6 °, in particular at 4 °.
  • the crack propagates from a region below the center of a first modification toward a region above the center of a second modification.
  • the essential context here is that the size of the modification can or must be changed depending on the distance of the modifications and the angle W.
  • the modifications are produced on a line and preferably at the same distance from each other. Furthermore, it is conceivable that a plurality of these generated in the first step lines are generated. These first lines are particularly preferably parallel to the crack propagation direction us preferably rectilinear or circular arc-shaped, in particular in the same plane generated.
  • second lines are preferably generated for triggering and / or driving preferably subcritical cracks. These second lines are also preferably generated in a straight line. Particularly preferably, the second lines are inclined relative to the first lines, in particular oriented orthogonally. The second lines preferably extend in the same plane as the first lines, or more preferably in a plane which is parallel to the plane in which the first lines extend.
  • third lines are preferably generated to connect the subcritical cracks generated.
  • a cooling device for cooling the recording layer to a temperature between -130 ° C. and -10 ° C, in particular to a temperature between -80 ° C and -50 ° C, provided.
  • the cooling device preferably has a misting agent, in particular at least or exactly one perforated pipe, for atomizing liquid nitrogen, and the cooling effect is particularly preferably produced by atomized nitrogen.
  • the cooling device has a nitrogen bath, wherein the recording layer is positioned at a distance from liquid nitrogen stored in the nitrogen bath.
  • the cooling device may be provided with a spray, in particular liquid or mist-like, nitrogen, preferably uniformly providing spraying means, the spraying means preferably being arranged above and / or laterally of the receiving layer.
  • a spray in particular liquid or mist-like, nitrogen, preferably uniformly providing spraying means, the spraying means preferably being arranged above and / or laterally of the receiving layer.
  • This embodiment is advantageous because the liquid nitrogen is very well suited for the defined cooling of objects. Further, this embodiment is advantageous because a much more energy efficient process is provided over low temperature processes of less than -80 ° C or less than -90 ° C.
  • the cooling device preferably has a nitrogen bath and a positioning device for defined setting of the distance of the position of the receiving layer to the liquid nitrogen held in the nitrogen bath, wherein the nitrogen bath and the positioning device are preferably arranged in a space which is at least partially and preferably completely demarcated from the environment.
  • One or more temperature sensing devices are provided in accordance with another preferred embodiment of the present invention.
  • the temperature measuring device (s) and temperature measurement (s) are preferably carried out, the detected temperature values preferably being used to control the position or the flow through a nitrogen valve for temperature control.
  • a fan can also be used in the chamber interior, which generates a forced convection and thus reduces temperature gradients.
  • Another, not shown, possibility of cooling is the contact cooling with a tempered heat sink, which is traversed for example by a coolant in a closed circuit and is brought into contact with the solid.
  • the temperature measurement is preferably carried out on the solid, in particular on the receiving layer and / or on the underside of the solid, preferably the solid bottom is arranged spaced from the chamber bottom, wherein for positioning of the solid preferably a positioning is provided by means of the particular Preferably, the distance of the solid to the chamber bottom or the distance of the receiving layer to the liquid nitrogen, in particular temperature-dependent, is variable.
  • a chamber for receiving the nitrogen and the positioning device is preferably provided, wherein the chamber is preferably closable and / or thermally insulated from the environment.
  • a solid-state starting material is preferably understood to be a monocrystalline, polycrystalline or amorphous material. Monocrystallines having a strongly anisotropic structure are preferred because of the strong anisotropic atomic binding forces.
  • the solid-state starting material preferably has a material or a combination of materials from one of the main groups 3, 4, 5 and / or the subgroup 12 of the Periodic Table of the Elements, in particular a combination of elements of the 3rd, 4th, 5th main group and the subgroup 12th , such as Zinc oxide or cadmium telluride, on.
  • the semiconductor starting material can also be made of silicon, gallium arsenide GaAs, gallium nitride GaN, silicon carbide SiC, indium phosphide InP, zinc oxide ZnO, aluminum nitride AIN, germanium, gallium (III) oxide Ga 2 O 3 , aluminum oxide Al 2 O 3 (sapphire ), Gallium phosphide GaP, indium arsenide InAs, indium nitride InN, aluminum arsenide AlAs or diamond.
  • the solid or the workpiece preferably has a material or a combination of materials from one of the main groups 3, 4 and 5 of the Periodic Table of the Elements, such as SiC, Si, SiGe, Ge, GaAs, InP, GaN, Al 2 0 3 (sapphire), AIN. Particularly preferably, the solid has a combination of the fourth, third and fifth group of the periodic table occurring elements.
  • Conceivable materials or combinations of materials are eg gallium arsenide, silicon, silicon carbide, etc.
  • the solid may have a ceramic (eg Al 2 0 3 - Alumiumoxid) or consist of a ceramic, preferred ceramics are eg Perovskitkeramiken (such as Pb-, O , Ti / Zr containing ceramics) in general, and lead magnesium niobates, barium titanate, lithium titanate, yttrium aluminum garnet, especially yttrium aluminum garnet crystals for solid state laser applications, surface acoustic wave (SAW) ceramics such as lithium niobate , Gallium orthophosphate, quartz, calcium titanate, etc. in particular.
  • the solid body thus preferably has a semiconductor material or a ceramic material or particularly preferably the solid body consists of at least one semiconductor material or a ceramic material.
  • the solid is preferably an ingot or a wafer.
  • the solid body is preferably a material which is at least partially transparent for laser beams. It is therefore still conceivable that the solid body has a transparent material or partially made of a transparent material, such as sapphire, or is made.
  • solid material materials which can be used as solid material alone or in combination with another material are, for example, "wide band gap” materials, InAISb, high-temperature superconductors, in particular rare earth cuprates (eg YBa 2 Cu 3 O 7 ) or alternatively it is conceivable that the solid body is a photomask, in which case any photomask material known to the filing date and particularly combinations thereof can preferably be used as the photomask material
  • the solid may comprise or consist of silicon carbide (SiC).
  • the modifications may represent a phase transformation of silicon carbide into silicon and carbon.
  • the laser application according to the invention preferably effects a substance-specific spatially resolved accumulation of the energy input, from which results a defined temperature control of the solid at a defined location or at defined locations as well as in a defined time.
  • the solid may consist of silicon carbide, whereby preferably a strongly localized tempering of the solid to a temperature of e.g. more than 2830 +/- 40 ° C is made. This tempering results in new substances or phases, in particular crystalline and / or amorphous phases, the resulting phases preferably being silicon (silicon) and DLC (diamond-like carbon) phases which are produced with significantly reduced strength. By this strength-reduced layer then gives the separation area or the Ablöseebene.
  • the above-mentioned object is achieved by a solid produced according to a method mentioned above and having at least one release plane inside the solid, the release plane being formed by modification generated by means of laser radiation. Further, the solid has an area resulting from a high-temperature treatment process.
  • the layer / s and / or component / s are arranged or generated at the area.
  • the layer (s) and / or component (s) can be arranged or generated on a surface of the solid state layer to be separated.
  • the solid body preferably has a thickness or average thickness of less than 1000 / m, in particular less than 800 or 700 or 700 ⁇ or 600 ⁇ or ⁇ or 400 ⁇ or 300 ⁇ or 200 ⁇ or 100 ⁇ or ⁇ or 50 ⁇ .
  • the invention thus also relates to the production of components on such a pretreated / modified wafer and the modified wafer as a component substrate itself.
  • the present invention additionally or alternatively relates to a multi-component arrangement.
  • the multicomponent arrangement according to the invention is preferably produced by means of a method described in this protective document and particularly preferably has at least one solid layer.
  • the solids layer preferably consists of more than 50% (by weight), in particular more than 75% (by weight) or more than 90% (by weight) or more than 95% (by weight) or more than 98% (by weight) or more than 99% (by mass) of SiC, the solid state layer having compressive stress generating modifications or modifying constituents in the area of a first surface, the modifications being amorphized (phase transformed) constituents of the solid state layer, the modifications being spaced closer to the first surface or these forming as a second surface, wherein the second surface is parallel or substantially parallel to the first surface, wherein the first surface is planar or substantially planar and / or wherein the second surface is planar or substantially planar.
  • the multi-component arrangement according to the invention likewise has a metal layer produced on the first surface of the solid-state layer. Furthermore, it is possible for one or more further layers and / or one or more further components to be arranged on the second surface, in particular for forming electrical components which can be used as horizontal or vertical components.
  • the production of a composite structure preferably takes place by arranging or producing layers and / or components at or above an initially exposed surface of the solid, wherein the exposed surface forms part of the solid state layer to be separated off.
  • the modifications to form the release plane are created prior to the formation of the composite structure.
  • an external force may be introduced into the solid for generating stresses in the solid, the external force being so strong that the stresses cause crack propagation along the release plane.
  • the modifications are less than 200 ⁇ ⁇ , in particular less than 150 ⁇ or less than 110 ⁇ or less than 100 ⁇ or less than 75 ⁇ or less than 50 ⁇ , spaced from the second surface.
  • a surface is preferably to be regarded as substantially planar if every square centimeter of the surface touches the ideally smooth and ideally flat surface when the surface is in contact with an ideal smooth and ideally flat surface with at least one component.
  • a surface is preferably to be regarded as planar if every square centimeter, in particular square millimeters, of the surface when the surface is in contact with the surface on an ideally smooth and ideally flat surface has at least several, in particular at least 2, 3, 4 or 5 components ideally smooth and ideally flat surface touched.
  • FIGS. 2a-b are two schematic examples of solid state arrangements as may be provided according to the invention.
  • Solid state arrangements or solid state arrangements which can be produced in the process according to the invention as an intermediate product
  • Fig. 4 is a schematic representation of two formed by modifications
  • depressions extending from the edge into the interior of the solid body, the depressions preferably extending along a detachment plane defined by modifications ⁇ .
  • Fig. 1a shows the provision of the solid 1, in particular a wafer.
  • the solid body 1 provided is coupled or glued or welded or screwed or clamped to a tool carrier (chuck) 3, wherein the tool carrier preferably comprises a cooling functionality and thereby preferably becomes the cooling device 3.
  • the solid body 1 is preferably fixed in the longitudinal direction with its underside, which is preferably in the longitudinal direction relative to the surface 5, to the cooling device 3, in particular glued.
  • the laser beams are thus introduced to generate the modifications 9 over the surface 5, which is part of the solid layer to be separated, in the direction of the cooling device 3 in the solid state 1.
  • a high-temperature treatment of the surface 5, in particular an epitaxial material arrangement on the solid-body surface 5, preferably results from which a further layer 145 or several further layers 145 result.
  • the at least one high-temperature method is preferably an epitaxy method, a doping method or a method using plasma, wherein at least one layer 1 5 is produced on the solid 1 by the high-temperature method, in particular in the case of an epitaxial method, the at least one layer 145 having predefined parameters wherein at least one predefined parameter specifies a maximum degree of refraction and / or absorption and / or reflection of laser light waves, the degree of refraction and / or absorption and / or reflection being below 5% and preferably below 1% and more preferably below 0, 1% is.
  • the generated layer 145 or the further generated layers 145 may preferably be metal-free.
  • Fig. 1 c shows schematically the generation of the modifications 9 by means of the laser beams.
  • the laser beams penetrate preferably via the previously by means of the high-temperature process generated layer 145 in the solid state 1 a.
  • the laser beams it is alternatively also conceivable for the laser beams to penetrate into the solid body 1 via a free surface of the solid 1, ie not coated with the further layer 145, in particular from below.
  • the solid body 1 is preferably held laterally or at the outer ends (width and / or depth direction).
  • FIG. 1d shows a schematic sectional view of the solid body 1 after the generation of the modifications 9.
  • 4 blocks of modifications 9 are visible, which lead to the 4 crack portions 25, 27, 28, 29.
  • reference numerals 41, 42, 43, 44 and 45 respectively denote areas without modifications 9 or areas where fewer modifications 9 are made than in the areas where the blocks are produced at modifications 9.
  • FIG. 1e shows a state according to which a receiving layer, in particular comprising a polymer material, is arranged or produced on further components (not shown) arranged on the surface 5 or on a further epitaxially produced surface on the surface 5.
  • the receiving layer has preferably been produced as a film and, after its production, has been coupled to the surface 5, in particular bonded or glued. However, it is also possible to form the receiving layer by applying a liquid polymer to the surface 5 and then solidifying.
  • an arrangement or generation of further layers 150 and / or components 150 on the surface 5 or on a further layer 145 already produced during an upstream high-temperature process preferably takes place.
  • Fig. 1f shows schematically a temperature of the recording layer.
  • the acquisition layer is at a temperature below ambient, in particular at a temperature of less than 20 ° C, or less than 1 ° C, or less than 0 ° C, or less than -10 ° C, or less than -50 ° C or less than -60 ° C tempered, in particular cooled.
  • the material of the receiving layer 140 undergoes a glass transition or crystallization as a result of the cooling.
  • the temperature of the receiving layer by means of liquid nitrogen, in particular by means of a nitrogen mist takes place. Due to the temperature, in particular due to the glass transition, the recording layer contracts, whereby mechanical stresses in the solid state 1 are generated.
  • FIG. 2 a shows an embodiment according to which the receiving layer 140 is arranged on a surface of the solid body that is further apart from the modifications than a parallel or preferably substantially parallel or completely parallel surface 5.
  • the surface preferably has a further layer 145 (analogous to Fig. 1 b-1f) on.
  • components 150 or further material layers 150 are arranged.
  • a stabilization layer and / or a protective layer 142 is preferably arranged or produced on an exposed surface of the further material layer 150 or of the components 150.
  • the components 150 may in this case be cast, for example, in particular with a polymer material and / or ceramic material.
  • a stabilization device in particular a further wafer, such as a glass wafer, is coupled to the stabilization layer and / or protective layer 142, in particular adhesively bonded or bonded thereto.
  • the stabilization layer and / or protective layer 142 or the stabilization layer and / or protective layer 142 and the stabilization device cause the components 150 or further material layer 150 to deform only insignificantly or not during removal or after cleavage.
  • the deformation can be effected by the forces generated by the receiving layer 140, and after being split off, deformation can be effected by the remaining modifications, in particular, transformations of matter.
  • the modifications effect in the case of a material conversion that compressive forces arise, which would result in a buckling (BOW) of the separated solid layer without the stabilization layer / stabilizer.
  • the stabilization layer 142 may thus be additionally or alternatively formed as a glass wafer or on the stabilization layer 142 may additionally or alternatively be arranged or be a glass wafer.
  • a unit of separated solid-state layer and stabilization layer and / or protective layer 142 arranged thereon and any stabilization device arranged thereon are then preferably further treated for stress removal.
  • the stabilization layer 142 or the stabilization device particularly preferably forms a holding device, by means of which the separated solid state layer can be fixed for a material removal treatment with respect to a material removal device, in particular a grinding and / or polishing device.
  • a material removal device in particular a grinding and / or polishing device.
  • the material removal device then remaining on the separated solid layer modification portions are removed, in particular removed by machining.
  • the solid state layer is preferably always thinner than the remaining solid content.
  • the receiving layer is not arranged or generated on a surface of the later solid-state layer, but on a surface of the remaining solid portion.
  • the separated solid layer preferably has a height of less than 40% of the height of the remaining solid compared to the remaining solid, in particular less than 30% or 20% of the height of the remaining solid.
  • the numerical aperture is preferably between 0.5 and 0.8, in particular 0.65
  • the irradiation depth is between 150 ⁇ m and 1000 ⁇ m, in particular at 300 ⁇ m
  • the pulse spacing is between 1 ⁇ and 5 ⁇ , especially at 2 ⁇ » the line spacing is between 1 ⁇ and 5 ⁇ , especially at 2 ⁇
  • the pulse duration is between 50ns and 400ns, especially at 300ns
  • the pulse energy is between ⁇ and 30 ⁇ , especially at 10 ⁇ .
  • the separated solid layer preferably has a height of less than 50% of the height of the remaining solid, in particular of less than 45% or 40% or 35% or 30% or 25% of the height of the remaining solid remaining solid.
  • the numerical aperture is preferably between 0.4 and 0.8, in particular 0.4
  • the EinstrahlISSe is preferably between 50 ⁇ and 500 ⁇ , especially at " ⁇
  • the pulse spacing is preferably between technicallyn, ⁇ and 3 ⁇ , especially at ⁇
  • the line spacing is preferably between 10 ⁇ and 100 ⁇ , especially at 75 ⁇
  • the pulse duration is preferably between 1fs and 10ns, especially at 3ns
  • the pulse energy is preferably between ⁇ , ⁇ and 30 ⁇ , in particular at 7 ⁇ .
  • a further layer 145 may be produced, even if it has not been identified.
  • the further material layers or components 150 are therefore preferably produced or arranged on the further layer 145 or on an exposed surface of the solid.
  • FIG. 2 b shows that the receiving layer can be arranged on a surface of the remaining solid and a further receiving layer 146 can be arranged on the components or further material layers 150.
  • the components can additionally be provided with a stabilization layer 142, as a result of which the further receiving layer 146 is preferably attached to the stabilization layer and / or Protective layer 142 is arranged or generated.
  • the further receiving layer 146 is preferably provided as a film and preferably also consists at least partially of a polymer material. Particularly preferably, the further receiving layer 146 has the same material as the receiving layer 140 or 142. This embodiment is advantageous because the stresses for generating the crack from two sides can be introduced into the solid.
  • FIGS. 3a to 3i show various arrangements which can be provided after the generation of the further material layers or components 150 for initiating the crack.
  • FIGS. 3a-3i show various solid state arrangements 176 which are advantageous for introducing crack propagation and / or crack initiation voltages.
  • FIG. 3 a shows a processed solid body 1 or wafer with structures or components 150.
  • a receiving layer 140 is arranged or generated on the component side, in particular on the components 150 or the further material layers 150, in the solid body 1 shown in FIG.
  • the receiving layer 140 is in this case preferably arranged on the solid state layer to be separated.
  • the receiving layer 140 may also be referred to as a split film and is thus preferably laminated on the structure side.
  • a cooling of the overall arrangement takes place, whereby the split or the crack initiation and / or crack guidance is effected.
  • a holding layer / bonded wafer is arranged on the underside of the solid or on the exposed surface of the solid.
  • the holding layer may also be a tool carrier or chuck 3.
  • a cooling of the overall arrangement takes place, whereby the split or the crack initiation and / or crack guidance is effected.
  • FIG. 3 b shows an arrangement in comparison with FIG. 3 b, according to which the solid body is provided on both sides with receiving layers 140, 146.
  • the further receiving layer 146 is in this case arranged on a surface of the residual solid remaining later, wherein an adhesion-promoting layer 148 and / or sacrificial layer 149 and / or protective layer 142 can be arranged or produced between the further receiving layer 146 and the solid body 1.
  • the two recording layers 140 and 146 are preferably laminated.
  • a cooling of the overall arrangement takes place, whereby the split or the crack initiation and / or crack guidance is effected.
  • FIG. 3e shows an arrangement according to which no adhesion-promoting layer 148 and / or sacrificial layer 149 and / or protective layer 142 is arranged or generated between the further receiving layer 146 and the solid body 1 with respect to the arrangement known from FIG. 3d.
  • a cooling of the overall arrangement takes place, whereby the split or the crack initiation and / or crack guidance is effected.
  • 3f shows an arrangement which is constructed inversely to the arrangement known from FIG. 3d, ie that the adhesion-promoting layer 148 and / or sacrificial layer 149 and / or protective layer 142 is not arranged or generated between the further receiving layer 146 and the solid body 1, but is generated or arranged between the receiving layer 140 and the solid body 1 and thus on the solid state layer to be separated.
  • the components 150 or the structures in this case, e.g. one or more layers are produced by spin coating.
  • cooling of the overall arrangement takes place, whereby the split or the crack initiation and / or crack guidance is effected.
  • FIG. 3g shows an arrangement corresponding to a combination of the arrangements of FIGS. 3d and 3f.
  • the solid is preferably laminated on both sides with a split film, likewise a double-sided protective layer and / or adhesion-promoting layer and / or sacrificial layer may be provided under the split film; Spincoating possible.
  • cooling of the overall arrangement takes place, whereby the split or the crack initiation and / or crack guidance is effected.
  • Fig. 3h shows an arrangement which is similar to the arrangement shown in Fig. 3b, wherein the receiving layer is not arranged or laminated on one side of the solid state layer to be separated, but on the remaining after the separation residual solids. The separation is then carried out as a result of the cooling analogous to the separation of an ingot or as in an ingot process.
  • Fig. 3i shows an arrangement similar to the arrangement known from Fig. 3c, wherein one or more of the following layers or devices are arranged or generated on the component side of the solid or on or above the components 150. These layers or devices are thereby preferred: at least or exactly one adhesion-promoting layer 148 and / or at least or exactly one sacrificial layer 149 and / or at least or exactly one protective layer 142 and / or at least or exactly one stabilizing device 3, in particular a tool carrier or chuck or another wafer.
  • cooling of the overall arrangement takes place, whereby the split or the crack initiation and / or crack guidance is effected.
  • Fig. 4 is an illustration of an example of a writing pattern in XY processing:
  • Arrows 170, 172 represent the laser advance direction, the black circles represent the different laser shots or modifications 9, which here do not overlap with their damage effect in the material. It is preferred here if the laser first moves in one direction and produces modifications 9 before reversing and writing modifications 9 in the second (lower) direction.
  • FIGS. 5a to 5d show various cooling devices 174.
  • the solid state arrangements 176 processed in these cooling devices 174 result from the various forms and configurations of the solid bodies 1 provided with one or more receiving layers 140, 146 shown and described in FIGS. 1a to 3i
  • the coolers 174 shown herein all use a gas 178 as the exit cooling medium for cooling.
  • this starting cooling medium is either atomized or vaporized.
  • the starting cooling medium is liquid nitrogen.
  • Alternative cooling methods e.g. by means of Peltier elements are also conceivable and possible.
  • the cooling device 174 preferably serves for cooling the recording layer 140, 146 to a temperature between -130 ° C and -10 ° C, in particular to a temperature between -80 ° C and -50 ° C.
  • the cooling device 174 has a nitrogen bath, wherein the receiving layer is spaced apart, in particular by means of an adjustable positioning device 180, positioned to liquid nitrogen held in the nitrogen bath.
  • the solid state assembly is preferably placed on a positioning device or on a holder over a nitrogen bath. This results in a temperature gradient over the chamber height and the temperature at the Festgroperan ever is about the level with the output cooling medium or the position of the solid state assembly 176 (distance to the bottom of the chamber) adjustable.
  • the cooling device can preferably have a misting agent, in particular at least or precisely a perforated pipeline, for atomizing liquid nitrogen or a misting agent for atomizing liquid nitrogen and the cooling effect can be generated by nebulized or vaporized nitrogen.
  • a misting agent in particular at least or precisely a perforated pipeline, for atomizing liquid nitrogen or a misting agent for atomizing liquid nitrogen and the cooling effect can be generated by nebulized or vaporized nitrogen.
  • a homogeneous spray device / mist sprayer is preferably provided for spraying or misting.
  • the spraying or atomizing is preferably carried out above the solid state arrangement 176.
  • temperature measurements for temperature control which output output data for regulating a valve, in particular a nitrogen valve, preferably take place. The temperature measurements are preferably carried out on the substrate or on the solid body 1 or on the receiving layer 140.
  • the substrate or the solid body 1 or the solid state arrangement 176 preferably rests above the chamber bottom in order to avoid nitrogen settling at the bottom of the chamber.
  • a perforated pipeline is preferably used as a homogeneous spray device. Furthermore, temperature measurements for temperature control, which output output data for regulating a valve, in particular a nitrogen valve, preferably take place. The temperature measurements are preferably carried out on the substrate or on the solid body 1 or on the receiving layer 140.
  • the substrate or the solid body 1 or the solid state arrangement 176 preferably rests above the chamber bottom in order to settle nitrogen at the bottom of the chamber.
  • FIG. 5d shows a cooling device 176 which has a homogeneous spray device / mist collector 182 for cooling preferably several or each side. Furthermore, temperature measurements for temperature control, which output output data for regulating a valve, in particular a nitrogen valve, preferably take place. The temperature measurements are preferably carried out on the substrate or on the solid body 1 or on the receiving layer 140.
  • the substrate or the solid body 1 or the solid state arrangement 176 preferably rests above the chamber bottom in order to avoid nitrogen settling at the bottom of the chamber.
  • the chamber 184 of the cooling device 174 is preferably closed in order to reduce a temperature gradient as far as possible by insulation.
  • Fig. 6 shows three examples of preferred relationships between crystal lattice orientation and modification generation. This method is particularly useful for the separation of solid layers of a SiC-containing or SiC-containing solid. These relationships result in a further method according to the invention.
  • This further method according to the invention is preferably used to separate at least one solid-state layer 4 from at least one solid 1, in particular of a wafer from an ingot or for thinning a wafer.
  • the further method according to the invention preferably comprises at least the steps of: generating a plurality of modifications 9 by means of laser beams inside the solid 1 to form a release plane 8, and introducing an external force into the solid 1 to generate stresses in the solid 1, wherein the external force is so strong that the stresses cause crack propagation along the Ablöseebene 8.
  • the modifications are produced successively in at least one line or row or line, wherein the modifications 9 produced in one row or row or line are preferably generated at a distance X and height H so that a crack propagating between two successive modifications , in particular in crystal lattice direction propagating crack, the crack propagation direction is aligned at an angle W opposite the Ablöseebene connecting the two modifications together.
  • the angle W is in this case preferably between 0 ° and 6 °, in particular at 4 °.
  • the crack propagates from a region below the center of a first modification toward a region above the center of a second modification.
  • the essential context here is that the size of the modification can or must be changed depending on the distance of the modifications and the angle W.
  • this method can also comprise the step of producing a composite structure by arranging or producing layers and / or components 150 at or above an initially exposed surface 5 of the solid 1, wherein the exposed surface 5 is preferably part of the solid layer 4 to be separated. Most preferably, the modifications to form the release plane 8 are created prior to the formation of the composite structure.
  • a receiving layer 140 are arranged on an exposed surface 5 of the composite structure or of the solid body analogously to the methods described above.
  • the three figures 6a to 6c are intended to illustrate how the size of the laser-amorphized / phase-converted damage / modification zone affects the height traveled by the sawtooth pattern of the crack.
  • the crack runs along the crystal planes between individual atoms of the crystal. In the modified zone, these clear planes no longer exist, so it comes to a halt.
  • the damage zone along the beam direction can be reduced, as well as laterally in the focal plane. Since only the threshold intensity has to be reached, a smaller pulse energy is sufficient here as well.
  • the laser modifications can be made denser, which makes the saw tooth shorter and, overall, causes a smaller height expansion of the modified plane (first image).
  • the damage zone is larger (higher energy and / or lower numerical aperture - Fig. 6b) - the increased pressure of the amorphized zone also triggers a larger microcrack to trap (ie stop controlled) one with a larger area of damage allows greater distance.
  • Fig. 6c shows the danger if the damage zone is not sufficiently large and too far-reaching cracks are triggered by the laser modification, the cracks run too far on one hand - i. the difference in height caused by the cracks is greater than desired - and second, the cracks are driven under the other damage zones and not stopped by the amorphized material. This then leads again to material losses, since all torn material layers for the final product or a renewed laser processing must be removed.
  • FIG. 7 shows a schematically illustrated snapshot from a further method according to the invention.
  • This further method is preferably used for separating at least one solid state layer 4 of at least one solid 1, in particular of a wafer from an ingot or for thinning a wafer.
  • the further method according to the invention preferably comprises at least the steps of: generating a plurality of modifications 9 by means of laser beams inside the solid 1 to form a release plane 8, and introducing an external force into the solid 1 to generate stresses in the solid 1, wherein the external force is so strong that the stresses cause crack propagation along the Ablöseebene 8.
  • the modifications are generated in a first step on a line 103 and preferably at the same distance from one another. Furthermore, it is conceivable that a plurality of these generated in the first step lines are generated. These first lines are particularly preferably parallel to the crack propagation direction us preferably rectilinear or circular arc-shaped, in particular in the same plane generated.
  • second lines 105 are preferably generated for triggering and / or driving preferably subcritical cracks. These second lines will also be preferably generated in a straight line. Particularly preferably, the second lines are inclined relative to the first lines, in particular oriented orthogonally. The second lines preferably extend in the same plane as the first lines, or more preferably in a plane which is parallel to the plane in which the first lines extend.
  • third lines are preferably generated to connect the subcritical cracks generated.
  • This method is particularly useful for the separation of solid layers of an existing from SIC or SiC solid.
  • the modifications may be generated in succession in at least one row or row or line, wherein the modifications 9 produced in a row or row or line are preferably generated at a distance X and height H, so as to propagate between two successive modifications Crack, in particular in the direction of crystal lattice propagating crack, whose crack propagation direction is aligned at an angle W opposite the Ablöseebene connecting the two modifications together.
  • the angle W is in this case preferably between 0 ° and 6 °, in particular at 4 °.
  • the crack propagates from a region below the center of a first modification toward a region above the center of a second modification.
  • the essential context here is that the size of the modification can or must be changed depending on the distance of the modifications and the angle W.
  • this method can also comprise the step of producing a composite structure by arranging or producing layers and / or components 150 at or above an initially exposed surface 5 of the solid 1, wherein the exposed surface 5 is preferably part of the solid layer 4 to be separated. Most preferably, the modifications to form the release plane 8 are created prior to the formation of the composite structure.
  • a receiving layer 140 are arranged on an exposed surface 5 of the composite structure or of the solid body analogously to the methods described above.
  • preferably lines on SiC are generated parallel to the crack propagation direction (preferably transverse lines) in order to first define a plane for the preferred crack initiation (crack initiation) before longitudinal lines drive the cracks.
  • the cracks are first initialized transversely, then longitudinally, before a final step lines between the longitudinal lines of the second Step sets to trigger the cracks over the entire surface. This allows for shorter crack paths, which minimizes the final surface roughness.
  • FIG. 8 shows by way of example a Schottky diode 200.
  • this diode 200 preferably has a solid-state layer 4 which, in turn, has modified portions, in particular modifications 9, by means of laser radiation.
  • the modifications 9 are in this case generated in the vicinity of a first surface of the solid state layer 4.
  • a metal layer 20, in particular by means of sputtering or chemical deposition has preferably been produced at this first surface of the solid-state layer 4.
  • the solid state layer 4 has, compared to the first surface, a second surface on which, in particular by means of an epitaxial process, a further layer 145 is produced.
  • the solid state layer 4 preferably consists of heavily doped SiC or has highly doped SiC and the layer 145 produced preferably consists of lightly doped SiC or has weakly doped SiC. Poorly doped here means preferably less doped than highly doped. Thus, the layer 145 produced preferably has less doping per unit volume than the solid state layer 4.
  • the reference numeral 150 denotes a Schottky contact.
  • FIG. 9 shows the structure of a MOSFET 250.
  • this MOSFET 250 preferably has a solid-state layer 4 which, in turn, has modified parts, in particular modifications 9, by means of laser radiation.
  • the modifications 9 are in this case generated in the vicinity of a first surface of the solid state layer 4.
  • a metal layer 20, in particular by means of sputtering or chemical deposition, has preferably been produced at this first surface of the solid-state layer 4.
  • the metal layer 20 preferably forms a drain (high) via a connection 259.
  • the solid state layer 4 has a second surface opposite the first surface. On the second surface, a further layer, in particular n type SiC, is formed, in particular produced or arranged.
  • the reference numeral 256 denotes a further material or element, in particular p type SiC.
  • the reference numeral 254 stands for n +.
  • Reference numeral 255 preferably denotes one or more channels, in particular for conducting the current.
  • the layer / view designated by the reference numeral 253 preferably consists of SiO 2 or has such.
  • Reference numeral 251 denotes a source (low), and reference numeral 252 denotes a gate.
  • the present invention can thus relate to a method for providing at least one solid state layer 4, wherein the solid state layer 4 is separated from a solid state 1.
  • the method according to the invention preferably comprises the steps:
  • the present invention may relate to a method of producing electrical components.
  • This method preferably comprises the steps of producing a multiplicity of modifications 9 by means of laser beams inside a solid 1 for forming a release plane 8, wherein the compressions are generated in the solid 1 by the modifications 9, producing a composite structure by arranging or producing layers and / or components 150 at or above an initially exposed surface 5 of the solid 1, wherein the exposed surface 5 is part of the separated solid layer 4, separating the solid layer 4 by a separation of the remaining solid 1 and the solid layer 4 along formed by the modifications 9 Ablöseebene 8, wherein at least components of the compressive stresses generating modifications 9 remain on the solid state layer 4, with so many modifications 9 are generated that the solid state layer 4 detaches due to the modifications 9 from the solid 1 or wherein e iner external force is introduced into the solid 1 for generating further stresses in the solid 1, wherein the external force is so strong that the stresses along a crack propagation cause the release plane formed by the modifications 8, generating a metal layer 20 at the surface exposed by the separation of the solid layer
  • FIG. 10a shows a diagram showing a grinding tool 22 with a specific contour. If we speak of a flat, straight or curved portion in relation to the grinding tool, then this always means a proportion of the contour shown.
  • the grinding tool 22 may be e.g. be designed as a Rotationsschleifzeugzeug, whereby the adjoining the contour in the circumferential direction shares would preferably extend in the circumferential direction bent.
  • 10a has a first processing portion 24 having a curved main grinding surface 32, and has a second processing portion 26 having a curved Mauschleif Chemistry 34, wherein the radius of the main grinding surface 32 is greater than the radius of the auxiliary grinding surface 34, preferably the radius of the main grinding surface 32 is at least twice, three times, four times or five times as large as the radius of the auxiliary grinding surface 34.
  • a method for separating at least one solid state layer 4, in particular a solid state disk or solid state layer, from a donor substrate 1 or solid body is thus additionally or alternatively provided.
  • This method preferably comprises the steps:
  • the modifications 9 can be produced partially or completely before the material removal or after the removal of material.
  • the depression 6 is thus preferably narrower in the direction of the center Z as far as a depression end 18.
  • the recess is wedge-shaped, with the recess end 18 preferably lying exactly in the plane in which the crack propagates or in which the modifications 9 are produced.
  • a composite structure to be produced by arranging or producing layers and / or components 150 at or above an initially exposed surface 5 of the solid 1, wherein the exposed surface 5 is part of the solid layer 4 to be separated.
  • the modifications 9 for forming the release plane 8 are thereby preferably produced before the production of the composite structure.
  • FIG. 10b shows a representation according to which the modifications 9 shown in FIG. 10a, which represent, in particular, amorphous portions of the crystal lattice, were treated in a corrosive manner.
  • an etching treatment of non-crystalline constituents of the solid body 1 is preferably carried out, while the crystalline constituents of the solid body are not or substantially not changed by the etching treatment. It is thus preferably used the effect that etching can be selectively adjusted to crystalline - non-crystalline areas.
  • the reference numeral 19 thus indicates a region in which the solid state layer 4 is separated from the remaining residual solid by an etching treatment of modifications 9. This solution is advantageous since the mechanical crack opening is guided deeper into the crystal by the etching or etching.
  • the etching parameters are preferably selected such that non-amorphous portions, in particular a possibly polished upper side 5 and / or the unmodified edge 7 are not etched.
  • the method according to the invention in particular the method described with regard to FIG. 10a, can be supplemented, for example, by the step of etching treatment or corrosive removal of modifications 9 which predetermine the release region at least in sections.
  • the solid 1, in particular before a composite structure is produced, preferably consists of SiC or has SiC.
  • the solid preferably has at least 95% (by mass) or at least 99% (by mass) or at least 99.99% (by mass) SiC.

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Abstract

La présente invention concerne un procédé pour séparer au moins une couche de solide (4) d'au moins un solide (1). Le procédé selon l'invention comprend les étapes suivantes: production d'une pluralité de modifications (9) à l'intérieur du solide (1) au moyen de faisceaux laser, pour former un plan de séparation (8), réalisation d'une structure composite par l'agencement ou la formation de couches et/ou de composants (150) à la surface ou au-dessus d'une surface actuellement libre (5) du solide (1), la surface libre (5) étant une partie de la couche de solide (4) à séparer, application d'une force externe au solide (1) afin de générer des contraintes dans le solide (1), la force externe étant suffisante pour que les contraintes provoquent une propagation de fissures le long du plan de séparation (8), les modifications destinées à former le plan de séparation (8) étant produites avant la réalisation de la structure composite.
EP17816734.2A 2016-12-12 2017-12-12 Procédé d'amincissement de couches de solides pourvues de composants Pending EP3551373A1 (fr)

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WO2018108938A1 (fr) 2018-06-21
US20210225659A1 (en) 2021-07-22

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