Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/67706—Mechanical details, e.g. roller, belt
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
  • B65G2201/02—Articles
  • B65G2201/0214—Articles of special size, shape or weigh
  • B65G2201/022—Flat
• • H—ELECTRICITY
  • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
  • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
  • H05K2203/01—Tools for processing; Objects used during processing
  • H05K2203/0147—Carriers and holders
  • H05K2203/0165—Holder for holding a Printed Circuit Board [PCB] during processing, e.g. during screen printing

Definitions

• the invention relates to a holding device for thin sheet substrates, such as thin circuit boards or so-called conductor foils or solar cells, the substrates are advantageously transported to the holding device through treatment plants or continuous systems.
• the invention has for its object to provide a holding device mentioned above, with the problems of the prior art can be avoided and in particular an advantageous possibility is created to hold the aforementioned substrates as well as transport or by treatment plants such as continuous flow systems or the like. to transport.
• This object is achieved by a holding device having the features of claim 1.
• Advantageous and preferred embodiments of the invention are the subject of the other claims and are explained in more detail below. The wording of the claims is incorporated herein by express reference.
• the holding device for the substrates is overall frame-like. On two outer longitudinal sides transport carriages are arranged, by means of which the holding device is transported, in particular along a route through treatment facilities such as flow systems or the like. If the substrates, for example, thin circuit boards or substrates for solar cells, so in these treatment plants, a step such as cleaning, etching or coating, in particular electrochemical coating take place. Between the transport carriage, a holding frame of the holding device is provided for the substrates or these are directly supported or attached to the support frame. According to the invention, the holding frame is mounted vertically variable on the transport carriage.
• the transport carriages are moved, so to speak, on a plane or height, for example on rails or rotating, above-described transport chains. Due to the possibility of changing the height of the holding frame or lowering it can be achieved that during transport of the substrates outside a treatment plant these are, so to speak, in a higher or the highest position. If the holding device with the substrates is moved into a treatment plant, for example with a dip tank for the substrates, then the holding frame together with substrates can be lowered until they at least touch a treatment medium in the dip tank or are wetted by it at the bottom. In particular, a complete lowering and immersion is possible. So it can be avoided that the entire holding device together the transport carriage, in particular a transport device such as rails or transport chains must be lowered or guided downwards, which usually involves considerable effort.
• Thecheznver Szier can advantageously be variable, either in certain stages or particularly advantageous continuously.
• the measure of the achievable height change can be in the range of a few cm, for example 5 cm to 15 cm, or about 10% to 30% of the width of the holding device. Too high height variability entails greatly increasing complexity for the mechanical design.
• the height-adjustable mounting of the front frame to the transport carriage may on the one hand be designed so that a relative movement between the two can take place exclusively in one direction vertical to the plane of the holding frame or to the transport direction or transport plane. As a result, a possibly too large or harmful overloading of the substrates in the holding frame can be avoided. Such a precisely predetermined movement can be easily achieved by appropriate design of joints for connecting the support frame and the transport carriage, which will be discussed in more detail below.
• the transport carriages can be designed such that they have rollers for moving transport, in particular on rails. It can therefore be arranged on a pass path, a left and a right rail on which a respective transport carriage moves, so a left transport carriage and a right transport carriage. They may be connected to each other, for example, frame-like, or alternatively also be independent or non-contiguous, so two separate parts.
• the transport carriage with pins, recesses or other form-fitting connections can be connected to a circulating transport, for example, a known from the aforementioned prior art transport chain. Then no complicated drive for the holding devices is necessary.
• the elongated transport carriages can be provided, with respect to the direction of passage, to the left and to the right of the passageway. Alternatively, they can span the pass path also across, but this is considered less advantageous.
• the transport carriages arranged on the left and on the right it is possible for them to be provided with a substantial area, in particular completely, laterally. ben plunge pool or the like for the substrates. So they are as little as possible affected.
• the holding frame is connected by means of several toggle lever or scissor joints with the transport carriage. These allow safe and precise guidance in both the vertical direction and in the directions along the transport plane, for example, to obtain an aforementioned angular stability or an angular adjustability.
• two scissor hinges are provided on each longitudinal side of the holding frame, for example one near a front area and another close to a rear area. By means of these four scissor hinges then the holding frame is attached to the transport carriage.
• a joint can advantageously be designed so that it has a hinge lever which is rotatably mounted on the holding frame by a point with one end. Its other end engages in a longitudinal slot on the transport carriage, which extends in the transport direction, and is both slidably and rotatably mounted therein, in each position, the toggle lever at an angle less than 90 ° to the support frame so that it always in a flat Angle stands.
• a named articulated lever may have in its middle region a rotatably connected intermediate lever. Another end of the intermediate lever is mounted or fixed rotatably about a point on the transport carriage. In this case, on one side of the holding device, the two articulated levers can face each other or be inclined toward one another, starting from the holding devices, while the intermediate levers point away from it. These intermediate levers can ensure that the lowering of the holding frame with respect to the transport carriage always takes place in parallel, if this is to be ensured.
• About differently designed articulated levers or intermediate lever can also be a prescribed, temporarily oblique lowering of the holding frame done.
• elongated clamping means may be provided in a front region and a rear region of the support frame. It can be, for example, continuous rods that can be twisted and have a plurality of clamping lugs. With these clamping lugs then the substrate can be clamped in several places.
• the substrates are to be treated electrochemically at the holding devices and therefore must be electrically contacted from the outside, that at least one transport slide is electrically connected to the holding frame for electrical contacting to a held in the holding frame substrate.
• An electrical contact to the transport carriage from the outside can then be easily done, either via sliding contacts or rails or transport chains on which the transport carriages are performed.
• An electrical contacting of the holding frame to the substrates can take place via the aforementioned clamping devices, which are then formed electrically contacting or electrically conductive. This does not have to apply to the entire clamping devices. You may, for example, have some contact heads that are movable and are formed flat at the end. You can, just like the other clamping devices, clamped against a substrate clamped in the holding frame and both hold it and contact electrically.
• An electrical connection between the transport carriage and the holding frame can take place via a joint device located therebetween, for example an aforementioned joint or scissors joint.
• a joint device located therebetween, for example an aforementioned joint or scissors joint.
• alternative can be provided here a flexible and laid after a loop electrical line.
• the holding frame is advantageously designed so that it rotates on the outside and its central region is substantially free.
• a front and a rear frame part may be formed by extending transversely to the direction of transport parts, which also have the aforementioned clamping devices. These two parts can be connected to each other by lateral connecting parts, so that the support frame is as self-stable, so carries itself and remains dimensionally stable and not only by the holder to the transport carriage. This is necessary above all for safe transport and secure mounting of the substrates.
• Fig. 1 is a sloping top view of a holding device according to the invention with a clamped circuit board in the raised state of a holding frame and Fig. 2, the holding device of Fig. 1 with lowered support frame.
• a holding device according to the invention 1 1 is shown in an oblique plan view, in which a circuit board 13 is held or clamped.
• the holding device 1 1 has a left transport carriage 15a and a right transport carriage 15b, which may be formed the same or mirror image to each other.
• a transport carriage 15 consists in each case of a front transport part 17a and a rear transport part 17a 'or 17b and 17b'.
• the transport parts 17 can either, as shown, downwardly facing transport projections 18a ', with which they similar to the like in the aforementioned DE 10 2007 038 1 16 A1 to circulating transport chains or the like. be hung.
• the transport parts may have 17 rollers for transport on a rail or the like, in which case a drive of the holding devices 1 1 takes place in a manner not shown.
• the two transport parts 17a and 17a 'and 17b and 17b' are connected to each other via connecting rods 20a and 20b and holding rods 21 a and 21 b. This ensures their connection-rigid construction.
• a front scissors joint 23 b and a rear scissors joint 24 b are provided on the support rod 21 a, as described on the right side of the transport carriage 15 b.
• the scissor hinges 23 and 24 are attached to a side bar 30b, which is part of a lower support frame 32.
• the side bars 30a and 30b are attached to front holding frame heads 34a and 34a 'on the left side and 34b and 34b' on the right side, respectively.
• the holding frame heads 34a and 34b of the left and the right side are connected via a front clamping support 36 and a rear clamping support 37 mit- connected to each other.
• the printed circuit board 13 is held in a manner known per se to a continuous clamping rod 39 at the front or 39 'rear, which is articulated and has clamping lugs 40 and rear 40'. Also with respect to these clamping rods 39 and generally the clamping of the printed circuit board 13 is referred to the aforementioned DE 10 2007 038 1 16 A1, see there, for example, the training according to the local figure 12 or 13.
• About clamping lever 38 in the holding frame heads 34 can be a clamp the printed circuit board 13, either manually or mechanically.
• the scissor hinges 23 and 24 are constructed so that of the side bars 30a and 30b, a hinge lever 25a and 25a 'and 25b and 25b' rotatably supported by a single point projects upwards, each at an acute angle.
• An upper end of the articulated lever 25 engages in longitudinal slots 26a and 26a 'and 26b and 26b' in the support rods 21 a and 21 b. They are stored there both rotatable and longitudinally movable.
• Approximately from the center of the articulated levers 25 rotatably mounted intermediate lever 28a and 28a 'and 28b and 28b' go upwards, in an acute angle to the horizontal opposite to the direction of the respective articulated lever 25.
• the intermediate lever 28 At the top of the intermediate lever 28 are in turn a point rotatably connected to the support rods 21.
• the function of the scissor hinges 23 and 24, as will be readily apparent, is such as to cause the support frame 32 to be raised or lowered relative to the transport carriages 15 substantially in a vertical direction without significant lateral misalignment.
• an uneven or oblique lowering of the holding frame 32 is possible, for example, more with the front region down or more strongly with the rear region. This is especially for the aforementioned retraction in a liquid bath or retracting advantage.
• guide pins 42 are provided on the side bars 30, as is clear from FIG. 2 in its lowered state, for example protruding from the bearing points of the articulated levers 25 on the side poles 30 42a 'in accordance with FIG. 2 can enter or be guided in scenes along the transport path of the holding device 11.
• the expert but easily familiar scenes or the like during transport of the holding device 1 1, the height of the holding frame 32 relative to the transport path, along which the transport carriages drive 15 a and 15 b, are set, so the clamped circuit board 13 are raised or lowered.
• a transport carriage 15 advantageously on its outside, similar to the transport projection 18 a 'an electrical contact, a loop or the like. be provided.
• a transport projection 18a 'in a transport chain can either be done via an electrical contact or a laterally projecting-
• the wiper may abut a current-carrying rail, as is generally known from electrical contacts.
• a further electrical contact to the outside can take place via the guide pins 42a and 42a 'when they run along electrically conductive guide slots.
• this has in comparison to an electrical contact on the transport parts 17 has the disadvantage that this may be because the guide pin 42 is approximately at the height of the circuit board 13 or just above that they then close or in the liquid bath with the Treatment medium run, which is certainly negative for an electrical contact.
• the holding frame 32 is thus formed circumferentially by the two side bars 30a and 30b, which are connected by means of the front clamp carrier 36 and the rear clamp carrier 37 and thus give a circumferential, approximately rectangular frame.
• Clamping rods 39 and clamping lugs 40 could also be provided on the underside of the clamping beams 36 and 37, but for reasons of handling this is better around them. Above all, so the condition of the clamp attachment can be better checked.

Landscapes

• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Chain Conveyers (AREA)
• Electric Connection Of Electric Components To Printed Circuits (AREA)
• Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
• Coating Apparatus (AREA)

Applications Claiming Priority (2)

Publications (1)

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ID=43127801

Family Applications (1)

Country Status (8)

Families Citing this family (7)

Family Cites Families (26)

• 2009
  • 2009-10-12 DE DE102009049905A patent/DE102009049905A1/de not_active Withdrawn
• 2010
  • 2010-09-28 EP EP10757225A patent/EP2489067A1/de not_active Withdrawn
  • 2010-09-28 WO PCT/EP2010/064318 patent/WO2011045178A1/de active Application Filing
  • 2010-09-28 JP JP2012533560A patent/JP2013507305A/ja active Pending
  • 2010-09-28 KR KR1020127011709A patent/KR20120095895A/ko not_active Application Discontinuation
  • 2010-09-28 CN CN201080046854.3A patent/CN102668056B/zh not_active Expired - Fee Related
  • 2010-10-12 TW TW099134748A patent/TW201139247A/zh unknown
• 2012
  • 2012-04-12 US US13/444,984 patent/US8534449B2/en active Active

Non-Patent Citations (1)

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