Classifications

• • E—FIXED CONSTRUCTIONS
  • E04—BUILDING
  • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
  • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
  • E04B1/62—Insulation or other protection; Elements or use of specified material therefor
  • E04B1/74—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls
  • E04B1/76—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to heat only
  • E04B1/78—Heat insulating elements
• • C—CHEMISTRY; METALLURGY
  • C03—GLASS; MINERAL OR SLAG WOOL
  • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
  • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
  • C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
• • C—CHEMISTRY; METALLURGY
  • C03—GLASS; MINERAL OR SLAG WOOL
  • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
  • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
  • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
  • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
• • C—CHEMISTRY; METALLURGY
  • C03—GLASS; MINERAL OR SLAG WOOL
  • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
  • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
  • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
  • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
  • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
  • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
  • C03C17/366—Low-emissivity or solar control coatings
• • C—CHEMISTRY; METALLURGY
  • C03—GLASS; MINERAL OR SLAG WOOL
  • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
  • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
  • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
  • C03C23/001—Other surface treatment of glass not in the form of fibres or filaments by irradiation by infrared light
• • C—CHEMISTRY; METALLURGY
  • C03—GLASS; MINERAL OR SLAG WOOL
  • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
  • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
  • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
  • C03C23/0015—Other surface treatment of glass not in the form of fibres or filaments by irradiation by visible light
• • C—CHEMISTRY; METALLURGY
  • C03—GLASS; MINERAL OR SLAG WOOL
  • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
  • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
  • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
  • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
  • C23C14/14—Metallic material, boron or silicon
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/58—After-treatment
  • C23C14/5806—Thermal treatment
• • C—CHEMISTRY; METALLURGY
  • C03—GLASS; MINERAL OR SLAG WOOL
  • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
  • C03C2218/00—Methods for coating glass
  • C03C2218/30—Aspects of methods for coating glass not covered above
  • C03C2218/32—After-treatment

Definitions

• the invention relates to a process for the preparation, in particular tempering of a low-emitting layer system according to the preamble of claim 1 and a
• the invention relates to the preparation, in particular the method of tempering, low-emitting, thin layers, e.g. Silver coatings, which find application in the field of thermal insulation of window and facade glass.
• the special low-emissivity coatings also known as low emissivity or short low-e coatings, are used to reduce heat transfer.
• the low-e coating is characterized by the fact that it has a low thermal emissivity and the
• Coating in the visual spectral range is also largely transparent.
• the aim of the heat-insulating coatings is that the solar radiation can pass through the pane and heat the building, while only a small amount of heat at room temperature is emitted from the building to the surroundings.
• the low-e coating is intended to reduce an energy input from outside to inside.
• the coatings used for this purpose include, for example, transparent, metallic layers, in particular
• Silver-based multi-layer systems which have a low emissivity and thus a high reflection in the infrared range of the light, with a high transmittance of the entire layer system in the visible spectral range.
• the commonly used metallic layers are used with a thickness with which they still have the required transparency. For example, silver is still transparent up to a thickness of 20 nm considered.
• the transparent metallic layers with high reflection in the IR range are generally referred to as IR reflective layers for distinction.
• Substrate is usually a vacuum method used, such as evaporation or sputtering technology.
• these thin layers can not be the most ideal compliant deposit and tend to de-wetting, resulting in a corrugated, that is not uniform, layer thicknesses ⁇ distribution result has.
• this energetic limitation of the growth can be partially compensated by the cover layers so that diffusion processes and the leveling of the silver layers occur during a subsequent temperature increase. This results from the shift of the surface energy balance in favor of a wetted configuration.
• These layers with a homogeneous thickness are characterized by a corresponding decrease in surface resistance and offer the advantage of increased reflection in the infrared region of the light and thus a reduced emissivity.
• coated substrate remain minimal, at least in such a range that visually no difference can be detected.
• thermally toughened substrates are no longer be assembled. This means that they are no longer shaped, as is usual for glass, by scratching and breaking or otherwise mechanical
• RTP rapid thermal processing
• the invention is therefore the object of a
• At least one low-emitting layer system after the deposition of at least one low-emitting layer system on at least one side of the substrate, at least one
• the emission wavelength of the electromagnetic Radiation in the short-time annealing step preferably adjusted or adapted to the material of the low-emitting layer such that the emission wavelength of the
• electromagnetic radiation is realized in their absorption range.
• the low-emittance coating is tempered to a specific temperature and thus restructured in such a way that its properties, in particular the thermal, electrical or optical properties, change, for example compared to the low-emittance layer before the brief annealing Reduced surface resistance and possibly also increases their transmission in the visible and the reflection in the infrared.
• Annealing meant in the processing of a glass to the safety glass. It has been shown that, in the case of a thermal treatment of the low-e layer deposited on the substrate after deposition, by means of the electromagnetic radiation adapted to the material properties of the low-e layer, the surface resistance of the coating is significantly reduced correlative decrease in emissivity, ie of the
• the big advantage It also consists in that due to the low heat ⁇ capacity of the low-emitting coating no extra cooling of the coated substrate is necessary and the substrate is not processed in the annealing step to safety glass. This can be dispensed not only on an energy ⁇ intense heating of the substrate in an oven or on a controlled cooling by means of a subsequent cooling section, but the substrate remains during the RTP to room temperature and can be further processed immediately. Overall, the RTP allows much higher throughput, as the process lasts for much less than a second. In addition, high-priced plant components, such as ceramic rolls for transporting hot glass panes in an oven, can be dispensed with.
• the electromagnetic radiation of the low-e layer will now be made by a flash lamp assembly, preferably at least a plurality of flash lamps ⁇ , by at least one flash pulse.
• a xenon flash lamp is used as the flash lamp.
• Xenon flash lamps provide a versatile wide-band spectrum from ⁇ with technically usable wavelength of typically 160 nm - 1000 nm, the noble gas xenon.
• the lower limit of the light emission of 160nm ⁇ is limited by the used quartz glass of the flash lamps. Other types of glass, such as lithium fluoride, also allow emission wavelengths below 160nm, with no use of this material for cost reasons. Above 10000 nm, the intensity of the emitted light is negligible in terms of technical use.
• the advantage of using a flash lamp is the relatively low cost and the possibility of customization the operation by adjusting the current density of layer ⁇ system. By operating the flash lamps with high current densities and a considerable amount of UV is generated.
• the irradiation of the coated layer takes place from the side of the layer system in order to prevent absorption of the electromagnetic radiation for short-term tempering,
• Emission wavelength of the electromagnetic radiation in the range of 160 nm to 1000 nm, preferably in a
• the annealing of the low-emitting layer preferably takes place in the range of the emission wavelength of the electromagnetic radiation of 200 nm to 400 nm and / or 650 nm to 850 nm and / or 160 nm to 200 nm.
• the radiation of flash lamps also includes
• emission wavelength ranges of the electromagnetic radiation include the regions of absorption maxima of the low-emittance layer which are in the range of about 200 nm to 400 nm and 650 to 850 nm.
• the thermal treatment of the coated, low-emitting layer by irradiation with light in these wavelength ranges enables a reduction in the emissivity or the
• Sheet resistance compared to the low-emitting layer before the Kurzzeittemper Colour.
• the range of 200 nm to less than 400 nm is advantageous, because in this area the low-e layer by up to a factor of two
• Tempering step adjusted such that the deposited layer will receive or absorb a predetermined energy input in the irradiation area.
• the specifiable energy input is a predetermined final temperature of the low-emitting layer in the irradiation area
• the final temperature corresponds to the temperature of the deposited layer, which is used to heal the structural defects due either to fluctuations in the
• the adjustment of the energy input therefore takes place taking into account the highest possible layer temperature, i. Maximum temperature of the deposited layers, as well as depending on the
• Thickness of the layers to be thermally treated As a result, a given crystal structure and morphology of the deposited low-e layer is possible.
• the adjustment of the energy input of the irradiation is preferably carried out both taking into account the parameters of the electromagnetic radiation, and the temperature of the deposited layer or. from the temperature of
• a temperature measurement of the low-e layer or the low-e layer and the substrate takes place immediately before the short-term heat treatment step. Based on the measured temperature, the value of the energy input for the thermal aftertreatment is determined and adjusted so that a predefinable End temperature for the Kurzzeittemper Colour is obtained.
• the energy input is chosen and matched with the highest possible layer temperature, ie maximum temperature of the layers, that the Kurzzeittemper Marin causes no damage to the deposited layer, but achieves predetermined or optimum layer properties. That is, the energy input is adjusted so that it does not exceed the highest possible layer temperature of the istschie ⁇ that layer.
• the radiation is also well absorbed by the substrate, for example of glass, which can result in heating of the substrate.
• the heating of the substrate can be minimized when adjusting the layer properties of the deposited layer.
• the determined energy input becomes a process parameter, such as the energy density, i. Power, exposure surface and duration of the electromagnetic radiation, intended for controlling the Kurzzeitittemper suitss.
• a process parameter such as the energy density, i. Power, exposure surface and duration of the electromagnetic radiation, intended for controlling the Kurzzeitittemper suitss.
• the flash pulses have a duration of 0.05 ms to 20 ms and a
• Pulse energy density in the range of 1 J / cm 2 to 10 J / cm 2 . It it is advantageous that the pulse intensity, the pulse repetition ⁇ holfrequenz, the pulse shape and the pulse duration of successive flash pulses in dependence on the thickness of the thermally treated layers and taking into account the heat conduction of the substrate can be varied.
• the flash lamp is operated at a current density greater than 4000A / cm 2 without the energy densities described
• Emission spectrum of the flash lamp with increasing current density shifts to shorter wavelengths. Since the life-expectancy of flash lamps is approximately 10 6 -10 flashes in the order of magnitude of the current density, a large number of substrates can be tempered until a lamp replacement.
• High-power flash lamps for example, are operated at 500 Hz, so that the throughput in production plants is not limited by the RTP, but rather by the maximum transport speed of substrates or the coating of the substrates.
• At least one low-e layer contains or consists of silver.
• Thin silver films in a wetted configuration are transparent in the solar and / or visible spectral region and at the same time highly reflective in the infrared wavelength range.
• thin silver layers usually can not be deposited in an ideal conformal manner and tend to become dewetting.
• the low-emitting layer comprises or consists of other materials
• the substrate is made of glass as the main substrate used by low-e layer systems.
• the high absorption in the IR range loses due to the process control as
• the method comprises a plurality of layers for forming a low-emittance layer system.
• the layers can be thermally treated by means of electromagnetic radiation in the short-time heat treatment step of the low-emittance layer and / or in a further short-time heat treatment step.
• the low ⁇ emitting layer system comprising at least two dielectric layers.
• a low-e silver layer is arranged between at least two dielectric layers.
• both the coating and the Kurzzeittemper Colour the deposited low-e layer by means of electromagnetic radiation in an inline vacuum coating system are advantageous embodiments of the invention.
• an “inline” Process management "a physical transport of the substrate from a coating station to another processing station to apply and treat layers, the substrate during the coating process
• the substrate is preferably moved with such a transport speed that it does not heat up too much.
• the process may be operated in continuous flow systems with continuously-transporting substrate strip, either an endless substrate and a roll-to-roll coating, or a quasi-continuous sequence of synchronously moving, aufein ⁇ other following general cargo area substrates.
• the short-time annealing step takes place in situ after the layer deposition of the substrate in the same treatment chamber.
• a further layer deposition is carried out after the thermal treatment of the low-e layer.
• a further thermal aftertreatment is carried out after the or each further low-layer deposition.
• the energy input in the thermal treatment is adjusted so that a predetermined final temperature of
• the inventive method is thus more energy efficient and associated with less breakage losses compared to conventional convection ovens.
• the color shift of the low emissivity layer system reached with the method is congruent to the values which are observed for konventi ⁇ onelles annealing, which equalizes visual differences, and the parallel assembly of both discs
• the flashlamp arrangement has at least one flashlamp, preferably a xenon lamp.
• flash lamps can cost RTP plants of large areas at high throughput, z. B. greater than 40m 2 / min to be built.
• the flash lamp assembly comprises a beam shaping device, for example a diaphragm or a mirror system, for
• the length of the linear intensity distribution of the electromagnetic radiation for short-term etching corresponds at least to the width of the layer deposited on the substrate in the direction of the longitudinal extent of the linear intensity distribution of the electromagnetic radiation.
• FIG. 1 a schematic representation of the system for the combined coating and subsequent thermal treatment by means of a flash lamp arrangement
• Fig. 1 shows the basic structure of the system 1 for the combined coating and subsequent thermal treatment by means of a flash lamp assembly. It consists of an elongated vacuum system 1 with a
• Substrate transport system 11 by means of which the large-area substrates 10 in a transport direction under different processing stations, u.a. Coating modules 30, are moved through.
• a low-e layer system 20 is applied to the substrate 10, which has at least one low-e layer. There are also several low-e layers conceivable.
• the substrate 10 provided with the layer system 20 is brought into a position for treatment with the flash lamp arrangement 50.
• the flash lamp arrangement has a plurality of flash lamps 53, in particular xenon lamps.
• the flashlamp arrangement 50 consists of a mirror system 52 which, by means of a suitable arrangement and geometry, projects the light of the flashlamps homogeneously onto the substrate 10 provided with the low-e layer system 20 from the layer side.
• a quartz glass plate 51 separates the flash lamp assembly 50 from the actual vacuum processing chamber.
• the deposited substrate 10 can then be transported to another processing station 31 or the thermal treatment can be repeated.
• the system 1 to a control 41 of the energy ⁇ entry of the heat treatment of the low-e layer system.
• the controlled variable corresponds to an energy input, which is necessary to obtain a predetermined final temperature of the low-e layer system in the subsequent step of the thermal treatment. In this case, the final temperature of the deposited layer system 20 within certain
• Example transmission, reflection and resistance occurs, and not destruction of the structure, such as embrittlement, caused due to exceeding the maximum temperature of the deposited layer.
• the adjustment of the energy input of the irradiation both in consideration of the parameters of the electromagnetic radiation of the flash lamp device, such as their wavelength, energy density, exposure area, as well as the temperature of the deposited layer or. from the
• Temperature of the deposited layer or the deposited layer system and the substrate For this purpose, an arrangement of the temperature measuring means 40 in the system 1 and a temperature measurement before the short-term tempering step is conceivable.
• the determined value of the energy input is determined by the
• Control device 41 is transmitted to the flash lamp device 50 and serves as a controlled variable for determining the parameters of the Kurzzeittemper suitss and for carrying out the subsequent Kurzzeittemper suitss.
• a glass substrate having dimensions of 10x10 cm is introduced into a vacuum chamber and having a double temperable low-e (DLE) coated layer stack having a silver ⁇ layer between two dielectric layers.
• the sample represents a commercially available layer system.
• DLE double temperable low-e
• it is irradiated with a xenon lamp device and an energy density of the radiation of 2 J / cm 2 .
• the sheet resistance of the low-e layer stack before and after the irradiation is measured using an eddy current measuring device
• the irradiation of the low-e layer stack results in a reduction of the surface resistance of the low-e layer from 6 ohm square (see reflection spectrum in FIG. 2) to 3 ohm square.
• the reduction in sheet resistance indicates compaction and homogenization of the silver layer, which is the characteristic feature of the expected improvement in emissivity.
• FIG. 2 shows the respective transmission and reflection spectra of the sample.
• the term “trans” corresponds to the transmission spectrum of the sample before (untreated) and after the irradiation, and the formulation "Refl” to the reflection spectrum measured from the layer side before (untreated) and after the irradiation.
• the comparison of the spectra given results for the thermally treated sample a significant increase in the transmission in the visual spectral range and a favorable higher reflection in the infrared wavelength range.

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• Chemical & Material Sciences (AREA)
• Engineering & Computer Science (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Materials Engineering (AREA)
• Organic Chemistry (AREA)
• General Chemical & Material Sciences (AREA)
• Geochemistry & Mineralogy (AREA)
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• Architecture (AREA)
• Metallurgy (AREA)
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• Optics & Photonics (AREA)
• Structural Engineering (AREA)
• Civil Engineering (AREA)
• Electromagnetism (AREA)
• Acoustics & Sound (AREA)
• Thermal Sciences (AREA)
• Surface Treatment Of Glass (AREA)
• Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
• Physical Vapour Deposition (AREA)
• Other Surface Treatments For Metallic Materials (AREA)

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• 2011
  • 2011-12-23 DE DE102011089884.0A patent/DE102011089884B4/de active Active
• 2012
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  • 2012-08-20 WO PCT/EP2012/066174 patent/WO2013026819A1/de active Application Filing
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