EP2347134A1 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire

Info

Publication number
EP2347134A1
EP2347134A1 EP09751922A EP09751922A EP2347134A1 EP 2347134 A1 EP2347134 A1 EP 2347134A1 EP 09751922 A EP09751922 A EP 09751922A EP 09751922 A EP09751922 A EP 09751922A EP 2347134 A1 EP2347134 A1 EP 2347134A1
Authority
EP
European Patent Office
Prior art keywords
stator
energy
housing
pump housing
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09751922A
Other languages
German (de)
English (en)
Inventor
Heinrich Engländer
Stefan HAß
Michael Richter
Ishan Roth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2347134A1 publication Critical patent/EP2347134A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a turbomolecular pump having a rotor element arranged in a pump housing, which is surrounded by a stator element.
  • Turbomolecular pumps have a rotor element connected to a rotor shaft.
  • the rotor shaft is mounted on one side and the rotor element mounted according to a bell on the free shaft end.
  • the rotor element has substantially radially extending wing disks with rotor blades.
  • Stator disks of the stator element are arranged between the rotor disks.
  • the stator disks are fixed by means of stator rings which completely surround the rotor element.
  • the stator rings are held stationary in the pump housing.
  • Turbomolecular pumps operate at operating speeds of tens of thousands of revolutions per minute. In operation, therefore, the kinetic energy of the rotor is very high. This leads to considerable destructive forces in the case of a rotor crash or rotor burst.
  • the object of the invention is to increase in particular fast-rotating turbomolecular pumps in the event of destruction safety, in particular to avoid damaging the housing.
  • the turbomolecular pump according to the invention has in a pump housing a rotor element which is surrounded by a stator element. Between the stator and the pump housing, a gap is provided. Within the gap, an energy absorbing element is provided for absorbing energy in the event of damage. In the case of destruction, as with a rotor burst, the kinetic energy of the rotor element is first transferred to the stator element. Since the stator is not firmly connected to the housing but only a connection via the energy-absorbing element, the energy is at least not completely transferred to the pump housing. Rather, at least a portion of the kinetic energy is absorbed in the arranged between the stator and the pump housing energy absorbing element.
  • turbomolecular pumps in which the stator is firmly connected to the pump housing.
  • the gap between the stator and the pump housing is only partially filled by the energy-absorbing element. This has the advantage that in the free spaces a deformation of the absorption element and the stator is possible.
  • the energy-absorbing element is at least partially web-shaped.
  • the web preferably extends from the stator element, in particular the outside of the stator element, to the pump housing, in particular the inside of the pump housing. It is particularly preferred in this case that the web is helically formed in particular for improving the mountability when pushing the housing over the stator rings.
  • the intermediate space between the stator element and the pump housing preferably extends over the entire length of the stator element.
  • the helically shaped web also extends over the entire axial length of the gap in the axial direction.
  • each stator ring is effective with all threads of the helical element. The more screw webs are available, the better is the centering effect.
  • annular web elements per one stator preferably two web elements is provided.
  • the energy absorption element according to the invention which is provided in the intermediate space, has a friction surface in a particularly preferred embodiment. This is preferably on the inside of the pump housing, wherein the absorption element is preferably fixedly connected to the stator in this embodiment. It is also possible that the friction surface bears against an outer surface of the stator element, wherein the energy absorption element is then preferably firmly connected to the inside of the pump housing. Furthermore, it is also possible that the energy-absorbing element is firmly connected neither to the stator nor to the pump housing, so that two friction surfaces, between the absorption element and the inside of the pump housing and between the absorption element and the outside of the stator are formed. As a result, the energy absorption, which takes place in particular due to the friction, can be increased. Further absorption of energy occurs by deformation of the energy absorbing element.
  • the intermediate space is only partially filled with an energy-absorbing element.
  • the stator element is held in a preferred embodiment by a holding element in the pump housing.
  • the retaining element is preferably formed elastically, wherein a biasing force is applied to the stator by the retaining element.
  • the elastic deformability of the holding element formed in particular as an O-ring means that energy is also removed by the deformation of the holding element.
  • the preferably low bias through the O-ring also allows rotation of the stator with respect to the housing.
  • Fig. 1 shows a schematic sectional view of the part of a
  • Fig. 2 shows a schematic sectional view of a second
  • Embodiment of the part of a turbomolecular pump in which the rotor element is arranged Embodiment of the part of a turbomolecular pump in which the rotor element is arranged.
  • the turbomolecular pump has a rotor shaft 10 driven via an electric motor, not shown.
  • the rotor shaft is mounted on the end, not shown, so that a rotor element 12 attached to the cantilevered end of the shaft and fixedly connected via a connected to the end face of the rotor shaft 10 screw 14 with the rotor shaft 10.
  • the rotor element 12 is bell-shaped and has a plurality of radially extending, individual rotor blades having rotor disks 16.
  • the rotor element 12 is arranged in a pump housing 18, wherein the rotor element 12 sucks the gas to be pumped through an inlet opening 20 of the pump housing in the direction of an arrow 22 and transported in Fig. 1 down.
  • stator element 24 surrounding the rotor element 12 is arranged.
  • the stator element 24 has a plurality of stator disks 26 each arranged between the rotor disks 16.
  • each stator 26 is connected to a radially outside of the rotor disks 16, this annularly surrounding stator ring 28 is connected.
  • the turbomolecular pump is fixed via a flange 30 connected to the housing 18.
  • the stator element 24 is fixedly connected to the housing 18. This has the consequence that in a burst of the rotor 12 almost all occurring forces and moments must be introduced into the housing and discharged through the flange. This is not possible at high speeds, so that the housing is damaged and possibly parts of the pump are thrown due to the high kinetic energy through the room.
  • the stator element 24 is not fixedly connected to the housing 18. Rather, between the stator 24, in particular the outer sides 32 of the individual stator 28 and the housing 18 and an inner side 34, a gap 36 is formed.
  • the inner side 34 of the housing forms a substantially cylindrical space, within which the stator element 24 is arranged.
  • the retaining element 40 is an elastic retaining element, wherein in the illustrated embodiment an O-ring is provided as the retaining element 40. In the radial direction, a projection 42 is provided for fixing the position on the housing 18.
  • the stator rings are preferably centered only over the housing.
  • annular rib 44 per stator ring 28 is provided as the energy absorption element.
  • the webs 44 are integrally formed with the stator 28 in the illustrated embodiment or fixedly connected thereto. On the inside 34 of the housing, the webs 44 are present, so that the webs 44 have a friction surface 46.
  • the stator 24 In normal operation, the stator 24 is stationary and does not move relative to the housing 18. In case of damage, as in a burst of the rotor element 12, takes a take away the stator 24. A rotation of the stator 24 is possible because the stator 24 according to the invention not fixed the housing 18 is connected.
  • the energy absorption elements 44 arranged in the intermediate space 36 Due to the energy absorption elements 44 arranged in the intermediate space 36, there is an internal absorption of at least a major part of the energy. Such damage to the housing 18, the items are blasted off of the housing 18 or exit from the housing is thus avoided.
  • the principle is also reversible by the webs 44 are part of the housing 18 and fix the stator radially.
  • the second embodiment ( Figure 2) is identical to the first embodiment except for the energy absorbing elements.
  • the corresponding components are therefore designated by the same reference numerals.
  • the energy absorbing element disposed in the gap 36 is formed as a helical ridge 48. In particular, it is a helical energy element extending over the entire length of the stator element 24, ie over the entire interspace 36.
  • the helical energy absorbing element may also be fixedly connected to the inner surface of the housing (as shown).

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'invention concerne une pompe turbomoléculaire comportant un élément rotor (12) monté dans un corps de pompe (18). L'élément rotor (12) est entouré par un élément stator (24). Un espace intermédiaire (36) est ménagé entre l'élément stator (24) et le corps de pompe (18). Afin d'absorber l'énergie en cas d'à-coup de l'élément rotor (12), un élément absorbeur d'énergie (44) est placé dans l'espace intermédiaire (36).
EP09751922A 2008-11-20 2009-11-13 Pompe turbomoléculaire Withdrawn EP2347134A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200810058151 DE102008058151A1 (de) 2008-11-20 2008-11-20 Turbomolekularpumpe
PCT/EP2009/065141 WO2010057834A1 (fr) 2008-11-20 2009-11-13 Pompe turbomoléculaire

Publications (1)

Publication Number Publication Date
EP2347134A1 true EP2347134A1 (fr) 2011-07-27

Family

ID=41531849

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09751922A Withdrawn EP2347134A1 (fr) 2008-11-20 2009-11-13 Pompe turbomoléculaire

Country Status (5)

Country Link
EP (1) EP2347134A1 (fr)
JP (1) JP5552127B2 (fr)
DE (1) DE102008058151A1 (fr)
TW (1) TW201028549A (fr)
WO (1) WO2010057834A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012211840A1 (de) * 2012-07-06 2014-01-09 Wethje Beteiligungs GmbH Faserverstärkte Antriebswelle und Ösenwickelverfahren zur Herstellung
JP6258041B2 (ja) * 2014-01-16 2018-01-10 株式会社ブリヂストン スタッダブルタイヤ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2214702A1 (de) * 1972-03-25 1973-09-27 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
JP3427950B2 (ja) * 1994-11-17 2003-07-22 株式会社島津製作所 モレキュラドラッグポンプ
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
JP3469055B2 (ja) * 1997-08-20 2003-11-25 三菱重工業株式会社 ターボ分子ポンプ
KR100724048B1 (ko) 1999-02-19 2007-06-04 가부시키가이샤 에바라 세이사꾸쇼 터보 분자 펌프
JP4197819B2 (ja) * 1999-02-19 2008-12-17 株式会社荏原製作所 ターボ分子ポンプ
JP4484470B2 (ja) 2002-10-23 2010-06-16 エドワーズ株式会社 分子ポンプ、及びフランジ
JP2004263628A (ja) * 2003-03-03 2004-09-24 Osaka Vacuum Ltd 分子ポンプの安全構造
DE102007051988A1 (de) * 2007-10-31 2009-05-07 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2010057834A1 *

Also Published As

Publication number Publication date
DE102008058151A1 (de) 2010-05-27
JP2012509432A (ja) 2012-04-19
JP5552127B2 (ja) 2014-07-16
WO2010057834A1 (fr) 2010-05-27
TW201028549A (en) 2010-08-01

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