EP1880111A1 - Systeme de pompe a vide - Google Patents
Systeme de pompe a videInfo
- Publication number
- EP1880111A1 EP1880111A1 EP06754953A EP06754953A EP1880111A1 EP 1880111 A1 EP1880111 A1 EP 1880111A1 EP 06754953 A EP06754953 A EP 06754953A EP 06754953 A EP06754953 A EP 06754953A EP 1880111 A1 EP1880111 A1 EP 1880111A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- housing
- vacuum
- vacuum chamber
- chamber housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Definitions
- the invention relates to a vacuum pump arrangement, in particular a turbomolecular Pumpcnanaku.
- Vacuum pumps such as turbomolecular pumps, are connected to a vacuum chamber housing to create a vacuum in a vacuum chamber.
- the connection takes place via a pump flange connected to the pump housing and corresponding holding elements, such as so-called claws.
- the claws are connected to the pump flange, on which, for example, a projection of the claw engages in a groove or groove of the pumping flange.
- the pump housing can be rotated relative to the vacuum chamber housing. This can lead to damage of the vacuum chamber housing in the attachment of the claws.
- the damage of the vacuum chamber housing is disadvantageous, since in addition to the replacement of the vacuum pump and a repair of the vacuum chamber housing is required. This is not only costly, but also interrupts a production for a longer period if necessary. Possibly. It may even happen that the claws break completely on the pump flange and the vacuum pump is no longer held on the vacuum chamber housing, so that the vacuum pump can fall down.
- damage to the vacuum chamber housing hiet was due to a high VerJetsungsrisiko of 70%fs.
- the object of the invention is to increase the safety of vacuum pump assemblies in case of damage.
- the vacuum pump arrangement according to the invention which is in particular a turbomolgular pumping arrangement, has in particular a pump with high weight and / or high rotational speeds of the rotor.
- the vacuum pump assembly has a pump housing in which a rotor and a stator are arranged. With the pump housing, a pump flange is connected, wherein the pump flange can also be formed directly as part of the housing for securing the pump housing to a Vakuumhuntgeophiereelemcnre are provided.
- at least one retaining element has an anti-twist device which is connected to the vacuum chamber housing 5 -
- At least one Halteelcment is provided with an anti-rotation device according to the invention.
- two, in particular opposing holding elements are provided with anti-rotation.
- the retaining clip according to the invention can be combined with anti-rotation with conventional single Haltcclementen.
- a plurality of retaining elements are provided with rotation, in particular with at least three on the circumference of the pump flange arranged in advance holding elements.
- the pump flange is preferably formed annular.
- the retaining element may have a pin which preferably engages in a recess or bore provided on the pump chamber housing.
- the retaining element preferably has a Befest Trentselemcnt, such as a screw on.
- a preferred embodiment of the retaining element according to the invention thus has an anti-rotation, for example in the form of a pin engaging in a recess, and a fastening element which is screwed into a provided on the vacuum chamber housing thread.
- the anti-rotation device is also designed as a fastening element, in particular as a screw, so that the retaining element according to the invention has at least two, in particular identically designed fastening elements. Since both Befest Trentselemcntc provided in the Vakuumcrousc recesses, such as - -1 -
- the pump flange connected to the pump housing or formed as part of the pump housing preferably has an annular groove. This can be interrupted, but preferably runs along the entire circumference.
- the holding elements preferably have a particular annular segment-shaped approach, which engages in the groove.
- the radius of the groove substantially corresponds to the radius of the lugs.
- FIG. 1 is a schematic sectional view of a vacuum
- Fig. 2 is a schematic perspective view of a
- FIG. 3 is a schematic perspective view of an adhesive element according to the invention.
- a vacuum pump arrangement has a pump housing 10, in which a rotor 14 rotating about a longitudinal axis 12 is arranged. Between the individual rotor blades 14 stator blades 16 connected to the housing 10 are arranged. The rotor 14 is fixedly connected via a connecting element 18 with a drive shaft 20. Accordingly, the stator 16 is fixedly connected via a kauselcmcnt 22 with the housing 10.
- the housing 10 is fastened to a vacuum chamber housing 26 in the region of an opening 28.
- the housing has a krc ⁇ sringförmtgen pump flange 30 in the illustrated embodiment.
- the pump flange 30 is L-shaped in cross section, so that an annular groove 32 is formed.
- the pump housing 10 is fastened via the flange 30 to the vacuum chamber housing 26.
- the holding element 34 has a projection 36, in particular a circular ring segment, which engages in the groove 32 of the pump flange 30.
- a screw 38 is provided as a fastening element.
- the holding element 34 according to the invention (FIG. 2) has a fastening element 38 and an anti-rotation lock 40, wherein both the fastening element 38 and the anti-rotation lock 40 are in the illustrated embodiment Screw are formed.
- the Vermossichcrung 40 engages in a recess 42, which is in the illustratedariessbeisp ⁇ el a threaded bore in the vacuum chamber housing 26.
- FIG. 2 In the perspective view of the pump housing 30 shown in Fig. 2 is a view of the flange side of the pump housing, wherein on the annular flange 30 four inventive holding elements 34 and four Einzcl-holding elements 44 are arranged.
- the holding elements 34 according to the invention each have a circular-ring-shaped projection 36, which engages in the groove 32 of the pump flange 30 (FIG. 1). Further, each Garelemcnt 34 two screws 38, 40 are provided which serve as a fastener or rotation.
- the screws 38, 40 are guided by provided in the Haltcelement 34 through holes 46.
- a single retaining element 44 is shown in Fig. A in case of damage.
- the Einzel-Halteelemcnt 44 is attached via a screw 48 in the Vakuumhuntgephaseusc 10. Due to the high occurring moments in case of damage, the pump housing 10 is rotated in the direction of an arrow 50. This results in a twisting of a single Garclcments 44 in the Gegcn-Uhr Attachers ⁇ nn, this can cause damage to the flange 30 and the vacuum chamber housing 26.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Compressor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005020904A DE102005020904A1 (de) | 2005-05-07 | 2005-05-07 | Vakuum-Pumpenanordnung |
PCT/EP2006/061977 WO2006120132A1 (fr) | 2005-05-07 | 2006-05-02 | Systeme de pompe a vide |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1880111A1 true EP1880111A1 (fr) | 2008-01-23 |
EP1880111B1 EP1880111B1 (fr) | 2009-12-30 |
Family
ID=36593111
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06754953A Not-in-force EP1880111B1 (fr) | 2005-05-07 | 2006-05-02 | Systeme de pompe a vide |
Country Status (9)
Country | Link |
---|---|
US (1) | US20090068011A1 (fr) |
EP (1) | EP1880111B1 (fr) |
JP (1) | JP2009500549A (fr) |
CN (1) | CN100575711C (fr) |
AT (1) | ATE453802T1 (fr) |
DE (2) | DE102005020904A1 (fr) |
HK (1) | HK1109440A1 (fr) |
TW (1) | TWI390112B (fr) |
WO (1) | WO2006120132A1 (fr) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2893094B1 (fr) * | 2005-11-10 | 2011-11-11 | Cit Alcatel | Dispositif de fixation pour une pompe a vide |
DE102006058672B4 (de) * | 2006-12-13 | 2016-09-15 | Pfeiffer Vacuum Gmbh | Anordnung mit Vakuumpumpe |
EP2017480A1 (fr) * | 2007-06-15 | 2009-01-21 | VARIAN S.p.A. | Joint divisé pour pompes sous vide et procédé d'obtention d'un tel joint |
DE102008028199A1 (de) * | 2008-06-12 | 2009-12-17 | Pfeiffer Vacuum Gmbh | Verbindungselement |
DE102009013244A1 (de) * | 2009-03-14 | 2010-09-16 | Pfeiffer Vacuum Gmbh | Anordnung mit Vakuumpumpe |
GB201314841D0 (en) | 2013-08-20 | 2013-10-02 | Thermo Fisher Scient Bremen | Multiple port vacuum pump system |
DE102013222167A1 (de) * | 2013-10-31 | 2015-04-30 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102014102680A1 (de) * | 2014-02-28 | 2015-09-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpenanordnung |
EP3059450B1 (fr) * | 2015-02-17 | 2018-07-18 | Pfeiffer Vacuum Gmbh | Dispositif de fixation pour pompe à vide |
EP3067565B1 (fr) * | 2015-03-13 | 2020-07-22 | Pfeiffer Vacuum Gmbh | Pompe à vide |
JP6507885B2 (ja) * | 2015-06-29 | 2019-05-08 | 株式会社島津製作所 | 真空ポンプ |
EP3171030B1 (fr) * | 2015-11-19 | 2020-01-08 | Pfeiffer Vacuum Gmbh | Pompe à vide |
DE202015008803U1 (de) * | 2015-12-23 | 2017-03-24 | Leybold Gmbh | Verbindungseinrichtung |
CN107461556B (zh) | 2016-06-03 | 2024-05-03 | 开利公司 | 法兰连接组件及其装卸方法、管路连接装置及冷却器机组 |
GB2579791B (en) * | 2018-12-13 | 2021-07-14 | Edwards Ltd | Vacuum pump with variable axial position |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1062438A (en) * | 1912-12-30 | 1913-05-20 | S R Dresser Mfg Co | Wrought-metal ring for collar-clamps, &c. |
US1637944A (en) * | 1925-07-22 | 1927-08-02 | Morgan Construction Co | Coupling device |
US2443187A (en) * | 1944-08-15 | 1948-06-15 | James C Hobbs | Pipe coupling |
DE1149201B (de) * | 1959-07-16 | 1963-05-22 | Demag Ag | Loesbare Verbindung von zwei ungleichen Temperaturen ausgesetzten, an ihrer Verbindungsstelle ringfoermigen Bauteilen |
US3165341A (en) * | 1962-07-10 | 1965-01-12 | Star Tank And Filter Corp | Clamping devices for mated flanges |
US3761114A (en) * | 1971-08-30 | 1973-09-25 | Victaulic Co Ltd | Pipe to flange couplings |
US3942141A (en) * | 1972-05-26 | 1976-03-02 | Licentia Patent-Verwaltungs-G.M.B.H. | Flange |
US3850455A (en) * | 1972-11-17 | 1974-11-26 | Caterpillar Tractor Co | Strain-limiting connector |
US4699353A (en) * | 1986-12-31 | 1987-10-13 | Weyer Paul P | Rotary valve actuator |
US4779900A (en) * | 1987-02-11 | 1988-10-25 | Ebaa Iron Inc. | Segmented pipe joint retainer glands |
JPH0291288U (fr) * | 1988-12-28 | 1990-07-19 | ||
JP2000073986A (ja) * | 1998-08-28 | 2000-03-07 | Jeol Ltd | ターボ分子ポンプの振動抑制器 |
US6485254B1 (en) * | 2000-10-19 | 2002-11-26 | Applied Materials, Inc. | Energy dissipating coupling |
JP2002327698A (ja) * | 2001-04-27 | 2002-11-15 | Boc Edwards Technologies Ltd | 真空ポンプ |
JP2003148423A (ja) * | 2001-11-08 | 2003-05-21 | Ishikawajima Harima Heavy Ind Co Ltd | フランジ結合構造 |
DE10208795A1 (de) * | 2002-02-28 | 2003-09-04 | Pfeiffer Vacuum Gmbh | Maschine mit schnelldrehendem Rotor |
JP2003336597A (ja) * | 2002-03-12 | 2003-11-28 | Boc Edwards Technologies Ltd | ターボ分子ポンプ |
JP4147042B2 (ja) * | 2002-03-12 | 2008-09-10 | エドワーズ株式会社 | 真空ポンプ |
JP4051681B2 (ja) * | 2003-07-25 | 2008-02-27 | ミネベア株式会社 | 軸流ファンモータ |
US20050029417A1 (en) * | 2003-08-08 | 2005-02-10 | Richard Scheps | Mounting bracket for a rotary pump |
DE10342907A1 (de) * | 2003-09-17 | 2005-04-21 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit schnelldrehendem Rotor |
-
2005
- 2005-05-07 DE DE102005020904A patent/DE102005020904A1/de not_active Withdrawn
-
2006
- 2006-04-07 TW TW095112443A patent/TWI390112B/zh not_active IP Right Cessation
- 2006-05-02 US US11/919,963 patent/US20090068011A1/en not_active Abandoned
- 2006-05-02 WO PCT/EP2006/061977 patent/WO2006120132A1/fr not_active Application Discontinuation
- 2006-05-02 AT AT06754953T patent/ATE453802T1/de active
- 2006-05-02 JP JP2008510538A patent/JP2009500549A/ja active Pending
- 2006-05-02 DE DE502006005788T patent/DE502006005788D1/de active Active
- 2006-05-02 EP EP06754953A patent/EP1880111B1/fr not_active Not-in-force
- 2006-05-02 CN CN200680015396A patent/CN100575711C/zh not_active Expired - Fee Related
-
2008
- 2008-03-31 HK HK08103572.2A patent/HK1109440A1/xx not_active IP Right Cessation
Non-Patent Citations (1)
Title |
---|
See references of WO2006120132A1 * |
Also Published As
Publication number | Publication date |
---|---|
CN101171428A (zh) | 2008-04-30 |
WO2006120132A1 (fr) | 2006-11-16 |
ATE453802T1 (de) | 2010-01-15 |
TWI390112B (zh) | 2013-03-21 |
EP1880111B1 (fr) | 2009-12-30 |
CN100575711C (zh) | 2009-12-30 |
US20090068011A1 (en) | 2009-03-12 |
HK1109440A1 (en) | 2008-06-06 |
JP2009500549A (ja) | 2009-01-08 |
TW200643308A (en) | 2006-12-16 |
DE102005020904A1 (de) | 2006-11-09 |
DE502006005788D1 (de) | 2010-02-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1880111B1 (fr) | Systeme de pompe a vide | |
EP3482104B1 (fr) | Unité de transmission, motoréducteur électrique et siège | |
EP3032093B1 (fr) | Dispositif de fixation d'une pale de rotor sur un moyeu de rotor d'une éolienne | |
DE60202740T2 (de) | Vakuumpumpe | |
EP3550140B1 (fr) | Support de machine pour éolienne | |
EP3495626A1 (fr) | Raccordement de levier et turbomachine associée | |
EP2159003B1 (fr) | Capot protecteur pour un objet rotatif | |
EP4200480A1 (fr) | Dispositif de rotation | |
EP3495625B1 (fr) | Aube de turbomachine réglable | |
EP2620637B1 (fr) | Dispositif de verrouillage pour la transmission d'une éolienne ainsi que procédé de verrouillage de la transmission | |
EP2368044A1 (fr) | Pompe à vide | |
WO2016058706A1 (fr) | Dispositif de montage d'un dispositif de support et système de montage pourvu du dispositif de montage | |
DE102009039119B4 (de) | Vakuumpumpe und Anordnung mit Vakuumpumpe | |
DE202014007756U1 (de) | Drehmomentbegrenzer | |
EP3724456B1 (fr) | Rotor à surfaces de contact optimisées au niveau de forces centrifuges | |
DE102013013571A1 (de) | Abgasturbolader | |
EP3825545A1 (fr) | Pale de rotor, rotor et éolienne, ainsi que procédé | |
DE112016000833T5 (de) | Fixiervorrichtung, Rotationsmaschine, Herstellungsverfahren einer Rotationsmaschine, Montageverfahren einer Rotationsmaschine und Demontageverfahren einer Rotationsmaschine | |
EP2913534B1 (fr) | Agencement de pompe à vide | |
EP3844409B1 (fr) | Ensemble de paliers et vis d'ajustement du jeu de palier | |
EP2347134A1 (fr) | Pompe turbomoléculaire | |
DE202018104028U1 (de) | Schraubverbindungsvorrichtung mit Verbindungselement | |
DE112013000543T5 (de) | Abgasturbolader | |
DE202022101689U1 (de) | Schieberanordnung | |
EP0856679A1 (fr) | Dispositif de couplage connectant un moyeu avec un disque de frein |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20071002 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: ODENDAHL, HEINZ-DIETER Inventor name: KALISCH, DIRK Inventor name: STOLLE, ROBERT |
|
REG | Reference to a national code |
Ref country code: HK Ref legal event code: DE Ref document number: 1109440 Country of ref document: HK |
|
DAX | Request for extension of the european patent (deleted) | ||
17Q | First examination report despatched |
Effective date: 20081028 |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: KALISCH, DIRK Inventor name: ODENDAHL, HEINZ-DIETER Inventor name: STOLLE, ROBERT |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D Free format text: NOT ENGLISH |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP Ref country code: CH Ref legal event code: NV Representative=s name: ISLER & PEDRAZZINI AG |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FG4D |
|
REF | Corresponds to: |
Ref document number: 502006005788 Country of ref document: DE Date of ref document: 20100211 Kind code of ref document: P |
|
REG | Reference to a national code |
Ref country code: HK Ref legal event code: GR Ref document number: 1109440 Country of ref document: HK |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 Ref country code: SE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: VDEP Effective date: 20091230 |
|
LTIE | Lt: invalidation of european patent or patent extension |
Effective date: 20091230 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 Ref country code: LV Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 Ref country code: PL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FD4D |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BG Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20100330 Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20100430 Ref country code: NL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 Ref country code: IS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20100430 Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 Ref country code: ES Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20100410 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CZ Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: IT Payment date: 20100529 Year of fee payment: 5 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20100331 Ref country code: CY Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 Ref country code: IE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CH Payment date: 20100525 Year of fee payment: 5 |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
BERE | Be: lapsed |
Owner name: OERLIKON LEYBOLD VACUUM G.M.B.H. Effective date: 20100531 |
|
26N | No opposition filed |
Effective date: 20101001 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: MC Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100531 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100531 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110531 Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110531 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110502 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: HU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20100701 Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100502 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: TR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20091230 |
|
REG | Reference to a national code |
Ref country code: AT Ref legal event code: MM01 Ref document number: 453802 Country of ref document: AT Kind code of ref document: T Effective date: 20110502 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: AT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110502 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20140520 Year of fee payment: 9 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20140516 Year of fee payment: 9 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20140729 Year of fee payment: 9 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R119 Ref document number: 502006005788 Country of ref document: DE |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20150502 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20160129 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20151201 Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20150502 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20150601 |